JP2825060B2 - Beta-barium borate single crystal processing surface modification method - Google Patents

Beta-barium borate single crystal processing surface modification method

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Publication number
JP2825060B2
JP2825060B2 JP19414194A JP19414194A JP2825060B2 JP 2825060 B2 JP2825060 B2 JP 2825060B2 JP 19414194 A JP19414194 A JP 19414194A JP 19414194 A JP19414194 A JP 19414194A JP 2825060 B2 JP2825060 B2 JP 2825060B2
Authority
JP
Japan
Prior art keywords
single crystal
bab
melt
seed crystal
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP19414194A
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Japanese (ja)
Other versions
JPH0859396A (en
Inventor
光 古宇田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP19414194A priority Critical patent/JP2825060B2/en
Publication of JPH0859396A publication Critical patent/JPH0859396A/en
Application granted granted Critical
Publication of JP2825060B2 publication Critical patent/JP2825060B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】この発明はベータ・バリウムボレ
イト(β−BaB2 4 )単結晶加工表面の改質方法に
関し、特に波長変換素子に応用されるβ−BaB2 4
単結晶を引上法で育成するための種結晶の加工表面の改
質方法に関する。
BACKGROUND OF relates modification method of the present invention is beta-barium borate (β-BaB 2 O 4) single-crystal work surface, β-BaB 2 O 4 which is particularly applicable to wavelength conversion element
The present invention relates to a method for modifying a processed surface of a seed crystal for growing a single crystal by a pulling method.

【0002】[0002]

【従来の技術】β−BaB2 4 単結晶を種結晶を用い
てBaB2 4 組成融液から引上法で育成するために
は、融液に接触させたときの熱ショックに対してクラッ
クを生じず、表面の熱放射を大きくして育成界面で低温
相であるβ相を晶出させるための熱流条件を満足する棒
状の種結晶を用いる必要があった。その条件を満たす種
結晶として従来は、白金棒を種結晶の代わりに用いその
先端部に育成された直径3φ、長さ30mm程度のアズ
グロウン(As Grown)の結晶が用いられてい
た。
2. Description of the Related Art In order to grow a β-BaB 2 O 4 single crystal from a BaB 2 O 4 composition melt using a seed crystal by a pulling method, it is necessary to prevent a heat shock when the melt is brought into contact with the melt. It was necessary to use a rod-shaped seed crystal which did not generate cracks and increased the heat radiation on the surface to satisfy the heat flow conditions for crystallizing the β phase as a low-temperature phase at the growth interface. Conventionally, as a seed crystal that satisfies these conditions, a platinum rod is used instead of the seed crystal, and an as-grown crystal with a diameter of about 3 mm and a length of about 30 mm grown at the tip thereof has been used.

【0003】[0003]

【発明が解決しようとする課題】白金棒を種結晶の代わ
りに用いて、棒状の種結晶に必要な形状に結晶を育成す
ることは、長さ方向の直径の制御等が非常に困難である
ため難しく、この種結晶を用いてβ−BaB2 4 単結
晶を育成した場合の歩留は約10%と低いものであっ
た。β−BaB2 4 単結晶を歩留まり良く育成するた
めには種結晶による育成が必須であり、そのため加工し
た種結晶を用いた育成が望まれていた。しかし加工した
種結晶は低温相であるβ相を直接BaB2 4 組成融液
から育成するための熱的条件を満足出来ないのが現状で
あった。加工した種結晶でβ−BaB2 4 単結晶を育
成するためには、加工した棒状の種結晶の表面に残って
いる歪みを除去し、また表面を鏡面状態に改質すること
が必要であった。
It is very difficult to grow a crystal in a shape required for a rod-shaped seed crystal by using a platinum rod in place of the seed crystal, for example, to control the diameter in the longitudinal direction. Therefore, the yield when β-BaB 2 O 4 single crystal was grown using this seed crystal was as low as about 10%. In order to grow a β-BaB 2 O 4 single crystal with good yield, it is essential to grow a seed crystal. Therefore, growth using a processed seed crystal has been desired. However, at present, the processed seed crystal cannot satisfy the thermal conditions for growing the β phase, which is a low-temperature phase, directly from the BaB 2 O 4 composition melt. In order to grow a β-BaB 2 O 4 single crystal with the processed seed crystal, it is necessary to remove the strain remaining on the surface of the processed rod-shaped seed crystal and to modify the surface to a mirror-like state. there were.

【0004】本発明の目的は、種結晶の加工歪を除去し
鏡面が容易に得られるβ−BaB24 単結晶加工表面
の改質方法を提供することにある。
[0004] It is an object of the present invention to provide a method for modifying a processed surface of a β-BaB 2 O 4 single crystal capable of easily removing a processing strain of a seed crystal and obtaining a mirror surface.

【0005】[0005]

【課題を解決するための手段】棒状の種結晶の形に加工
したβ−BaB2 4 単結晶を、β−BaB2 4 単結
晶が僅かに融解される組成を有する、BaB2 4 とフ
ラックス成分(例えばNa2 O粉末)の混合融液にディ
ッピングすることにより、単結晶の加工表面層が融解さ
れる過程で歪みが除去され、その表面を平滑な鏡面状態
にすることができる。
SUMMARY OF THE INVENTION A β-BaB 2 O 4 single crystal processed into a rod-like seed crystal is converted into a BaB 2 O 4 having a composition in which the β-BaB 2 O 4 single crystal is slightly melted. By dipping in a mixed melt of a single crystal and a flux component (for example, Na 2 O powder), distortion is removed in the process of melting the processed surface layer of the single crystal, and the surface can be made a smooth mirror surface state.

【0006】[0006]

【作用】種結晶の表面を3000番の研磨材で研磨した
場合、その表面には数十μmの凹凸が形成されている。
またカット及び研磨の際に生じた歪みが蓄積しクラック
等の生じやすい状態に成っている。この加工した結晶を
β−BaB2 4 結晶が僅かに融解される組成のBaB
2 4 フラックス(例えばNa2 O)の混合融液にデ
ィッピングすると、表面にある原子は融解され歪みが除
去される。ここで結晶がわずかに融解される組成の混合
溶液にディッピングするとは、BaB 2 4 とフラック
スからなるβ相が初晶として晶出する融液組成のフラッ
クス溶液中に、β−BaB 2 4 単結晶が平衡状態で共
存する温度よりも0〜5℃高い温度にてディッピングす
ることを言う。また表面のエネルギーが最小になるよう
に原子配置も再編成されるため、表面の凹凸は減少して
平滑になり鏡面状態となる。融液の温度を厳密に制御す
ることで結晶の表面層が融解する量も厳密にコントロー
ルすることが出来るため、過剰に融解されることは無
い。
When the surface of the seed crystal is polished with a # 3000 abrasive, irregularities of several tens of μm are formed on the surface.
In addition, distortion generated during cutting and polishing is accumulated, and cracks and the like are likely to occur. BaB having a composition in which β-BaB 2 O 4 crystal is slightly melted
When dipping in a mixed melt of 2 O 4 and a flux (eg, Na 2 O), the atoms on the surface are melted and the strain is removed. Where a mixture of compositions where the crystals are slightly melted
When dipping in a solution, BaB 2 O 4 and flux
Of the melt composition at which the β phase
Β-BaB 2 O 4 single crystal in equilibrium
Dipping at a temperature 0-5 ° C higher than the existing temperature
Say that In addition, since the atomic arrangement is rearranged so that the surface energy is minimized, the unevenness of the surface is reduced, and the surface becomes smooth and mirror-finished. By strictly controlling the temperature of the melt, the amount by which the surface layer of the crystal melts can also be strictly controlled, so that there is no excessive melting.

【0007】[0007]

【実施例】次に本発明の実施例について図面を用いて説
明する。図1はBaB2 4 −Na2 Oの平衡状態図、
図2は図1におけるA部の拡大図である。以下β−Ba
2 4 種結晶の加工表面が僅かに融解するディッピン
グ融液としてNa2 Oのフラックス融液を用いた場合の
実施例を説明する。
Next, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is an equilibrium diagram of BaB 2 O 4 —Na 2 O,
FIG. 2 is an enlarged view of a portion A in FIG. Below β-Ba
An example in which a flux melt of Na 2 O is used as a dipping melt in which a processed surface of a B 2 O 4 seed crystal slightly melts will be described.

【0008】図1の平衡状態図よりNa2 Oの濃度が2
2〜32mol%のときに925〜755℃の間で論理
的にはBaB2 4 のβ相が晶出する。しかし実際の融
液は10〜20℃程度の過冷却性を持つため、Na2
が30〜32mol%濃度の融液であるとディッピング
した種結晶にBaB2 4 ・Na2 Oが晶出してしまう
可能性がある。また融液が高温になるとフラックス成分
が蒸発して組成がずれてくる。そこで実際のディッピン
グ融液組成は、Na2 Oが25〜30mol%で融点温
度が890〜800℃程度に調整することが望ましい。
実施例ではBaB2 4 粉末にNa2 O粉末を25mo
l%混合し、ディッピング融液の原料とした。このBa
Ba2 4 −Na2 O組成の融液からβ−BaB2 4
単結晶が平衡状態で共存する温度は880℃であること
がわかる。
[0008] The concentration of Na 2 O than the equilibrium phase diagram of Figure 1 is 2
The theoretical β phase of BaB 2 O 4 crystallizes between 925 and 755 ° C. when the content is 2 to 32 mol%. However, since the actual melt has a supercooling property of about 10 to 20 ° C., Na 2 O
There is a possibility that a certain When dipping the seed crystal in the melt 30~32Mol% concentration BaB 2 O 4 · Na 2 O will crystallize out. When the temperature of the melt becomes high, the flux component evaporates and the composition shifts. Therefore, it is desirable that the actual composition of the dipping melt is adjusted so that Na 2 O is 25 to 30 mol% and the melting point temperature is about 890 to 800 ° C.
In the embodiment, 25 mol of Na 2 O powder is added to BaB 2 O 4 powder.
1% was mixed to obtain a raw material for the dipping melt. This Ba
From the melt having the composition of Ba 2 O 4 -Na 2 O, β-BaB 2 O 4
It can be seen that the temperature at which the single crystals coexist in the equilibrium state is 880 ° C.

【0009】縦型の抵抗加熱炉を用い直径40mmの白
金坩堝に原料を充填して880℃より3℃高い883℃
で融解した。融解温度を高くしすぎると種結晶から融液
にとけ込む量が多くなるため融点より+5℃以下で融解
することが望ましい(種結晶の大きさと融液の量により
最適な融液温度が決定される)。この融液上に長さ30
mm太さ3mmの形状で表面をアルミナの3000番の
研磨材で研磨したβ−BaB2 4 の種結晶を1時間保
持した後、融液にディッピングした。883℃の融液に
β−BaB2 4 単結晶をディッピングすると結晶表面
が融解して図2の矢印2で示したように、ディンピング
ポイント1から融液の組成が変化し種結晶と融液は平衡
状態に達する。約5分間ディッピングした後に種結晶を
ゆっくりと融液から引き出し、回転させてフラックス成
分を振り飛ばし、常温まで50℃/hrで冷却した。取
り出した種結晶の表面の加工歪みは除去され光学的に透
明な鏡面が得られた。
The raw material is filled in a platinum crucible having a diameter of 40 mm using a vertical resistance heating furnace, and 883 ° C. higher than 880 ° C. by 3 ° C.
Melted. If the melting temperature is too high, the amount of melt from the seed crystal into the melt increases, so it is desirable to melt at + 5 ° C. or less from the melting point (the optimal melt temperature is determined by the size of the seed crystal and the amount of melt). ). Length 30 on this melt
After holding a seed crystal of β-BaB 2 O 4 having a shape having a thickness of 3 mm and a surface thereof polished with an abrasive No. 3000 of alumina for 1 hour, it was dipped in a melt. When the β-BaB 2 O 4 single crystal is dipped in the melt at 883 ° C., the crystal surface is melted and the composition of the melt changes from the dipping point 1 as shown by the arrow 2 in FIG. The liquid reaches an equilibrium state. After dipping for about 5 minutes, the seed crystal was slowly pulled out of the melt, rotated to shake off the flux components, and cooled to room temperature at 50 ° C./hr. The processing strain on the surface of the seed crystal taken out was removed, and an optically transparent mirror surface was obtained.

【0010】この表面を改質した種結晶を用いてBaB
2 4 組成融液から単結晶の引き上げ育成を試みたとこ
ろ、β−BaB2 4 の単結晶がほぼ100%の歩留り
で育成でき、従来の白金棒を用いて種結晶を用いた場合
に比べβ−BaB2 4 単結晶の作製歩留りを大幅に向
上させることができた。
[0010] BaB is prepared by using a seed crystal whose surface is modified.
When an attempt was made to pull up and grow a single crystal from a 2 O 4 composition melt, a single crystal of β-BaB 2 O 4 could be grown at a yield of almost 100%, and when a seed crystal was used with a conventional platinum rod, In comparison, the production yield of β-BaB 2 O 4 single crystal was significantly improved.

【0011】同様にNa2 2 4 、BaCl2 、Na
Cl等のフラックスを用いた場合もβ相が晶出する融液
組成に調整して融点よりも僅かに高い温度に設定し、加
工した種結晶をディッピングすることにより表面を改質
することが出来る。
Similarly, Na 2 B 2 O 4 , BaCl 2 , Na
Even when a flux such as Cl is used, the surface can be modified by adjusting the melt composition at which the β phase is crystallized, setting the temperature slightly higher than the melting point, and dipping the processed seed crystal. .

【0012】[0012]

【発明の効果】以上説明したように本発明は、β−Ba
2 4 単結晶が僅かに融解される組成の融液中に棒状
に加工した種結晶をディッピングすることにより、種結
晶の加工歪を容易に除去することができると共に、その
表面を鏡面にできる。この為、β−BaB2 4 単結晶
の育成歩留まりを飛躍的に向上させることができる。
As described above, according to the present invention, β-Ba
By dipping the rod-shaped seed crystal into a melt having a composition in which the B 2 O 4 single crystal is slightly melted, the processing strain of the seed crystal can be easily removed and the surface can be mirror-finished. it can. For this reason, the yield of growing β-BaB 2 O 4 single crystal can be significantly improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】BaB2 4 −Na2 Oの平衡状態図。FIG. 1 is an equilibrium diagram of BaB 2 O 4 —Na 2 O.

【図2】図1におけるA部の拡大図。FIG. 2 is an enlarged view of a portion A in FIG.

【符号の説明】[Explanation of symbols]

1 ディッピングポイント 2 矢印 1 Dipping point 2 Arrow

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】非線形光学材料であるβ−BaB24単結
晶を引上法で育成する為の棒状に加工した種結晶を、B
aB24Na 2 Oフラックスからなるβ相が初晶とし
て晶出する融液組成のフラックス溶液中に、β−BaB
24単結晶が平衡状態で共存する温度よりも0〜5℃高
い温度にてディッピングして加工歪みを除去し鏡面を得
ることを特徴とするベータ・バリウムボレイト単結晶加
工表面の改質方法。
1. A seed crystal processed into a rod shape for growing a β-BaB 2 O 4 single crystal as a nonlinear optical material by a pulling method,
β-BaB is contained in a flux solution having a melt composition in which a β phase composed of aB 2 O 4 and Na 2 O flux is crystallized as primary crystals.
A modified beta-barium borate single crystal processing surface characterized in that dipping is performed at a temperature 0 to 5 ° C. higher than the temperature at which the 2 O 4 single crystal coexists in an equilibrium state to remove a processing distortion and obtain a mirror surface. Method.
【請求項2】前記Na 2 Oフラックスの濃度が25〜3
0mol%であることを特徴とする請求項1記載のベー
タ・バリウムボレイト単結晶加工表面の改質方法。
2. The method according to claim 1, wherein the concentration of the Na 2 O flux is 25 to 3
2. The method for modifying a processed surface of beta-barium borate single crystal according to claim 1, wherein the amount is 0 mol%.
JP19414194A 1994-08-18 1994-08-18 Beta-barium borate single crystal processing surface modification method Expired - Lifetime JP2825060B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19414194A JP2825060B2 (en) 1994-08-18 1994-08-18 Beta-barium borate single crystal processing surface modification method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19414194A JP2825060B2 (en) 1994-08-18 1994-08-18 Beta-barium borate single crystal processing surface modification method

Publications (2)

Publication Number Publication Date
JPH0859396A JPH0859396A (en) 1996-03-05
JP2825060B2 true JP2825060B2 (en) 1998-11-18

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Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Link
JP (1) JP2825060B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5093924B2 (en) * 2009-01-09 2012-12-12 住友電気工業株式会社 Etching method of seed crystal surface

Also Published As

Publication number Publication date
JPH0859396A (en) 1996-03-05

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