WO2003059023A1 - Generateur de decharge luminescente a pression atmospherique et dispositif de neutralisation de charge - Google Patents

Generateur de decharge luminescente a pression atmospherique et dispositif de neutralisation de charge Download PDF

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Publication number
WO2003059023A1
WO2003059023A1 PCT/JP2002/013383 JP0213383W WO03059023A1 WO 2003059023 A1 WO2003059023 A1 WO 2003059023A1 JP 0213383 W JP0213383 W JP 0213383W WO 03059023 A1 WO03059023 A1 WO 03059023A1
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WO
WIPO (PCT)
Prior art keywords
electrode
atmospheric pressure
protruding
static eliminator
discharge
Prior art date
Application number
PCT/JP2002/013383
Other languages
English (en)
Japanese (ja)
Inventor
Atsushi Ohsawa
Original Assignee
National Institute Of Industrial Safety Independent Administrative Institution
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2001399040A external-priority patent/JP3507897B2/ja
Priority claimed from JP2002248042A external-priority patent/JP3507898B1/ja
Application filed by National Institute Of Industrial Safety Independent Administrative Institution filed Critical National Institute Of Industrial Safety Independent Administrative Institution
Publication of WO2003059023A1 publication Critical patent/WO2003059023A1/fr

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00—Carrying-off electrostatic charges
    • H05F3/04—Carrying-off electrostatic charges by means of spark gaps or other discharge devices

Definitions

  • the present invention relates to an atmospheric pressure glow discharge generator and a static eliminator, and more particularly, to an atmospheric pressure glow discharge electric generator for generating a stable glow discharge at atmospheric pressure and an atmospheric pressure generator using the same.
  • the present invention relates to a static eliminator that generates a stable glow discharge to neutralize the charge of a charged object.
  • Glow discharge is a discharge that occurs through a gas with a very low pressure, for example, about 1 Torr.
  • a discharge current of several mA to about 1 O mA flows, and is called glow. This is discharge accompanied by light emission. Conventionally, it has been difficult to generate this glow discharge in a stable state at atmospheric pressure.
  • the occurrence of electrification in the industrial field causes production failure, explosion and fire.
  • devices have broken down due to electrostatic discharge due to charging of devices, and fires and explosions have occurred due to electrostatic discharge due to charging of films, powders, etc. .
  • a static eliminator is used.
  • the static eliminator generates ions by any method, and neutralizes the charge by bombarding the charged object with an ion having a polarity opposite to that of the charged object to neutralize the charge.
  • corona discharge or ultraviolet light has been used as an ion source to generate ions, and a static eliminator using corona discharge is mainly used.
  • the present invention solves the conventional problems, and provides an atmospheric pressure glow discharge generator capable of generating a stable glow discharge at atmospheric pressure, and a glow discharge stable at atmospheric pressure using the generator.
  • An object of the present invention is to provide a static eliminator that generates a discharge, does not generate ozone, has a good ion balance, and can neutralize the electric charge of a charged object that requires precise ion balance control.
  • the present invention is an atmospheric pressure orifice discharge generator for generating a stable orifice discharge at atmospheric pressure, comprising: a projecting electrode having a projecting portion; and a small hole portion provided to face the projecting portion. And a power supply for supplying alternating current to the protruding electrodes.
  • the size of the small hole of the hollow electrode is 0.1 to 0.5 mm, and the distance between the protruding electrode and the hollow electrode is 0.2 mm or less. It is a glow discharge generator.
  • the present invention provides a static eliminator that generates a stable glow discharge at atmospheric pressure to neutralize the charge of a charged object, and is provided with a projection electrode having a projection, and opposed to the projection.
  • the static eliminator includes a hollow electrode having a small hole and a power supply for supplying an alternating current to be applied to the protruding electrode.
  • the present invention is a static eliminator that can include a grid electrode to which a control voltage is applied, on a side of the hollow electrode opposite to the protruding electrode.
  • the present invention includes a protruding electrode having a protruding portion, a hollow electrode having a small hole portion provided to face the protruding portion, and a power supply for supplying a voltage applied to the protruding electrode.
  • a neutralizing device that generates a stable glow discharge to neutralize the electric charge of the charged object, wherein the voltage supplied by the power source is a sinusoidal alternating current having a DC bias component. 3 It is preferable that the DC bias component of the voltage supplied by the power supply be a voltage of 150 to 200 V.
  • the present invention includes a projection electrode having a projection, a hollow electrode having a small hole provided facing the projection, and a power supply for supplying a voltage to be applied to the projection electrode.
  • a neutralizing device that generates a stable electric discharge and neutralizes the electric charge of the charged object, wherein the voltage supplied by the power source is a rectangular wave pulse having a pause portion.
  • the present invention is the static eliminator wherein the width of the rectangular wave pulse is such that the positive / negative duty ratio is 4 : 6 to 2: 8.
  • the present invention is the static eliminator wherein the rest portion of the rectangular pulse is 30 to 40% of one cycle.
  • FIG. 1 is an explanatory cross-sectional view of an electrode structure of an atmospheric pressure glow discharge generator of Example 1 according to the present invention.
  • FIG. 2 is an explanatory diagram of a discharge circuit of the atmospheric pressure glow discharge generator according to the first embodiment.
  • FIG. 3 is an explanatory diagram of an applied voltage, a discharge current, and a voltage waveform of the atmospheric pressure glow discharge generator of the first embodiment.
  • FIG. 4 is an explanatory diagram of the static elimination performance measurement in Example 2 according to the present invention.
  • FIG. 5 is an explanatory diagram of the static elimination performance of the static eliminator of the second embodiment.
  • FIG. 6 is an explanatory diagram of a test of a floating object in the second embodiment.
  • FIG. 7 is an explanatory diagram of a static eliminator according to a third embodiment of the present invention.
  • FIG. 8 is an explanatory diagram of a static eliminator according to a fourth embodiment of the present invention.
  • FIG. 9 is an explanatory diagram of an applied voltage, a discharge current, and a voltage waveform in the static eliminator of the fourth embodiment.
  • FIG. 10 is an explanatory diagram of an ion balance control result in the static eliminator of the fourth embodiment.
  • FIG. 11 shows the applied voltage, discharge current and voltage in the static eliminator of Embodiment 5 according to the present invention. 3383
  • FIG. 1 is an explanatory sectional view of an electrode structure of an atmospheric pressure glow discharge generator according to a first embodiment.
  • FIG. 2 is an explanatory diagram of a discharge circuit of the atmospheric pressure glow discharge generator according to the first embodiment.
  • FIG. 3 is an explanatory diagram of a discharge current and a voltage waveform of the atmospheric pressure glow discharge generator of the first embodiment.
  • FIG. 4 is an explanatory diagram of the static elimination performance measurement in the second embodiment.
  • FIG. 5 is an explanatory diagram of the static elimination performance of the static eliminator of the second embodiment.
  • FIG. 6 is an explanatory diagram of a test of a floating object in the second embodiment.
  • FIG. 1 is an explanatory sectional view of an electrode structure of an atmospheric pressure glow discharge generator according to a first embodiment.
  • FIG. 2 is an explanatory diagram of a discharge circuit of the atmospheric pressure glow discharge generator according to the first embodiment.
  • FIG. 3 is an explanatory diagram of a discharge current and a voltage waveform of the atmospheric pressure glow discharge generator
  • FIG. 7 is an explanatory diagram of the static eliminator of the third embodiment.
  • FIG. 8 is an explanatory diagram of the static eliminator of the fourth embodiment.
  • FIG. 9 is an explanatory diagram of applied voltages and the like in the static eliminator of the fourth embodiment.
  • FIG. 10 is an explanatory diagram of the ion balance control result in the static eliminator of the fourth embodiment.
  • FIG. 11 is an explanatory diagram of applied voltages and the like in the static eliminator of the fifth embodiment.
  • Example 1 will be described.
  • This embodiment is an example of an atmospheric pressure glow discharge generator, and has a protruding electrode 1, a hollow electrode 2, a power supply 41, and a discharge stabilizing resistor 51 as shown in FIGS. 1 and 2.
  • the projecting electrode 1 has a projecting portion 11 having a substantially triangular cross section.
  • the hollow electrode 2 has a small hole (hollow) 21 facing the protrusion 11.
  • the size d of the small hole portion 21 of the hollow electrode 2 is 0.5 mm or less, preferably 0.1 to 0.5 mm, and more preferably 0.3 mm.
  • the thickness of the hollow electrode 2 is about 0.1 mm.
  • the closest distance (interval) between the protruding electrode 1 and the hollow electrode 2 is preferably 0.2 mm or less, and more preferably 0.1 mm or less.
  • the power supply 41 supplies a voltage to be applied to the protruding electrode 1.
  • the applied voltage is an AC of about 50 OV, which is a low-voltage power supply compared to the use of corona discharge. Since the alternating current is used, electrode heating due to discharge pause is prevented, and transition to arc discharge can be prevented.
  • the voltage between the protruding electrode 1 and the hollow electrode 2 can be adjusted by the power supply 41 and the discharge stabilizing resistor 51.
  • the resistor 52 is used for measuring the current I.
  • an AC power supply 41 was used as a discharge drive method. However, when a direct current was used, a transition from a single discharge to an arc discharge was caused by electrode heating.
  • Example 2 will be described.
  • This embodiment is an example in which the atmospheric pressure glow discharge generator of the first embodiment (see FIGS. 1 and 2) is used as a static eliminator, and has the same configuration as that of the first embodiment. It has a hollow electrode 2, a power supply 41, and a discharge stabilization resistor 51. Reverse charging occurs with direct current, but does not occur with alternating current.
  • FIG. 4 The static elimination characteristics of the static eliminator of the second embodiment will be described.
  • a filter having a protruding electrode 1 and a mouth electrode 1 is used.
  • the static elimination performance for target 8 of the electric appliance was measured.
  • the measurement results can be obtained with the oscilloscope 93 and the personal computer 94.
  • Fig. 5 shows the obtained results.
  • FIG. 5A shows the characteristics when the target 8 is positively charged
  • FIG. 5B shows the characteristics when the target 8 is negatively charged. Regardless of whether the target 8 is positively or negatively charged, static electricity can be reliably removed.
  • a low-voltage power supply can be used, and a power supply of about 500 V or more can be used.
  • the use of corona discharge requires about 7 kV.
  • the ion balance is much better than using corona discharge. It can be used even when the charging degree is less than ⁇ 10 V. If a static eliminator with a poor ion balance is used, an uncharged object may be largely charged, or may be excessively neutralized and reversely charged to the opposite polarity.
  • Ozone-free, glow discharge does not generate ozone unlike corona discharge because the gas temperature is relatively high and the generated ozone is destroyed.
  • Example 3 will be described.
  • the static eliminator of the present embodiment is provided with a protruding electrode 1, a mouth electrode 2, a dalid electrode 3, a power supply 41, a grid potential applying section 42, and a discharge stabilizing resistor 51.
  • the third embodiment is different from the first and second embodiments in that a dalid electrode 3 and a grid potential applying unit 42 are provided.
  • the grid electrode 3 is provided on the surface of the hollow electrode 2 with respect to the protruding electrode 1, and a control voltage is applied from the Darled potential application unit 42.
  • the distance between the hollow electrode 2 and the grid electrode 3 is about 2 mm.
  • the applied voltage is a DC of about several volts.
  • the static eliminator of the third embodiment has the following features in addition to the features (1) to (5) of the second embodiment.
  • the static eliminator of the present embodiment is provided with a protruding electrode 1, a mouth electrode 2, a power supply 43, and a discharge stabilizing resistor 51.
  • the protrusion electrode 1 has a conical protrusion 11.
  • the hollow electrode 2 has a small hole (hollow) 21 facing the protrusion 11.
  • the diameter d of the small hole 21 of the hollow electrode 2 is 0.5 mm or less, preferably 0.1 mm. ⁇ 0.5 mm, more preferably 0.3 mm.
  • the thickness of the hollow electrode 2 is about 0.1 mm.
  • the closest distance (interval) between the protruding electrode 1 and the hollow electrode 2 is preferably 0.2 mm or less, and more preferably 0.1 mm or less.
  • the power supply 43 supplies a current to be applied to the bump electrode 1. The applied voltage and the like will be described later.
  • the discharge current can be adjusted by the power supply 43 and the discharge stabilizing resistor 51.
  • the resistor 52 is used for measuring the discharge current I.
  • the applied voltage waveform and the like in the static eliminator of the fourth embodiment will be described with reference to FIG.
  • the applied voltage is composed of an alternating current (sine wave) having a DC bias component as shown in curves 61 to 63 of the waveforms of the discharge voltage, discharge current and power supply in FIG.
  • the DC bias component is variable to control the ion balance, and is preferably 150 to 1200 V, and an example is 188 V. Since the applied voltage is about +600 to 180 V at the peak voltage, it can be used as a low-voltage power supply as compared with the use of corona discharge. In addition, electrode heating due to pause in discharge is prevented, and transition to arc discharge can be prevented.
  • FIG. 10 shows the result of the ion balance control in this embodiment.
  • Example 5 will be described.
  • the static eliminator of this embodiment has the same configuration as that of the fourth embodiment (see FIG. 8).
  • the applied voltage waveform and the like in this embodiment will be described with reference to FIG.
  • the applied voltage and the like are rectangular wave pulses having pauses as shown in curves 81 to 83 of the waveforms of the discharge voltage, discharge current and power supply in FIG.
  • the width of the rectangular pulse preferably has a positive / negative duty ratio of 4: 6 to 2: 8. Adjusting this ratio enables precise static elimination.
  • the pause portion of the square wave pulse stops the discharge and prevents transition to arc discharge due to cathode heating, and 30 to 40% of the entire pulse is suitable, an example of which is 1/3.
  • an atmospheric pressure mouth discharge generator capable of generating a stable glow discharge at atmospheric pressure, and a glow discharge stable at atmospheric pressure using the generator.
  • a neutralizer that does not generate ozone, has good ion balance, and neutralizes the charge of a charged object that requires precise ion balance control can be obtained.

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  • Elimination Of Static Electricity (AREA)

Abstract

L'invention concerne un générateur de décharge luminescente à pression atmosphérique permettant de générer une décharge luminescente stable à la pression atmosphérique, ainsi qu'un dispositif de neutralisation de charge comprenant ce générateur de décharge luminescente à pression atmosphérique et conçu pour neutraliser la charge d'un corps chargé nécessitant une commande précise de l'équilibre des ions, par génération d'une décharge luminescente à pression atmosphérique sans produire de l'ozone et avec une bon équilibre des ions. Ce générateur de décharge luminescente à pression atmosphérique comprend une électrode saillante (1) possédant une partie saillante (11), une électrode creuse (2) possédant un petit trou (21) opposé à la partie saillante (11), et une alimentation électrique (41) permettant de générer une tension alternative devant être appliquée sur l'électrode saillante (1). La taille du petit trou (21) est comprise entre 0,1 et 0,5 mm. La distance séparant l'électrode saillante (1) et l'électrode creuse (2) est égale ou inférieure à 0,2 mm. Lorsque l'alimentation électrique (41) applique une tension sur l'électrode saillante (1), une décharge luminescente stable est produite à la pression atmosphérique.
PCT/JP2002/013383 2001-12-28 2002-12-20 Generateur de decharge luminescente a pression atmospherique et dispositif de neutralisation de charge WO2003059023A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2001399040A JP3507897B2 (ja) 2001-12-28 2001-12-28 大気圧グロー放電発生器及び除電器
JP2001-399040 2001-12-28
JP2002248042A JP3507898B1 (ja) 2002-08-28 2002-08-28 除電器
JP2002-248042 2002-08-28

Publications (1)

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WO2003059023A1 true WO2003059023A1 (fr) 2003-07-17

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03230499A (ja) * 1989-03-07 1991-10-14 Takasago Thermal Eng Co Ltd イオン発生装置およびこれを用いた清浄空間内の帯電物品の除電設備
JPH0594078A (ja) * 1991-10-01 1993-04-16 Minolta Camera Co Ltd 帯電装置
JPH06231897A (ja) * 1993-02-05 1994-08-19 Seiko Epson Corp 静電気の除去方法およびその装置
JPH06275366A (ja) * 1993-03-22 1994-09-30 Takasago Thermal Eng Co Ltd 帯電物品の中和装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03230499A (ja) * 1989-03-07 1991-10-14 Takasago Thermal Eng Co Ltd イオン発生装置およびこれを用いた清浄空間内の帯電物品の除電設備
JPH0594078A (ja) * 1991-10-01 1993-04-16 Minolta Camera Co Ltd 帯電装置
JPH06231897A (ja) * 1993-02-05 1994-08-19 Seiko Epson Corp 静電気の除去方法およびその装置
JPH06275366A (ja) * 1993-03-22 1994-09-30 Takasago Thermal Eng Co Ltd 帯電物品の中和装置

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