WO2002019401A1 - Procede et dispositif d'exposition - Google Patents
Procede et dispositif d'exposition Download PDFInfo
- Publication number
- WO2002019401A1 WO2002019401A1 PCT/JP2001/007306 JP0107306W WO0219401A1 WO 2002019401 A1 WO2002019401 A1 WO 2002019401A1 JP 0107306 W JP0107306 W JP 0107306W WO 0219401 A1 WO0219401 A1 WO 0219401A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- wafer
- exposure
- row
- shot regions
- scan
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2001280175A AU2001280175A1 (en) | 2000-08-29 | 2001-08-27 | Exposure method and device |
KR10-2003-7002843A KR20030028826A (ko) | 2000-08-29 | 2001-08-27 | 노광방법 및 장치 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000-258539 | 2000-08-29 | ||
JP2000258539 | 2000-08-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2002019401A1 true WO2002019401A1 (fr) | 2002-03-07 |
Family
ID=18746840
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2001/007306 WO2002019401A1 (fr) | 2000-08-29 | 2001-08-27 | Procede et dispositif d'exposition |
Country Status (4)
Country | Link |
---|---|
KR (1) | KR20030028826A (ko) |
AU (1) | AU2001280175A1 (ko) |
TW (1) | TW538448B (ko) |
WO (1) | WO2002019401A1 (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006057263A1 (ja) * | 2004-11-25 | 2006-06-01 | Nikon Corporation | 移動体システム、露光装置及びデバイス製造方法 |
CN113307115A (zh) * | 2020-02-27 | 2021-08-27 | 株式会社日立制作所 | 测量装置、电梯系统以及测量方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI640840B (zh) * | 2007-12-28 | 2018-11-11 | 日商尼康股份有限公司 | Exposure apparatus, exposure method, and component manufacturing method |
KR101594713B1 (ko) | 2014-12-22 | 2016-02-17 | 주식회사 포스코 | 오버런 검출 장치 및 방법 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0951054A1 (en) * | 1996-11-28 | 1999-10-20 | Nikon Corporation | Aligner and method for exposure |
EP1111471A2 (en) * | 1999-12-21 | 2001-06-27 | Asm Lithography B.V. | Lithographic projection apparatus with collision preventing positioning device |
-
2001
- 2001-08-27 AU AU2001280175A patent/AU2001280175A1/en not_active Abandoned
- 2001-08-27 WO PCT/JP2001/007306 patent/WO2002019401A1/ja active Application Filing
- 2001-08-27 KR KR10-2003-7002843A patent/KR20030028826A/ko not_active Application Discontinuation
- 2001-08-28 TW TW090121151A patent/TW538448B/zh not_active IP Right Cessation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0951054A1 (en) * | 1996-11-28 | 1999-10-20 | Nikon Corporation | Aligner and method for exposure |
EP1111471A2 (en) * | 1999-12-21 | 2001-06-27 | Asm Lithography B.V. | Lithographic projection apparatus with collision preventing positioning device |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006057263A1 (ja) * | 2004-11-25 | 2006-06-01 | Nikon Corporation | 移動体システム、露光装置及びデバイス製造方法 |
JPWO2006057263A1 (ja) * | 2004-11-25 | 2008-06-05 | 株式会社ニコン | 移動体システム、露光装置及びデバイス製造方法 |
JP4807629B2 (ja) * | 2004-11-25 | 2011-11-02 | 株式会社ニコン | 露光装置及びデバイス製造方法 |
CN113307115A (zh) * | 2020-02-27 | 2021-08-27 | 株式会社日立制作所 | 测量装置、电梯系统以及测量方法 |
Also Published As
Publication number | Publication date |
---|---|
TW538448B (en) | 2003-06-21 |
AU2001280175A1 (en) | 2002-03-13 |
KR20030028826A (ko) | 2003-04-10 |
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