JP3319740B2 - Brazing material coating device - Google Patents
Brazing material coating deviceInfo
- Publication number
- JP3319740B2 JP3319740B2 JP2000165971A JP2000165971A JP3319740B2 JP 3319740 B2 JP3319740 B2 JP 3319740B2 JP 2000165971 A JP2000165971 A JP 2000165971A JP 2000165971 A JP2000165971 A JP 2000165971A JP 3319740 B2 JP3319740 B2 JP 3319740B2
- Authority
- JP
- Japan
- Prior art keywords
- brazing material
- tool horn
- workpiece
- tank
- inner tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
Description
【０００１】本発明は、スパッタリングターゲットのよ
うな大面積の被加工物に均一に低融点ロウ材（インジウ
ム、鉛錫はんだ、錫亜鉛はんだ等）を塗布するロウ材塗
布装置に関する。The present invention relates to a brazing material coating method for uniformly applying a low melting point brazing material (indium, lead-tin solder, tin-zinc solder, etc.) to a large-area workpiece such as a sputtering target.
Related to a cloth device .
【０００２】[0002]
【従来の技術】近年、膜厚や成分を容易に制御できるス
パッタリング法が電子・電気部品用材料の成膜法の一つ
として多く使用されている。このスパッタリング法は正
の電極と負の電極とからなるターゲットとを対向させ、
不活性ガス雰囲気下でこれらの基板とターゲットの間に
高電圧を印加して電場を発生させるものであり、この時
電離した電子と不活性ガスが衝突してプラズマが形成さ
れ、このプラズマ中の陽イオンがターゲット（負の電
極）表面に衝突してターゲット構成原子を叩きだし、こ
の飛び出した原子が対向する基板表面に付着して膜が形
成されるという原理を用いたものである。2. Description of the Related Art In recent years, a sputtering method capable of easily controlling a film thickness and components has been widely used as one of film forming methods for materials for electronic and electric parts. In this sputtering method, a target composed of a positive electrode and a negative electrode is opposed to each other,
A high voltage is applied between the substrate and the target in an inert gas atmosphere to generate an electric field. At this time, the ionized electrons collide with the inert gas to form plasma, and the plasma is formed. This is based on the principle that positive ions collide with the surface of a target (negative electrode) and strike out constituent atoms of the target, and the ejected atoms adhere to the opposing substrate surface to form a film.
【０００３】通常、スパッタリングターゲットは銅等の
熱伝導性の良い材料で作製されたバッキングプレートに
ロウ材等により接合されており、このバッキングプレー
トを水冷等の手段により冷却し、間接的にスパッタリン
グターゲットを冷却する構造となっている。また、バッ
キングプレートは多くの場合再利用されるので、このス
パッタリングターゲットとバッキングプレートはスパッ
タリングターゲットの交換ができるように、低融点のロ
ウ材や接着剤で接合されている。[0003] Usually, a sputtering target is joined to a backing plate made of a material having good heat conductivity such as copper with a brazing material or the like, and this backing plate is cooled by means of water cooling or the like, and the sputtering target is indirectly cooled. It has a structure to cool. Further, since the backing plate is reused in many cases, the sputtering target and the backing plate are joined with a low melting point brazing material or an adhesive so that the sputtering target can be replaced.
【０００４】従来、スパッタリングターゲットのロウ材
の塗布に際しては、作業台上にスパッタリングターゲッ
ト等の被加工物を置き、次に被加工物の上にロウ材を置
いて該ロウ材を加熱溶融した後、超音波ウェルダーの工
具ホーンを上から被加工物上の溶融ロウ材に接触させロ
ウ材の塗布作業を行っていた。ところが、このようなロ
ウ材の塗布の場合、ターゲット等の被加工物が比較的少
面積の場合は小型の超音波ウェルダーを使用して手で作
業することができるが、手作業である以上被加工物上の
ロウ材との接触が不安定で、ロウ材の塗布にむらが生じ
ると言う大きな問題があった。また、大面積のターゲッ
トに塗布する場合、大型の超音波ウェルダーを使用する
ことが望まれるが、手でもって作業することは重量の問
題で無理がある。したがって、超音波ウェルダーを固定
し、被加工物を移動する方法を採らざるを得ないのであ
るが、逆に被加工物を移動させる必要があり、実際は上
記と同様のロウ材の塗りむらの問題が発生した。Conventionally, when a brazing material is applied to a sputtering target, a work such as a sputtering target is placed on a workbench, and then the brazing material is placed on the work and heated and melted. Then, the tool horn of the ultrasonic welder was brought into contact with the molten brazing material on the workpiece from above to apply the brazing material. However, in the case of applying such a brazing material, when a workpiece such as a target has a relatively small area, the work can be performed manually using a small ultrasonic welder. There was a major problem that the contact with the brazing material on the workpiece was unstable, causing uneven application of the brazing material. When applying to a target having a large area, it is desirable to use a large ultrasonic welder, but it is impossible to work by hand due to the weight problem. Therefore, it is inevitable to adopt a method of moving the workpiece while fixing the ultrasonic welder, but it is necessary to move the workpiece in reverse. There has occurred.
【０００５】上記の場合、いずれも被加工物の上側から
加工することになるので、ロウ材の供給が少なすぎると
未塗布部が発生し、多すぎると被加工物表面から流出し
て本来ロウ材が付着してはならない部分まで付着する問
題がある。従って、作業者が常にロウ材の塗布状況を細
かく監視する必要があったまた、上記のように手で塗布
作業を行うために、超音波ウェルダーの工具ホーンが被
加工物と直接接触することもしばしば起こり、このため
に工具ホーンの摩耗が発生した。したがって、工具ホー
ンを定期的に交換する必要があり、工具ホーンのメンテ
ナンスや作業に無駄が多かった。[0005] In any of the above cases, since the processing is performed from the upper side of the workpiece, if the supply of the brazing material is too small, an uncoated portion occurs. There is a problem that the material adheres to a portion that should not adhere. Therefore, it was necessary for the operator to always closely monitor the application state of the brazing material.In addition, the tool horn of the ultrasonic welder may be in direct contact with the workpiece to perform the application operation by hand as described above. Often, this resulted in tool horn wear. Therefore, the tool horn needs to be replaced regularly, and there is much waste in maintenance and work of the tool horn.
【０００６】このようなことから、上記のように被加工
物の上にロウ材を塗布する手法に替えて、ロウ材を溶融
槽に満たし、被加工物の下面にロウ材を接触させて塗布
する方法が考えられる。これはプリント基板などで一般
的な手法である。しかし、この方法は、被加工物の表面
にロウ材の濡れ性を改善するために、フラックスを塗布
する必要があるが、スパッタリングターゲットのような
機能性材料の場合、フラックスによる汚染は許容され
ず、この手法をそのまま適用することはできない。した
がって、フラックスに替えて超音波ウエルダーを使用す
る必要があるが、従来の超音波ウエルダーをそのまま使
用する場合には、溶融槽の中に超音波発振子を直接浸漬
する構造にしなければならない。しかし、このような装
置は超音波発振子に対する熱的防護装置やシールが必要
であり、構造が複雑化し現実的でない。たとえ、このよ
うな溶融槽の中に超音波発振子を直接浸漬する装置が可
能であるにしても、溶融槽の容積が被加工物の大きさに
比例させて大きくする必要があり装置そのものが大型化
する。また、装置が大型化し、溶融槽が大きくなるとロ
ウ材も多く使用することになり、例えば高価なインジウ
ムをロウ材として使用する場合は、コスト面でも大きな
負担となる問題がある。以上から、従来はスパッタリン
グターゲットのような大面積の被加工物に、低融点ロウ
材を均一かつ効率良く塗布する方法及び装置は存在して
いなかった。In view of the above, instead of the method of applying a brazing material on a work as described above, a melting bath is filled with a brazing material, and the brazing material is applied by contacting the lower surface of the work. There is a way to do it. This is a general method for a printed circuit board or the like. However, in this method, it is necessary to apply a flux to improve the wettability of the brazing material on the surface of the workpiece, but in the case of a functional material such as a sputtering target, flux contamination is not allowed. However, this method cannot be applied as it is. Therefore, it is necessary to use an ultrasonic welder instead of the flux. However, if a conventional ultrasonic welder is used as it is, the ultrasonic oscillator must be immersed directly in the melting tank. However, such a device requires a thermal protection device and a seal for the ultrasonic oscillator, and the structure is complicated and unrealistic. Even if an apparatus in which the ultrasonic oscillator is directly immersed in such a melting tank is possible, the volume of the melting tank needs to be increased in proportion to the size of the workpiece, and the apparatus itself is required. Increase in size. In addition, when the size of the apparatus is increased and the melting tank becomes large, a large amount of brazing material is used. For example, when expensive indium is used as the brazing material, there is a problem in that the cost becomes large. As described above, there has been no method and apparatus for uniformly and efficiently applying a low melting point brazing material to a large-area workpiece such as a sputtering target.
【０００７】[0007]
【発明が解決しようとする課題】本発明は、スパッタリ
ングターゲットのような大面積の被加工物に低融点ロウ
材（インジウム、鉛錫はんだ、錫亜鉛はんだ等）を均一
かつ効率良く塗布できるロウ材塗布装置を得ることを目
的とする。SUMMARY OF THE INVENTION The present invention relates to a brazing material capable of uniformly and efficiently applying a low melting point brazing material (indium, lead tin solder, tin zinc solder, etc.) to a large-area workpiece such as a sputtering target. The purpose is to obtain a coating device .
【０００８】[0008]
【課題を解決するための手段】上記の課題を解決するた
めに、本発明者らは鋭意研究を行なった結果、超音波ウ
ェルダーの工具ホーン上面のみにロウ材を流動させ、そ
のロウ材流動面上をスパッタリングターゲット等の大面
積被加工物を通過させると、その下面にロウ材を均一か
つ効率良く塗布できるとの知見を得た。本発明はこの知
見に基づき、 １ 超音波ウェルダーによるロウ材塗布装置であって、
該装置は超音波発振装置に結合する矩形の工具ホーン、
該工具ホーンを囲み上端が工具ホーンのやや下方に位置
する内槽及び内槽の外側に位置し工具ホーンの上面から
オーバーフローするロウ材を収容する外槽を備えている
ことを特徴とするロウ材塗布装置。 ２ 前記内槽は、工具ホーンの広幅側面に接するととも
に狭側面に内槽と工具ホーンとの間にロウ材を流動させ
る流動路及び該内槽に溶融ロウ材を導入する導入口を備
え、かつ外槽にロウ材を排出する排出口を備えているこ
とを特徴とする上記１記載のロウ材塗布装置 ３ 工具ホーンと溶融ロウ材タンクとの間で溶融ロウ材
を電磁ポンプにより循環させることを特徴とする上記１
又は２のいずれかに記載のロウ材塗布装置 ４ 工具ホーンの上面に流動するロウ材と被加工物の下
面との間に０〜３ｍｍの間隔があるように、該被加工物
を移送するコンベヤー装置を備えていることを特徴とす
る上記１、２、３のいずれかに記載のロウ材塗布装置 ５ 被加工物がスパッタリングターゲットであることを
特徴とする上記１、２、３、４のいずれかに記載のロウ
材塗布装置、を提供する。Means for Solving the Problems In order to solve the above-mentioned problems, the inventors of the present invention have conducted intensive studies and as a result, made the brazing material flow only on the upper surface of the tool horn of the ultrasonic welder, and the brazing material flow surface It has been found that when a large-area workpiece such as a sputtering target is passed over the upper surface, the brazing material can be uniformly and efficiently applied to the lower surface thereof. The present invention is based on this finding, 1 is a brazing material coating device using an ultrasonic welder,
The device is a rectangular tool horn coupled to an ultrasonic oscillator,
A brazing material comprising an inner tank surrounding the tool horn, the upper end of which is located slightly below the tool horn, and an outer tank which is located outside the inner tank and contains a brazing material which overflows from the upper surface of the tool horn. Coating device. (2) The inner tank is provided with a flow path for contacting the wide side surface of the tool horn and for flowing the brazing material between the inner tank and the tool horn on the narrow side surface, and an inlet for introducing the molten brazing material into the inner tank, and 3. The brazing material coating device according to the above item 1, wherein the outer bath is provided with a discharge port for discharging the brazing material. 3. Circulating the molten brazing material between the tool horn and the molten brazing material tank by an electromagnetic pump. Characteristic 1 above
Or the brazing material coating apparatus according to any one of 2 to 4, a conveyor for transferring the workpiece so that there is an interval of 0 to 3 mm between the brazing material flowing on the upper surface of the tool horn and the lower surface of the workpiece. 5. The brazing material coating device according to any one of the above items 1, 2 and 3, wherein the device is provided with a device. And a brazing material application device.
【０００９】[0009]
【００１０】次に、本発明を図面に沿って説明する。な
お、以下の図面に基づく説明は本発明の１例を示すもの
で、この説明に限定されるものではない。すなわち、本
発明の技術思想に基づく他の変形や態様を全て含むもの
である。図１（（１）は正面図、（２）は側面図を示
す。）及び図２に示すように、本発明の一例を示す超音
波ウェルダーによるロウ材塗布装置Ａは、超音波発振装
置１に結合する矩形（板状）の工具ホーン２と、該工具
ホーン２を囲み上端３が工具ホーン２のやや下方に位置
する内槽４と、内槽４の外側に位置し工具ホーン２の上
面５からオーバーフローするロウ材６を収容する外槽７
を有する。Next, the present invention will be described with reference to the drawings. The following description based on the drawings shows an example of the present invention, and the present invention is not limited to this description. That is, it includes all other modifications and aspects based on the technical idea of the present invention. As shown in FIG. 1 ((1) is a front view and (2) is a side view) and FIG. 2, a brazing material application device A using an ultrasonic welder according to an example of the present invention is an ultrasonic oscillation device 1. A tool horn 2 connected to the tool horn 2, an inner tank 4 surrounding the tool horn 2 and having an upper end 3 positioned slightly below the tool horn 2, and an upper surface of the tool horn 2 positioned outside the inner tank 4 Outer tub 7 containing brazing material 6 overflowing from 5
Having.
【００１１】内槽４を形成する一方の対向する内壁は工
具ホーン２の広幅側面８に接し、該内槽４を形成する他
方の対向する内壁は工具ホーン２の狭側面９に位置す
る。そして、内槽４と工具ホーン２との間にロウ材６を
流動させる通路（流動路）１０及び内槽４に溶融ロウ材
６を導入する導入口１１を有し、また外槽７はロウ材を
排出する排出口１２を有する。工具ホーン２は、通常冷
却器１３を介して超音波発振装置に結合させる。One opposing inner wall forming the inner tub 4 contacts the wide side surface 8 of the tool horn 2, and the other opposing inner wall forming the inner tub 4 is located on the narrow side surface 9 of the tool horn 2. A passage (flow path) 10 for flowing the brazing material 6 between the inner tank 4 and the tool horn 2 and an inlet 11 for introducing the molten brazing material 6 to the inner tank 4 are provided. It has a discharge port 12 for discharging the material. The tool horn 2 is usually coupled to the ultrasonic oscillator via a cooler 13.
【００１２】図２に示すように、工具ホーン２とロウ材
タンク１４との間で溶融ロウ材６を電磁ポンプ１５によ
り循環させる。即ち、ロウ材タンク１４中の溶融ロウ材
６を送り配管１６を介して、前記内槽４の導入口１１に
溶融ロウ材６に送る。また、外槽７の排出口１２から出
た溶融ロウ材６は、戻り配管１７を介してロウ材タンク
１４に戻す。スパッタリングターゲットへのロウ材塗布
工程中、この溶融ロウ材６の循環を行う。ロウ材塗布装
置Ａの上部には、耐熱樹脂製ローラーコンベア等のコン
ベア装置１８を配置し、これにスパッタリングターゲッ
ト等の被加工物１９を載せ下面への塗布を行う。コンベ
ア装置１８は高さ位置を調節できるようになっている。
通常の作業工程では、工具ホーンの上面に流動するロウ
材と被加工物の下面との間に０〜３ｍｍの間隔があるよ
うにするのが良い。As shown in FIG. 2, the molten brazing material 6 is circulated between the tool horn 2 and the brazing material tank 14 by an electromagnetic pump 15. That is, the molten brazing material 6 in the brazing material tank 14 is sent to the inlet 11 of the inner tank 4 through the feed pipe 16 to the molten brazing material 6. In addition, the molten brazing material 6 that has exited from the outlet 12 of the outer tank 7 is returned to the brazing material tank 14 via the return pipe 17. During the step of applying the brazing material to the sputtering target, the molten brazing material 6 is circulated. A conveyor device 18 such as a roller conveyor made of a heat-resistant resin is disposed above the brazing material application device A, and a workpiece 19 such as a sputtering target is placed on the conveyor device 18 to perform application on the lower surface. The conveyor device 18 can adjust the height position.
In a normal working process, it is preferable that there is a space of 0 to 3 mm between the brazing material flowing on the upper surface of the tool horn and the lower surface of the workpiece.
【００１３】次に、上記ロウ材塗布装置Ａを用いてスパ
ッタリングターゲット等の被加工物を用いてロウ材を塗
布する操作について説明する。ロウ材タンク１４で溶融
させたインジウム等の溶融ロウ材６を、電磁ポンプ１５
により内槽４に送る。この場合、内槽４の容積を例えば
５００ＣＣする。しかし、この容積は超音波ウェルダー
の工具ホーン２の大きさに合わせて適宜決めることがで
きる。内槽４に送られた溶融ロウ材６は電磁ポンプ１５
の吐出力と溶融ロウ材の表面張力により、約５ｍｍほど
内槽４の上端３より盛り上がり、外槽７にオーバーフロ
ーする。そしてこのオーバーフローした外槽７に溜まっ
た溶融ロウ材６は戻り配管１７を介して、ロウ材タンク
１４に戻る。Next, an operation of applying a brazing material using a workpiece such as a sputtering target using the brazing material applying apparatus A will be described. The molten brazing material 6 such as indium melted in the brazing material tank 14 is supplied to the electromagnetic pump 15.
To the inner tank 4. In this case, the capacity of the inner tank 4 is set to, for example, 500 CC. However, this volume can be appropriately determined according to the size of the tool horn 2 of the ultrasonic welder. The molten brazing material 6 sent to the inner tank 4 is
About 5 mm from the upper end 3 of the inner tank 4 and overflow to the outer tank 7 due to the discharge force of the molten solder and the surface tension of the molten brazing material. Then, the molten brazing material 6 accumulated in the overflowed outer tank 7 returns to the brazing material tank 14 via the return pipe 17.
【００１４】超音波ウェルダーの工具ホーン２は、溶融
ロウ材６の盛上がり面より１〜３ｍｍ程度下にくるよう
に設計される。そして該溶融ロウ材６をオーバーフロー
させながら、超音波を発振させ、コンベア装置１８から
送られてきたスパッタリングターゲット等の被加工物１
９の下面に接触させてロウ材６を塗布する。超音波ウェ
ルダーの工具ホーン２の幅を、例えば１１０ｍｍとする
と、１１０ｍｍ以内の幅の被加工物１９は、その長さを
問わず一回の通過でロウ材６の塗布か可能である。この
幅（１１０ｍｍ）の工具ホーン２を使用して、これ以上
の幅の広い被加工物に塗布する場合には、被加工物の位
置をずらして数回通過させて塗布することもできるし、
またこのロウ材塗布装置Ａを２連以上並べて塗布するこ
ともできる。また、工具ホーン２そのもののサイズを変
更することによっても可能である。The tool horn 2 of the ultrasonic welder is designed to be about 1 to 3 mm below the raised surface of the molten brazing material 6. Then, while causing the molten brazing material 6 to overflow, ultrasonic waves are oscillated, and the workpiece 1 such as a sputtering target sent from the conveyor device 18 is oscillated.
The brazing material 6 is applied in contact with the lower surface of the soldering material 9. If the width of the tool horn 2 of the ultrasonic welder is, for example, 110 mm, the workpiece 19 having a width of 110 mm or less can be coated with the brazing material 6 in one pass regardless of its length. When using a tool horn 2 of this width (110 mm) to apply to a workpiece that is wider than this, the workpiece can be displaced and shifted several times to apply.
In addition, two or more brazing material application devices A can be applied side by side. It is also possible to change the size of the tool horn 2 itself.
【００１５】ロウ材タンク１４中のロウ材６はタンク内
に設けたヒーター（図示せず。）の温度を、通常の温度
調整器により調節して温度を一定に保つことができる。
溶融ロウ材６の移送に電磁ポンプ１５を使用するのが便
利であるが、機械式ポンプを使用しても良い。また、電
磁ポンプ１５の吐出量をインバーターで制御することが
でき、またこの制御を戻り回路と分岐バルブを設け、こ
のバルブ開度で調節することもできる。また、ロウ材タ
ンク１４からの電磁ポンプ１５への配管は、タンク１４
の底部に設け、溶融ロウ材６に浮かぶロウ材の酸化物を
巻き込まない構造とする。The temperature of the brazing material 6 in the brazing material tank 14 can be kept constant by adjusting the temperature of a heater (not shown) provided in the tank with a usual temperature controller.
Although it is convenient to use the electromagnetic pump 15 for transferring the molten brazing material 6, a mechanical pump may be used. Further, the discharge amount of the electromagnetic pump 15 can be controlled by an inverter, and this control can be adjusted by providing a return circuit and a branch valve and opening the valve. The piping from the brazing material tank 14 to the electromagnetic pump 15 is
At the bottom of the molten brazing material 6, so that the oxide of the brazing material floating on the molten brazing material 6 is not involved.
【００１６】[0016]
【発明の効果】本発明の装置は、前後のローラーコンベ
アの高さを調整することにより、被加工材と溶融ロウ材
の一定の距離を保つことが可能であり、また超音波ウェ
ルダーの工具ホーンが固定され、自動的に塗布ができの
で、手作業による塗布むら等が発生せず、均一な塗布が
できる著しい効果を有する。ロウ材は、溶融槽が空にな
るまで供給することができる。また、被加工物は構造的
に下面しか接触しないので効率的な塗布が可能であり、
塗布不要の個所を汚染することもない。超音波ウェルダ
ーの工具ホーンは被加工物と接触せず、その間の距離を
正確に調節かつ維持できるので、工具ホーンを半永久的
に使用できる利点がある。超音波ウェルダーを使用する
のでフラックス使用せずに安定した濡れ性を維持するこ
とができ、また工具ホーンのみが溶融ロウ材と接触する
ので、発振部への悪影響がないという大きな特徴を有す
る。The apparatus of the present invention can maintain a constant distance between the workpiece and the molten brazing material by adjusting the height of the front and rear roller conveyors, and can also maintain the tool horn of the ultrasonic welder. Is fixed and coating can be performed automatically, so that there is no remarkable effect that uniform coating can be performed without application unevenness or the like caused by manual operation. The brazing material can be supplied until the melting tank is empty. Also, since the workpiece is structurally in contact only with the lower surface, efficient application is possible,
There is no contamination of the unnecessary parts. The tool horn of the ultrasonic welder has the advantage that the tool horn can be used semi-permanently because it does not come into contact with the workpiece and the distance between them can be precisely adjusted and maintained. Since an ultrasonic welder is used, stable wettability can be maintained without using a flux, and since only the tool horn comes into contact with the molten brazing material, there is a great feature that there is no adverse effect on the oscillation part.
【図１】本発明のロウ材塗布装置Ａの概要を示す説明図
であり、（１）は正面図、（２）は側面図を示す。FIG. 1 is an explanatory view showing an outline of a brazing material coating apparatus A of the present invention, wherein (1) is a front view and (2) is a side view.
【図２】本発明のロウ材塗布工程の全体像を示す説明図
である。FIG. 2 is an explanatory view showing an overall image of a brazing material application step of the present invention.
Ａ ロウ材塗布装置Ａ １ 超音波発振装置 ２ 工具ホーン ３ 上端 ４ 内槽 ５ 上面 ６ ロウ材 ７ 外槽 ８ 広幅側面 ９ 狭側面 １０ 通路（流動路） １１ 導入口 １２ 排出口 １３ 冷却器 １４ ロウ材タンク １５ 電磁ポンプ １６ 送り配管 １７ 戻り配管 １８ コンベア装置 １９ 被加工物 A Brazing material application device A 1 Ultrasonic oscillator 2 Tool horn 3 Upper end 4 Inner tub 5 Upper surface 6 Brazing material 7 Outer tub 8 Wide side surface 9 Narrow side surface 10 Passage (flow path) 11 Inlet 12 Outlet 13 Cooler 14 Row Material tank 15 Electromagnetic pump 16 Feed pipe 17 Return pipe 18 Conveyor device 19 Workpiece
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ Ｃ２３Ｃ 14/34 Ｃ２３Ｃ 14/34 Ｃ (58)調査した分野(Int.Cl.7，ＤＢ名) B23K 1/00 B23K 1/08 B05C 1/02 B05C 11/10 B05D 1/26 C23C 14/34 ──────────────────────────────────────────────────続 き Continuation of the front page (51) Int.Cl. 7 identification code FI C23C 14/34 C23C 14/34 C (58) Field surveyed (Int.Cl. 7 , DB name) B23K 1/00 B23K 1 / 08 B05C 1/02 B05C 11/10 B05D 1/26 C23C 14/34
Claims (5)
であって、該装置は超音波発振装置に結合する矩形の工
具ホーン、該工具ホーンを囲み上端が工具ホーンのやや
下方に位置する内槽及び該内槽の外側に位置し工具ホー
ンの上面からオーバーフローするロウ材を収容する外槽
を備えていることを特徴とするロウ材塗布装置。1. A brazing material application device using an ultrasonic welder, comprising a rectangular tool horn coupled to an ultrasonic oscillator, an inner tank surrounding the tool horn and having an upper end located slightly below the tool horn, and A brazing material application device, comprising: an outer tank that is located outside the inner tank and contains a brazing material that overflows from the upper surface of the tool horn.
するとともに狭側面に内槽と工具ホーンとの間にロウ材
を流動させる流動路及び内槽に溶融ロウ材を導入する導
入口を備え、かつ外槽にロウ材を排出する排出口を備え
ていることを特徴とする請求項１記載のロウ材塗布装
置。2. The inner tank has a flow path that contacts a wide side surface of the tool horn and has a narrow side surface through which a brazing material flows between the inner tank and the tool horn, and an introduction port that introduces a molten brazing material into the inner tank. 2. The brazing material coating apparatus according to claim 1, further comprising a discharge port for discharging the brazing material to the outer tank.
溶融ロウ材を電磁ポンプにより循環させることを特徴と
する請求項１又は２のいずれかに記載のロウ材塗布装
置。3. The brazing material applying apparatus according to claim 1, wherein the molten brazing material is circulated between the tool horn and the molten brazing material tank by an electromagnetic pump.
加工物の下面との間に０〜３ｍｍの間隔があるように、
該被加工物を移送するコンベヤー装置を備えていること
を特徴とする請求項１、２、３のいずれかに記載のロウ
材塗布装置。4. An apparatus according to claim 1, wherein a space between the brazing material flowing on the upper surface of the tool horn and the lower surface of the workpiece is 0 to 3 mm.
4. The brazing material coating device according to claim 1, further comprising a conveyor device for transferring the workpiece.
あることを特徴とする請求項１、２、３、４のいずれか
に記載のロウ材塗布装置。5. The brazing material coating apparatus according to claim 1, wherein the workpiece is a sputtering target.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000165971A JP3319740B2 (en) | 2000-06-02 | 2000-06-02 | Brazing material coating device |
| CN 01803060 CN1193855C (en) | 2000-06-02 | 2001-03-23 | Coating method and device for solder material |
| PCT/JP2001/002409 WO2001094068A1 (en) | 2000-06-02 | 2001-03-23 | Waxed fabric producing method and device therefor |
| TW90110388A TW524866B (en) | 2000-06-02 | 2001-05-01 | Welding material spreading method and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000165971A JP3319740B2 (en) | 2000-06-02 | 2000-06-02 | Brazing material coating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001340959A JP2001340959A (en) | 2001-12-11 |
| JP3319740B2 true JP3319740B2 (en) | 2002-09-03 |
Family
ID=18669361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000165971A Expired - Fee Related JP3319740B2 (en) | 2000-06-02 | 2000-06-02 | Brazing material coating device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP3319740B2 (en) |
| CN (1) | CN1193855C (en) |
| TW (1) | TW524866B (en) |
| WO (1) | WO2001094068A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI496621B (en) * | 2010-10-26 | 2015-08-21 | Prologium Technology Co | Coating head and coating machine using the same |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100785208B1 (en) * | 2005-06-15 | 2007-12-11 | 미쓰이 긴조꾸 고교 가부시키가이샤 | Solder Alloy for Manufacturing Sputtering Target and Sputtering Target Using the same |
| CN101396751B (en) * | 2007-09-27 | 2011-03-02 | 比亚迪股份有限公司 | Solder-reflow soldering method |
| CN101768723B (en) * | 2009-12-30 | 2012-05-09 | 宁波江丰电子材料有限公司 | Large-size target ultrasonic treatment device and treatment method thereof |
| DE102011051024A1 (en) * | 2011-05-17 | 2012-11-22 | Schott Solar Ag | Method for integrally joining elements |
| CN103128390B (en) * | 2011-11-30 | 2016-06-08 | 亚企睦自动设备有限公司 | Welding ring pre-fix device and welding ring pre-fix method |
| CH706712A1 (en) * | 2012-07-05 | 2014-01-15 | Besi Switzerland Ag | Method and apparatus for dispensing solder onto a substrate. |
| CN103921499B (en) * | 2014-04-22 | 2017-02-15 | 刘建忠 | Metal material with excellent soldering performance |
| JP6689309B2 (en) | 2018-03-26 | 2020-04-28 | Ｊｘ金属株式会社 | Sputtering target member, sputtering target assembly, and method for manufacturing sputtering target member |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0753808Y2 (en) * | 1991-07-16 | 1995-12-13 | 黒田電気株式会社 | Jet type ultrasonic brazing device |
| US5230462A (en) * | 1992-07-08 | 1993-07-27 | Materials Research Corporation | Method of soldering a sputtering target to a backing member |
-
2000
- 2000-06-02 JP JP2000165971A patent/JP3319740B2/en not_active Expired - Fee Related
-
2001
- 2001-03-23 WO PCT/JP2001/002409 patent/WO2001094068A1/en active Application Filing
- 2001-03-23 CN CN 01803060 patent/CN1193855C/en not_active Expired - Fee Related
- 2001-05-01 TW TW90110388A patent/TW524866B/en not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI496621B (en) * | 2010-10-26 | 2015-08-21 | Prologium Technology Co | Coating head and coating machine using the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2001340959A (en) | 2001-12-11 |
| WO2001094068A1 (en) | 2001-12-13 |
| TW524866B (en) | 2003-03-21 |
| CN1193855C (en) | 2005-03-23 |
| CN1392816A (en) | 2003-01-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0875331B1 (en) | Method of bonding an electronic part to a substrate. | |
| JP3592486B2 (en) | Soldering equipment | |
| US6427898B2 (en) | Solder bump forming method and apparatus | |
| JP3319740B2 (en) | Brazing material coating device | |
| US20080302861A1 (en) | Method and apparatus for wave soldering an electronic substrate | |
| US4909429A (en) | Method and apparatus for solder deposition | |
| US6935553B2 (en) | Reflow soldering method | |
| US6478215B2 (en) | Automatic wave soldering apparatus and method | |
| US6575352B2 (en) | Apparatus and method for soldering electronic components to printed circuit boards | |
| JPH05235061A (en) | Electronic circuit joining device and method, solder ball, and aligning mark | |
| JPH0783930B2 (en) | Method and device for mounting electronic components on a substrate | |
| JPH09307219A (en) | Soldering treatment | |
| US4973500A (en) | Method of plating metal sheets by passing the sheet upwards in close proximity to an upwardly directed nozzle | |
| JP2012121046A (en) | Soldering method and soldering device | |
| JP2004106061A (en) | Manufacturing method for printed circuit board unit and soldering device | |
| JPH03118962A (en) | Vapor reflowing type soldering apparatus | |
| Diepstraten | Wave/Selective Soldering | |
| JP3617793B2 (en) | Soldering method and soldering apparatus | |
| JPH10290066A (en) | Part mounting method and equipment | |
| JP2527452B2 (en) | Soldering equipment | |
| US20060138201A1 (en) | Method of manufacturing an electronic component and apparatus for carrying out the method | |
| JP3926084B2 (en) | Flow soldering equipment | |
| JPS6298692A (en) | Apparatus for heated tin plating of printed circuit board and method of soldering terminals of electronic parts to conductor patterns and insertion holes of printed circuit board | |
| JP2007253101A (en) | Spray fluxer apparatus | |
| JP2000052031A (en) | Preliminal soldering device for electronic parts |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20020604 |
|
| LAPS | Cancellation because of no payment of annual fees |