WO2002079549A3 - Preparation of 157nm transmitting barium fluoride crystals with permeable graphite - Google Patents

Preparation of 157nm transmitting barium fluoride crystals with permeable graphite Download PDF

Info

Publication number
WO2002079549A3
WO2002079549A3 PCT/US2002/009803 US0209803W WO02079549A3 WO 2002079549 A3 WO2002079549 A3 WO 2002079549A3 US 0209803 W US0209803 W US 0209803W WO 02079549 A3 WO02079549 A3 WO 02079549A3
Authority
WO
WIPO (PCT)
Prior art keywords
crystal
crucible
oxide
preparation
barium fluoride
Prior art date
Application number
PCT/US2002/009803
Other languages
French (fr)
Other versions
WO2002079549A2 (en
Inventor
Michele M L Meyer-Fredholm
Michael A Pell
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Priority to JP2002577949A priority Critical patent/JP2004526654A/en
Priority to DE10296589T priority patent/DE10296589T5/en
Priority to AU2002255986A priority patent/AU2002255986A1/en
Publication of WO2002079549A2 publication Critical patent/WO2002079549A2/en
Publication of WO2002079549A3 publication Critical patent/WO2002079549A3/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
    • C30B11/002—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/12—Halides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)

Abstract

The object of the present invention is a process of preparing an optical fluoride crystal containing barium fluoride, which comprises loading a crucible with a barium fluorine starting material crystal feedstock which contains at least one oxide as impurity, and an effective and non-excess amount of at least one fluorinating agent which is solid at ambient temperature, melting said mixture within said crucible, growing the crystal, by controlled cooling of the molten mixture, controlled cooling of said crystal to ambient temperature, recovering said crystal; and which is characterised in that the oxide(s) resulting from the reaction between said fluorinating agent(s) and said oxide(s), the impurity or impurities, can be discharged from said crucible, in view of the intrinsic permeability of the material constituting it. Said process is particularly adapted for preparing 157 nm transmitting lithography excimer laser optical fluoride crystals in graphite crucibles.
PCT/US2002/009803 2001-03-29 2002-03-28 Preparation of 157nm transmitting barium fluoride crystals with permeable graphite WO2002079549A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2002577949A JP2004526654A (en) 2001-03-29 2002-03-28 Preparation of Barium Fluoride Crystal Transmitting Light of 157 nm Wavelength Using Transmissive Graphite
DE10296589T DE10296589T5 (en) 2001-03-29 2002-03-28 Production of barium fluoride crystals with permeable graphite that transmits at 157 nm
AU2002255986A AU2002255986A1 (en) 2001-03-29 2002-03-28 Preparation of 157nm transmitting barium fluoride crystals with permeable graphite

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR01/04232 2001-03-29
FR0104232A FR2822853B1 (en) 2001-03-29 2001-03-29 PREPARATION OF (MONO) CRYSTALS

Publications (2)

Publication Number Publication Date
WO2002079549A2 WO2002079549A2 (en) 2002-10-10
WO2002079549A3 true WO2002079549A3 (en) 2003-02-13

Family

ID=8861679

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/EP2002/002460 WO2002079550A1 (en) 2001-03-29 2002-03-06 Process for preparing fluoride monocrystals
PCT/US2002/009803 WO2002079549A2 (en) 2001-03-29 2002-03-28 Preparation of 157nm transmitting barium fluoride crystals with permeable graphite

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/EP2002/002460 WO2002079550A1 (en) 2001-03-29 2002-03-06 Process for preparing fluoride monocrystals

Country Status (8)

Country Link
US (4) US6669778B2 (en)
EP (1) EP1373602A1 (en)
JP (2) JP2004531444A (en)
AU (1) AU2002255986A1 (en)
DE (1) DE10296589T5 (en)
FR (1) FR2822853B1 (en)
TW (2) TWI236507B (en)
WO (2) WO2002079550A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7660621B2 (en) 2000-04-07 2010-02-09 Medtronic, Inc. Medical device introducer
FR2822853B1 (en) * 2001-03-29 2003-06-27 Corning Inc PREPARATION OF (MONO) CRYSTALS
RU2001111055A (en) * 2001-04-16 2003-04-10 Репкина Тать на Александровна MULTI-SECTION CONTAINER FOR GROWING CALCIUM FLUORIDE SINGLE CRYSTALS
US7704260B2 (en) 2002-09-17 2010-04-27 Medtronic, Inc. Low profile instrument immobilizer
EP1475464A1 (en) * 2003-05-06 2004-11-10 Corning Incorporated Method for producing an optical fluoride crystal
WO2005079903A2 (en) 2004-02-13 2005-09-01 Medtronic, Inc. Methods and apparatus for securing a therapy delivery device within a burr hole
DE102004008752A1 (en) * 2004-02-23 2005-09-08 Schott Ag Production of large volume CaF 2 single crystals for use as optical devices with an optical axis parallel to the (100) or (110) crystal axis
FR2869327A1 (en) * 2004-04-22 2005-10-28 Univ Claude Bernard Lyon CUPPER AND METHOD OF GROWING MASSIVE CRYSTALS AND, IN PARTICULAR, CAF2 MONOCRYSTALS
US20050241570A1 (en) * 2004-04-22 2005-11-03 Kherreddine Lebbou Crucible and method for growing large crystals, in particular CaF2 monocrystals
DE102005059531A1 (en) * 2005-12-13 2007-06-14 Schott Ag Preparation of highly pure, preferably radiation-stable large volume single crystals, useful in e.g. lenses, comprises producing a melt obtained from crystal raw material and controlled cooling under solidification
DE102010044017B4 (en) * 2010-11-17 2013-06-20 Carl Zeiss Smt Gmbh Process for the preparation of alkali or alkaline earth fluoride crystals and crystals produced by the process
CN114180612A (en) * 2021-12-09 2022-03-15 安徽光智科技有限公司 Preparation method of high-purity barium fluoride of optical material

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6061174A (en) * 1997-03-18 2000-05-09 Nikon Corporation Image-focusing optical system for ultraviolet laser
US6375551B1 (en) * 1999-06-25 2002-04-23 Corning Incorporated Angstrom polishing of calcium fluoride optical VUV microlithography lens elements and preforms

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1374909A (en) * 1918-05-31 1921-04-19 Lava Crucible Company Of Pitts Method of making graphite crucibles
US3655354A (en) * 1968-05-23 1972-04-11 Union Carbide Corp Graphite crucibles for use in producing high quality quartz
KR930004506A (en) * 1991-08-29 1993-03-22 티모티 엔. 비숍 Glassy Carbon Coated Graphite Components Used to Grow Silicon Crystals
EP0671490B1 (en) * 1994-03-11 1998-12-16 Sumitomo Electric Industries, Ltd. Method of and crucible for preparing compound semiconductor crystal
US5911824A (en) * 1997-12-16 1999-06-15 Saint-Gobain Industrial Ceramics, Inc. Method for growing crystal
DE19835613C2 (en) * 1997-01-13 2002-12-12 Aisin Seiki Electrically conductive resin composition and its use for the production of molded resin parts
JPH10279396A (en) * 1997-03-31 1998-10-20 Canon Inc Apparatus for production of fluoride crystal
JP3475407B2 (en) * 1997-03-31 2003-12-08 キヤノン株式会社 Apparatus and method for producing fluoride crystal and crucible
CA2240695A1 (en) * 1997-06-18 1998-12-18 Saburou Tanaka Method of manufacturing multiple-piece graphite crucible
JP4154744B2 (en) * 1997-12-01 2008-09-24 株式会社ニコン Calcium fluoride crystal production method and raw material treatment method
US6201634B1 (en) * 1998-03-12 2001-03-13 Nikon Corporation Optical element made from fluoride single crystal, method for manufacturing optical element, method for calculating birefringence of optical element and method for determining direction of minimum birefringence of optical element
JP3631063B2 (en) * 1998-10-21 2005-03-23 キヤノン株式会社 Method for purifying fluoride and method for producing fluoride crystal
JP4072269B2 (en) * 1999-01-22 2008-04-09 キヤノン株式会社 Method for producing fluoride
US6200385B1 (en) * 2000-03-20 2001-03-13 Carl Francis Swinehart Crucible for growing macrocrystals
US6277351B1 (en) * 2000-03-20 2001-08-21 Carl Francis Swinehart Crucible for growing macrocrystals
US6860942B2 (en) * 2001-03-29 2005-03-01 Corning Incorporated Preparation of crystals
FR2822853B1 (en) * 2001-03-29 2003-06-27 Corning Inc PREPARATION OF (MONO) CRYSTALS
FR2828933A1 (en) * 2001-08-27 2003-02-28 Corning Inc Determination of the optical quality of a fluoride monocrystal by irradiating a volume element with hard X-rays following a given family of crystalline planes
US6669920B2 (en) * 2001-11-20 2003-12-30 Corning Incorporated Below 160NM optical lithography crystal materials and methods of making
DE10297547T5 (en) * 2001-12-13 2004-11-04 Corning Incorporated UV-optical fluoride crystal elements for laser lithography with λ <200nm and method thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6061174A (en) * 1997-03-18 2000-05-09 Nikon Corporation Image-focusing optical system for ultraviolet laser
US6375551B1 (en) * 1999-06-25 2002-04-23 Corning Incorporated Angstrom polishing of calcium fluoride optical VUV microlithography lens elements and preforms

Also Published As

Publication number Publication date
TWI227754B (en) 2005-02-11
WO2002079549A2 (en) 2002-10-10
EP1373602A1 (en) 2004-01-02
JP2004526654A (en) 2004-09-02
US6855203B2 (en) 2005-02-15
TWI236507B (en) 2005-07-21
US6669778B2 (en) 2003-12-30
JP2004531444A (en) 2004-10-14
US20050115490A1 (en) 2005-06-02
FR2822853B1 (en) 2003-06-27
DE10296589T5 (en) 2004-04-22
US20040089223A1 (en) 2004-05-13
AU2002255986A1 (en) 2002-10-15
WO2002079550A1 (en) 2002-10-10
US7276219B2 (en) 2007-10-02
US20030066477A1 (en) 2003-04-10
US20020189527A1 (en) 2002-12-19
FR2822853A1 (en) 2002-10-04

Similar Documents

Publication Publication Date Title
KR100818679B1 (en) Quartz glass crucible and method for the production thereof
JP4584710B2 (en) Method for treating rare earth chloride, bromide or iodide in a carbon-containing crucible
US6364946B2 (en) Methods for growing large-volume single crystals from calcium fluoride and their uses
WO2002079549A3 (en) Preparation of 157nm transmitting barium fluoride crystals with permeable graphite
US6755049B2 (en) Method of producing a quartz glass crucible
JP3707750B2 (en) Method for producing calcium fluoride crystals
KR20020048947A (en) Beads of a polycrystalline alkali-metal or alkaline-earth metal fluoride, their preparation, and their use
JP4803784B2 (en) Method for producing quartz glass crucible for pulling silicon single crystal
US20060249072A1 (en) Method of synthesizing a fluoride growth material for improved outgassing
Armington et al. Strengthening of halides for infrared windows
Voda et al. Crystal growth of rare-earth-doped ternary potassium lead chloride single crystals by the Bridgman method
US6802901B2 (en) Method of making high purity optical fluoride crystals
US20030019420A1 (en) Seed crystal for epitaxial growth of single-crystal calcium fluoride
KR20060015524A (en) Apparatus for producing fluoride crystal
EP1666644B1 (en) Method for producing crystal of fluoride
JPH10203899A (en) Fluorite little in alkaline earth metal impurities and its production
US20060201412A1 (en) Method of making highly uniform low-stress single crystals with reduced scattering
JP2005035825A (en) Crucible and method for manufacturing fluoride crystal
JP2011026142A (en) Method for growing fluoride crystal, fluoride crystal, and optical member
JP6035584B2 (en) Method for producing fluorite crystals
JP2825060B2 (en) Beta-barium borate single crystal processing surface modification method
JP4228127B2 (en) Method for producing calcium fluoride crystals
KR20050010513A (en) Method for manipulating a rare earth chloride or bromide or iodide in a crucible comprising carbon
JPH05279164A (en) Production of iii-v group compound semiconductor single crystal and apparatus therefor
JPH01115897A (en) Production of magnesium fluoride single crystal

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ OM PH PL PT RO RU SD SE SG SI SK SL TJ TM TN TR TT TZ UA UG UZ VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR

121 Ep: the epo has been informed by wipo that ep was designated in this application
AK Designated states

Kind code of ref document: A3

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ OM PH PL PT RO RU SD SE SG SI SK SL TJ TM TN TR TT TZ UA UG UZ VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A3

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR

DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
WWE Wipo information: entry into national phase

Ref document number: 2002577949

Country of ref document: JP

122 Ep: pct application non-entry in european phase