WO2004027268A1 - Soupape multivoie - Google Patents

Soupape multivoie Download PDF

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Publication number
WO2004027268A1
WO2004027268A1 PCT/DE2003/002985 DE0302985W WO2004027268A1 WO 2004027268 A1 WO2004027268 A1 WO 2004027268A1 DE 0302985 W DE0302985 W DE 0302985W WO 2004027268 A1 WO2004027268 A1 WO 2004027268A1
Authority
WO
WIPO (PCT)
Prior art keywords
way valve
valve
valves
control
way
Prior art date
Application number
PCT/DE2003/002985
Other languages
German (de)
English (en)
Inventor
Günter Baldauf
Hans-Joachim Pflüger
Original Assignee
Imi Norgren-Herion Fluidtronic Gmbh & Co. Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imi Norgren-Herion Fluidtronic Gmbh & Co. Kg filed Critical Imi Norgren-Herion Fluidtronic Gmbh & Co. Kg
Publication of WO2004027268A1 publication Critical patent/WO2004027268A1/fr

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803Modular units
    • F15B13/0807Manifolds
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B11/00Servomotor systems without provision for follow-up action; Circuits therefor
    • F15B11/006Hydraulic "Wheatstone bridge" circuits, i.e. with four nodes, P-A-T-B, and on-off or proportional valves in each link
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/0401Valve members; Fluid interconnections therefor
    • F15B13/0405Valve members; Fluid interconnections therefor for seat valves, i.e. poppet valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/042Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure
    • F15B13/043Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure with electrically-controlled pilot valves
    • F15B13/0431Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure with electrically-controlled pilot valves the electrical control resulting in an on-off function
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803Modular units
    • F15B13/0832Modular valves
    • F15B13/0839Stacked plate type valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803Modular units
    • F15B13/0832Modular valves
    • F15B13/0842Monoblock type valves, e.g. with multiple valve spools in a common housing
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803Modular units
    • F15B13/0846Electrical details
    • F15B13/0857Electrical connecting means, e.g. plugs, sockets
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803Modular units
    • F15B13/0871Channels for fluid
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B2013/002Modular valves, i.e. consisting of an assembly of interchangeable components
    • F15B2013/006Modular components with multiple uses, e.g. kits for either normally-open or normally-closed valves, interchangeable or reprogrammable manifolds
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00Circuits for servomotor systems
    • F15B2211/30Directional control
    • F15B2211/305Directional control characterised by the type of valves
    • F15B2211/3056Assemblies of multiple valves
    • F15B2211/30565Assemblies of multiple valves having multiple valves for a single output member, e.g. for creating higher valve function by use of multiple valves like two 2/2-valves replacing a 5/3-valve

Definitions

  • the invention relates to a multi-way valve.
  • this object is achieved by at least two individual seat valves, preferably blocked with one another, and a presettable distributor, by means of which control channels of the individual seat valves can be fluidly connected to one another.
  • the arrangement of a plurality of individual seat valves blocked with one another and the connection of the control channels of these individual seat valves with one another by means of a presettable distributor means not only create a modular structure of the multi-way valve in a very simple manner, but different switching functions can be implemented in a technically simple manner by changing the presettable distributor means.
  • the use of single-seat valves ensures a long service life with high tightness.
  • the use of single-seat valves also has the great advantage that a large opening and thus a large flow can be achieved by means of a small stroke, which in turn enables very fast switching operations and low switching time scatter and thus high switching frequencies of the multi-way valve.
  • the use of mechanically uncoupled single-seat valves is also particularly advantageous because there is no need for complex tolerance compensation and therefore cost-effective production is possible.
  • the parts can be made entirely of plastic injection molding.
  • the distributor means is a distributor plate which forms fluidic connections between the channels of a plurality of individual valves. In this way, only two elements are to be provided for determining the switching function of the multi-way valve, namely the individual seat valves blocked with one another and the distributor plate acting as a distributor.
  • the distributor plate comprises a cover element which forms at least one control channel which is sealed off from the environment and connects the control channels of the individual seat valves and a sealing element which is adapted to and cooperates with the cover element and through which the control channels of one or more individual seat valves are lockable.
  • the sealing element itself can be designed in different ways.
  • An advantageous embodiment provides that the sealing element has elastically arranged closure means, for example sealing plugs or closure membranes, which are pressed by openings in the cover element, raised areas, projections or the like. On openings of the control channels.
  • the presetting of the distributor means and thus the desired switching function of the multi-way valve is realized in that the arrangement of the cams in the cover element can be freely selected.
  • the choice of the arrangement of the cams and thus the choice of the open and closed control channels of the blocked single-seat valves can be specified by the manufacturer or determined by the user.
  • the sealing element is a lattice gasket, by means of which the individual control channels of the individual seat valves are closed.
  • the grille seal is preferably designed such that different switching functions, that is to say directional control valves with different switching functions, can be implemented by rotating and / or turning the grating seal.
  • the distributor plate is formed by at least one electronic component which can be deformed by the action of an electric current in such a way that the channels of one or more single-seat valves can be closed by their targeted deformation. In this way, an electrical control and thus a change in the switching function of the multi-way valve is implemented in a very simple manner.
  • the single-seat valves can have different switching functions.
  • the individual seat valves which are blocked with one another are 2/2-way seat valves which are arranged flat alongside one another.
  • the use of 2/2-way seat valves has the advantage that they have a technically simple, failure-prone and ultimately also inexpensive construction at a high switching speed.
  • the flat arrangement of the valves side by side accommodates the formation of the distributor plate and the cover element.
  • At least one pilot valve can be connected upstream and / or downstream of the distributor means.
  • FIG. 1a schematically shows a circuit diagram of a multi-way valve making use of the invention
  • 1 b is a table which illustrates the switching positions of the individual seat valves for implementing several switching functions of the multi-way valve
  • 1c shows a table illustrating the different directional valve functions
  • FIG. 2a schematically shows a circuit diagram of another exemplary embodiment of a multi-way valve making use of the invention
  • FIG. 2b shows a table from which the switching function of the multi-way valve shown in FIG. 2a can be seen by changing the connection of the individual valves;
  • 2c shows a table illustrating the different directional valve functions
  • FIG. 3a schematically shows an exemplary embodiment of one in FIG.
  • Fig. 2a shown multi-way valve
  • FIG. 3b shows a detail identified by III in FIG. 3a in an enlarged manner
  • FIG. 3c shows the detail marked III in FIG. 3a with a modified sealing element
  • Fig. 4c schematically opened and closed control channels one
  • the basic idea of the invention is to selectively implement different switching functions of multi-way valves from a plurality of, preferably juxtaposed, single-seat valves, for example 2/2-way valves, with the aid of a distributor plate which is sealed off from the environment and which establishes connections between control channels of the individual valves.
  • a multi-way valve designated as a whole in FIG. 1a with 100, comprises four 2/2-way valves A, B, C, D, which are closed in the rest position and are used to control the consumers (not shown) connected to connections 2 and 4. Furthermore, control valves E, F and electrically actuable control valves G, H of small nominal sizes are provided. Fluidic switches S1 to S11 are provided to implement different switching functions. The design of these switches is illustrated in FIG. 3 and in FIG. 4. In Fig. 1 b different switching positions of the switches S1, ... S11 are shown, which enable the directional control valve functions listed in table 1c.
  • the 2/2-way seat valves A, B, C, D are arranged blocked next to each other, so to speak they form a valve plate with control channels 110 arranged side by side.
  • individual control channels 110 are closed or opened. This takes place, for example, as shown in FIGS. 3a, b, c with the aid of a distributor in the form of a distributor plate 130.
  • the distributor plate 130 comprises a cover element 132 and a sealing element interacting with it in the form of a grille seal 134.
  • Individual grille valves 134 are formed by the grille seal 134 110 fluidly connected to one another or fluidly separated from one another.
  • the separation takes place in the fluidic connection cavity formed on the basis of the cover element 132 by means of webs 136 of the grille seal 134 arranged between the individual valves. Openings or openings of connections can be changed by using different grille seals 134, by rotating a single grille seal and / or by turning a grille seal.
  • the cover element 132 and the grid seal 134 form the fluidic switches S1,... S11.
  • FIG. 4a schematically shows a further embodiment of a distributor plate 130 'designed as a distributor means.
  • a cover element 132 ' has projections 133' which press the closure membranes 135 'of a sealing element 134' onto respective openings of the control channels 110 of the 2/2-seat valves and thereby close them or, if no projections 133 'are provided, leave them open.
  • FIGS. 4b and 4d A further exemplary embodiment of the fluidic switches S1,... S11 is shown in FIGS. 4b and 4d.
  • a distributor plate 130 "comprises a cover element 132" and a sealing element 134 "which cooperates with it.
  • the sealing element 134" itself has a plurality of closable elastically arranged closure means in the form of closure plugs 135 ", which in dependence in the cover element 132" switching cams 133 "arranged from the desired switching position are pressed onto a control channel 110 of the 2/2-way seat valves A, B, C, D and close or leave them open.
  • cover element 132 that is to say formation and arrangement of the switching cams 133, depending on the connection shown in Table 1c, a plurality of multi-way valve switching functions are implemented, for example the 5/2 rest position specified in Table 1c or the 5/3 blocking means (APB - AII Ports Blocked) position.
  • the cover element 132, 132 'or 132 "and the sealing element 134 or 134' or 134" are designed so that the fluidic switches S1, S3, S7, S8, S9, S10, S11 are not closed, whereas the fluid ones Switches S2, S4, S5, S6 are closed.
  • the control medium can thus control the two 2/2-way valves A and C coming from the pressure connection 1 via the valve E, via the switches 2 and 6.
  • port 4 is vented to valve A after 5 and port 2 is pressurized via valve C.
  • valves B and D remain vented via the connection of the fluidic switches 4 and 5 via the uncontrolled valve G, ie the 2/2-way valves B and D remain closed. If control valve G is now switched on, valve E is thereby switched on at the same time.
  • the valves B and D are controlled by valve G via the connection of the fluidic switches 4 and 5, the valves A and C are vented by the connection of the fluidic switches 2 and 4 via the switched-on valve E, ie the fluid can flow from the pressure connection 1 to Work port 4 flow. Port 2 is vented via valve D.
  • the valves F and H are not addressed with this switching function.
  • FIG. 2 Another embodiment of a multi-way valve is shown schematically in FIG. 2.
  • this exemplary embodiment two times two valves which are closed in the rest position and open in the rest position are used, with the exception of the 5/3 blocking center position (APB - All Ports Blocked) function.
  • the advantage of simple conversion on site is somewhat limited, but at the same time the pilot or control valves E and F described above are saved.
  • valves A 'to D' and the control lines shown in dash-dotted lines represent only the optional equipment, so it is not an additional valve.
  • the illustration is intended to clarify that, depending on the desired function according to table Fig. 2b, valve A 'can be used instead of valve A.
  • the connections of the control lines required depending on the desired function, designated II, III and IV in FIGS. 2a and 2b, are carried out in the same way as explained above.
  • the directional valve Functions are shown in a table in FIG. 2c. If, for example, a 5/2-way valve with a rest position function is to be implemented, valves A, B ', C and D' are required according to Table 2b.
  • connection is now made according to the connection of the control channels designated II, ie the control line of the control valve G is connected to the control inputs of the valves A, B ', C and D'.
  • the control valve H is not required for this function. If control valve G is not switched on as shown, the control connections of valves A, B ', C, D' are vented via the connected control lines and via valve G.
  • the operating pressure can pass from port 1 via valve C to working port 2, valve D 'is closed, ie the fluid connection of port 2 to 3 is blocked.
  • the working connection 4 is vented to the connection 5 via the valve A, the valve B 'is closed, so that there is no pressure connection to the connection 4.
  • control valve G If the control valve G is switched on, the control pressure is passed to the control connections of the valves A, B ', C and D'. As a result, pressurized fluid is passed via valve B 'to port 4, port 2 is vented via valve D'. At the same time the connection to the working connection 2 is blocked by the valve C. The venting of the working connection 4 is shut off via the valve A.
  • distributor plates instead of the distributor plates explained above, it is also possible, for example, to use an electrically controllable distributor plate having electrical components, in which the components are deformed by the action of an electrical current in such a way that the control channels 110 of one or more single-seat valves can be closed by this deformation.
  • a distribution means which can be predetermined as desired and in particular can also be changed by the user on site can be used, which enables different switching functions of the individual valves.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Multiple-Way Valves (AREA)

Abstract

La présente invention concerne une soupape multivoie (100) caractérisée par des soupapes à siège individuel (A, B, C, D) verrouillées les unes aux autres et par un système distributeur préréglable (130). Ce système distributeur préréglable permet d'établir une liaison fluidique des canaux de commande (110) des soupapes à siège individuel (A, B, C, D) entre eux et entre ces mêmes canaux de commande (110) des soupapes à siège individuel (A, B, C, D) et des connexions externes.
PCT/DE2003/002985 2002-09-13 2003-09-08 Soupape multivoie WO2004027268A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10242726.7 2002-09-13
DE10242726A DE10242726A1 (de) 2002-09-13 2002-09-13 Mehrwegeventil

Publications (1)

Publication Number Publication Date
WO2004027268A1 true WO2004027268A1 (fr) 2004-04-01

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ID=31895991

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2003/002985 WO2004027268A1 (fr) 2002-09-13 2003-09-08 Soupape multivoie

Country Status (2)

Country Link
DE (1) DE10242726A1 (fr)
WO (1) WO2004027268A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010118811A1 (fr) * 2009-04-17 2010-10-21 Festo Ag & Co. Kg Dispositif à soupapes
WO2010118797A1 (fr) * 2009-04-17 2010-10-21 Festo Ag & Co.Kg Dispositif à soupapes
WO2017178272A1 (fr) * 2016-04-14 2017-10-19 Hoerbiger Automatisierungstechnik Holding Gmbh Groupe de soupapes électropneumatique

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004045057A1 (de) * 2004-09-15 2006-03-30 Bar-Pneumatische Steuerungssysteme Gmbh Steuerventil
DE102009017880A1 (de) * 2009-04-17 2010-10-28 Festo Ag & Co. Kg Ventileinrichtung
DE102009017878A1 (de) * 2009-04-17 2010-10-21 Festo Ag & Co. Kg Ventileinrichtung

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US3407846A (en) * 1966-07-14 1968-10-29 Aro Corp Circuit board and control module for fluid logic circuit mechanism
US3556144A (en) * 1969-11-10 1971-01-19 Nordberg Manufacturing Co Directional control valve and method of making
US3572368A (en) * 1969-09-02 1971-03-23 Honeywell Inc Pneumatic control system manifold means
US3760844A (en) * 1971-07-19 1973-09-25 Westinghouse Air Brake Co Circuit module for fluid distribution
DE2262438A1 (de) * 1972-12-20 1974-07-11 Siemens Ag Schaltungs- und montageplatte fuer bauteile der pneumatischen mess- und regeltechnik
US3881513A (en) * 1974-01-25 1975-05-06 Sun Oil Co Pennsylvania Three-coordinate fluid manifold
FR2399561A1 (fr) * 1977-08-01 1979-03-02 Ross Operating Valve Co Dispositif a quatre soupapes circulaires a fonctions multiples
GB2212562A (en) * 1987-10-14 1989-07-26 Kinetrol Ltd Actuator control means
WO1990006470A1 (fr) * 1988-12-09 1990-06-14 Rosemount Inc. Vanne micro-usinee a diaphragme a film de polyimide
DE4409667C1 (de) * 1994-03-15 1995-08-24 Mannesmann Ag Wegeventilanordnung mit Wegeventil und Grundplatte
GB2301167A (en) * 1995-03-14 1996-11-27 Elizabeth Mary Shansonga System valve
WO1999058859A1 (fr) * 1998-05-08 1999-11-18 Festo Ag & Co. Batterie de microclapets
EP1013941A1 (fr) * 1998-12-23 2000-06-28 Bürkert Werke GmbH & Co. Aménagement pour commander un dispositif de positionnement
WO2002031363A1 (fr) * 2000-10-11 2002-04-18 El-O-Matic B.V. Mecanisme d'entrainement, partie de fonction et vanne d'isolement

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3407846A (en) * 1966-07-14 1968-10-29 Aro Corp Circuit board and control module for fluid logic circuit mechanism
US3572368A (en) * 1969-09-02 1971-03-23 Honeywell Inc Pneumatic control system manifold means
US3556144A (en) * 1969-11-10 1971-01-19 Nordberg Manufacturing Co Directional control valve and method of making
US3760844A (en) * 1971-07-19 1973-09-25 Westinghouse Air Brake Co Circuit module for fluid distribution
DE2262438A1 (de) * 1972-12-20 1974-07-11 Siemens Ag Schaltungs- und montageplatte fuer bauteile der pneumatischen mess- und regeltechnik
US3881513A (en) * 1974-01-25 1975-05-06 Sun Oil Co Pennsylvania Three-coordinate fluid manifold
FR2399561A1 (fr) * 1977-08-01 1979-03-02 Ross Operating Valve Co Dispositif a quatre soupapes circulaires a fonctions multiples
GB2212562A (en) * 1987-10-14 1989-07-26 Kinetrol Ltd Actuator control means
WO1990006470A1 (fr) * 1988-12-09 1990-06-14 Rosemount Inc. Vanne micro-usinee a diaphragme a film de polyimide
DE4409667C1 (de) * 1994-03-15 1995-08-24 Mannesmann Ag Wegeventilanordnung mit Wegeventil und Grundplatte
GB2301167A (en) * 1995-03-14 1996-11-27 Elizabeth Mary Shansonga System valve
WO1999058859A1 (fr) * 1998-05-08 1999-11-18 Festo Ag & Co. Batterie de microclapets
EP1013941A1 (fr) * 1998-12-23 2000-06-28 Bürkert Werke GmbH & Co. Aménagement pour commander un dispositif de positionnement
WO2002031363A1 (fr) * 2000-10-11 2002-04-18 El-O-Matic B.V. Mecanisme d'entrainement, partie de fonction et vanne d'isolement

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010118811A1 (fr) * 2009-04-17 2010-10-21 Festo Ag & Co. Kg Dispositif à soupapes
WO2010118797A1 (fr) * 2009-04-17 2010-10-21 Festo Ag & Co.Kg Dispositif à soupapes
CN102395799A (zh) * 2009-04-17 2012-03-28 费斯托股份有限两合公司 阀门装置
US8689833B2 (en) 2009-04-17 2014-04-08 Festo Ag & Co. Kg Valve device
WO2017178272A1 (fr) * 2016-04-14 2017-10-19 Hoerbiger Automatisierungstechnik Holding Gmbh Groupe de soupapes électropneumatique
KR20180129931A (ko) * 2016-04-14 2018-12-05 훼르비거 아우토마티지어룬스테크닉 홀딩 게엠베하 전공 밸브 어셈블리
US10619655B2 (en) 2016-04-14 2020-04-14 Hoerbiger Automatsierungstechnik Holding Gmbh Electropneumatic valve assembly
KR102305303B1 (ko) 2016-04-14 2021-09-24 회르비거 플로우 컨트롤 게엠베하 전공 밸브 어셈블리

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