WO2003028104A3 - Halbleiterspeicher mit einen vertikalen auswahltransistor umfassenden speicherzellen sowie verfahren zu seiner herstellung - Google Patents

Halbleiterspeicher mit einen vertikalen auswahltransistor umfassenden speicherzellen sowie verfahren zu seiner herstellung Download PDF

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Publication number
WO2003028104A3
WO2003028104A3 PCT/DE2002/002980 DE0202980W WO03028104A3 WO 2003028104 A3 WO2003028104 A3 WO 2003028104A3 DE 0202980 W DE0202980 W DE 0202980W WO 03028104 A3 WO03028104 A3 WO 03028104A3
Authority
WO
WIPO (PCT)
Prior art keywords
trench
production
word line
selection transistor
semiconductor memory
Prior art date
Application number
PCT/DE2002/002980
Other languages
English (en)
French (fr)
Other versions
WO2003028104A2 (de
Inventor
Joern Luetzen
Bernd Goebel
Dirk Schumann
Martin Gutsche
Harald Seidl
Martin Popp
Alfred Kersch
Werner Steinhoegl
Original Assignee
Infineon Technologies Ag
Joern Luetzen
Bernd Goebel
Dirk Schumann
Martin Gutsche
Harald Seidl
Martin Popp
Alfred Kersch
Werner Steinhoegl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies Ag, Joern Luetzen, Bernd Goebel, Dirk Schumann, Martin Gutsche, Harald Seidl, Martin Popp, Alfred Kersch, Werner Steinhoegl filed Critical Infineon Technologies Ag
Priority to JP2003531529A priority Critical patent/JP2005504440A/ja
Priority to EP02764546A priority patent/EP1423874A2/de
Priority to KR1020047003325A priority patent/KR100700365B1/ko
Publication of WO2003028104A2 publication Critical patent/WO2003028104A2/de
Publication of WO2003028104A3 publication Critical patent/WO2003028104A3/de
Priority to US10/792,742 priority patent/US6977405B2/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment
    • H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/03—Making the capacitor or connections thereto
    • H10B12/038—Making the capacitor or connections thereto the capacitor being in a trench in the substrate
    • H10B12/0383—Making the capacitor or connections thereto the capacitor being in a trench in the substrate wherein the transistor is vertical
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/39—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor and the transistor being in a same trench
    • H10B12/395—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor and the transistor being in a same trench the transistor being vertical
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/48—Data lines or contacts therefor
    • H10B12/488—Word lines
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment
    • H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/03—Making the capacitor or connections thereto
    • H10B12/038—Making the capacitor or connections thereto the capacitor being in a trench in the substrate
    • H10B12/0385—Making a connection between the transistor and the capacitor, e.g. buried strap

Abstract

Zur Herstellung eines Halbleiterspeichers (5) wird in einem ersten Graben (25) ein Grabenkondensator (30) angeordnet. Neben dem ersten Graben (25) wird ein erster Längsgraben (55) und parallel auf der anderen Seite des ersten Grabens (25) ein zweiter Längsgraben (60) in dem Substrat (15) angeordnet. In dem ersten Längsgraben (55) wird eine erste Spacer-Wortleitung (70) und in dem zweiten Längsgraben (60) eine zweite Spacer-Wortleitung (75) angeordnet. In dem ersten Graben (25) werden Verbindungsstege (80) zwischen der ersten Spacer-Wortleitung (70) und der zweiten Spacer-Wortleitung (75) angeordnet, die eine Dicke (110) aufweisen, die in Richtung der ersten Spacer-Wortleitung (70) kleiner ist als die Hälfte der Breite des ersten Grabens (25) in Richtung der ersten Spacer-Wortleitung (70).
PCT/DE2002/002980 2001-09-05 2002-08-14 Halbleiterspeicher mit einen vertikalen auswahltransistor umfassenden speicherzellen sowie verfahren zu seiner herstellung WO2003028104A2 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2003531529A JP2005504440A (ja) 2001-09-05 2002-08-14 垂直選択トランジスタを含むメモリーセルを備えた半導体メモリー、および、その製造方法
EP02764546A EP1423874A2 (de) 2001-09-05 2002-08-14 Halbleiterspeicher mit einen vertikalen auswahltransistor umfassenden speicherzellen sowie verfahren zu seiner herstellung
KR1020047003325A KR100700365B1 (ko) 2001-09-05 2002-08-14 수직 선택 트랜지스터를 포함하는 메모리 셀을 구비한 반도체 메모리 및 그 제조 방법
US10/792,742 US6977405B2 (en) 2001-09-05 2004-03-05 Semiconductor memory with memory cells comprising a vertical selection transistor and method for fabricating it

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10143650.5 2001-09-05
DE10143650A DE10143650A1 (de) 2001-09-05 2001-09-05 Halbleiterspeicher mit einen vertikalen Auswahltransistor umfassenden Speicherzellen sowie Verfahren zu seiner Herstellung

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US10/792,742 Continuation US6977405B2 (en) 2001-09-05 2004-03-05 Semiconductor memory with memory cells comprising a vertical selection transistor and method for fabricating it

Publications (2)

Publication Number Publication Date
WO2003028104A2 WO2003028104A2 (de) 2003-04-03
WO2003028104A3 true WO2003028104A3 (de) 2003-08-14

Family

ID=7697897

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2002/002980 WO2003028104A2 (de) 2001-09-05 2002-08-14 Halbleiterspeicher mit einen vertikalen auswahltransistor umfassenden speicherzellen sowie verfahren zu seiner herstellung

Country Status (7)

Country Link
US (1) US6977405B2 (de)
EP (1) EP1423874A2 (de)
JP (1) JP2005504440A (de)
KR (1) KR100700365B1 (de)
DE (1) DE10143650A1 (de)
TW (1) TW556341B (de)
WO (1) WO2003028104A2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10318625B4 (de) * 2003-04-24 2006-08-03 Infineon Technologies Ag Vertikale Speicherzelle und Verfahren zu deren Herstellung
TWI300975B (en) * 2006-06-08 2008-09-11 Nanya Technology Corp Method for fabricating recessed-gate mos transistor device
US20150112623A1 (en) * 2013-10-22 2015-04-23 United Microelectronics Corp. Structure for measuring doping region resistance and method of measuring critical dimension of spacer
CN113629061B (zh) * 2021-08-02 2023-10-13 中国科学院微电子研究所 Nor型存储器件及其制造方法及包括存储器件的电子设备
EP4216263A1 (de) 2021-08-23 2023-07-26 Changxin Memory Technologies, Inc. Speichervorrichtung und verfahren zur herstellung davon
CN116133375A (zh) * 2021-08-23 2023-05-16 长鑫存储技术有限公司 存储器件及其形成方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62140456A (ja) * 1985-12-16 1987-06-24 Toshiba Corp 半導体記憶装置
JPH01266756A (ja) * 1988-04-18 1989-10-24 Sony Corp 半導体メモリ
JPH0214563A (ja) * 1988-07-01 1990-01-18 Matsushita Electron Corp 半導体記憶装置
US5776836A (en) * 1996-02-29 1998-07-07 Micron Technology, Inc. Self aligned method to define features smaller than the resolution limit of a photolithography system
WO2001017015A1 (de) * 1999-08-31 2001-03-08 Infineon Technologies Ag Verfahren zur herstellung einer dram-zellenanordnung
DE10038728A1 (de) * 2000-07-31 2002-02-21 Infineon Technologies Ag Halbleiterspeicher-Zellenanordnung und Verfahren zu deren Herstellung

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07130871A (ja) 1993-06-28 1995-05-19 Toshiba Corp 半導体記憶装置
EP0899790A3 (de) 1997-08-27 2006-02-08 Infineon Technologies AG DRAM-Zellanordnung und Verfahren zu deren Herstellung
TW469599B (en) 1998-12-02 2001-12-21 Infineon Technologies Ag DRAM-cells arrangement and its production method
KR101140087B1 (ko) * 2002-06-13 2012-04-30 쓰리엠 이노베이티브 프로퍼티즈 캄파니 제어되는 인증서 생산 및 관리 시스템

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62140456A (ja) * 1985-12-16 1987-06-24 Toshiba Corp 半導体記憶装置
JPH01266756A (ja) * 1988-04-18 1989-10-24 Sony Corp 半導体メモリ
JPH0214563A (ja) * 1988-07-01 1990-01-18 Matsushita Electron Corp 半導体記憶装置
US5776836A (en) * 1996-02-29 1998-07-07 Micron Technology, Inc. Self aligned method to define features smaller than the resolution limit of a photolithography system
WO2001017015A1 (de) * 1999-08-31 2001-03-08 Infineon Technologies Ag Verfahren zur herstellung einer dram-zellenanordnung
DE10038728A1 (de) * 2000-07-31 2002-02-21 Infineon Technologies Ag Halbleiterspeicher-Zellenanordnung und Verfahren zu deren Herstellung

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 011, no. 367 (E - 561) 28 November 1987 (1987-11-28) *
PATENT ABSTRACTS OF JAPAN vol. 014, no. 032 (E - 876) 22 January 1990 (1990-01-22) *
PATENT ABSTRACTS OF JAPAN vol. 014, no. 156 (E - 0908) 26 March 1990 (1990-03-26) *

Also Published As

Publication number Publication date
KR20040033018A (ko) 2004-04-17
US20040201055A1 (en) 2004-10-14
TW556341B (en) 2003-10-01
WO2003028104A2 (de) 2003-04-03
US6977405B2 (en) 2005-12-20
DE10143650A1 (de) 2003-03-13
EP1423874A2 (de) 2004-06-02
JP2005504440A (ja) 2005-02-10
KR100700365B1 (ko) 2007-03-27

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