WO2003075445A1 - Organe d'entraînement linéaire - Google Patents

Organe d'entraînement linéaire Download PDF

Info

Publication number
WO2003075445A1
WO2003075445A1 PCT/JP2003/002373 JP0302373W WO03075445A1 WO 2003075445 A1 WO2003075445 A1 WO 2003075445A1 JP 0302373 W JP0302373 W JP 0302373W WO 03075445 A1 WO03075445 A1 WO 03075445A1
Authority
WO
WIPO (PCT)
Prior art keywords
sliders
vibrating body
actuator
energizing
linear actuator
Prior art date
Application number
PCT/JP2003/002373
Other languages
English (en)
French (fr)
Inventor
Osamu Miyazawa
Original Assignee
Seiko Epson Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corporation filed Critical Seiko Epson Corporation
Priority to CN03805115XA priority Critical patent/CN1639956B/zh
Priority to KR1020047013696A priority patent/KR100641521B1/ko
Priority to DE60328586T priority patent/DE60328586D1/de
Priority to EP03743534A priority patent/EP1482630B1/en
Priority to JP2003573770A priority patent/JP4103799B2/ja
Publication of WO2003075445A1 publication Critical patent/WO2003075445A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
    • H02N2/006—Elastic elements, e.g. springs
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
PCT/JP2003/002373 2002-03-04 2003-02-28 Organe d'entraînement linéaire WO2003075445A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN03805115XA CN1639956B (zh) 2002-03-04 2003-02-28 直线致动器
KR1020047013696A KR100641521B1 (ko) 2002-03-04 2003-02-28 직선형 액츄에이터
DE60328586T DE60328586D1 (de) 2002-03-04 2003-02-28 Linear-betätigungsglied
EP03743534A EP1482630B1 (en) 2002-03-04 2003-02-28 Linear actuator
JP2003573770A JP4103799B2 (ja) 2002-03-04 2003-02-28 リニアアクチュエータ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002-058072 2002-03-04
JP2002058072 2002-03-04

Publications (1)

Publication Number Publication Date
WO2003075445A1 true WO2003075445A1 (fr) 2003-09-12

Family

ID=27784681

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2003/002373 WO2003075445A1 (fr) 2002-03-04 2003-02-28 Organe d'entraînement linéaire

Country Status (8)

Country Link
US (1) US6831393B2 (ja)
EP (1) EP1482630B1 (ja)
JP (1) JP4103799B2 (ja)
KR (1) KR100641521B1 (ja)
CN (1) CN1639956B (ja)
DE (1) DE60328586D1 (ja)
TW (1) TWI283102B (ja)
WO (1) WO2003075445A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011254587A (ja) * 2010-05-31 2011-12-15 Canon Inc 振動型駆動装置

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69936300T2 (de) * 1998-12-21 2008-06-19 Seiko Epson Corp. Piezoelektrischer aktor, uhrwerk und tragbares bauelement
JP2004166479A (ja) * 2002-06-14 2004-06-10 Seiko Epson Corp 回転型駆動装置およびこれを備えた装置
JP2004266943A (ja) * 2003-02-28 2004-09-24 Seiko Epson Corp 超音波モータ、稼働装置、光学系切換機構および電気機器
KR100534140B1 (ko) * 2004-06-23 2005-12-08 삼성전자주식회사 스테이지장치
GB0506358D0 (en) * 2004-09-29 2005-05-04 Nanomotion Ltd Assembly
EP1800470A2 (en) * 2004-09-29 2007-06-27 Nanomotion Ltd. Camera modules with lens drive device
US7208861B2 (en) * 2005-02-04 2007-04-24 Piezomotor Uppsala Ab Electromechanical drive element
JP4586754B2 (ja) * 2005-06-29 2010-11-24 セイコーエプソン株式会社 圧電アクチュエータの駆動量検出装置および電子機器
JP4791095B2 (ja) * 2005-07-06 2011-10-12 株式会社日立製作所 リニアアクチュエータ
CN101507094B (zh) * 2006-08-28 2012-05-23 松下电器产业株式会社 驱动装置
KR100817470B1 (ko) * 2006-10-24 2008-03-31 한국과학기술연구원 압전 선형 모터
DE102007021337A1 (de) * 2007-05-07 2008-11-13 Robert Bosch Gmbh Piezoelektrische Antriebsvorrichtung
GB2458146B (en) * 2008-03-06 2013-02-13 Nanomotion Ltd Ball-mounted mirror moved by piezoelectric motor
JP2009254190A (ja) * 2008-04-09 2009-10-29 Olympus Corp 超音波モータ
CN102067435B (zh) * 2008-07-17 2013-07-10 株式会社丰田自动织机 振动致动器
JP2010130889A (ja) * 2008-12-01 2010-06-10 Olympus Corp リニア駆動型超音波モータ
EP2237338A1 (de) 2009-04-03 2010-10-06 Leica Geosystems AG Piezo-Antrieb
CN101873079B (zh) * 2009-04-24 2013-09-04 阿尔卑斯电气株式会社 振动型致动器及其制造方法
JP5895154B2 (ja) 2011-01-21 2016-03-30 パナソニックＩｐマネジメント株式会社 リニアアクチュエータの駆動方法
DE102011087801B4 (de) * 2011-02-22 2013-04-25 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallmotor
JP5744670B2 (ja) * 2011-08-05 2015-07-08 キヤノン株式会社 超音波モータ及びそれを有するレンズ装置
EP2680334A1 (de) * 2012-06-28 2014-01-01 Leica Geosystems AG Piezo-Antrieb mit drehgelenkgelagertem Piezooszillator
JP6543951B2 (ja) * 2015-02-18 2019-07-17 セイコーエプソン株式会社 圧電駆動装置、ロボット、及び、それらの駆動方法
JP6592993B2 (ja) * 2015-07-07 2019-10-23 セイコーエプソン株式会社 圧電駆動装置及びロボット
CN107994806B (zh) * 2018-01-12 2019-09-10 长春工业大学 高精度压电粘滑旋转台及其驱动方法
KR20200114915A (ko) * 2019-03-29 2020-10-07 엘지디스플레이 주식회사 표시 장치

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH066101B2 (ja) * 1984-10-31 1994-01-26 オリンパス光学工業株式会社 内視鏡装置
JPH06233560A (ja) * 1993-02-03 1994-08-19 Olympus Optical Co Ltd 超音波アクチュエータ
JPH08237970A (ja) * 1995-02-28 1996-09-13 Olympus Optical Co Ltd 超音波アクチュエータ及びその駆動方法
JPH0937575A (ja) * 1995-07-18 1997-02-07 Nanomotion Ltd セラミックモータ
JPH1080162A (ja) * 1996-08-30 1998-03-24 Honda Electron Co Ltd 超音波リニアモータ

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JP2722211B2 (ja) 1988-07-30 1998-03-04 本多電子株式会社 超音波駆動装置
US5039899A (en) * 1989-02-28 1991-08-13 Brother Kogyo Kabushiki Kaisha Piezoelectric transducer
JPH0688680B2 (ja) * 1989-03-20 1994-11-09 輝 林 記録媒体搬送装置及びこの装置に用いられる圧電素子付枠体
US5087851A (en) * 1989-06-21 1992-02-11 Alps Electric Co., Ltd. Device for driving a part on a vehicle
US5191688A (en) * 1989-07-27 1993-03-09 Olympus Optical Co., Ltd. Method for producing a superior longitudinal vibrator
JPH066989A (ja) * 1992-06-15 1994-01-14 Olympus Optical Co Ltd 超音波リニアモータ
US5416375A (en) * 1992-06-15 1995-05-16 Olympus Optical Co., Ltd. Ultrasonic motor
JPH066101A (ja) 1992-06-18 1994-01-14 Nec Corp 通過帯域ろ波器取付基板
JP3245245B2 (ja) * 1993-02-05 2002-01-07 沖電気工業株式会社 超音波モータ及び超音波搬送装置
EP0633616B1 (en) 1993-07-09 2002-01-30 Nanomotion Ltd Ceramic motor
US5616980A (en) * 1993-07-09 1997-04-01 Nanomotion Ltd. Ceramic motor
US5682076A (en) * 1993-08-03 1997-10-28 Nanomotion Ltd. Ceramic disc-drive actuator
FR2709213B1 (fr) * 1993-08-18 1995-10-27 Figest Bv Moteur électrique à éléments vibrants et coupleur élastique.
JP3412648B2 (ja) * 1994-01-31 2003-06-03 株式会社ニコン 超音波モータ
JP2980541B2 (ja) 1994-06-28 1999-11-22 ナノモーション・リミテッド マイクロモータ
US6091179A (en) * 1994-11-09 2000-07-18 Nikon Corporation Vibration actuator drive device and method of use
US6218767B1 (en) * 1996-01-08 2001-04-17 Canon Kabushiki Kaisha Vibration device
JP2000060163A (ja) * 1998-02-10 2000-02-25 Nikon Corp 振動アクチュエ―タ
JP2001016879A (ja) 1999-06-30 2001-01-19 Minolta Co Ltd 超音波モータ及びその駆動方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH066101B2 (ja) * 1984-10-31 1994-01-26 オリンパス光学工業株式会社 内視鏡装置
JPH06233560A (ja) * 1993-02-03 1994-08-19 Olympus Optical Co Ltd 超音波アクチュエータ
JPH08237970A (ja) * 1995-02-28 1996-09-13 Olympus Optical Co Ltd 超音波アクチュエータ及びその駆動方法
JPH0937575A (ja) * 1995-07-18 1997-02-07 Nanomotion Ltd セラミックモータ
JPH1080162A (ja) * 1996-08-30 1998-03-24 Honda Electron Co Ltd 超音波リニアモータ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1482630A4 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011254587A (ja) * 2010-05-31 2011-12-15 Canon Inc 振動型駆動装置

Also Published As

Publication number Publication date
DE60328586D1 (de) 2009-09-10
US6831393B2 (en) 2004-12-14
KR100641521B1 (ko) 2006-10-31
EP1482630A1 (en) 2004-12-01
TWI283102B (en) 2007-06-21
CN1639956B (zh) 2010-12-08
JPWO2003075445A1 (ja) 2005-06-30
US20040090146A1 (en) 2004-05-13
JP4103799B2 (ja) 2008-06-18
EP1482630B1 (en) 2009-07-29
KR20040086473A (ko) 2004-10-08
TW200304269A (en) 2003-09-16
EP1482630A4 (en) 2006-04-05
CN1639956A (zh) 2005-07-13

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