WO2003017003A3 - Blende für eine integratoreinheit - Google Patents
Blende für eine integratoreinheit Download PDFInfo
- Publication number
- WO2003017003A3 WO2003017003A3 PCT/EP2002/008180 EP0208180W WO03017003A3 WO 2003017003 A3 WO2003017003 A3 WO 2003017003A3 EP 0208180 W EP0208180 W EP 0208180W WO 03017003 A3 WO03017003 A3 WO 03017003A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- diaphragm
- integrator unit
- symmetry
- axis
- integrator
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Electron Beam Exposure (AREA)
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP02754928A EP1417541A2 (de) | 2001-08-15 | 2002-07-23 | Blende für eine integratoreinheit |
US10/777,109 US6885434B2 (en) | 2001-08-15 | 2004-02-13 | Diaphragm for an integrator unit |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10138847.0 | 2001-08-15 | ||
DE10138847A DE10138847A1 (de) | 2001-08-15 | 2001-08-15 | Blende für eine Integratoreinheit |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/777,109 Continuation US6885434B2 (en) | 2001-08-15 | 2004-02-13 | Diaphragm for an integrator unit |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2003017003A2 WO2003017003A2 (de) | 2003-02-27 |
WO2003017003A3 true WO2003017003A3 (de) | 2004-01-22 |
Family
ID=7694734
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2002/008180 WO2003017003A2 (de) | 2001-08-15 | 2002-07-23 | Blende für eine integratoreinheit |
Country Status (5)
Country | Link |
---|---|
US (1) | US6885434B2 (de) |
EP (1) | EP1417541A2 (de) |
DE (1) | DE10138847A1 (de) |
TW (1) | TW565738B (de) |
WO (1) | WO2003017003A2 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009514007A (ja) * | 2005-10-27 | 2009-04-02 | オプティカ・リミテッド | 画像投写表示システム |
DE102008041288A1 (de) | 2007-09-28 | 2009-04-02 | Carl Zeiss Smt Ag | Beleuchtungssystem für eine Projektionsbelichtungsanlage mit Stabintegrator und Graufilter |
DE102009029132A1 (de) | 2009-09-02 | 2010-11-04 | Carl Zeiss Smt Ag | Beleuchtungssystem für eine Projektionsbelichtungsanlage für die Mikrolithographie mit Stabintegrator |
DE102009041405B4 (de) * | 2009-09-14 | 2020-08-20 | Carl Zeiss Smt Gmbh | Maskeninspektionsmikroskop mit variabler Beleuchtungseinstellung |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0633506A1 (de) * | 1993-06-11 | 1995-01-11 | Nikon Corporation | Abtastbelichtungsvorrichtung |
US5675401A (en) * | 1994-06-17 | 1997-10-07 | Carl-Zeiss-Stiftung | Illuminating arrangement including a zoom objective incorporating two axicons |
JPH11260716A (ja) * | 1998-03-13 | 1999-09-24 | Nikon Corp | 露光装置及び半導体デバイスの製造方法 |
JP2000243681A (ja) * | 1999-02-17 | 2000-09-08 | Nikon Corp | 投影露光装置及び該投影露光装置を用いた露光方法 |
EP1154330A2 (de) * | 2000-05-11 | 2001-11-14 | Nikon Corporation | Belichtungsverfahren und Belichtungsapparat |
US20020196419A1 (en) * | 2001-05-22 | 2002-12-26 | Satoru Mizouchi | Illumination apparatus, exposure apparatus, and device fabricating method using the same |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5719704A (en) * | 1991-09-11 | 1998-02-17 | Nikon Corporation | Projection exposure apparatus |
AU7921894A (en) | 1993-09-30 | 1995-04-18 | Cymer Laser Technologies | Full field mask illumination enhancement methods and apparatus |
US5473408A (en) | 1994-07-01 | 1995-12-05 | Anvik Corporation | High-efficiency, energy-recycling exposure system |
DE19548805A1 (de) | 1995-12-27 | 1997-07-03 | Zeiss Carl Fa | REMA-Objektiv für Mikrolithographie-Projektionsbelichtungsanlagen |
DE19653983A1 (de) | 1996-12-21 | 1998-06-25 | Zeiss Carl Fa | REMA-Objektiv für Mikrolithographie-Projektionsbelichtungsanlagen |
DE19855108A1 (de) | 1998-11-30 | 2000-05-31 | Zeiss Carl Fa | Mikrolithographisches Reduktionsobjektiv, Projektionsbelichtungsanlage und -Verfahren |
DE19942281A1 (de) | 1999-05-14 | 2000-11-16 | Zeiss Carl Fa | Projektionsobjektiv |
DE59913116D1 (de) | 1998-11-30 | 2006-04-20 | Zeiss Carl Smt Ag | Hochaperturiges projektionsobjektiv mit minimalem blendenfehler |
DE19855157A1 (de) | 1998-11-30 | 2000-05-31 | Zeiss Carl Fa | Projektionsobjektiv |
-
2001
- 2001-08-15 DE DE10138847A patent/DE10138847A1/de not_active Withdrawn
-
2002
- 2002-07-22 TW TW091116304A patent/TW565738B/zh not_active IP Right Cessation
- 2002-07-23 EP EP02754928A patent/EP1417541A2/de not_active Withdrawn
- 2002-07-23 WO PCT/EP2002/008180 patent/WO2003017003A2/de not_active Application Discontinuation
-
2004
- 2004-02-13 US US10/777,109 patent/US6885434B2/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0633506A1 (de) * | 1993-06-11 | 1995-01-11 | Nikon Corporation | Abtastbelichtungsvorrichtung |
US5675401A (en) * | 1994-06-17 | 1997-10-07 | Carl-Zeiss-Stiftung | Illuminating arrangement including a zoom objective incorporating two axicons |
JPH11260716A (ja) * | 1998-03-13 | 1999-09-24 | Nikon Corp | 露光装置及び半導体デバイスの製造方法 |
JP2000243681A (ja) * | 1999-02-17 | 2000-09-08 | Nikon Corp | 投影露光装置及び該投影露光装置を用いた露光方法 |
EP1154330A2 (de) * | 2000-05-11 | 2001-11-14 | Nikon Corporation | Belichtungsverfahren und Belichtungsapparat |
US20020196419A1 (en) * | 2001-05-22 | 2002-12-26 | Satoru Mizouchi | Illumination apparatus, exposure apparatus, and device fabricating method using the same |
Non-Patent Citations (3)
Title |
---|
"DIAPHRAGM AT QUARTZ-ROD ENTRANCE FOR I-LINE SCANNERS", RESEARCH DISCLOSURE, KENNETH MASON PUBLICATIONS, HAMPSHIRE, GB, no. 423, July 1999 (1999-07-01), pages 939, XP000888962, ISSN: 0374-4353 * |
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 14 22 December 1999 (1999-12-22) * |
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 12 3 January 2001 (2001-01-03) * |
Also Published As
Publication number | Publication date |
---|---|
US20040160591A1 (en) | 2004-08-19 |
EP1417541A2 (de) | 2004-05-12 |
DE10138847A1 (de) | 2003-02-27 |
US6885434B2 (en) | 2005-04-26 |
WO2003017003A2 (de) | 2003-02-27 |
TW565738B (en) | 2003-12-11 |
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