WO2003035928A3 - Mechanisch und thermodynamisch stabile amorphe kohlenstoffschichten für temperaturempfindliche oberflächen - Google Patents

Mechanisch und thermodynamisch stabile amorphe kohlenstoffschichten für temperaturempfindliche oberflächen Download PDF

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Publication number
WO2003035928A3
WO2003035928A3 PCT/EP2002/011657 EP0211657W WO03035928A3 WO 2003035928 A3 WO2003035928 A3 WO 2003035928A3 EP 0211657 W EP0211657 W EP 0211657W WO 03035928 A3 WO03035928 A3 WO 03035928A3
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WO
WIPO (PCT)
Prior art keywords
mechanically
amorphous carbon
thermodynamically stable
carbon layers
stable amorphous
Prior art date
Application number
PCT/EP2002/011657
Other languages
English (en)
French (fr)
Other versions
WO2003035928A2 (de
Inventor
Udo Heinrich Grabowy
Heinz Werner Busch
Original Assignee
Nttf Gmbh
Udo Heinrich Grabowy
Heinz Werner Busch
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nttf Gmbh, Udo Heinrich Grabowy, Heinz Werner Busch filed Critical Nttf Gmbh
Priority to US10/493,683 priority Critical patent/US20040261702A1/en
Priority to EP02782949A priority patent/EP1438444A2/de
Priority to AU2002346944A priority patent/AU2002346944A1/en
Publication of WO2003035928A2 publication Critical patent/WO2003035928A2/de
Publication of WO2003035928A3 publication Critical patent/WO2003035928A3/de

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Materials For Medical Uses (AREA)
  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

Die Erfindung betrifft ein Verfahren zur Abscheidung mechanisch und thermodynamisch stabiler amorpher Kohlenstoffschichten mit Hilfe eines Niederdruckplasma-Abscheideverfahrens, insbesondere eines PE-CVD- oder kombinierten PVD-/PE-CVD-Prozesses, dadurch gekennzeichnet, dass die mittlere kinetische Energie pro deponiertem Kohlenstoffatom geringer als 20 eV, bevorzugt geringer als 10 eV und die Ionenstromdichte j geringer als 0,2 mA/cm2, bevorzugt geringer als 0,1 mA/cm2 ist.
PCT/EP2002/011657 2001-10-25 2002-10-18 Mechanisch und thermodynamisch stabile amorphe kohlenstoffschichten für temperaturempfindliche oberflächen WO2003035928A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US10/493,683 US20040261702A1 (en) 2001-10-25 2002-10-18 Mechanically and thermodynamically stable amorphous carbon layers for temperature-sensitive surfaces
EP02782949A EP1438444A2 (de) 2001-10-25 2002-10-18 Mechanisch und thermodynamisch stabile amorphe kohlenstoffschichten für temperaturempfindliche oberflächen
AU2002346944A AU2002346944A1 (en) 2001-10-25 2002-10-18 Mechanically and thermodynamically stable amorphous carbon layers for temperature-sensitive surfaces

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10152055.7 2001-10-25
DE10152055A DE10152055A1 (de) 2001-10-25 2001-10-25 Mechanisch und thermodynamisch stabile amorphe Kohlenstoffschichten für temperaturempfindliche Oberflächen

Publications (2)

Publication Number Publication Date
WO2003035928A2 WO2003035928A2 (de) 2003-05-01
WO2003035928A3 true WO2003035928A3 (de) 2003-12-24

Family

ID=7703290

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2002/011657 WO2003035928A2 (de) 2001-10-25 2002-10-18 Mechanisch und thermodynamisch stabile amorphe kohlenstoffschichten für temperaturempfindliche oberflächen

Country Status (5)

Country Link
US (1) US20040261702A1 (de)
EP (1) EP1438444A2 (de)
AU (1) AU2002346944A1 (de)
DE (1) DE10152055A1 (de)
WO (1) WO2003035928A2 (de)

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US8771343B2 (en) 2006-06-29 2014-07-08 Boston Scientific Scimed, Inc. Medical devices with selective titanium oxide coatings
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US20080069858A1 (en) * 2006-09-20 2008-03-20 Boston Scientific Scimed, Inc. Medical devices having biodegradable polymeric regions with overlying hard, thin layers
US7981150B2 (en) 2006-11-09 2011-07-19 Boston Scientific Scimed, Inc. Endoprosthesis with coatings
WO2008101704A2 (de) * 2007-02-23 2008-08-28 Technische Universität Kaiserslautern Plasmadeponiertes elektrisch isolierendes, diffusionsdichtes und elastisches schichtsystem
US8070797B2 (en) 2007-03-01 2011-12-06 Boston Scientific Scimed, Inc. Medical device with a porous surface for delivery of a therapeutic agent
US8431149B2 (en) 2007-03-01 2013-04-30 Boston Scientific Scimed, Inc. Coated medical devices for abluminal drug delivery
US8067054B2 (en) 2007-04-05 2011-11-29 Boston Scientific Scimed, Inc. Stents with ceramic drug reservoir layer and methods of making and using the same
US7976915B2 (en) 2007-05-23 2011-07-12 Boston Scientific Scimed, Inc. Endoprosthesis with select ceramic morphology
US8002823B2 (en) 2007-07-11 2011-08-23 Boston Scientific Scimed, Inc. Endoprosthesis coating
US7942926B2 (en) 2007-07-11 2011-05-17 Boston Scientific Scimed, Inc. Endoprosthesis coating
EP2187988B1 (de) 2007-07-19 2013-08-21 Boston Scientific Limited Endoprothese mit nicht verschmutzender oberfläche
US8815273B2 (en) 2007-07-27 2014-08-26 Boston Scientific Scimed, Inc. Drug eluting medical devices having porous layers
US7931683B2 (en) 2007-07-27 2011-04-26 Boston Scientific Scimed, Inc. Articles having ceramic coated surfaces
WO2009018340A2 (en) 2007-07-31 2009-02-05 Boston Scientific Scimed, Inc. Medical device coating by laser cladding
WO2009020520A1 (en) 2007-08-03 2009-02-12 Boston Scientific Scimed, Inc. Coating for medical device having increased surface area
BRPI0816493A2 (pt) * 2007-10-05 2019-02-26 3M Innovatie Properties Company sensor e método para detectar um analito químico orgânico e métodos de fabricação de um elemento de detecção de analito químico orgânico
US8029554B2 (en) 2007-11-02 2011-10-04 Boston Scientific Scimed, Inc. Stent with embedded material
US8216632B2 (en) 2007-11-02 2012-07-10 Boston Scientific Scimed, Inc. Endoprosthesis coating
US7938855B2 (en) 2007-11-02 2011-05-10 Boston Scientific Scimed, Inc. Deformable underlayer for stent
ES2423504T3 (es) 2008-04-22 2013-09-20 Boston Scientific Scimed, Inc. Dispositivos médicos que tienen un recubrimiento de material inorgánico
US8932346B2 (en) 2008-04-24 2015-01-13 Boston Scientific Scimed, Inc. Medical devices having inorganic particle layers
US8231980B2 (en) 2008-12-03 2012-07-31 Boston Scientific Scimed, Inc. Medical implants including iridium oxide
US8071156B2 (en) 2009-03-04 2011-12-06 Boston Scientific Scimed, Inc. Endoprostheses
US8287937B2 (en) 2009-04-24 2012-10-16 Boston Scientific Scimed, Inc. Endoprosthese
US8834560B2 (en) 2010-04-06 2014-09-16 Boston Scientific Scimed, Inc. Endoprosthesis
DE102015213259A1 (de) * 2015-07-15 2017-01-19 Schaeffler Technologies AG & Co. KG Kunststoffbauteil sowie Verfahren zur Herstellung eines Kunststoffbauteils
JP6956956B2 (ja) * 2017-08-08 2021-11-02 学校法人慶應義塾 細胞生産方法
KR102421199B1 (ko) 2021-11-29 2022-07-15 주식회사 이고진 워킹패드 충격흡수장치

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EP0259791A1 (de) * 1986-09-06 1988-03-16 Forschungszentrum Jülich Gmbh Verfahren zur Herstellung von Werkstücken mit einer Oberflächenschicht aus Kohlenstoff
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US3526005A (en) * 1967-06-29 1970-09-01 Gulf General Atomic Inc Method of preparing an intravascular defect by implanting a pyrolytic carbon coated prosthesis
EP0259791A1 (de) * 1986-09-06 1988-03-16 Forschungszentrum Jülich Gmbh Verfahren zur Herstellung von Werkstücken mit einer Oberflächenschicht aus Kohlenstoff
EP0388888A2 (de) * 1989-03-20 1990-09-26 Hitachi, Ltd. Metallorganischer makromolekularer synthetischer Harzverbundwerkstoff und Verfahren zu seiner Herstellung
US5190807A (en) * 1990-10-18 1993-03-02 Diamonex, Incorporated Abrasion wear resistant polymeric substrate product
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WO1996040308A1 (en) * 1995-06-07 1996-12-19 Southwest Research Institute Treatments to reduce thrombogeneticity in heart valves made from titanium and its alloys
WO1997038850A1 (en) * 1996-04-15 1997-10-23 Monsanto Company Highly durable and abrasion-resistant dielectric coatings for lenses
EP0876821A2 (de) * 1997-05-02 1998-11-11 Howmedica International Inc. Verfahren zur Verbesserung der Friktion am Anfang und bei kontinuierlicher Bewegung von elastisch weichen Polyurethanen
WO2001040537A1 (en) * 1999-11-30 2001-06-07 The Regents Of The University Of California Method for producing fluorinated diamond-like carbon films
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Title
See also references of EP1438444A2 *

Also Published As

Publication number Publication date
US20040261702A1 (en) 2004-12-30
AU2002346944A1 (en) 2003-05-06
DE10152055A1 (de) 2003-05-08
EP1438444A2 (de) 2004-07-21
WO2003035928A2 (de) 2003-05-01

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