WO2001094068A1

WO2001094068A1 - Waxed fabric producing method and device therefor

Info

Publication number: WO2001094068A1
Application number: PCT/JP2001/002409
Authority: WO
Inventors: Koichi Nakashima; Yoshiaki Akaba
Original assignee: Nikko Materials Company, Limited
Priority date: 2000-06-02
Filing date: 2001-03-23
Publication date: 2001-12-13
Also published as: TW524866B; CN1193855C; CN1392816A; JP3319740B2; JP2001340959A

Abstract

A waxed fabric producing method comprising the steps of flowing wax over the tool horn of an ultrasonic welder, producing ultrasonic waves, and passing work along the surface of the flowing wax to apply the wax to the work; and a device therefor. Low-melting waxes (indium, lead-tin solder, tin-zinc solder, etc.) can be automatically and uniformly applied to work of large area, such as sputtering targets.

Description

Description Oral coating method and equipment Technical field

The present invention relates to a brazing material coating method and apparatus for uniformly applying a low melting point brazing material (indium, lead-tin solder, tin-zinc solder, etc.) to a large-area workpiece such as a sputtering target. Background art

In recent years, a sputtering method capable of easily controlling the film thickness and components has been widely used as one of the film forming methods for materials for electronic and electric parts.

In this sputtering method, a target composed of a positive electrode and a negative electrode is opposed to each other, and a high voltage is applied between the substrate and the target under an inert gas atmosphere to generate an electric field. At this time, the ionized electrons collide with the inert gas to form plasma, and the cations in the plasma collide with the surface of the target (negative electrode) and strike out the constituent atoms of the target. This is based on the principle that a film is formed by adhering to the surface of a substrate.

Normally, the sputtering target is bonded to a packing plate made of a material having good thermal conductivity such as copper by a roll material or the like, and this packing plate is cooled by means of water cooling or the like, and the sputtering target is indirectly cooled. It has a cooling structure.

Since the packing plate is reused in many cases, the sputtering target and the backing plate are joined with a low melting point brazing material / adhesive so that the sputtering target can be replaced. Conventionally, when a brazing material is applied to a sputtering target, a workpiece such as a sputtering target is placed on a workbench, and then an opening material is placed on the workpiece and the brazing material is heated and melted. However, the tool horn of the ultrasonic welder was brought into contact with the molten filler on the workpiece from above to apply the filler.

However, in the case of applying such a brazing material, when the work such as the target has a relatively small area, the work can be performed manually using a small ultrasonic welder. There was a big problem that the contact with the brazing material on the workpiece was unstable and the coating of the mouth material was uneven.

In addition, when applying to a large area target, it is desirable to use a large ultrasonic welder, but it is impossible to work by hand due to weight issues.

Therefore, the ultrasonic welder must be fixed and a method of moving the workpiece is inevitable.However, the workpiece must be moved, and in fact, the same problem of uneven brazing material as described above occurs. There has occurred.

In all of the above cases, processing is performed from the upper side of the workpiece, so if the supply of brazing material is too small, an uncoated portion will be generated. There is a problem of adhesion to parts that should not adhere. Therefore, it was necessary for the worker to constantly monitor the application status of the brazing material.

In addition, the tool horn of the ultrasonic welder often comes into direct contact with the workpiece due to the manual application work as described above, and as a result, the tool horn was worn. Therefore, it was necessary to replace the tool horn periodically, and there was much waste in the maintenance and work of the tool horn.

For this reason, instead of the method of applying a filler material on a work as described above, a method of filling a melting bath with a brazing material and contacting and applying the brazing material to the lower surface of the work. Can be considered. This is a general method for a printed circuit board or the like.

However, this method requires the application of a flux to improve the wettability of the brazing material on the surface of the workpiece, but for functional materials such as sputtering targets, flux contamination is acceptable. Therefore, this method cannot be applied as it is. Therefore, it is necessary to use an ultrasonic welder instead of the flux. However, if a conventional ultrasonic welder is used as it is, the ultrasonic oscillator must be immersed directly in the melting tank.

However, such a device requires a thermal protection device and a seal for the ultrasonic oscillator, and its structure is complicated and impractical.

Even if such a device could be used to immerse the ultrasonic oscillator directly in the melting tank, the volume of the melting tank would need to be increased in proportion to the size of the workpiece. The thing itself becomes large. In addition, when the equipment becomes large and the melting tank becomes large, a large amount of filler material is used. For example, when expensive indium is used as a brazing material, there is a problem in that the cost becomes large.

As described above, conventionally, there has been no method and apparatus for uniformly and efficiently applying a low melting point filler material to a large-area workpiece such as a sputtering target. Disclosure of the invention

An object of the present invention is to provide a method and an apparatus for coating a coating material capable of uniformly and efficiently applying a low melting point coating material (indium, lead-tin solder, tin-zinc solder, etc.) to a large-area workpiece such as a sputtering target. With the goal.

In order to solve the above-mentioned problems, the present inventors have conducted intensive research, and as a result, the brazing material was caused to flow only on the upper surface of the tool horn of the ultrasonic welder, and a sputtering target such as a sputtering target was formed on the flowing surface of the brazing material. It has been found that the brazing material can be uniformly and efficiently applied to the lower surface of the workpiece when it passes through the workpiece.

The present invention is based on this finding,

(1) The brazing material is caused to flow on the tool horn of the ultrasonic welder to oscillate ultrasonic waves, and at the same time, the work is passed through the surface of the flowing mouth material, and the brazing material is placed on the lower surface of the work. Coating method characterized by applying

(2) The method for coating an opening material according to the above (1), wherein the workpiece is a sputtering target. (3) A brazing material application device using an ultrasonic welder, which is a rectangular tool horn coupled to an ultrasonic oscillator, an inner tank surrounding the tool horn and having an upper end slightly below the tool horn, and an outer tank. A brazing material applicator, comprising an outer tank for containing a brazing material overflowing from the upper surface of the tool horn.

(4) The inner tank has a flow path for contacting the wide side surface of the tool horn and for allowing the brazing material to flow between the inner tank and the tool horn on a narrow side surface, and an introduction port for introducing a melting port material into the inner tank. 3. The brazing material coating device according to the above item 3, further comprising a discharge port for discharging the brazing material to the outer tank.

(5) The brazing material coating device according to any of (3) or (4) above, wherein the molten filler material is circulated between the tool horn and the molten filler material tank by an electromagnetic pump.

6 A conveyor device for transferring the workpiece is provided so that there is a gap of 0 to 3 mm between the mouth material flowing on the upper surface of the tool horn and the lower surface of the workpiece. The brazing material coating device according to any one of the above 3, 4, and 5

7.The above 3, 4, characterized in that the workpiece is a sputtering target

The brazing material coating device according to any one of 5 and 6

I will provide a. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is an explanatory view showing an outline of a brazing material coating apparatus A of the present invention, wherein (1) is a front view and (2) is a side view.

FIG. 2 is an explanatory diagram showing an overall image of the brazing material application step of the present invention. Embodiment of the Invention

Next, the present invention will be described with reference to the drawings. The following description based on the drawings shows one example of the present invention, and is not limited to this description. That is, it includes all other modifications and aspects based on the technical idea of the present invention. As shown in FIGS. 1 and 2, a brazing material applying apparatus A using an ultrasonic welder according to an example of the present invention includes a rectangular (plate-shaped) tool horn 2 coupled to an ultrasonic oscillator 1, and the tool horn 2. 2 has an upper tank 3 whose upper end 3 is located slightly below the tool horn 2, and an outer tank 7 which is located outside the inner tank 4 and contains a mouthpiece 6 overflowing from the upper surface 5 of the tool horn 2. .

One opposing inner wall forming the inner tub 4 is in contact with the wide side surface 8 of the tool horn 2, and the other opposing inner wall forming the inner tub 4 is located on the narrow side 9 of the tool horn 2. A passage (flow path) 10 for flowing the brazing material 6 between the inner tank 4 and the tool horn 2 and an inlet 11 for introducing the molten filler 6 into the inner tank 4 are provided. The tank 7 has a discharge port 12 for discharging the filler material. The tool horn 2 is usually connected to an ultrasonic oscillator via a cooler 13.

As shown in FIG. 2, the molten filler 6 is circulated between the tool horn 2 and the filler tank 14 by the electromagnetic pump 15. That is, the molten brazing material 6 in the brazing material tank 14 is sent to the inlet 11 of the inner tank 4 to the molten brazing material 6 via the feed pipe 16.

Further, the molten filler 6 coming out of the outlet 12 of the outer tank 7 is returned to the filler tank 14 via the return pipe 17. During the step of applying the brazing filler metal to the sputtering target, the circulating material 6 is circulated.

A conveyor device 18 such as a roller conveyor made of a heat-resistant resin is disposed above the mouth material coating device A, and a workpiece 19 such as a sputtering target is placed on the conveyor device 18 to perform coating on the lower surface. The conveyor device 18 can adjust the height position. In a normal work process, it is preferable that there is a gap of 0 to 3 mm between the base material flowing on the upper surface of the tool horn and the lower surface of the workpiece.

Next, an operation of applying a brazing material using a workpiece such as a sputtering target using the above-mentioned mouth material applying apparatus A will be described. The molten brazing material 6 such as indium melted in the mouth material tank 14 is sent to the inner tank 4 by the electromagnetic pump 15. In this case, the volume of the inner tank 4 is set to 500 CC, for example. However, this volume can be appropriately determined according to the size of the tool horn 2 of the ultrasonic welder. The molten filler 6 sent to the inner tank 4 swells about 5 mm from the upper end 3 of the inner tank 4 and overflows to the outer tank 7 due to the discharge force of the electromagnetic pump 15 and the surface tension of the molten filler. I do. Then, the molten filler material 6 accumulated in the overflowed outer tank 7 returns to the brazing material tank 14 via the return pipe 17.

The tool horn 2 of the ultrasonic welder is designed to be about 1 to 3 mm below the raised surface of the molten brazing material 6. Then, the ultrasonic wave is oscillated while overflowing the molten filler material 6, and is brought into contact with the lower surface of the workpiece 19 such as a sputtering target sent from the conveyor device 18 to apply the brazing material 6.

Assuming that the width of the tool horn 2 of the ultrasonic welder is, for example, 110 mm, the workpiece 19 having a width of 110 mm or less can be coated with the brazing material 6 in one pass regardless of its length. It is possible.

When using a tool horn 2 of this width (1 10 mm) to apply to a wider workpiece, the workpiece may be displaced and shifted several times to apply. It is also possible to apply the coating material coating apparatus A side by side in two or more rows. It is also possible to change the size of the tool horn 2 itself. The brazing material 6 in the brazing material tank 14 can be maintained at a constant temperature by adjusting the temperature of a heater (not shown) provided in the tank by a normal temperature controller.

It is convenient to use the electromagnetic pump 15 to transfer the molten brazing material 6, but a mechanical pump may be used. Also, the discharge amount of the electromagnetic pump 15 can be controlled by an impeller, and this control can be adjusted by providing a return circuit and a branch pulp and adjusting the opening degree of the pulp.

Also, the piping from the brazing material tank 14 to the electromagnetic pump 15 is provided at the bottom of the tank 14 so that oxide of the material floating on the melting material 6 is not involved. The invention's effect

The apparatus of the present invention can maintain a constant distance between the workpiece and the melter by adjusting the height of the front and rear rollers and the conveyor, and the tool horn of the ultrasonic welder is fixed. The coating is performed automatically, so that there is no unevenness in the coating by hand, which has a remarkable effect that uniform coating can be performed.

The brazing filler metal can be supplied until the melting tank is empty. In addition, since the workpiece is structurally in contact only with the lower surface, efficient application is possible, and there is no need to contaminate unnecessary parts.

The tool horn of the ultrasonic welder has the advantage that the tool horn can be used semi-permanently because it does not come into contact with the workpiece and the distance between them can be adjusted and maintained precisely. The use of an ultrasonic welder enables stable wettability to be maintained without the use of flux, and the tool horn only comes into contact with the molten brazing material, so there is no major adverse effect on the oscillator.

Claims

The scope of the claims

1. The brazing material is caused to flow on the tool horn of the ultrasonic welder to oscillate ultrasonic waves, and the work is passed through the surface of the flowing brazing material to apply the brazing material to the lower surface of the work. A brazing filler metal coating method.

2. The method for coating a mouth material according to claim 1, wherein the workpiece is a sputtering target.

3. A brazing material application device using an ultrasonic welder, the device being a rectangular tool horn coupled to an ultrasonic oscillation device, an inner tank surrounding the tool horn and having an upper end located slightly below the tool horn, and an A brazing material applicator, comprising an outer tank that is located outside the inner tank and contains a brazing material that overflows from the upper surface of the tool horn.

4. The inner tank has a flow path for contacting the tool horn with a wide side surface and a narrow path between the inner tank and the tool horn and an inlet for introducing a molten filler material into the inner tank. 4. The brazing material coating apparatus according to claim 3, wherein the brazing material is provided in the outer tank, and a discharge port for discharging the brazing material is provided in the outer tank.

5. The coating material coating apparatus according to claim 3, wherein the molten coating material is circulated between the tool horn and the molten coating material tank by an electromagnetic pump.

6. A conveyor device for transferring the workpiece so that there is a gap of 0 to 3 mm between the mouth material flowing on the upper surface of the tool horn and the lower surface of the workpiece. The brazing material application device according to any one of claims 3, 4 and 5,

7. The brazing material coating apparatus according to any one of claims 3, 4, 5, and 6, wherein the workpiece is a sputtering target.