WO2002061514A1 - Dispositif de diagnostic, dispositif de collecte d'informations, systeme de diagnostic, et systeme de maintenance a distance - Google Patents

Dispositif de diagnostic, dispositif de collecte d'informations, systeme de diagnostic, et systeme de maintenance a distance Download PDF

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Publication number
WO2002061514A1
WO2002061514A1 PCT/JP2002/000474 JP0200474W WO02061514A1 WO 2002061514 A1 WO2002061514 A1 WO 2002061514A1 JP 0200474 W JP0200474 W JP 0200474W WO 02061514 A1 WO02061514 A1 WO 02061514A1
Authority
WO
WIPO (PCT)
Prior art keywords
diagnosing
industrial equipment
defect
information collecting
remote maintenance
Prior art date
Application number
PCT/JP2002/000474
Other languages
English (en)
French (fr)
Inventor
Hajime Nakamura
Noriyasu Ooshima
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Priority to JP2002562024A priority Critical patent/JPWO2002061514A1/ja
Publication of WO2002061514A1 publication Critical patent/WO2002061514A1/ja

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0224—Process history based detection method, e.g. whereby history implies the availability of large amounts of data
PCT/JP2002/000474 2001-01-30 2002-01-23 Dispositif de diagnostic, dispositif de collecte d'informations, systeme de diagnostic, et systeme de maintenance a distance WO2002061514A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002562024A JPWO2002061514A1 (ja) 2001-01-30 2002-01-23 診断装置、情報収集装置、診断システム及び遠隔保全システム

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-22477 2001-01-30
JP2001022477 2001-01-30

Publications (1)

Publication Number Publication Date
WO2002061514A1 true WO2002061514A1 (fr) 2002-08-08

Family

ID=18887888

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/000474 WO2002061514A1 (fr) 2001-01-30 2002-01-23 Dispositif de diagnostic, dispositif de collecte d'informations, systeme de diagnostic, et systeme de maintenance a distance

Country Status (2)

Country Link
JP (1) JPWO2002061514A1 (ja)
WO (1) WO2002061514A1 (ja)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006293695A (ja) * 2005-04-11 2006-10-26 Denso Corp 監視制御装置及び監視制御方法
JP2009538476A (ja) * 2006-05-25 2009-11-05 ローズマウント インコーポレイテッド 専用プロセス診断装置
JP2010224923A (ja) * 2009-03-24 2010-10-07 Fanuc Ltd 機械の監視システム
JP2010224973A (ja) * 2009-03-24 2010-10-07 Dainippon Screen Mfg Co Ltd 基板処理装置および障害要因解明プログラム
US8001442B2 (en) 2005-12-09 2011-08-16 Shimadzu Corporation Data-processing system for measurement devices
JP2013058780A (ja) * 2012-11-08 2013-03-28 Hitachi Kokusai Electric Inc 基板処理システム、外部接続装置及び基板処理装置のデータ処理方法
JP2015106391A (ja) * 2013-12-03 2015-06-08 三菱電機株式会社 保全点検システム
JP2016012157A (ja) * 2014-06-27 2016-01-21 株式会社日立製作所 故障予兆検出システム
JP2016157280A (ja) * 2015-02-25 2016-09-01 三菱重工業株式会社 事象予測システム、事象予測方法及びプログラム
US9840643B2 (en) 2006-08-25 2017-12-12 Baumer Hhs Gmbh Hot-glue application system and method for controlling and monitoring the hot-glue application system
JP2018010388A (ja) * 2016-07-12 2018-01-18 三菱電機株式会社 広域監視制御システム
WO2018142688A1 (ja) 2017-01-31 2018-08-09 オムロン株式会社 情報処理装置、情報処理装置の制御方法、および、制御プログラム
KR20190069933A (ko) * 2017-12-12 2019-06-20 현대일렉트릭앤에너지시스템(주) 장비제어유닛 관리용 서버 기기
US10691119B2 (en) 2014-07-31 2020-06-23 Camozzi Digital S.R.L. System for monitoring physical parameters of textile machinery and method of predictive maintenance
CN114616527A (zh) * 2019-11-05 2022-06-10 三菱电机株式会社 信息处理装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019106158A (ja) * 2018-01-18 2019-06-27 株式会社デンソー九州 生産管理システム
JP6808684B2 (ja) * 2018-06-14 2021-01-06 キヤノン株式会社 情報処理装置、判定方法、プログラム、リソグラフィシステム、および物品の製造方法

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08328640A (ja) * 1995-05-29 1996-12-13 Hitachi Zosen Corp プロセスデータ発生方法
EP0822473A2 (en) * 1996-07-31 1998-02-04 Canon Kabushiki Kaisha Remote maintenance system
JPH1195833A (ja) * 1997-07-23 1999-04-09 Toshiba Corp プラント監視装置
JPH11237912A (ja) * 1998-02-19 1999-08-31 Toshiba Corp 高温構造部材の保守管理方法および装置
JPH11252670A (ja) * 1998-03-05 1999-09-17 Omron Corp 遠方監視制御システム及びセンサ端末装置
JP2000214918A (ja) * 1999-01-21 2000-08-04 Toshiba Corp プラント保守支援システム
JP2000224167A (ja) * 1999-01-29 2000-08-11 Mitsubishi Electric Corp 設備遠隔アクセスシステム、イベント発生検出プログラム生成装置、インターネット連携装置、遠隔端末及びコンピュータ読み取り可能な記録媒体
GB2347234A (en) * 1999-02-22 2000-08-30 Fisher Rosemount Systems Inc Diagnostic expert in a process control system
JP2000305619A (ja) * 1999-04-26 2000-11-02 Toshiba Corp 運転タスク管理システム
JP2002006942A (ja) * 2000-06-22 2002-01-11 Hitachi Ltd 遠隔監視診断システム、及び遠隔監視診断方法

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08328640A (ja) * 1995-05-29 1996-12-13 Hitachi Zosen Corp プロセスデータ発生方法
EP0822473A2 (en) * 1996-07-31 1998-02-04 Canon Kabushiki Kaisha Remote maintenance system
JPH1195833A (ja) * 1997-07-23 1999-04-09 Toshiba Corp プラント監視装置
JPH11237912A (ja) * 1998-02-19 1999-08-31 Toshiba Corp 高温構造部材の保守管理方法および装置
JPH11252670A (ja) * 1998-03-05 1999-09-17 Omron Corp 遠方監視制御システム及びセンサ端末装置
JP2000214918A (ja) * 1999-01-21 2000-08-04 Toshiba Corp プラント保守支援システム
JP2000224167A (ja) * 1999-01-29 2000-08-11 Mitsubishi Electric Corp 設備遠隔アクセスシステム、イベント発生検出プログラム生成装置、インターネット連携装置、遠隔端末及びコンピュータ読み取り可能な記録媒体
GB2347234A (en) * 1999-02-22 2000-08-30 Fisher Rosemount Systems Inc Diagnostic expert in a process control system
JP2000305619A (ja) * 1999-04-26 2000-11-02 Toshiba Corp 運転タスク管理システム
JP2002006942A (ja) * 2000-06-22 2002-01-11 Hitachi Ltd 遠隔監視診断システム、及び遠隔監視診断方法

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006293695A (ja) * 2005-04-11 2006-10-26 Denso Corp 監視制御装置及び監視制御方法
US8001442B2 (en) 2005-12-09 2011-08-16 Shimadzu Corporation Data-processing system for measurement devices
JP2009538476A (ja) * 2006-05-25 2009-11-05 ローズマウント インコーポレイテッド 専用プロセス診断装置
US9840643B2 (en) 2006-08-25 2017-12-12 Baumer Hhs Gmbh Hot-glue application system and method for controlling and monitoring the hot-glue application system
JP2010224923A (ja) * 2009-03-24 2010-10-07 Fanuc Ltd 機械の監視システム
JP2010224973A (ja) * 2009-03-24 2010-10-07 Dainippon Screen Mfg Co Ltd 基板処理装置および障害要因解明プログラム
JP2013058780A (ja) * 2012-11-08 2013-03-28 Hitachi Kokusai Electric Inc 基板処理システム、外部接続装置及び基板処理装置のデータ処理方法
JP2015106391A (ja) * 2013-12-03 2015-06-08 三菱電機株式会社 保全点検システム
JP2016012157A (ja) * 2014-06-27 2016-01-21 株式会社日立製作所 故障予兆検出システム
US10691119B2 (en) 2014-07-31 2020-06-23 Camozzi Digital S.R.L. System for monitoring physical parameters of textile machinery and method of predictive maintenance
JP2016157280A (ja) * 2015-02-25 2016-09-01 三菱重工業株式会社 事象予測システム、事象予測方法及びプログラム
JP2018010388A (ja) * 2016-07-12 2018-01-18 三菱電機株式会社 広域監視制御システム
WO2018142688A1 (ja) 2017-01-31 2018-08-09 オムロン株式会社 情報処理装置、情報処理装置の制御方法、および、制御プログラム
US11435714B2 (en) 2017-01-31 2022-09-06 Omron Corporation Information processing device, control method, and recording medium for specifying related event from collected event logs
KR20190069933A (ko) * 2017-12-12 2019-06-20 현대일렉트릭앤에너지시스템(주) 장비제어유닛 관리용 서버 기기
KR102294654B1 (ko) * 2017-12-12 2021-08-26 현대글로벌서비스 주식회사 장비제어유닛 관리용 서버 기기
CN114616527A (zh) * 2019-11-05 2022-06-10 三菱电机株式会社 信息处理装置

Also Published As

Publication number Publication date
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