WO2003026361A1 - Dispositif de decharge a barriere dielectrique - Google Patents

Dispositif de decharge a barriere dielectrique Download PDF

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Publication number
WO2003026361A1
WO2003026361A1 PCT/JP2002/009081 JP0209081W WO03026361A1 WO 2003026361 A1 WO2003026361 A1 WO 2003026361A1 JP 0209081 W JP0209081 W JP 0209081W WO 03026361 A1 WO03026361 A1 WO 03026361A1
Authority
WO
WIPO (PCT)
Prior art keywords
discharge
dielectric barrier
lamp
circuit
resonance
Prior art date
Application number
PCT/JP2002/009081
Other languages
English (en)
Japanese (ja)
Inventor
Tadatomo Ohnoda
Original Assignee
Shin-Etsu Engineering Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Engineering Co., Ltd. filed Critical Shin-Etsu Engineering Co., Ltd.
Publication of WO2003026361A1 publication Critical patent/WO2003026361A1/fr

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
    • H05B41/14—Circuit arrangements
    • H05B41/24—Circuit arrangements in which the lamp is fed by high frequency ac, or with separate oscillator frequency

Definitions

  • the present invention relates to, for example, a dry cleaning apparatus for removing dirt of organic compounds adhering to the surface of a glass substrate such as a liquid crystal display or a silicon semiconductor wafer, and a photochemical reaction with ozone gas in the semiconductor manufacturing process.
  • the present invention relates to a discharge device of a dielectric barrier discharge excimer UV (ultraviolet) lamp which is used for an ashing device for peeling and removing a photoresist which has become unnecessary.
  • a dielectric barrier discharge lamp having a pair of electrodes disposed across a discharge space filled with a discharge gas for generating excimer molecules by dielectric barrier discharge.
  • the present invention relates to a dielectric barrier discharge device including a power supply device for applying a high frequency voltage between both electrodes of a lamp.
  • dielectric barrier discharge lamp a dielectric exists between a pair of electrodes across a space of a discharge plasma filled with a discharge gas, and the pair of electrodes using this dielectric as a medium is The current will flow by acting as a capacitor.
  • this dielectric barrier discharge lamp continues discharge with its capacitance characteristics during discharge, its capacitance is increased because the dielectric constant is higher than before discharge is started. However, they have the property that they do not change significantly during discharge.
  • the inventor of the present application has experimentally found that the resonance circuit including the dielectric barrier discharge lamp has the capacitance of the dielectric barrier discharge lamp before the start of discharge as shown in FIG. In this case, it is difficult to start the discharge even if a high voltage is applied between both electrodes at the resonance frequency in the case where the voltage is applied after reaching a predetermined frequency range, it is extremely easy. I found that the discharge started.
  • the capacitance before the discharge starts changes to a larger capacitance C 2 , so the resonance frequency fi before the discharge starts to the lower resonance frequency f 2 I also learned to move.
  • the invention according to claim 1 of the present invention aims to provide a dielectric barrier discharge device having high luminous efficiency.
  • the invention according to claim 2 is, in addition to the object of the invention according to claim 1, an object of the present invention is to easily detect an oscillation frequency range where discharge is easy to start by a simple operation. Disclosure of the invention
  • a resonant circuit including a dielectric barrier discharge excimer UV lamp, an oscillating means for setting the resonant circuit to an oscillation frequency region which is preset before discharge start of the lamp and which facilitates discharge start.
  • Trigger means for starting in the oscillation frequency range where discharge start is easy, detection means for detecting the resonant frequency of the resonant circuit after discharge start, and stable discharge continuation after discharge start detected by the detection means
  • changing means for changing the applied voltage to the resonance frequency of
  • the dielectric valya discharge used as an excitation source of the above-mentioned excimer UV lamp is said to include an aliased ozonizer discharge or a silent discharge (silent discharge) and a high frequency discharge by capacitive coupling as a method of applying a high frequency electric field.
  • the operation of the invention according to claim 1 resulting from such a configuration is that, in the state before the discharge start, the oscillation means sets the oscillation frequency region in which the discharge start is easy, and the lamp starts by the trigger means. After that, the detection means detects the resonance frequency of the resonant circuit after discharge, and the change means marks the voltage output to both electrodes at the resonance frequency of the stable discharge area after the discharge starts. Change the applied voltage.
  • the invention according to claim 2 is characterized in that, in the configuration according to the invention according to claim 1, the oscillation frequency range is a frequency range higher than the resonance frequency due to the capacitance of the resonance circuit before lamp discharge measured in advance. It is characterized in that
  • FIG. 1 is a circuit diagram of a dielectric barrier discharge device showing one embodiment of the present invention.
  • FIG. 2 is an explanatory view showing a relationship between a voltage between both electrodes and a resonance frequency.
  • a dielectric barrier discharge excimer UV lamp A has an internal electrode A1 disposed along the inner side of a quartz glass discharge vessel A3 formed in a hollow cylindrical shape and is provided on the outer side.
  • An external electrode A2 is disposed along the discharge space of the discharge vessel A3 and xenon gas is enclosed as discharge gas A4 so that excimer VUV (vacuum ultraviolet light) of 17 2 nm radiates radially. It shows the case of a double cylindrical structure.
  • a feeder B for applying a high frequency voltage between the two electrodes A 1 and A 2 is
  • a resonant circuit 1 including a dielectric barrier discharge excimer UV lamp A, and an oscillation means for setting the resonant circuit 1 into an oscillation frequency region f t which is previously set before the discharge start of the excimer UV lamp A.
  • a trigger 1 means 3 for starting in the oscillation frequency range f t where the discharge start is easy
  • a detection means 4 for detecting the resonance frequency of the resonant circuit 1 after the discharge start
  • detection means 4 A change means 5 is provided for changing the applied voltage to a resonance frequency for sustaining stable discharge after the start of discharge.
  • the resonance frequency: ⁇ by the capacitance of the resonance circuit 1 is measured and obtained in advance in a state before the excimer UV lamp A is discharged.
  • the oscillation means 2 is an oscillation circuit that oscillates an oscillation frequency range f t which facilitates discharge start higher than the resonance frequency in a state before the discharge start, and its output end is connected to the power amplifier 7 via the addition circuit 6. After being amplified by the power amplifier 7, the signal is output to both electrodes A 1 and A 2 through the resonant circuit 1.
  • the trigger means 2 is a trigger circuit that outputs a discharge start signal in an oscillation frequency range f t where discharge start by the oscillation means 2 is easy, and its output end is connected to the addition circuit 6, and from the trigger circuit Power amplifier 6 based on the output of The oscillation frequency domain: The voltage of f t is output to both electrodes A 1 and A 2 via the resonant circuit 1.
  • the detection means 4 comprises a detection circuit, and a coil is formed by the coil on the input side, the coil connected to the output end of the power amplifier 1b, and the inductance coil of the resonant circuit 1, The inductance L of the resonant circuit 1.
  • the oscillation circuit of the oscillation unit 2 the resonance point of the resonance circuit 1 is detected by the detection means 4 are fed back, the resonance frequency: ⁇ lower resonance frequency: switched oscillate f 2, which It is also a changing means 5 for changing the voltage output to both electrodes A 1 and A 2 to the resonance frequency f 2 for sustaining stable discharge after the start of discharge.
  • an attenuator 8 may be connected in the circuit of the power feeding device B, if necessary, to attenuate the signal passing therethrough to an appropriate amount.
  • the oscillation frequency region: f t which is easy to start discharge higher than the resonance frequency measured in advance by the oscillation circuit of the oscillation means 2 is set.
  • a trigger signal of trigger 1 means 3 outputs a discharge start signal to both electrodes Al and A2, whereby the discharge of the excimer UV lamp A is very easily started.
  • the resonance point of the resonance circuit 1 is detected by the detection means 4 after 1 second, for example, and the oscillation of the oscillation means 2 whose resonance frequency f 2 lower than the resonance frequency is also the change means 5 is fed back to the circuit, controls the oscillator so that the best resonance frequency f 2.
  • Range of the resonance frequency changing the voltage applied to f 2.
  • the light emission efficiency with respect to the input power is improved, whereby the heat generation can be suppressed even if the desired amount of light is obtained.
  • the dielectric barrier discharge used as an excitation source for the excimer UV lamp A is also known as an aliaser discharge or silent discharge, and a high frequency discharge by capacitive coupling as a method of applying a high frequency electric field.
  • the present invention can be used with either of the discharge methods.
  • the dielectric barrier discharge excimer UV lamp A has the internal electrode A1 disposed along the inside of the hollow cylindrical discharge vessel A3 and the external electrode A2 disposed along the outside.
  • the discharge vessel A 3 has a double cylindrical structure in which xenon gas is enclosed as discharge gas A 4, but the invention is not limited thereto.
  • the shape of the discharge vessel A 3 and both electrodes A 1 , A 2 arrangement position and discharge gas A 4 may be different.
  • the invention according to claim 1 of the present invention sets the oscillation frequency range in which the discharge can be easily started by the oscillation means, and the discharge of the lamp is started by the activation from the trigger one means.
  • the detecting means detects the resonant frequency of the resonant circuit after the discharge, and the changing means changes the voltage output to both electrodes to the resonant frequency of the stable discharge region after the discharge is started. It is possible to provide a dielectric barrier discharge device having high luminous efficiency.
  • the heat generation can be suppressed to obtain the desired light intensity, and the energy can be saved accordingly to miniaturize the power supply.
  • the resonance frequency due to the capacitance of the resonance circuit is measured in advance in the state before the lamp is discharged.
  • the frequency domain can be easily detected.

Landscapes

  • Circuit Arrangements For Discharge Lamps (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

L'invention concerne un dispositif de décharge à barrière diélectrique présentant une efficacité lumineuse élevée. Avant le début d'une décharge, une unité d'oscillation (2) fixe une fréquence d'oscillation (ft) facilitant le début de la décharge en vue de déclencher la décharge d'une lampe (A) par activation d'une unité de déclenchement (3). Ensuite, une unité de détection (4) détecte la fréquence de résonance (f2) d'un circuit résonant (1) après la décharge. Une unité modificatrice (5) règle une tension imposée de la sortie de tension vers chacune des électrodes (A1, A2) sur la fréquence de résonance (f2) d'une zone de décharge stable après le début de la décharge.
PCT/JP2002/009081 2001-09-14 2002-09-06 Dispositif de decharge a barriere dielectrique WO2003026361A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001279997A JP2005196969A (ja) 2001-09-14 2001-09-14 誘電体バリア放電装置
JP2001-279997 2001-09-14

Publications (1)

Publication Number Publication Date
WO2003026361A1 true WO2003026361A1 (fr) 2003-03-27

Family

ID=19104079

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/009081 WO2003026361A1 (fr) 2001-09-14 2002-09-06 Dispositif de decharge a barriere dielectrique

Country Status (3)

Country Link
JP (1) JP2005196969A (fr)
TW (1) TW569282B (fr)
WO (1) WO2003026361A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7906918B2 (en) 2005-09-15 2011-03-15 Koninklijke Philips Electronics N.V. Adaptive drive for dielectric barrier discharge (DBD) lamp

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0831585A (ja) * 1994-07-15 1996-02-02 Ushio Inc 誘電体バリア放電装置
US5623188A (en) * 1994-06-15 1997-04-22 Sgs-Thomson Microelectronics S.A. Method and apparatus for controlling an oscillating circuit of a low pressure fluorescent lamp
US5731652A (en) * 1995-03-08 1998-03-24 Nec Corporation Power source unit employing piezoelectric transformer frequency-controlled and voltage-controlled to operate at a maximum efficiency
US6285138B1 (en) * 1998-12-09 2001-09-04 Matsushita Electric Industrial Co., Ltd. Apparatus for lighting fluorescent lamp

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5623188A (en) * 1994-06-15 1997-04-22 Sgs-Thomson Microelectronics S.A. Method and apparatus for controlling an oscillating circuit of a low pressure fluorescent lamp
JPH0831585A (ja) * 1994-07-15 1996-02-02 Ushio Inc 誘電体バリア放電装置
US5731652A (en) * 1995-03-08 1998-03-24 Nec Corporation Power source unit employing piezoelectric transformer frequency-controlled and voltage-controlled to operate at a maximum efficiency
US6285138B1 (en) * 1998-12-09 2001-09-04 Matsushita Electric Industrial Co., Ltd. Apparatus for lighting fluorescent lamp

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7906918B2 (en) 2005-09-15 2011-03-15 Koninklijke Philips Electronics N.V. Adaptive drive for dielectric barrier discharge (DBD) lamp

Also Published As

Publication number Publication date
TW569282B (en) 2004-01-01
JP2005196969A (ja) 2005-07-21

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