WO2002009894A3 - Gas-vapor cleaning method and system therefor - Google Patents
Gas-vapor cleaning method and system therefor Download PDFInfo
- Publication number
- WO2002009894A3 WO2002009894A3 PCT/US2001/024341 US0124341W WO0209894A3 WO 2002009894 A3 WO2002009894 A3 WO 2002009894A3 US 0124341 W US0124341 W US 0124341W WO 0209894 A3 WO0209894 A3 WO 0209894A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- gas
- vapor mixture
- heated
- delivery line
- cleaning method
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/026—Cleaning by making use of hand-held spray guns; Fluid preparations therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
- B08B2203/005—Details of cleaning machines or methods involving the use or presence of liquid or steam the liquid being ozonated
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2230/00—Other cleaning aspects applicable to all B08B range
- B08B2230/01—Cleaning with steam
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2001281021A AU2001281021A1 (en) | 2000-08-01 | 2001-08-01 | Gas-vapor cleaning method and system therefor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US22216100P | 2000-08-01 | 2000-08-01 | |
US60/222,161 | 2000-08-01 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2002009894A2 WO2002009894A2 (en) | 2002-02-07 |
WO2002009894A3 true WO2002009894A3 (en) | 2002-06-13 |
Family
ID=22831117
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2001/024341 WO2002009894A2 (en) | 2000-08-01 | 2001-08-01 | Gas-vapor cleaning method and system therefor |
Country Status (2)
Country | Link |
---|---|
AU (1) | AU2001281021A1 (en) |
WO (1) | WO2002009894A2 (en) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6598805B2 (en) * | 2001-05-30 | 2003-07-29 | Dainippon Screen Mfg. Co., Ltd | Substrate cleaning apparatus |
US7789971B2 (en) | 2005-05-13 | 2010-09-07 | Tokyo Electron Limited | Treatment of substrate using functionalizing agent in supercritical carbon dioxide |
JP4653018B2 (en) | 2006-06-02 | 2011-03-16 | 東京エレクトロン株式会社 | Processing apparatus and processing method |
EP2199854B1 (en) | 2008-12-19 | 2015-12-16 | Obducat AB | Hybrid polymer mold for nano-imprinting and method for making the same |
EP2199855B1 (en) | 2008-12-19 | 2016-07-20 | Obducat | Methods and processes for modifying polymer material surface interactions |
FR2958558B1 (en) | 2010-04-09 | 2014-05-23 | Durr Ecoclean | INSTALLATION WITH TREATMENT JET FOR CLEANING AND / OR DEGREASING MANUFACTURED PARTS |
US10279365B2 (en) * | 2012-04-27 | 2019-05-07 | Progressive Surface, Inc. | Thermal spray method integrating selected removal of particulates |
DE102014101123B4 (en) | 2014-01-30 | 2022-10-20 | Elwema Automotive Gmbh | Method and system for cleaning a metal workpiece after machining with minimum quantity lubrication |
FR3017807B1 (en) | 2014-02-26 | 2016-03-04 | Durr Cleaning France | METHOD AND INSTALLATION FOR CLEANING AND / OR DEGREASING MANUFACTURED PARTS USING A TREATMENT JET |
CN110068385B (en) * | 2019-04-16 | 2024-05-07 | 宜宾机电一体化研究所 | Single-cylinder piston type gas flow standard device |
CN111167771B (en) * | 2020-02-17 | 2023-06-02 | 青岛诺诚化学品安全科技有限公司 | System and process method for online airtight cleaning and detection of flame arresters |
CN114388159A (en) * | 2021-12-23 | 2022-04-22 | 中国核电工程有限公司 | Phase splitting method and device, and extraction and separation method and system for spent fuel post-treatment plant |
GB2622391A (en) * | 2022-09-14 | 2024-03-20 | Probionate Ltd | Cleaning systems and methods for extraction or ventilation ducts |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2145864A5 (en) * | 1971-07-15 | 1973-02-23 | Inst Elektrotermicheskogo Obor | Gas mixing appts - with independent feeds to a venturi-type mixer |
US3788825A (en) * | 1970-10-06 | 1974-01-29 | Black Sivalls & Bryson Inc | Method of vaporizing and combining a liquefied cryogenic fluid stream with a gas stream |
US4615352A (en) * | 1984-05-17 | 1986-10-07 | Carboxyque Francaise | Process and apparatus for supplying a mixture of CO2 and SO2 or a like mixture under pressure |
SU1489812A1 (en) * | 1986-11-19 | 1989-06-30 | Предприятие П/Я Р-6900 | Device for producing gas mixtures |
US5372754A (en) * | 1992-03-03 | 1994-12-13 | Lintec Co., Ltd. | Liquid vaporizer/feeder |
US5725154A (en) * | 1995-08-18 | 1998-03-10 | Jackson; David P. | Dense fluid spray cleaning method and apparatus |
US5730806A (en) * | 1993-08-30 | 1998-03-24 | The United States Of America As Represented By The Administrator Of The National Aeronautics & Space Administration | Gas-liquid supersonic cleaning and cleaning verification spray system |
WO1999034422A1 (en) * | 1997-12-30 | 1999-07-08 | Applied Materials, Inc. | Aerosol substrate cleaner |
-
2001
- 2001-08-01 WO PCT/US2001/024341 patent/WO2002009894A2/en active Application Filing
- 2001-08-01 AU AU2001281021A patent/AU2001281021A1/en not_active Abandoned
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3788825A (en) * | 1970-10-06 | 1974-01-29 | Black Sivalls & Bryson Inc | Method of vaporizing and combining a liquefied cryogenic fluid stream with a gas stream |
FR2145864A5 (en) * | 1971-07-15 | 1973-02-23 | Inst Elektrotermicheskogo Obor | Gas mixing appts - with independent feeds to a venturi-type mixer |
US4615352A (en) * | 1984-05-17 | 1986-10-07 | Carboxyque Francaise | Process and apparatus for supplying a mixture of CO2 and SO2 or a like mixture under pressure |
SU1489812A1 (en) * | 1986-11-19 | 1989-06-30 | Предприятие П/Я Р-6900 | Device for producing gas mixtures |
US5372754A (en) * | 1992-03-03 | 1994-12-13 | Lintec Co., Ltd. | Liquid vaporizer/feeder |
US5730806A (en) * | 1993-08-30 | 1998-03-24 | The United States Of America As Represented By The Administrator Of The National Aeronautics & Space Administration | Gas-liquid supersonic cleaning and cleaning verification spray system |
US5725154A (en) * | 1995-08-18 | 1998-03-10 | Jackson; David P. | Dense fluid spray cleaning method and apparatus |
WO1999034422A1 (en) * | 1997-12-30 | 1999-07-08 | Applied Materials, Inc. | Aerosol substrate cleaner |
Non-Patent Citations (1)
Title |
---|
DATABASE WPI Section Ch Week 199015, Derwent World Patents Index; Class J02, AN 1990-114446 [25], XP002194649 * |
Also Published As
Publication number | Publication date |
---|---|
AU2001281021A1 (en) | 2002-02-13 |
WO2002009894A2 (en) | 2002-02-07 |
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