WO2003005381A1 - Structure conductrice presentant des caracteristiques de courant alternatif ameliorees - Google Patents

Structure conductrice presentant des caracteristiques de courant alternatif ameliorees Download PDF

Info

Publication number
WO2003005381A1
WO2003005381A1 PCT/EP2002/007432 EP0207432W WO03005381A1 WO 2003005381 A1 WO2003005381 A1 WO 2003005381A1 EP 0207432 W EP0207432 W EP 0207432W WO 03005381 A1 WO03005381 A1 WO 03005381A1
Authority
WO
WIPO (PCT)
Prior art keywords
conductor
sub
conductors
conductive structure
substructures
Prior art date
Application number
PCT/EP2002/007432
Other languages
German (de)
English (en)
Inventor
Matthias Peter
Original Assignee
Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung, E.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung, E.V. filed Critical Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung, E.V.
Priority to EP02782457A priority Critical patent/EP1405320A1/fr
Publication of WO2003005381A1 publication Critical patent/WO2003005381A1/fr
Priority to US12/077,164 priority patent/US20080230050A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5227—Inductive arrangements or effects of, or between, wiring layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type 
    • H01F17/0006—Printed inductances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00—Details of transformers or inductances, in general
    • H01F27/28—Coils; Windings; Conductive connections
    • H01F27/2804—Printed windings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/10—Inductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Definitions

  • the present invention relates to conductive structures and, in particular, conductive structures that have improved AC properties with respect to eddy current losses and skin effect.
  • the invention relates to planar conductors of this type which can advantageously be used in coils and transformers of integrated high-frequency circuits (MMICs).
  • a conventional planar coil is shown in FIG. 1 and comprises a coil conductor 10, which in the exemplary embodiment shown has 2% rectangular windings.
  • the coil conductor 10 comprises a conductor start 12 and a conductor end 14.
  • the same is carried out in an underpass area 16 on another level below the remaining coil conductor 10, so that no short circuit arises.
  • a large number of coil shapes are known in the art, the asymmetrical, square coil shown being merely an arbitrarily chosen example, while any other shapes are possible, for example octagonal, round, symmetrical or also stacked coil shapes.
  • a planar coil as shown for example in FIG. 1, is operated at high frequencies, eddy currents are induced in the coil lines by the magnetic field of the coil.
  • the losses of these eddy currents increase the resistance of the coil and the magnetic field generated by the eddy currents lowers the inductance of the coil. These losses are frequency dependent. Starting at low frequencies, the increase in resistance caused by them increases approximately linearly with the frequency in the frequency range of general interest.
  • the mentioned reduction in inductance caused by the eddy currents also increases with frequency, but is mostly negligible. Both effects reduce the quality of the coil. This reduction in quality is particularly troublesome for planar coils that are to be used in integrated circuits.
  • a common measure is to use an internally open coil with a larger radius and fewer windings, since the reduced number of windings means that the magnetic field is lower and thus the eddy currents.
  • the increased space requirement is disadvantageous. From an optimal radius, the resistance increases again with increasing radius, since a longer coil conductor is required because of the lower magnetic coupling.
  • a stripline inductor is known from WO 98/43258, which has one or more stripline windings, with reduced eddy current losses being achieved by dividing the conductor into a plurality of partial conductors.
  • the partial conductors are interchanged in order to further reduce the eddy current losses.
  • a reduction in the skin effect is not achieved with the stripline inductor according to WO 98/43258.
  • DE 19727758 A1 discloses a non-planar structure of a multiple parallel conductor for windings of electrical devices and machines, in which a plurality of individually electrically insulated partial conductors is provided.
  • the partial conductors are bent flat at predetermined intervals by bending, so that their position in the overall cross section of the multiple parallel conductor changes regularly at comparatively short intervals.
  • a printed coil is known from DE 2520934 B2, the inner windings of which have smaller conductor widths than the outer windings.
  • DE 19944741 AI discloses a monolithically integrated transformer, the primary winding and / or secondary Winding are each formed by a plurality of sub-conductors, with sub-conductors of the secondary winding being arranged between respective sub-conductors of the primary winding. Furthermore, the positions of the respective sub-conductors are interchanged by respective crossovers.
  • the object of the present invention is to provide a conductive structure with improved AC properties.
  • the present invention provides a conductive structure with the following features:
  • the positions of the substructures are interchanged by crossovers, so that the effect of the magnetic field generated by the alternating current flow, which affects an alternating current flow through the conductive partial structures, is reduced, or so that the alternating current flow through an external conductor, caused by the conductive structure, is reduced Effect of the magnetic field generated by the alternating current flow through the external conductor is reduced, and
  • the conductive structure has a plurality of at least three substructure positions corresponding to the number of at least three substructures and wherein the positions of the substructures are interchanged in sections are that each substructure occupies each substructure position at least once.
  • the conductive structure can be an alternating current-carrying conductor with a conductor beginning and a conductor end, the substructures representing sub-conductors.
  • the subconductors are preferably connected in an electrically conductive manner at the beginning and end of the conductor.
  • the sub-conductors can also be electrically conductively connected at a distance from the start and end of the conductor, for example via connecting lines and the like. The same applies to the substructures of the conductive structure according to the invention.
  • the present invention is based on the finding that by subdividing a conductor, for example a coil conductor, into subconductors, a significant reduction in eddy current losses can be achieved, since the sum of the losses of the narrow subconductors is less than the loss in / through the original wide ladder.
  • the conductors according to the invention are particularly suitable for high-frequency applications, the present invention being particularly suitable for producing flat coils and transformers.
  • the present invention can significantly reduce eddy current losses even with wide conductors. This enables planar coils with lower resistance at high frequencies and thus coils with a better quality factor.
  • the decrease in inductance that increases with frequency due to eddy currents is reduced, which also improves the quality factor.
  • the current distribution in the overall conductor is more homogeneous, as a result of which the maximum current density in the conductor becomes lower, so that a higher current is permissible for a predetermined maximum current density.
  • planar coils are realized using the conductor according to the invention, it is also possible to reduce the conductor track width of the sub-lines for the inner windings. Since the magnetic field of the coil is stronger inside, the inner windings have a greater inductance per length, which makes it sensible to use somewhat thinner conductors here, taking into account the increasing DC resistance. Eddy current losses in the case of a planar coil can thus be reduced even further.
  • the present invention provides a possibility of reducing the influence of a conductive structure, ie a conductive surface, on an AC-current-carrying conductor located in the vicinity thereof.
  • a conductive structure ie a conductive surface
  • the magnetic field generated by an alternating current flow in a conductor creates eddy currents in the adjacent conductive structure, which in turn increases the resistance in the alternating current conductor.
  • Such conductive structures can be, for example, ground areas present in integrated circuits or MMICs and wide or thick voltage supply lines.
  • the conductors or conductive structures according to the invention are also suitable for use in high-frequency external magnetic fields, since firstly the external magnetic field is less disturbed and secondly there is no increased current density at the conductor edges caused by the external magnetic field.
  • the present invention thus not only makes it possible to reduce the resistance in AC conductors through appropriate structuring thereof, but also enables structuring of non-AC conductive surfaces in order to reduce or eliminate their influence on an AC conductor when such conductors become conductive Area is located within the magnetic field generated by the AC current-carrying conductor.
  • FIG. 1 shows a schematic plan view of a known planar coil
  • FIG. 2 shows a schematic top view of an exemplary embodiment of a planar coil according to the invention
  • FIG. 3 shows a schematic top view of a transformer according to the prior art
  • 4 shows a schematic top view of an exemplary embodiment of a transformer according to the invention
  • 6 and 7 are schematic top views of exemplary embodiments of conductors according to the invention.
  • 8a and 8b are schematic cross-sectional views of conductors according to the invention.
  • FIG. 9 shows a schematic top view of a further exemplary embodiment of a planar coil according to the invention.
  • FIG. 10 shows a schematic plan view of a further exemplary embodiment of a conductor according to the invention or of a conductive structure according to the invention.
  • Fig. 11 is a schematic representation of an embodiment of a planar coil according to the invention. •
  • planar subconductor is to be understood in particular as conductor structures produced using planar technology. Such planar conductor structures can be implemented in a plurality of metallization levels as required in order to be able to cause crossings between conductors without causing short circuits between them.
  • FIG. 2 shows a schematic top view of a coil according to the invention, the number of windings and the shape of the coil substantially corresponding to the coil shown in FIG. 1.
  • the coil conductor is divided into a first sub-conductor 22 and a second sub-conductor 24.
  • a gap 26 is formed between the sub-conductors 22 and 24, it being advantageous to leave the smallest possible gap between the sub-conductors 22 and 24.
  • the two sub-conductors and the gap can together have an overall width which essentially corresponds to that of a corresponding conductor without subdivision, so that no space losses occur. This is particularly possible with modern semiconductor processes, since the minimum realizable distances are very small, which is why the overall width of the coil conductor is only slightly reduced by the subdivision.
  • the sub-conductors 22 and 24 run parallel to one another in sections, whereby it is to be understood here that the sub-conductors per se run parallel to one another, the mutually facing edges of the latter not necessarily having to run parallel to one another.
  • the sub-conductors 22 and 24 are connected to one another in an electrically conductive manner at a coil end 28 and at a coil start 30. Furthermore, the sub-conductors 22 and 24 are interchanged in sections with regard to their position with respect to an imaginary center line of the “overall conductor” formed by them, where the sub-conductors 22 and 24 run essentially parallel to one another.
  • FIG shown embodiment provided at each corner of the coil crossovers, four of which are exemplary with the loading numeral 32a, 32b, 32c and 32d are designated.
  • the crossovers which implement a respective swapping of the sub-conductors, are realized by respective underpasses over a different metal level, so that there is no short circuit.
  • the subconductor 22 is passed under the subconductor 24, while at the crossover points 32b and 32d the subconductor 24 is passed under the subconductor 22. Furthermore, an underpass area 34 is again provided for an underpass over another metal level in order to lead the coil end 30 out of the inside of the coil without short-circuiting.
  • a magnetic flux through the sub-conductors can be greatly reduced, so that in addition to the division of the entire conductor into sub-conductors, additional eddy currents between the sub-conductors are reduced or prevented.
  • the magnetic flux through the surfaces enclosed by the sub-conductors 22 and 24 is reduced.
  • a surface to be considered is formed in each case by two subconductor centers and successive crossovers between subconductors or electrically conductive connections between them.
  • the sub-conductors are exchanged according to the invention, so that the signs of the enclosed areas are reversed and thus the magnetic flux through the total area enclosed by the sub-conductors decreases.
  • the parasitic capacitance that arises at the crossings between the sub-conductors is hardly disadvantageous, since the sub-conductors are at almost the same potential.
  • the described reversal of the signs of the surfaces enclosed by the sub-conductors can in any case Reduction of the magnetic flux can be achieved through the total area. It does not matter whether the swapping takes place at a corner or in a straight line.
  • the magnetic field changes from the inside to the outside, so that it makes sense to choose the distances between the exchanges to be relatively short.
  • at least one "complete exchange” should be provided for each winding, ie revolution, the expression "complete exchange” being understood to mean such an arrangement of the sub-conductors to one another that the magnetic flux is approximately canceled out. Since the magnetic flux is eliminated in the first approximation with each complete swap, it is optionally possible to establish an electrical connection between the sub-conductors with each complete swap.
  • a coil conductor can be divided into N D parallel sub-conductors, where N o is a natural number greater than 1.
  • N ö is chosen to be as small as possible, but so large that the width of each subconductor becomes so narrow that no significant eddy current losses occur. For a conductor at 1 GHz, this would be, for example, 5 ⁇ m, but this is only a rough guide value, which is also dependent on the process used in each case.
  • Correspondingly narrower sub-conductors are suitable for higher frequencies.
  • the width of the lower conductor is in the order of the skin depth, although significant improvements can also be obtained for wider lower conductors.
  • the expression "complete exchange” is understood to mean such an arrangement of sub-conductors, according to which the magnetic flux is abolished in the first approximation or has been extinguished by the opposite sign of the partial areas.
  • the Length 1 which has two sub-conductors, can therefore be completely interchanged by changing the position between the sub-conductors at half length 1/2, so that the subareas then enclosed with the opposite sign have an identical size a single symmetrical interchange with two sub-conductors a complete interchange with an extinction of the magnetic flux through the total area enclosed by the sub-conductors, if a locally constant magnetic field is present.
  • the position de s change of sub conductor, d. H. of the change in the position of the subconductor can be adapted accordingly in order to in turn extinguish the magnetic flux.
  • an extinction related to a locally constant magnetic field is referred to as a zero order extinction
  • an extinction with consideration of a magnetic field gradient is referred to as a first order extinction.
  • the conductor is divided into more than two sub-conductors, it can be completely mixed up in several steps. If the gradient of the magnetic field is also to be observed, ie if 1st-order cancellation is to be effected, a complete reversal in partial steps is even necessary. With a locally constant In the magnetic field, all magnetic fluxes are completely extinguished by all combinations of sub-conductors with a single symmetrical exchange around the center of the conductor if the distances to the start and end of the conductor are the same before and after the exchange.
  • a first possibility is to interchange the sub-conductors at regular intervals, whereby regular here also means intervals that are caused by a regular pattern, for example a respective interchange at the coil corners, as shown in FIG. 2 ,
  • regular also means intervals that are caused by a regular pattern, for example a respective interchange at the coil corners, as shown in FIG. 2
  • the intervals of the exchanges, as shown in Fig. 2 decrease towards the inside.
  • a swap can take place symmetrically around the center of the conductor, with outer sub-conductors placed inside and inner sub-conductors placed outside. In the case of an odd number of subdivisions, the middle conductor then does not need to be interchanged, which results in zero-order cancellation.
  • a swap can be made using a rotation, for example from the inside out, with the outermost subconductor coming in while all the others are pushed out one position. With this procedure, a complete swap after Nrj partial swaps has been achieved.
  • first order cancellation can also be achieved by any other sum of exchanges in which
  • Planar transformers are two or more planar coils that are wrapped around one another or in one another in different ways.
  • a conductor path subdivision according to the invention or a swapping in accordance with preferred exemplary embodiments of the present invention can be applied to each of these individual coils.
  • FIG. 3 An exemplary embodiment of a transformer according to the prior art is shown in FIG. 3, in which a divided primary conductor 36 and a secondary conductor 38 are shown.
  • the secondary conductor 38 is interleaved to improve the magnetic coupling with the divided primary conductor 36, i.e. arranged between sub-conductors 40 and 42 of the primary conductor 36.
  • the subconductors 40 and 42 of the primary conductor 36 are connected to one another in an electrically conductive manner at the primary conductor ends 44 and 46.
  • the conductor end 46 of the primary conductor and the conductor end 50 of the secondary conductor are led out on another metal level by means of an underpass 51, so that no short circuit occurs.
  • a disadvantage of the arrangement shown in FIG. 3, however, is that the parasitic capacitive coupling increases. Since the primary conductor track also encloses a large area, a correspondingly large magnetic flux also flows through, which in turn induces eddy currents.
  • the disadvantages indicated are with regard to The eddy currents are reduced or prevented by interchanging the sub-conductors 40 and 42 of the primary winding, ie the primary conductor, as shown in FIG. 4.
  • the sub-conductor 40 is interchanged with the sub-conductor 42 at the middle corner between the conductor ends 44 and 46.
  • Corresponding underpasses 52 are again provided in order to prevent a short circuit.
  • each individual coil of a transformer that has a conductor according to the invention can be considered separately, wherein each conductor or sub-conductor shown in FIG. 4 can be divided into additional sub-conductors. Both the sub-conductors within each conductor or sub-conductor and the sub-conductors are then subjected to the above exchange rules. Then, for a complete suppression of the eddy currents, each sub-conductor will assume every position within its conductor in equal parts. A subconductor with respect to subconductor 42 would thus assume all subconductor positions within subconductors 40 and 42, which together form the primary conductor.
  • FIGS. 6 and 7 Two exemplary embodiments of such a conductor with skin effect loss suppression are shown in FIGS. 6 and 7, a section of a known conductor being illustrated in FIG. 5 in order to clarify that the conductors according to the invention have a width as a whole which is can essentially correspond to that of the known conductor.
  • the conductor according to the invention comprises four sub-conductors 60, 62, 64 and 66, which are each electrically connected to one another at the conductor ends 68 and 70, respectively.
  • a swap is provided in order to cancel the skin effect over the entire conductor section shown in FIG. 6.
  • an exchange is carried out separately for both halves of the conductor, i. H. the positions of the sub-conductors 60 and 62 are interchanged in the middle of the conductor section, and the positions of the sub-conductors 64 and 66 are interchanged in the center of the illustrated conductor section.
  • Corresponding underpasses 72 using different metallization levels are also shown schematically.
  • each sub-conductor at least once occupies each sub-conductor position of the half of the conductor to which the sub-conductor belongs.
  • the conductor according to the invention likewise comprises four sub-conductors 60, 62, 64 and 66, which in turn are connected to one another in an electrically conductive manner at the ends 68 and 70 of the conductor.
  • Corresponding underpasses 74 are again used to implement the exchanges.
  • the effect is used that the sign of the magnetic field reverses in the middle of the conductor.
  • FIGS. 8a and 8b two exemplary embodiments of lines according to the invention are now described in a vertical connection or arrangement, i. H. a planar arrangement over several metallization levels one above the other.
  • FIG. 8a shows a schematic cross-sectional view of a conductor which has two sub-conductors 80 and 82 which belong to different metallization levels and are therefore separated by an insulating substrate, which is shown schematically at 84.
  • vertical eddy currents can be reduced by corresponding interchanges, so that again a eddy current losses are reduced.
  • the example is disadvantageous in that eddy currents in the lateral direction of the subconductors 80 and 82 are not effectively suppressed.
  • FIG. 8b A more preferred embodiment in this regard is shown in FIG. 8b, in which the parallel conductors 80 and 82 shown in FIG. 8a are again subdivided into subconductors 80a, 80b and 82a, 82b.
  • the conductor 80a can now be interchanged with the conductor 80b and the conductor 82a with the conductor 82b. If the total thickness of a conductor track formed by the four sub-conductors 80a, 80b, 82a, 82b becomes so thick that not only eddy currents interfere in the horizontal but also in the vertical, a swap not only between the conductors of the individual, analogous to what has been described above Metallization levels, but also from top to bottom, i.e. H.
  • FIG. 9 A further exemplary embodiment of an application of the present invention to a planar coil is shown in FIG. 9.
  • FIG. 9 shows an octagonal planar coil in which the conductor with a conductor start 100 and a conductor end 102 between them is divided into three sub-conductors 104, 106 and 108. As shown, this coil is at the exchange points, which in turn are formed by underpasses, which are shown hatched in FIG. 9 and of which three are designated by way of example with the reference symbol 110, the innermost conductor is led outwards in order to achieve a rotation reversal. As shown, eight interchanges are provided so that each of the subconductors 104, 106, and 108 occupies approximately equal portions of each of the subconductor positions to effect substantially complete extinction of the magnetic flux through the areas occupied by the subconductors.
  • the sub-conductors are in turn electrically conductively connected to one another at the conductor start 100 and the conductor end 102, in this example the conductor no longer being in the region of the underpass 112, which is provided in order to lead the conductor end 102 out is divided.
  • FIG. 10 shows a further exemplary embodiment of a conductor structured according to the invention.
  • the conductor shown comprises four sub-conductors 120, 122, 124 and 126, which are connected in an electrically conductive manner at the beginning 128 and end 130.
  • three rotational exchanges 132 are provided, which define four conductor sections of equal length. This results in a complete swapping in the case of four sub-conductors in the conductor section shown, an electrically conductive connection being provided instead of the fourth swapping.
  • the conductor shown in FIG. 10 can now also be regarded as a conductive structure which does not have current flowing through it, for example a ground plane or voltage supply line of an integrated circuit.
  • This conductive structure can now be arranged in the vicinity of a conductor through which AC current flows, such a conductor 140 being indicated in FIG. 10.
  • the conductor 140 points through the provided in the conductive structure subdivisions and exchanges result in lower eddy current losses.
  • conductor 140 may be a portion of a coil.
  • the coil field generates eddy currents in the conductive structure, which can be a conductor that does not flow through alternating current per se or else also a conductor through which alternating current flows, which in turn cause disadvantageous effects in conductor 140.
  • eddy currents in the conductive structure can be a conductor that does not flow through alternating current per se or else also a conductor through which alternating current flows, which in turn cause disadvantageous effects in conductor 140.
  • these can be suppressed.
  • the above-mentioned swap rules can be observed again, with which the skin defect losses of the conductor itself can also be suppressed, for example, an exchange by rotating the conductor positions.
  • the quality factor of the conductor for example the coil
  • conductive surfaces e.g. Ground planes or voltage supply lines closer to AC lines can be provided without significantly affecting the behavior in the AC lines.
  • the current is distributed more evenly, which means that a larger current is permissible for a given maximum current density.
  • the present invention thus enables the implementation of low-loss lines both for use as transmission lines by reducing or suppressing skin effect losses and for use in coils or transformers by reducing or suppressing eddy current losses occurring there.
  • the present invention is particularly suitable for the realization of planar coils and transformers which are structured by be produced in a multi-layer structure, for example also in MCM-D technology.
  • the present invention is also suitable for the production of planar coils and transformers in integrated circuits, for example CMOS structures, BiCMOS structures, bipolar structures in silicon, GaAs or SiGe.
  • the present invention is suitable for the production of planar coils and transformers for high-frequency applications, for example in a frequency range from 1 GHz to 50 GHz.
  • the present invention is furthermore suitable for lines which are produced by structuring in multilayered layer structures, for example lines in integrated circuits of the abovementioned technologies, ie CMOS technologies, BiCMOS technologies and bipolar technologies in silicon, GaAs, AlGaAs or SiGe.
  • FIG. 11 Another embodiment of the present invention is shown in FIG. 11.
  • the planar coil shown there has a plurality of windings, namely 2 H, and corresponds in this respect to the known coil shown in FIG. 1. 11, however, the coil conductor is divided into two sub-conductors 200 and 202.
  • the subconductors 200 and 202 are electrically conductively connected at the coil start 204 and 206, but can also be electrically conductively connected externally using connecting conductors.
  • the subdivision of the coil conductor into subconductors is preferably carried out in such a way that the width defined by the two subconductors and the gap 208 between them essentially corresponds to the width of the original, undivided, coil conductor, as shown in FIG. 1.
  • the magnetic field of the coil shown in FIG. 11 has a first direction in the middle thereof, while it has an opposite direction in the outer region. This means that the sign of the magnetic flux changes from the inside out. So there is a reduction of the flow only by dividing the coil conductor without interchanging and / or connecting between sub-conductors.

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Coils Or Transformers For Communication (AREA)

Abstract

L'invention concerne une structure conductrice comprenant une partie initiale (128) et une partie terminale (130). Plusieurs sous-structures planes (120 - 124) sont disposées entre la partie initiale et la partie terminale sur au moins un substrat isolant, ces sous-structures étant parallèles les unes aux autres au moins par sections. Les positions des sous-structures sont permutées par sections par l'intermédiaire de croisements (132) de façon à réduire l'effet du champ magnétique généré par un flux de courant alternatif, cet effet altérant le flux de courant alternatif à travers les sous-structures conductrices, ou de façon à réduire l'effet, dû à la structure conductrice, du champ magnétique généré par le flux de courant alternatif à travers un conducteur externe, cet effet altérant le flux de courant alternatif à travers ledit conducteur externe. Cette structure conductrice comprend un nombre d'au moins trois positions de sous-structure correspondant au nombre d'au moins trois sous-structures, les positions des sous-structures étant permutées par sections de telle sorte que chaque sous-structure adopte au moins une fois chaque position de sous-structure.
PCT/EP2002/007432 2001-07-04 2002-07-04 Structure conductrice presentant des caracteristiques de courant alternatif ameliorees WO2003005381A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP02782457A EP1405320A1 (fr) 2001-07-06 2002-07-04 Structure conductrice presentant des caracteristiques de courant alternatif ameliorees
US12/077,164 US20080230050A1 (en) 2001-07-04 2008-03-17 Method for the physical treatment of starch (derivatives)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2001132847 DE10132847A1 (de) 2001-07-06 2001-07-06 Leiter und Spule mit verringerten Wirbelstromverlusten
DE10132847.8 2001-07-06

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/077,164 Continuation US20080230050A1 (en) 2001-07-04 2008-03-17 Method for the physical treatment of starch (derivatives)

Publications (1)

Publication Number Publication Date
WO2003005381A1 true WO2003005381A1 (fr) 2003-01-16

Family

ID=7690867

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2002/007432 WO2003005381A1 (fr) 2001-07-04 2002-07-04 Structure conductrice presentant des caracteristiques de courant alternatif ameliorees

Country Status (3)

Country Link
EP (1) EP1405320A1 (fr)
DE (1) DE10132847A1 (fr)
WO (1) WO2003005381A1 (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003096419A2 (fr) * 2002-05-08 2003-11-20 Infineon Technologies Ag Ensemble pistes conductrices integre
WO2007072282A2 (fr) * 2005-12-19 2007-06-28 Philips Intellectual Property & Standards Gmbh Enroulements primaire et secondaire entrelaces pour transformateur plan
CN102097198A (zh) * 2010-11-29 2011-06-15 番禺得意精密电子工业有限公司 组合式电感器
JP2013004973A (ja) * 2011-06-16 2013-01-07 Altera Corp 撚り合わされた導線を有する集積回路インダクター
JP2019075458A (ja) * 2017-10-16 2019-05-16 Tdk株式会社 コイル部品
JP2021097188A (ja) * 2019-12-19 2021-06-24 三安ジャパンテクノロジー株式会社 スパイラルインダクタ及びパッシブ集積回路
DE102021112455A1 (de) 2021-05-12 2022-11-17 Technische Universität Dresden, Körperschaft des öffentlichen Rechts Spulenanordnungen und Verfahren zum Herstellen einer Spulenanordnung

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4752879B2 (ja) * 2008-07-04 2011-08-17 パナソニック電工株式会社 平面コイル
DE102013226228A1 (de) * 2012-12-21 2014-06-26 Robert Bosch Gmbh Induktivladespulenvorrichtung
FR3140200A1 (fr) * 2022-09-26 2024-03-29 Irt Antoine De Saint Exupéry Câble méplat multi-couches avec permutations des couches pour la réalisation d’une bobine électrique

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04239106A (ja) * 1991-01-11 1992-08-27 Nippon Telegr & Teleph Corp <Ntt> インダクタンス素子
EP0762443A2 (fr) * 1995-09-07 1997-03-12 Kabushiki Kaisha Toshiba Dispositif magnétique planaire
JP2000114048A (ja) * 1998-10-05 2000-04-21 Kankyo Denji Gijutsu Kenkyusho:Kk コモンモードフィルタ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2520934C3 (de) * 1975-05-10 1982-07-08 Blaupunkt-Werke Gmbh, 3200 Hildesheim Gedruckte Spule
FI971180A (fi) * 1997-03-20 1998-12-23 Micronas Oy Stripe-line-kela
DE19727758A1 (de) * 1997-04-17 1998-10-22 Alsthom Cge Alcatel Mehrfachparallelleiter für Wicklungen elektrischer Geräte und Maschinen
JP2001085230A (ja) * 1999-09-14 2001-03-30 Murata Mfg Co Ltd インダクタ
DE19944741C2 (de) * 1999-09-17 2001-09-13 Siemens Ag Monolitisch integrierter Transformator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04239106A (ja) * 1991-01-11 1992-08-27 Nippon Telegr & Teleph Corp <Ntt> インダクタンス素子
EP0762443A2 (fr) * 1995-09-07 1997-03-12 Kabushiki Kaisha Toshiba Dispositif magnétique planaire
JP2000114048A (ja) * 1998-10-05 2000-04-21 Kankyo Denji Gijutsu Kenkyusho:Kk コモンモードフィルタ

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 017, no. 006 (E - 1302) 7 January 1993 (1993-01-07) *
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 07 29 September 2000 (2000-09-29) *
See also references of EP1405320A1 *

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003096419A2 (fr) * 2002-05-08 2003-11-20 Infineon Technologies Ag Ensemble pistes conductrices integre
WO2003096419A3 (fr) * 2002-05-08 2004-07-22 Infineon Technologies Ag Ensemble pistes conductrices integre
US7550854B2 (en) 2002-05-08 2009-06-23 Infineon Technologies Ag Integrated interconnect arrangement
WO2007072282A2 (fr) * 2005-12-19 2007-06-28 Philips Intellectual Property & Standards Gmbh Enroulements primaire et secondaire entrelaces pour transformateur plan
WO2007072282A3 (fr) * 2005-12-19 2007-10-11 Philips Intellectual Property Enroulements primaire et secondaire entrelaces pour transformateur plan
US7746208B2 (en) 2005-12-19 2010-06-29 Koninklijke Philips Electronics N.V. Interleaved planar transformer primary and secondary winding
CN102097198A (zh) * 2010-11-29 2011-06-15 番禺得意精密电子工业有限公司 组合式电感器
JP2013004973A (ja) * 2011-06-16 2013-01-07 Altera Corp 撚り合わされた導線を有する集積回路インダクター
JP2019075458A (ja) * 2017-10-16 2019-05-16 Tdk株式会社 コイル部品
JP7062914B2 (ja) 2017-10-16 2022-05-09 Tdk株式会社 コイル部品
JP2021097188A (ja) * 2019-12-19 2021-06-24 三安ジャパンテクノロジー株式会社 スパイラルインダクタ及びパッシブ集積回路
JP7430376B2 (ja) 2019-12-19 2024-02-13 三安ジャパンテクノロジー株式会社 スパイラルインダクタ及びパッシブ集積回路
DE102021112455A1 (de) 2021-05-12 2022-11-17 Technische Universität Dresden, Körperschaft des öffentlichen Rechts Spulenanordnungen und Verfahren zum Herstellen einer Spulenanordnung

Also Published As

Publication number Publication date
EP1405320A1 (fr) 2004-04-07
DE10132847A1 (de) 2003-01-30

Similar Documents

Publication Publication Date Title
DE102010048302B4 (de) Induktivitätsanordnung und integrierte Schaltung mit derselben
DE19944741C2 (de) Monolitisch integrierter Transformator
DE10260246B4 (de) Spulenanordnung mit veränderbarer Induktivität
EP1249025B1 (fr) Bobine et systeme de bobine a integrer dans un circuit micro-electronique et circuit micro-electronique correspondant
DE3912840A1 (de) Suchspulenanordnung fuer ein induktives suchgeraet
DE19527921A1 (de) Doppelseitige HF-Abschirmung für eine Spule in Gradienten-Spulen für Hochgeschwindigkeits MR-Bildgebung
DE102006022785A1 (de) Induktives Bauelement und Verfahren zum Herstellen eines induktiven Bau-elements
DE19504171C2 (de) Trennbare, lokale Gradientenspulenanordnung für Kernspintomographiegeräte
DE102012108056A1 (de) Spiralförmige Gradientenspule für Magnetresonanzbildgebungsgerät
DE102018113765B4 (de) Transformator mit einer durchkontaktierung für einen magnetkern
WO2003005381A1 (fr) Structure conductrice presentant des caracteristiques de courant alternatif ameliorees
DE3851831T2 (de) Symmetrischer planarer Übertrager.
DE3402498C2 (fr)
DE102016123920A1 (de) Induktive Komponente für die Verwendung in einer integrierten Schaltung, Transformator und Induktor, die als Teil einer integrierten Schaltung ausgebildet sind
DE102013009588A1 (de) Transformator und Verfahren zur Anbringung von Wicklungen
WO1996009631A1 (fr) Conducteur d&#39;amenee de courant en sortie de la feuille conductrice de l&#39;enroulement en feuille d&#39;un transformateur de puissance
DE4306416A1 (de) Spulenstruktur für eine Leiterplattenanordnung
EP2863403B1 (fr) Transformateur
DE3882626T2 (de) Transformator.
DE102005014929B4 (de) Integrierte Spule und integrierter Transformator
DE10261385A1 (de) Monolithisch integrierter Transformator
DE2418706A1 (de) Mehrstufennetzwerk, insbesondere verzoegerungsleitung
DE3901098C1 (en) Multiphase bar winding for electrical machine - has special crossing rods to connect strands in upper and lower grooves
WO2007036323A1 (fr) Circuit integre comprenant au moins une ligne de transmission integree
DE202019102273U1 (de) Induktives Bauelement

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): JP US

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LU MC NL PT SE SK TR

121 Ep: the epo has been informed by wipo that ep was designated in this application
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
WWE Wipo information: entry into national phase

Ref document number: 2002782457

Country of ref document: EP

WWP Wipo information: published in national office

Ref document number: 2002782457

Country of ref document: EP

NENP Non-entry into the national phase

Ref country code: JP

WWW Wipo information: withdrawn in national office

Country of ref document: JP

WWW Wipo information: withdrawn in national office

Ref document number: 2002782457

Country of ref document: EP