WO2002023593A1 - Cassette pour pieces a traiter plates - Google Patents

Cassette pour pieces a traiter plates Download PDF

Info

Publication number
WO2002023593A1
WO2002023593A1 PCT/DE2001/003186 DE0103186W WO0223593A1 WO 2002023593 A1 WO2002023593 A1 WO 2002023593A1 DE 0103186 W DE0103186 W DE 0103186W WO 0223593 A1 WO0223593 A1 WO 0223593A1
Authority
WO
WIPO (PCT)
Prior art keywords
cassette
cassette according
locking
workpieces
flat
Prior art date
Application number
PCT/DE2001/003186
Other languages
German (de)
English (en)
Inventor
Thomas Böhme
Stefan Liehr
Steffen Mimietz
Original Assignee
Infineon Technologies
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies filed Critical Infineon Technologies
Publication of WO2002023593A1 publication Critical patent/WO2002023593A1/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates

Definitions

  • the invention relates to a cassette for holding flat workpieces, for example for storing, transporting and handling wafers.
  • Wafers used for semiconductor production are usually transported or stored in so-called cassettes.
  • Such a cassette usually offers space for a stack of wafers placed parallel to one another in the cassette.
  • the wafers rest, for example, on guide rails or stopping points and can be removed and fed, usually by machines, on an open side of the cassette. So far, the wafers have been transported in different cassettes that match the equipment used in the various phases of semiconductor production. There was no cassette for storing, transporting and handling wafers in the wafer frame.
  • the present invention is therefore based on the object of providing a cassette which enables all the necessary properties for continuous use in the production of wafers. It goes without saying that the cassette according to the invention is also suitable for holding other flat workpieces.
  • the invention is directed to a cassette for receiving flat workpieces with a housing with sides, an opening on one of the housing sides, guides for receiving and separating the flat workpieces in a stack, a locking device for retaining the flat workpieces in the housing, a coupling mechanism for coupling the cassette to a cassette holder, and a signal transmitter for identifying the cassette.
  • the sides surround the square housing on all four resulting side surfaces, one of the sides being designed as an opening.
  • the flat workpieces which may also be located in a stabilizing holder or a frame, are stacked in a stack on top of each other and are held at a distance from each other.
  • the locking device is used to hold the flat workpieces in the housing. Restraint is understood to mean that, regardless of the play that the flat workpieces can have, workpieces (or the frames) in the cassette are in any case prevented from migrating out of the cassette beyond a certain point through the opening in the cassette ,
  • the cassette according to the invention In order to make the cassette according to the invention also suitable for shipping, it is further preferred that it be completely lockable. This is achieved, for example, in that an automatic closing device is arranged on the opening, which can close the opening.
  • an automatic closing device is arranged on the opening, which can close the opening.
  • manual locking devices or simple lids that can be attached to the opening with corresponding connections are also conceivable.
  • the guides can for example be stacked guide rails on which the flat workpieces at least two opposite areas rest at least with their edges on the guide levels of these guide rails.
  • the flat workpieces are only supported at their edges and remain floating with their main part. If circular workpieces, such as wafers, are involved, the support only takes place on a small area of the edge.
  • the guide planes of the rails are planes that are in direct contact with the side of the flat workpieces that rests on the rails. If there are no obstacles like the locking device in these planes, the workpiece or the frame receiving it can slide freely out of or into the cassette.
  • the stacks of guide rails are preferably arranged on two side walls of the cassette, which adjoin the opening.
  • the locking device of the cassette is preferably designed in such a way that all the guides can be locked simultaneously by the locking device. In this way, the locking device is particularly easy to use.
  • the locking device preferably comprises locking elements, which are parts of the guide rails, which can be moved back and forth between a release position for removing and feeding workpieces, in which the locking elements are in the guide plane, and a locking position for preventing the flat surface from sliding. Chen workpieces beyond the locking device, in which the locking elements are in the sliding path of the workpieces.
  • the locking takes place in that the parts of the guide rails referred to as locking elements are brought into the sliding path and these locking elements can thereby prevent sliding over them.
  • the out- and movement can be, for example, a shift in the lateral direction or a twist.
  • the locking elements are still parallel to the rest of the guide rails, while in the case of a tilt, for example, the tilt axis remains on the guide plane, while on the tilted side of the locking element the guide plane blocks and the workpieces can no longer slide is.
  • the cassette usually has a bottom, with it being preferred that a mechanism is attached to the bottom which can interact with the locking device in order to lock the workpieces against a surface when the cassette is raised. In this way it is achieved that when the cassette is transported, the lock is activated in any case and workpieces accommodated therein cannot slide out.
  • This mechanism can be implemented, for example, in that the locking device has a holding plate for the locking elements which are arranged on the outside of the side walls, a spring mechanism which can move the holding plate in such a way that the locking elements are moved in the direction of the locking position, and a pin under the base plate, which can move the holding plate against the force of the spring mechanism when the cassette is placed on a surface such that the locking elements are moved in the direction of the release position.
  • the pen thus acts against the spring mechanism so that the two can be viewed as antagonists.
  • this locking element for a specific flat workpiece can move from a position which is on the same guide plane for this workpiece, when locking, into a position which is between the guide rail for this workpiece and the adjacent guide rail lies so that it lies essentially next to the flat workpiece and prevents its sliding on the guide rail due to its presence.
  • the opening can be designed so that it can be coupled to a counterpart of a standardized processing device for the flat workpieces.
  • This coupling preferably takes place with so-called equip ent load ports, which likewise require a construction of the cassette according to the invention in a closed design, which should be equipped with an automatic locking device.
  • the signal transmitter for identifying the cassette. This enables the cassette to be identified either according to its type and / or according to a unique identification number and / or according to its content.
  • the signal transmitter thus contains corresponding information in a suitably coded manner, which it can transmit to a device which requires the information on request or query.
  • the signal generator can function mechanically, optically, electronically etc.; with or without a direct connection to the querying device.
  • the signal transmitter is preferably an electronic signal transmitter.
  • the signal generator is a contactless signal generator.
  • the information can be transmitted, for example, optically, for example by means of light emitting diodes or a bar code; or by emitting electromagnetic radiation.
  • the signal transmitter have a coil, the electrical characteristics of which serve to identify the cassette. Electrical characteristics also mean the sending behavior of a message that can be emitted by the coil.
  • transponders which are also to be used in the warehousing and sales area, is particularly preferred.
  • the system is preferably equipped so that its data can be manipulated in the same way.
  • cassettes can be stacked on top of one another.
  • stackable is to be understood first of all to mean that the upper and lower sides of the cassettes are designed in such a way that they are complementarily compatible with one another and that cassettes can therefore be stacked on top of one another.
  • the cassette according to the invention has only smooth top and bottom sides, which allow stacking in a simple manner.
  • the cassette has a bottom and an upper side opposite the bottom
  • mutually complementary holding elements are arranged on the bottom and upper side, with which the cassettes can be stacked on top of one another, and the lateral mobility of the cassettes relative to one another is excluded by the holding elements.
  • the holding elements can stack cassettes stacked on top of one another in the vertical direction so that several cassettes can be lifted together when the uppermost cassette of the stack is raised.
  • This can be achieved, for example, by means of a pin hole construction or embodiments similar to a bayonet lock. Swiveling hooks, which engage corresponding receiving devices, are also conceivable here.
  • the cassettes are expediently designed such that when a cassette is placed on another cassette, the Locking device is not moved towards its release position. When using a pen, this can be achieved, for example, through a corresponding opening at the top of the cassette into which the pen is inserted, so that it cannot actuate the mechanism in the direction of the release position.
  • the coupling mechanism at the same time contains the holding elements mentioned above on the floor.
  • the coupling mechanism can in principle be designed for inclusion in standard cassette receptacles, for example those that correspond to the SEMI standard.
  • standardization means that the cassette according to the invention can be used in existing recordings and thus devices that also meet the standard.
  • the coupling mechanism is a so-called kinematic coupling, which is able to adapt to different coupling mechanisms that differ, for example, in terms of their dimensions.
  • the cassette preferably also has at least one grip area, with two grip areas usually being used to enable the cassette or the stack of cassettes to be lifted with both hands.
  • the at least one grip area can be arranged within the outer dimensions of the cassette. This is to be understood to mean that the outermost corners of the cassette define outer dimensions in the form of their connecting lines to one another and that the grip area or areas do not protrude beyond these outer dimensions.
  • the grip area can thus be designed to be retractable, for example, or consist of openings in which one can engage.
  • the at least one grip area preferably consists of foldable handles on an upper side of the cassette.
  • the cassette can furthermore have a receiving device for an automatic gripping system.
  • a gripping robot for example, and not just by a human operator.
  • the flat workpieces are wafers.
  • the cassette has been developed especially with regard to recent developments in wafers, which are getting larger and larger and have reached a diameter of 300 mm (12 inches) in the current generation. It is therefore preferred that the cassette be suitable for receiving such 300 m wafers.
  • the cassette according to the invention can also be used for other wafers, for example those with 5, 6 or 8 inch diameters.
  • the cassette according to the invention presented above was developed with regard to the requirements placed on the storage, transport and handling of 12 inch wafers in a wafer-frame combination.
  • the cassette can have a different number of management levels (slots), for example 10 to 30 slots. Usual cassettes have 13 slots, whereby cassettes with 25 slots are also possible.
  • Flat workpieces in the sense of the present invention are not only to be understood as the directly used workpieces which are to be processed, but also, if appropriate, also combinations of the actual workpiece with a holding frame, as is customary, for example, in the case of wafers.
  • a workpiece in the sense of the present invention is therefore also a frame plus the inserted flat workpiece. This embodiment is often preferred in order to stabilize the actual workpiece, for example an otherwise sagging workpiece.
  • the cassette according to the invention it is also possible to send sawn wafers if the cassette is provided in a closed design.
  • the material and design of the cassette can vary while maintaining the functionality according to the invention and can thus be adapted to different equipment and transport systems.
  • Figure 1 shows a preferred embodiment of a cassette according to the invention
  • Figure 2 shows the same embodiment of a cassette according to the invention when viewed from the front;
  • FIG. 3 shows the same embodiment as FIGS. 1 and 2 when the cassette is viewed from below.
  • FIG. 1 shows a cassette according to the invention.
  • This comprises a housing 1, which consists of a top 2, a bottom 3 and pages 4, 5, 6 and 7.
  • the side 4 is a rear wall while the side walls 5 and 6 frame the opening 7, which can be called the front.
  • guides 8 are arranged, which serve to receive the flat workpieces or to hold such workpieces or the holding frame of the workpieces.
  • the guides can be guide rails 15 which run parallel to one another along the side walls and with their guide planes 16 (FIG. 2) serve to receive the flat workpieces 12.
  • These workpieces 12 rest with their edges 13, 14 on the guide planes 16 of the guide rails 15.
  • a part of the guide rails 15 is designed as a locking element 17, which are attached to the holding plates 18 of the locking device 9 in a suitable manner, for example by welding or screwing.
  • a pin 19 is attached to the underside of the locking device 9, which pin can push the locking device upwards and move it against a spring mechanism (not shown).
  • the cassette according to the invention also has a signal transmitter 11, which can be integrated into the housing, for example.
  • Handles 21 are used to transport the cassette.
  • three couplings 10 are provided on the bottom 3 of the cassette, which serve as kinematic couplings for coupling to standard equipment and simultaneously for coupling to other cassettes in a stack of cassettes.
  • two pins 20 arranged on the top of the cassette according to the invention engage in the coupling mechanisms 10.
  • the pins 20 are arranged on struts 22, which stabilize the side walls 5, 6. In the release position, the flat workpieces can be fed in and removed through the opening 7.
  • the cassette has a bottom 3 with openings. However, it is also possible to provide a completely closed cassette. Reference symbol list:

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

L'invention concerne une cassette pour le logement de pièces à traiter plates (12), par exemple de plaquettes de silicium. Cette cassette présente un corps (1) avec des côtés (4, 5, 6, 7), une ouverture (7) sur un des côtés du corps, des guidages (8), de préférence des rails de guidage, pour le logement et la séparation des pièces à traiter plates empilées, un dispositif de verrouillage (9) pour le maintien des pièces plates dans le corps (1), un mécanisme de couplage (10), de préférence un couplage cinématique, pour le couplage de la cassette à une unité réceptrice de cassettes, et un émetteur de signaux (11) pour l'identification de la cassette.
PCT/DE2001/003186 2000-09-13 2001-08-21 Cassette pour pieces a traiter plates WO2002023593A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10045202.7 2000-09-13
DE2000145202 DE10045202A1 (de) 2000-09-13 2000-09-13 Kassette für flache Werkstücke

Publications (1)

Publication Number Publication Date
WO2002023593A1 true WO2002023593A1 (fr) 2002-03-21

Family

ID=7656002

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2001/003186 WO2002023593A1 (fr) 2000-09-13 2001-08-21 Cassette pour pieces a traiter plates

Country Status (2)

Country Link
DE (1) DE10045202A1 (fr)
WO (1) WO2002023593A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2850638A1 (fr) * 2003-02-03 2004-08-06 Excel Services Emballages Sa Boite a etiquette electronique amovible, pour le conditionnement de plaquettes destinees a la fabrication de circuits integres
US9883360B1 (en) 2005-04-04 2018-01-30 X One, Inc. Rendez vous management using mobile phones or other mobile devices
DE102017204910A1 (de) 2017-03-23 2018-09-27 Singulus Technologies Ag Trägerkassette und Trägerkassettenstapel

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010012976A1 (de) * 2010-03-22 2011-09-22 Schmid Technology Systems Gmbh Transportkassette und Transportmittel zum Transport solcher Transportkassetten

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4228902A (en) * 1979-02-21 1980-10-21 Kasper Instruments, Inc. Carrier for semiconductive wafers
GB2144718A (en) * 1983-02-23 1985-03-13 Kulicke And Soffa Cassette for holding flat articles
US4888473A (en) * 1987-06-11 1989-12-19 Fluoroware, Inc. Wafer disk location monitoring system and tagged process carriers for use therewith
US5025926A (en) * 1987-07-07 1991-06-25 Empak, Inc. Package
US5638958A (en) * 1995-09-08 1997-06-17 Micron Technology, Inc. Semiconductor film wafer cassette
US5853214A (en) * 1995-11-27 1998-12-29 Progressive System Technologies, Inc. Aligner for a substrate carrier
US5915562A (en) * 1996-07-12 1999-06-29 Fluoroware, Inc. Transport module with latching door

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2848102A1 (de) * 1977-11-07 1979-05-10 Kasper Instruments Mit einer sicherung gegen das herausfallen von werkstuecken versehene tragvorrichtung
US4684201A (en) * 1985-06-28 1987-08-04 Allied Corporation One-piece crimp-type connector and method for terminating a coaxial cable
US5351836A (en) * 1992-07-08 1994-10-04 Daifuku Co., Ltd. Container for plate-like objects
EP0692817B1 (fr) * 1994-07-15 1997-09-24 Fluoroware, Inc. Support pour galette semi-conductrice

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4228902A (en) * 1979-02-21 1980-10-21 Kasper Instruments, Inc. Carrier for semiconductive wafers
GB2144718A (en) * 1983-02-23 1985-03-13 Kulicke And Soffa Cassette for holding flat articles
US4888473A (en) * 1987-06-11 1989-12-19 Fluoroware, Inc. Wafer disk location monitoring system and tagged process carriers for use therewith
US4888473B1 (en) * 1987-06-11 1996-10-15 Fluoroware Inc Wafer disk location monitoring system and tagged process carrier for use therewith
US5025926A (en) * 1987-07-07 1991-06-25 Empak, Inc. Package
US5638958A (en) * 1995-09-08 1997-06-17 Micron Technology, Inc. Semiconductor film wafer cassette
US5853214A (en) * 1995-11-27 1998-12-29 Progressive System Technologies, Inc. Aligner for a substrate carrier
US5915562A (en) * 1996-07-12 1999-06-29 Fluoroware, Inc. Transport module with latching door

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2850638A1 (fr) * 2003-02-03 2004-08-06 Excel Services Emballages Sa Boite a etiquette electronique amovible, pour le conditionnement de plaquettes destinees a la fabrication de circuits integres
US9883360B1 (en) 2005-04-04 2018-01-30 X One, Inc. Rendez vous management using mobile phones or other mobile devices
US10750311B2 (en) 2005-04-04 2020-08-18 X One, Inc. Application-based tracking and mapping function in connection with vehicle-based services provision
DE102017204910A1 (de) 2017-03-23 2018-09-27 Singulus Technologies Ag Trägerkassette und Trägerkassettenstapel
DE102017204910B4 (de) 2017-03-23 2018-10-04 Singulus Technologies Ag Trägerkassette und Trägerkassettenstapel

Also Published As

Publication number Publication date
DE10045202A1 (de) 2002-04-11

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