WO2004018963A2 - Verfahren zur bestimmung tribologischer eigenschaften einer probenoberfläche mittels eines rasterkraftmikroskops (rkm) sowie ein diesbezügliches rkm - Google Patents
Verfahren zur bestimmung tribologischer eigenschaften einer probenoberfläche mittels eines rasterkraftmikroskops (rkm) sowie ein diesbezügliches rkm Download PDFInfo
- Publication number
- WO2004018963A2 WO2004018963A2 PCT/EP2003/009054 EP0309054W WO2004018963A2 WO 2004018963 A2 WO2004018963 A2 WO 2004018963A2 EP 0309054 W EP0309054 W EP 0309054W WO 2004018963 A2 WO2004018963 A2 WO 2004018963A2
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- WO
- WIPO (PCT)
- Prior art keywords
- sample surface
- measuring tip
- cantilever
- excitation
- amplitudes
- Prior art date
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/28—Adhesion force microscopy
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H3/00—Measuring characteristics of vibrations by using a detector in a fluid
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/34—Generating the ultrasonic, sonic or infrasonic waves, e.g. electronic circuits specially adapted therefor
- G01N29/346—Generating the ultrasonic, sonic or infrasonic waves, e.g. electronic circuits specially adapted therefor with amplitude characteristics, e.g. modulated signal
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/26—Friction force microscopy
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02827—Elastic parameters, strength or force
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/10—Number of transducers
- G01N2291/101—Number of transducers one transducer
Definitions
- the invention relates to a method for examining a sample surface by means of an atomic force microscope (RKM), which has a spring bar with a longitudinal extension, along which a measuring tip is attached, which is arranged in a targeted manner relative to the sample surface and detects its spatial position with a sensor unit is initiated, as well as at least one ultrasonic wave generator, which initiates with a predeterminable excitation frequency an oscillation excitation between the sample surface and the cantilever, the measuring tip of which is brought into contact with the sample surface, in such a way that the measuring tip is oriented laterally to the sample surface and orthogonally to the longitudinal extension of the cantilever is excited and that torsional vibrations which form in the cantilever are detected and analyzed by means of an evaluation unit,
- RKM atomic force microscope
- DE 4324983 C2 discloses an acoustic microscope that works on the technology basis of an atomic force microscope and is able to measure both the topography and the elasticity properties of a sample surface.
- the force microscope has a spring bar designed as a leaf spring, typically with a length between 100 ⁇ m and 500 ⁇ m, on one end of which a pyramid-shaped measuring tip with a tip radius of curvature of approximately 50 nanometers is attached.
- the cantilever and the measuring tip connected to it are scanned over the sample surface with the aid of a suitable movement device in such a way that the measuring tip comes into contact with the sample surface at every individual grid point with a predefinable contact force.
- a suitable movement device in such a way that the measuring tip comes into contact with the sample surface at every individual grid point with a predefinable contact force.
- the optical sensor unit usually provides a laser diode, from which a laser beam emerges directed onto the cantilever, is reflected on the cantilever and is detected by a position-sensitive photodiode.
- the cantilever including the measuring tip, is actively tracked perpendicular to the sample surface during the scanning process via a control loop, so that the deflection of the cantilever or the contact force with which the cantilever rests on the sample surface over the measuring tip remains constant.
- the control voltage required for the deflection is typically converted into a distance value and, as a color value, is correspondingly brought into a representation from which the surface topography can ultimately be found.
- an ultrasonic wave generator which sets the sample surface in oscillation while the measuring tip is at a raster point on the Sample surface is on.
- the vibration excitation by the ultrasonic wave coupling leads to normal vibrations of the sample surface, by means of which the cantilever is set into high-frequency oscillating bending vibrations along its extent.
- the difficulty that has to be overcome in this measuring situation lies in the technical decoupling of the superimposed deflections of the cantilever, which on the one hand result from the topography measurement, by means of which the contact force with which the measuring tip rests on the sample surface is kept as constant as possible, and on the other hand caused by the ultrasound-induced normal vibrations of the sample surface, which are transmitted to the cantilever via the measuring tip.
- the ultrasound-induced vibration excitation of the sample surface occurs at frequencies that are at least one order of magnitude higher than the resonance frequency of the cantilever with the measuring tip attached to it.
- the vibration behavior of the cantilever can be selectively detected and evaluated using two photodiodes which can be addressed differently in terms of time and which are struck by the light beam reflected on the cantilever. For example, that photodiode that has a slow response behavior can only detect those deflections that result from the contour-dependent readjustment of the cantilever for topography detection.
- a second photodiode for detecting the high-frequency vibration components of the cantilever which has a bandwidth window in the MHz range.
- the cantilever Due to the vibration excitation directed transversely to the longitudinal extension of the cantilever, the cantilever is subjected to torsional vibrations via the measuring tip in contact with the sample surface, the measuring tip, which is at least temporarily in contact with the sample surface, executing oscillations directed longitudinally to the sample surface, which are directed or longitudinally transverse to the spring beam are polarized.
- the probe tip temporarily sticks to the sample surface, which is deformed by shear forces acting laterally to the sample surface, until the probe tip slides back over the sample surface from this situation, which can be described by friction.
- the shear deformations that form at the reversal points of movement depending on the contact force with which the measuring tip rests on the sample surface influence the vibration behavior of the measuring tip and, in connection with this, the cantilever in a manner that characterizes the elastic properties of the sample surface. It is thus possible from the vibration behavior, for example from the vibration amplitude and / or the phase to make statements about the elastic properties of the sample surface in the form of torsional vibrations along the cantilever.
- the oscillations within the sample initiated by the signal generator have frequencies of approximately 1 kHz.
- the spatial resolution with this measurement method is unsatisfactory. So only measurements with a spatial resolution of about 100 nm can be achieved.
- the measurement quality that can be achieved with this method only allows qualitative statements about the friction properties of the sample surface.
- the invention is based on the object of a method for examining a sample surface by means of an atomic force microscope of the type described above, in which the sample surface is set into vibrations, in which the vibrations are directed laterally to the sample surface and, moreover, are oriented orthogonally to the longitudinal extension of the cantilever, to develop in such a way that qualitative and quantitative statements about the friction properties of the sample surface are possible.
- a determination of the tribological i.e. To allow friction properties of the sample surface.
- a sample surface mapping that can be detached with high resolution with a spatial resolution of less than 100 nm, preferably less than 10 nm, should be possible.
- a method for examining a sample surface using an atomic force microscope which has a spring bar with a longitudinal extension, along which a measuring tip is attached, which is arranged in a targeted manner relative to the sample surface and whose spatial position is detected with a sensor unit, and at least one ultrasonic wave generator that initiates with a predeterminable excitation frequency an oscillation excitation between the sample surface and the cantilever, the measuring tip of which is brought into contact with the sample surface, in such a way that the measuring tip is excited in oscillations oriented laterally to the sample surface and orthogonally to the longitudinal extent of the cantilever and that torsional vibrations that form in the cantilever are detected and analyzed by means of an evaluation unit, in that the vibration excitation takes place in such a way that the vibrations from the
- the vibration excitation is preferably carried out in each case with a continuous wave signal which is swept, ie tuned, within a predeterminable excitation frequency range.
- the excitation frequency range is to be selected such that the resonant fundamental oscillation of the frequency bar in contact with the measuring tip on the sample surface lies within the excitation frequency range.
- the vibration excitation of the cantilever resting on the sample surface is carried out with excitation amplitudes, which lead to torsional vibrations with torsional amplitudes in the cantilever, the torsional amplitude maxi ma of which, despite increasing excitation amplitudes, assume a largely constant plateau value and their resonance spectra experience the amplitude of the torsion amplitudes, and the resonance amplitudes experience a maximum amplitude can be determined by a plateau width.
- the resonance spectra preferably the plateau value, the plateau width, the slope of the respective resonance spectra on the side flanks of the resonance curve and / or the slope of the plateau can be used to examine the sample surface.
- tribological properties for example the frictional force or friction coefficient acting on the sample surface between the measuring tip and the sample surface
- the method according to the invention represents a highly sensitive and finely resolving tribological analysis method.
- the method according to the invention naturally also allows topography detection by setting one constant contact force with which the measuring tip of the cantilever rests on the sample surface to be examined.
- topography-related, low-frequency deflections of the measuring tip are detected via light reflection on the cantilever and evaluated accordingly.
- the detection signal obtained with the aid of the detection device and representing the low-frequency topography-related deflection serves on the one hand to determine the topography and on the other hand as a control variable with which the distance between the measurement tip and the sample surface or the contact force with which the measurement tip rests on the sample surface is averaged over time is kept constant.
- the ultrasonic wave generator generates vibrations in the form of continuous wave signals for determining the resonant fundamental frequency of the cantilever beam which is in contact with the sample surface via the measuring tip, the frequencies of which are swept, ie tuned, in a predeterminable frequency range.
- the predeterminable frequency range preferably includes frequencies below the resonant fundamental frequency of the measuring probe with the sample surface in Contact spring bar up to 30 times this contact resonance frequency.
- the frequency sweep of the excitation frequency typically takes place in 1 kHz frequency steps within a frequency range between 50 kHz and 10 MHz.
- a typical cantilever with a length of 450 ⁇ m showed four torsional resonances in the frequency range between 50 kHz and 3 MHz.
- the sample is acted upon by the ultrasonic wave generator with excitation frequencies which are around the contact resonance frequency f r .
- the excitation frequency range ⁇ f a preferably comprises frequencies from f r -Vz f r to f r + Vz f r .
- the excitation frequency range comprises frequencies between a .DELTA.f f r - f Vz .DELTA.f r to r + Vz .DELTA.f r, where r .DELTA.f of the half-value width of the detected in the measurement curve at resonance f r corresponds.
- the vibration excitation takes place again as part of a frequency sweep, ie the excitation frequency is wobbled or tuned in the form of individual continuous wave signals within the predetermined excitation frequency range ⁇ f a .
- the exact setting of the vibration direction or polarization of the transverse vibrations induced laterally in the sample surface relative to the longitudinal extent of the cantilever is of the greatest relevance.
- the measuring tip resting on the sample surface with a defined contact force gets into high-frequency oscillating transverse vibrations transverse to the longitudinal extension of the cantilever, which constantly "jumps" between the following three states due to the resonant vibration increase: 1.
- the measuring tip rubs over the sample surface. 2.
- the oscillation movement comes to a standstill.
- the measuring tip moves in the elastic potential, ie the measuring tip enters into the sample surface a brief frictional connection, whereby the sample surface is locally deformed due to the shear forces directed laterally to the sample surface.
- the measuring tip in the resonant oscillation case begins to dance chaotically at least in sections over the sample surface and assumes the above states in a stochastically distributed manner.
- the vibration behavior that forms within the cantilever is determined by the tribological contact properties between the measuring tip and the sample surface. If, as mentioned above, the sample surface is excited by the ultrasonic wave generator with a contact resonance frequency, preferably the basic resonance frequency of the cantilever beam in contact with the sample surface via the measuring tip, then a resonant oscillation behavior of the cantilever beam occurs with low excitation amplitudes, the resonance curve of which is largely is symmetrical. The resonant vibration behavior of the cantilever is recorded in a manner known per se using an optical sensor unit and is displayed in the form of a resonance curve.
- the excitation amplitude is increased by successively increasing the excitation voltage with which the ultrasonic wave generator can be operated, deviations from the original symmetrical resonance curve are shown in the recorded resonance spectrum in such a way that, despite the increasing excitation amplitude, the amplitude of the resonance spectrum assumes a kind of saturation value and remains almost constant.
- the shape of the resonance curve changes in such a way that a resonant broadening is formed in the upper amplitude range of the resonance curve.
- a kind of plateau forms, the position of which remains largely constant despite increasing excitation amplitudes, however, its width also increases with increasing excitation amplitudes.
- these characteristic deviations from the symmetrical design of the resonance curve, which are formed by increasing the excitation amplitude are used specifically to obtain tribological information; this relates in particular to the plateau values resulting from the spectral resonant broadening, the plateau width, and the slope of the respective resonance spectra on the side edges of the resonance curve and / or the slope of the plateau.
- the above-described resonant excitation even at higher order contact resonance frequencies.
- the above deviations from the symmetrical formation of the resonance curve can be observed not only at the fundamental resonant frequency, that is to say when the first torsion mode occurs, but also at higher modes.
- the broadening in the resonance curve that occurs at higher modes, such as the plateau width, can also be used to determine the frictional force.
- overtones to the excitation frequency in the resonant behavior of the cantilever can be detected as soon as the flattening described occurs at the resonance maximum.
- Such overtones can also be recognized in higher vibration modes, which can also be used to determine the frictional force the first torsion mode at an excitation frequency of 100 kHz, the higher torsion modes are at 300 kHz, 500 kHz, 700 kHz etc.
- the nth torsion mode is therefore (2n-1) x 100 kHz.
- the first torsion mode is excited with a sufficiently high excitation amplitude so that, for example, a flattened torsion peak can be seen in the excitation frequency spectrum between 80 kHz and 120 kHz, peaks at 200 kHz, 300 kHz, 400 kHz ect Frequencies kx 100 kHz that can be individually detected.
- those overtones of the A are formed excitation frequency, which coincide with higher torsion modes (300 kHz, 500 kHz, 700 kHz, ...) more than the others (200 kHz, 400 kHz, 600 kHz, ).
- At least one temporally high-resolution photodiode is preferably used, the temporal resolution of which enables the detection of oscillation events with frequencies which preferably correspond to up to 25 times, preferably twice to ten times the excitation frequencies.
- measurements are carried out successively at closely adjacent contact points, the lateral distance of which is at least about 1 nm, under the resonance conditions described above, which provide information about the surface topography and information about the contact point provide existing tribological properties.
- the properties of the resonance curve of the cantilever mentioned above can be recorded at any point on the sample surface to be measured and displayed as a color value.
- FIG. 1 schematic component representation for performing the method according to the invention
- Fig. 2 diagram with resonance curves at different excitation amplitudes.
- FIG. 1 shows an atomic force microscope for carrying out the method according to the invention for examining a sample surface, in particular for detecting tribological properties on the sample surface.
- the microscope shown in FIG. 1 provides a spring bar 1, the measuring tip 2 of which rests on the sample surface 3 of a sample P.
- the sample P is in contact with an ultrasound transducer 5 via a lead section or lead layer 4, which is set into oscillations via a corresponding signal generator 6.
- the lead layer 4 is connected to the sample P and the ultrasound transducer 5, for example, each via a honey layer as an acoustic coupling layer.
- An optical sensor unit is provided for measuring the vibrations transmitted via the measuring tip 2 in the cantilever 1, consisting of a laser diode 7, a deflecting mirror 8 and a photodiode unit 9.
- the photodiode unit 9 serves on the one hand to detect the topography-related, low-frequency deflections of the measuring tip 2 and connected to the cantilever 1 and for this reason is connected to an AFM feedback loop 10 which serves for constant control of the contact force with which the measuring tip 2 rests on the sample surface 3. Details about such a control loop can be found in the document mentioned at the beginning, DE 43 24983 C2.
- the photodiode unit 9 is able to detect high-frequency vibrations, which are transmitted as a torsion signal T via a fast signal processing unit 11 to a computer unit 12, stored, evaluated and ultimately displayed graphically as friction properties.
- the friction microscope arrangement shown in highly schematic form in FIG. 1 does not show the adjusting means required for the spatial arrangement of the cantilever relative to the sample surface, which are typically designed as piezo adjusting means. Since these are known actuating means, reference is also made to DE 43 24983 C2 in this connection.
- the ultrasound transducer 5 is designed and operated in such a way that the sample P is oscillated exclusively laterally to the sample surface 3, which are also oriented or polarized perpendicular to the longitudinal extension of the cantilever 1 (see arrow representation in FIG. 1). Due to the mechanical coupling, the spring bar 1, which is in contact with the sample surface 3 via the measuring tip 2, is subjected to torsional vibrations, which lead to a resonant torsional vibration increase when a resonant fundamental frequency is reached.
- the ultrasonic wave generator which is composed of the oscillation generator 6 and the ultrasonic transducer 5, generates a large number of continuous wave signals, the excitation frequencies of which are separated from one another in time sequence a predefinable frequency range can be tuned, the frequencies below the resonant fundamental frequency of the cantilever up to 30 times this frequency. This ensures that the cantilever 1 is not only excited with its resonant fundamental vibration to torsional vibrations, but also vibrates with higher-modulus torsional resonances.
- the excitation amplitude with which the ultrasound transducer 5 oscillates is set such that the measuring tip 2 rubs on the sample surface 3 and thus always changes the elastic contact with the sample surface.
- the measuring tip 2 carries out oscillating sliding movements at these excitation amplitudes, each of which is briefly interrupted at the point of oscillation reversal by a frictional connection between the measuring tip 2 and the sample surface 3.
- the resonance behavior of the cantilever 1, which occurs with this vibration behavior, which can also be described as a “stick-slip” vibration behavior, is detected by the optical sensor unit 9 and analyzed more precisely by means of a resonance curve representation.
- a measurement arrangement obtained with the aid of the FIG. 1 is obtained
- the diagram shown in FIG. 2 shows an abscissa designed as a frequency axis and an ordinate designed as an amplitude axis.
- the resonance curves shown in the different lines represent resonance behavior of the cantilever at different excitation amplitudes or excitation voltages.
- the position of the amplitude of the torsional resonance remains largely the same and is in the range of the torsion maximum a spectral broadening in Art a plateau formation. It is precisely these characteristics that change the resonance curve that are used according to the invention for determining the friction properties or the tribological properties of the sample surface. This applies in particular to the plateau value of the resonance amplitudes which forms as a saturation value, the plateau which forms and the slope of the resonance curve flanks.
- the resonant torsional vibration behavior of the cantilever is evaluated by recording the phase and frequency distribution of the torsional vibrations of the cantilever by means of optical vibration detection and using a lock-in amplifier.
- a lock-in amplifier there is also the use of a broadband amplifier in connection with a discrete signal processing for spectral analysis, such as the discrete Fourier transform (DFT), the fast Fourier transform (FFT), the wavelet transform or the so-called Walsh transformation.
- DFT discrete Fourier transform
- FFT fast Fourier transform
- Walsh transformation a discrete Fourier transform
- An analog spectral analysis is also conceivable.
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Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP03792324A EP1535020A2 (de) | 2002-08-16 | 2003-08-14 | Verfahren zur bestimmung tribologischer eigenschaften einer probenoberfl che mittels eines rasterkraftmikroskops (rkm) sowie ein diesbez gliches rkm |
US10/524,729 US7360404B2 (en) | 2002-08-16 | 2003-08-14 | Method for determining tribological properties of a sample surface using a scanning microscope (sem) and associated scanning microscope |
JP2004530154A JP2005535903A (ja) | 2002-08-16 | 2003-08-14 | 原子間力走査顕微鏡を使用して試料面の摩擦学特性を測定する方法とそのための原子間力走査顕微鏡 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10237627.1 | 2002-08-16 | ||
DE10237627A DE10237627A1 (de) | 2002-08-16 | 2002-08-16 | Verfahren zur Bestimmung tribologischer Eigenschaften einer Probenoberfläche mittels eines Rasterkraftmikroskops (RKM) sowie ein diesbezügliches RKM |
Publications (2)
Publication Number | Publication Date |
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WO2004018963A2 true WO2004018963A2 (de) | 2004-03-04 |
WO2004018963A3 WO2004018963A3 (de) | 2004-08-12 |
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ID=31501785
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/EP2003/009054 WO2004018963A2 (de) | 2002-08-16 | 2003-08-14 | Verfahren zur bestimmung tribologischer eigenschaften einer probenoberfläche mittels eines rasterkraftmikroskops (rkm) sowie ein diesbezügliches rkm |
Country Status (5)
Country | Link |
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US (1) | US7360404B2 (de) |
EP (1) | EP1535020A2 (de) |
JP (1) | JP2005535903A (de) |
DE (1) | DE10237627A1 (de) |
WO (1) | WO2004018963A2 (de) |
Cited By (1)
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US7657947B2 (en) * | 2003-05-15 | 2010-02-02 | Fraunhofer-Gesellschaft zur Förderung | Method and device for the contactless excitation of torsional vibrations in a one-sidedly clamped-in spring cantilever of an atomic force microscope |
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US7168301B2 (en) * | 2002-07-02 | 2007-01-30 | Veeco Instruments Inc. | Method and apparatus of driving torsional resonance mode of a probe-based instrument |
US7448269B2 (en) * | 2003-08-12 | 2008-11-11 | Northwestern University | Scanning near field ultrasound holography |
US8438927B2 (en) * | 2003-08-12 | 2013-05-14 | Northwestern University | Scanning near field thermoelastic acoustic holography (SNFTAH) |
US7598723B2 (en) * | 2005-02-14 | 2009-10-06 | Clemson University | Method and apparatus for detecting resonance in electrostatically driven elements |
US8384372B1 (en) | 2005-02-14 | 2013-02-26 | Clemson University | Non-linear electrical actuation and detection |
US7989164B2 (en) * | 2005-04-22 | 2011-08-02 | The Board Of Trustees Of The Leland Stanford Junior University | Detection of macromolecular complexes with harmonic cantilevers |
JP5224084B2 (ja) * | 2006-11-08 | 2013-07-03 | 独立行政法人産業技術総合研究所 | カンチレバー共振特性評価法 |
DE102009008251B4 (de) | 2009-02-02 | 2013-05-02 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Flexibel verschiebbare Kopplungseinrichtung für die akustisch angeregte Rasterkraftmikroskopie mit akustischer Anregung der Probe |
RU2449255C2 (ru) * | 2009-07-16 | 2012-04-27 | Государственное образовательное учреждение высшего профессионального образования "Ростовский государственный университет путей сообщения" | Способ определения триботехнических составляющих виброакустических спектров трибосопряжений |
US8686358B2 (en) * | 2010-09-14 | 2014-04-01 | University Of Washington Through Its Center For Commercialization | Sub-microsecond-resolution probe microscopy |
CN104155477A (zh) * | 2014-08-13 | 2014-11-19 | 中国科学院电工研究所 | 一种原子力声学显微镜探针接触谐振频率追踪方法 |
US9541575B2 (en) * | 2014-11-26 | 2017-01-10 | Tufts University | Exploitation of second-order effects in atomic force microscopy |
KR101628557B1 (ko) | 2014-12-05 | 2016-06-08 | 현대자동차주식회사 | 시편 표면의 마찰계수 측정방법 |
CN107188116B (zh) * | 2016-03-14 | 2019-03-22 | 中国科学院沈阳自动化研究所 | 一种基于相位反馈的超声afm闭环纳米加工装置和方法 |
TWI621843B (zh) * | 2016-04-15 | 2018-04-21 | 財團法人工業技術研究院 | 檢測材料表面抗污能力的方法以及檢測材料表面抗污能力的檢測裝置 |
CN108408685B (zh) * | 2018-02-05 | 2019-04-23 | 杭州电子科技大学 | 一种超声振动刻蚀器及纳米加工系统 |
EP3745125A1 (de) * | 2019-05-27 | 2020-12-02 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO | Vorrichtung zur ultraschallsondenmikroskopie unter der oberfläche und zugehöriges verfahren |
US11193913B2 (en) * | 2020-01-31 | 2021-12-07 | Toyota Motor Engineering & Manufacturing North America, Inc. | Methods and systems to detect sub-surface defects in electronics modules using shear force microscopy |
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DE19900114A1 (de) * | 1999-01-05 | 2000-08-03 | Krotil Hans Ulrich | Verfahren und Vorrichtung zur gleichzeitigen Bestimmung der Adhäsion, der Reibung und weiterer Materialeigenschaften einer Probenoberfläche |
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Publication number | Priority date | Publication date | Assignee | Title |
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DE4324983C2 (de) * | 1993-07-26 | 1996-07-11 | Fraunhofer Ges Forschung | Akustisches Mikroskop |
JP2852397B2 (ja) * | 1994-11-15 | 1999-02-03 | 工業技術院長 | 原子間力顕微鏡および原子間力顕微鏡における摩擦の解析方法 |
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2002
- 2002-08-16 DE DE10237627A patent/DE10237627A1/de not_active Ceased
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2003
- 2003-08-14 US US10/524,729 patent/US7360404B2/en not_active Expired - Fee Related
- 2003-08-14 JP JP2004530154A patent/JP2005535903A/ja active Pending
- 2003-08-14 WO PCT/EP2003/009054 patent/WO2004018963A2/de active Application Filing
- 2003-08-14 EP EP03792324A patent/EP1535020A2/de not_active Withdrawn
Patent Citations (1)
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DE19900114A1 (de) * | 1999-01-05 | 2000-08-03 | Krotil Hans Ulrich | Verfahren und Vorrichtung zur gleichzeitigen Bestimmung der Adhäsion, der Reibung und weiterer Materialeigenschaften einer Probenoberfläche |
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ARNOLD W ET AL: "Atomic Force Microscopy at Ultrasonic Frequencies" NONDESTRUCTIVE EVALUATION AND RELIABILITY OF MICRO- AND NANOMATERIAL SYSTEMS, SAN DIEGO, CA, USA, 18-19 MARCH 2002, Bd. 4703, Seiten 53-64, XP002283751 Proceedings of the SPIE - The International Society for Optical Engineering, 2002, SPIE-Int. Soc. Opt. Eng, USA ISSN: 0277-786X * |
RABE U ET AL: "Evaluation of the contact resonance frequencies in atomic force microscopy as a method for surface characterisation (invited)" ULTRASONICS, IPC SCIENCE AND TECHNOLOGY PRESS LTD. GUILDFORD, GB, Bd. 40, Nr. 1-8, Mai 2002 (2002-05), Seiten 49-54, XP004357169 ISSN: 0041-624X * |
RABE U ET AL: "Probing linear and non-linear tip-sample interaction forces by atomic force acoustic microscopy" PROCEEDINGS OF THE 3RD CONFERENCE ON DEVELOPMENT AND INDUSTRIAL APPLICATION OF SCANNING PROBE METHODS (SXM-3), BASEL, SWITZERLAND, 16-19 SEPT. 1998, Bd. 27, Nr. 5-6, Seiten 386-391, XP002283752 Surface and Interface Analysis, May-June 1999, Wiley, UK ISSN: 0142-2421 * |
REINSTAEDTLER M ET AL: "ON THE NANOSCALE MEASUREMENT OF FRICTION USING ATOMIC-FORCE MICROSCOPE CANTILEVER TORSIONAL RESONANCES" APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, Bd. 82, Nr. 16, 21. April 2003 (2003-04-21), Seiten 2604-2606, XP001166597 ISSN: 0003-6951 * |
YAMANAKA K ET AL: "Quantitative material characterization by ultrasonic AFM" PROCEEDINGS OF THE 3RD CONFERENCE ON DEVELOPMENT AND INDUSTRIAL APPLICATION OF SCANNING PROBE METHODS (SXM-3), BASEL, SWITZERLAND, 16-19 SEPT. 1998, Bd. 27, Nr. 5-6, Seiten 600-606, XP002283753 Surface and Interface Analysis, May-June 1999, Wiley, UK ISSN: 0142-2421 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7657947B2 (en) * | 2003-05-15 | 2010-02-02 | Fraunhofer-Gesellschaft zur Förderung | Method and device for the contactless excitation of torsional vibrations in a one-sidedly clamped-in spring cantilever of an atomic force microscope |
Also Published As
Publication number | Publication date |
---|---|
US20060150719A1 (en) | 2006-07-13 |
US7360404B2 (en) | 2008-04-22 |
DE10237627A1 (de) | 2004-03-11 |
WO2004018963A3 (de) | 2004-08-12 |
JP2005535903A (ja) | 2005-11-24 |
EP1535020A2 (de) | 2005-06-01 |
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