CN1392816A - Coating method and device for solder material - Google Patents
Coating method and device for solder material Download PDFInfo
- Publication number
- CN1392816A CN1392816A CN 01803060 CN01803060A CN1392816A CN 1392816 A CN1392816 A CN 1392816A CN 01803060 CN01803060 CN 01803060 CN 01803060 A CN01803060 A CN 01803060A CN 1392816 A CN1392816 A CN 1392816A
- Authority
- CN
- China
- Prior art keywords
- brazing material
- sounding head
- work piece
- coating
- inside groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
Abstract
The present invention relates to a waxed fabric producing method comprising the steps of flowing wax over the tool horn of an ultrasonic welder, producing ultrasonic waves, and passing work along the surface of the flowing wax to apply the wax to the work; and a device therefor. Low-melting waxes (indium, lead-tin solder, tin-zinc solder, etc.) can be automatically and uniformly applied to work of large area, such as sputtering targets.
Description
Technical field
The invention relates on the sort of large tracts of land work piece of sputtering target, apply the brazing material coating method of low melting point brazing material (indium, lead-tin solder, tin-zinc solder etc.) and the invention of device equably.
Background technology
As electronics, electric parts one of film build method of material, be extensive use of the sputtering method of thickness and easy control of components in recent years.
The principle that this sputtering method adopts is: under inert gas environment, be provided with the target that positive electrode and negative electrode are formed in pairs, additional high voltage between these substrates and target, produce electric field, the electronics of ionization this moment and inert gas impact, and form plasma, cation impact target (negative electrode) surface in this plasma, inspire the atom that constitutes target, this atom that flies out forms film attached to substrate surface.
The structure of general sputtering target is: sputtering target is welded on the gripper shoe of making of the good material of thermal conductivity such as copper with materials such as solderings, cools off this gripper shoe with means such as water-cooleds, cool off sputtering target indirectly.
Because most of gripper shoes will reuse, so will be with low-melting brazing material welding sputtering target and gripper shoe, so that change sputtering target.
Carrying out coat operations now is: when applying brazing material on sputtering target, place work pieces such as sputtering target on the operating desk, on work piece, place brazing material then, behind the brazing material heating and melting, the sounding head of ultrasonic welder is contacted from fusion brazing material top and on the work piece.
When applying brazing material like this, under the smaller area situation of work pieces such as target, use miniature ultrasonic ripple soldering apparatus can operate with hand, but when operating by hand with work piece on brazing material contact just unstablely, have and the big problem that brazing material applies inequality occurs.
Wish to use large-scale ultrasonic welder when applying large area target in addition, because weight issue is unsuitable for using hand operated.
Therefore have to adopt the mounting ultrasonic soldering apparatus, the method for mobile work piece must make work piece move conversely, in fact produces the uneven problem of brazing material coating same as described above.
Under the above-mentioned situation owing to all above work piece, process, the very few words of the brazing material of usefulness have be coated with less than the place, too much words flow out from the work piece surface, the problem that the position of brazing material is coated with can occur not applying.Therefore the operator usually needs to examine the situation of coating brazing material.
Owing to apply by hand as described above, directly contacting with work piece again and again can appear in the sounding head of ultrasonic welder, causes the wearing and tearing of sounding head in addition.Therefore will regularly replace the sounding head, the maintenance and operation waste of sounding head is big.
Consider thus to change the above-mentioned method that on work piece, applies brazing material, brazing material is full of fusion tank, the coating method that the work piece lower surface is contacted with brazing material.This is the middle conventional methods that adopt such as printed substrate.
This method needs the coating flux in order to improve the soakage of brazing material on the work piece surface, under the situation of the such functional material of sputtering target, does not allow flux to pollute, and can not directly use such method.
Therefore need to use ultrasonic welder replace flux, directly use under the situation of existing ultrasonic welder, must adopt hyperacoustic oscillator directly is immersed in structure in the fusion tank.
Such device must have the thermal protection and the sealing device of pair ultrasonic oscillator, and complex structure is unpractical.
Even for example can directly be immersed in ultrasonic oscillator in such fusion tank, the volume of fusion tank is proportional with the work piece size, so will become big, device will maximize.Device maximizes in addition, and it is big that fusion tank becomes, and it is many that the brazing material of use is also wanted, and when for example using expensive indium to use as brazing material, will produce the excessive problem of cost burden.
From as can be seen above, not on large-area work piece as sputtering target, evenly and effectively apply the method and apparatus of low melting point brazing material at present.
Summary of the invention
The objective of the invention is to obtain on large-area work piece as sputtering target, can be evenly and apply the coating method and the device of low melting point brazing material (indium, lead-tin solder, tin-zinc solder etc.) effectively.
In order to solve above-mentioned problem, what the inventor made great efforts to study found that, brazing material is only flowed on ultrasonic welder sounding head, large tracts of land work pieces such as sputtering target are passed through on its brazing material flow surface, just can evenly and effectively be coated with and apply brazing material at its lower surface.
The present invention provides on the basis of this understanding:
1. apply the method for brazing material: brazing material is flowed, produce hyperacoustic work piece that makes simultaneously and pass through the brazing material surface that this flows, at the lower surface coating brazing material of this work piece on the sounding head of ultrasonic welder.
2. as the method for above-mentioned 1 described coating brazing material, it is characterized by: work piece is a sputtering target.
3. the device of coating brazing material: be the device that utilizes the coating brazing material of ultrasonic welder, this device is provided with the rectangle sounding head that integrally combines with ultrasonic oscillator, surround this sounding head and upper end is positioned at the inside groove that is lower than the sounding head slightly, is positioned at the outer water jacket of collecting the brazing material that overflows from sounding head upper surface of inside groove.
4. the device of above-mentioned 3 described coating brazing materials, it is characterized by: above-mentioned inside groove and sounding head breadth contacts side surfaces have simultaneously flow passage that brazing material is flowed, have the introducing port that the fusion brazing material is imported this inside groove between narrow side inside groove and sounding head.And on water jacket, be provided with the outlet of discharging brazing material.
5. the device of the coating of any described in above-mentioned 3 or 4 brazing material is characterized by: between sounding head and fusion brazing material hold-up tank, make the circulation of fusion brazing material with electromagnetic pump.
6. as the device of any coating brazing material described in above-mentioned 3,4,5, it is characterized by: be provided with the conveyer of carrying this work piece, making between brazing material that sounding head upper surface flows and work piece lower surface has 0～3mm at interval.
7. any described in above-mentioned 3,4,5,6 applies the device of brazing material, and it is characterized by: work piece is a sputtering target.
Brief Description Of Drawings
Fig. 1 is the key diagram of schematic representation brazing material applying device of the present invention A, and (1) is front view, and (2) are side view.
Fig. 2 is the key diagram of expression brazing material working procedure of coating overall picture of the present invention.
The working of an invention mode
The present invention will be described with figure below.Explanation according to figure below is an example of the present invention, is not only to be defined as this explanation.That is to say other variations and the mode that comprise according to the technology of the present invention thought.
As depicted in figs. 1 and 2, brazing material applying device A is the example of the present invention that ultrasonic welder is adopted in expression, and brazing material applying device A has rectangle (tabular) the sounding head 2 that integrally combines with supersonic oscillations device 1, surround this sounding head 2 and upper end 3 is positioned at the inside groove 4 that is lower than sounding head 2 slightly, is positioned at the outer water jacket 7 of collecting the brazing material 6 that overflows from sounding head 2 upper surfaces 5 of inside groove 4.
Form inside groove 4 one paired inwalls and contact, form the narrow side 9 that inside groove 4 another paired inwalls are positioned at sounding head 2 with the broad side surface 8 of sounding head 2.
Have between inside groove 4 and the sounding head 2 can make the flow passage 10 that brazing material 6 flows and have the introducing port 11 that fusion brazing material 6 is imported these inside grooves 4, at water jacket 7 outlet 12 of discharging brazing material is arranged in addition.Sounding head 2 is by general cooler 13 and supersonic oscillations means for engaging.
As shown in Figure 2, between sounding head 2 and fusion brazing material hold-up tank 14, make 6 circulations of fusion brazing material with electromagnetic pump 15.Just the fusion brazing material 6 in the brazing material hold-up tank 14 is transported to the introducing port 11 of above-mentioned inside groove 4 by carrying pipe arrangement 16.
The fusion brazing material 6 that flows out from the outlet 12 of water jacket 7 turns back to brazing material hold-up tank 14 by returning pipe arrangement 17 in addition.In sputtering target coating brazing material operation, this fusion brazing material 6 circulates.
The top of brazing material applying device A is provided with the conveying device 18 of roller conveyor of making of heat stable resin etc., from following work pieces such as sputtering target 19 is applied.The height and position of conveying device 18 can be regulated.
In the general operation operation, the interval of 0～3mm can be arranged between the lower surface of brazing material that the upper surface of sounding head flows and work piece.
Describe using the operation of stating brazing material applying device A coating brazing material on the work pieces such as sputtering target below.The fusion brazing material 6 usefulness electromagnetic pumps 15 of indium of fusion in brazing material hold-up tank 14 etc. are transported to inside groove 4.In this case, the volume of inside groove 4 for example is 500cc.This volume is determined according to the size of ultrasonic welder sounding head 2.
The fusion brazing material 6 of delivering to inside groove 4 relies on the surface tension of electromagnetic pump 15 output pressures and fusion brazing material, and the about 5mm of upper end 3 protuberances than inside groove 4 spills into water jacket 7.Spill into the fusion brazing material 6 that water jacket 7 accumulates then, turn back to brazing material hold-up tank 14 by returning pipe arrangement 17.
The sounding head 2 of ultrasonic welder is designed to the low 1～3mm of crowning than fusion brazing material 6, this fusion brazing material 6 is overflowed on one side, make supersonic oscillations on one side, fusion brazing material 6 is contacted, coating brazing material 6 with the lower surface of the work pieces of sending here from conveying device 18 such as sputtering target 19.
The width of ultrasonic welder sounding head 2 for example is decided to be 110mm, and how long the work piece 19 of the following width of 110mm is no matter have, by once just applying brazing material 6.
Use the sounding head 2 of this width (110mm), when applying, also staggered in the work piece position, can apply several times, also can and apply in addition together two such brazing material applying device A than its wide work piece.Also can adopt the method for the size that changes sounding head 2.
Brazing material 6 usefulness in the brazing material hold-up tank 14 are contained in the temperature of the heater (not having expression among the figure) in the hold-up tank, adopt general thermoregulator to regulate, and can make its maintenance temperature-resistant.
It is easily that transporting molten brazing material 6 uses electromagnetic pump 15, also can use mechanical pump.Use current transformer can control the output quantity of electromagnetic pump 15 in addition, the shunt valve of return loop is set, also can control with the adjusting of the aperture of this valve.
15 pipe arrangement is located at the bottom of hold-up tank 14 from brazing material hold-up tank 14 to electromagnetic pump in addition, and its structure can non-involvement floats over the oxide of the brazing material on the fusion brazing material 6.
The effect of invention
Device of the present invention can make work piece by the roller conveyor height before and after adjusting Maintain a certain distance with the melting brazing material, the sounding head of ultrasonic welder is fixed, can With automatic coating, so the unequal problem of coating that causes because of manual operations can not take place, have The positive effect that can evenly apply.
At the fusion tank sky before brazing material can be provided always. From structure just and added The contact of the lower surface of workpiece can effectively apply, and can not pollute does not need the place that applies yet.
The sounding head of ultrasonic welder does not contact with work piece, because adjusting that can be correct Distance therebetween, and can keep this distance. Have that the sounding head can semipermanent uses Advantage.
Owing to use ultrasonic welder, need not use flux, can keep stable soakage, Only the sounding head contacts with the melting brazing material in addition, so its key character is that the vibration position is not had Bad impact is arranged.
Claims (7)
1. the method for coating brazing material is characterized by: brazing material is flowed on ultrasonic welder sounding head, produce hyperacoustic work piece that makes simultaneously and pass through the brazing material surface that this flows, apply brazing material on the lower surface of this work piece.
2. the method for coating brazing material as claimed in claim 1 is characterized by: described work piece is a sputtering target.
3. apply the device of brazing material, it is characterized by: be the device that utilizes the coating brazing material of ultrasonic welder, this device is provided with the rectangle sounding head that is combined as a whole with ultrasonic oscillator, surround this sounding head and upper end is positioned at the inside groove that is lower than the sounding head slightly, is positioned at the outer water jacket of collecting the brazing material that overflows from sounding head upper surface of inside groove.
4. the device of coating brazing material as claimed in claim 3, it is characterized by: above-mentioned inside groove and sounding head breadth contacts side surfaces, between narrow side inside groove and sounding head, have simultaneously can make the mobile flow passage of brazing material and the fusion brazing material is imported the introducing port of this inside groove, and on water jacket, be provided with the outlet of discharging brazing material.
5. as the device of claim 3 or 4 described coating brazing materials, it is characterized by: between sounding head and fusion brazing material hold-up tank, make the circulation of fusion brazing material with electromagnetic pump.
6. as the device of claim 3,4 or 5 described coating brazing materials, it is characterized by: be provided with the conveyer of carrying this work piece, making between brazing material that sounding head upper surface flows and work piece lower surface has 0～3mm at interval.
7. as the device of claim 3,4,5 or 6 described coating brazing materials, it is characterized by: described work piece is a sputtering target.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000165971A JP3319740B2 (en) | 2000-06-02 | 2000-06-02 | Brazing material coating device |
| JP165971/2000 | 2000-06-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1392816A true CN1392816A (en) | 2003-01-22 |
| CN1193855C CN1193855C (en) | 2005-03-23 |
Family
ID=18669361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 01803060 Expired - Fee Related CN1193855C (en) | 2000-06-02 | 2001-03-23 | Coating method and device for solder material |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP3319740B2 (en) |
| CN (1) | CN1193855C (en) |
| TW (1) | TW524866B (en) |
| WO (1) | WO2001094068A1 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101396751B (en) * | 2007-09-27 | 2011-03-02 | 比亚迪股份有限公司 | Solder-reflow soldering method |
| CN101768723B (en) * | 2009-12-30 | 2012-05-09 | 宁波江丰电子材料有限公司 | Large-size target ultrasonic treatment device and treatment method thereof |
| CN103128390A (en) * | 2011-11-30 | 2013-06-05 | 亚企睦自动设备有限公司 | Prefixing device for welding ring and prefixing method for welding ring |
| CN103842120A (en) * | 2011-05-17 | 2014-06-04 | 弗劳恩霍弗实用研究促进协会 | Method for the cohesive connection of elements |
| CN103921499A (en) * | 2014-04-22 | 2014-07-16 | 刘建忠 | Metal material with excellent soldering performance |
| CN103521871B (en) * | 2012-07-05 | 2016-12-28 | 贝思瑞士股份公司 | For the method and apparatus distributing fluxless solder on substrate |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100785208B1 (en) * | 2005-06-15 | 2007-12-11 | 미쓰이 긴조꾸 고교 가부시키가이샤 | Solder Alloy for Manufacturing Sputtering Target and Sputtering Target Using the same |
| TWI496621B (en) * | 2010-10-26 | 2015-08-21 | Prologium Technology Co | Coating head and coating machine using the same |
| JP6689309B2 (en) | 2018-03-26 | 2020-04-28 | Ｊｘ金属株式会社 | Sputtering target member, sputtering target assembly, and method for manufacturing sputtering target member |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0753808Y2 (en) * | 1991-07-16 | 1995-12-13 | 黒田電気株式会社 | Jet type ultrasonic brazing device |
| US5230462A (en) * | 1992-07-08 | 1993-07-27 | Materials Research Corporation | Method of soldering a sputtering target to a backing member |
-
2000
- 2000-06-02 JP JP2000165971A patent/JP3319740B2/en not_active Expired - Fee Related
-
2001
- 2001-03-23 WO PCT/JP2001/002409 patent/WO2001094068A1/en active Application Filing
- 2001-03-23 CN CN 01803060 patent/CN1193855C/en not_active Expired - Fee Related
- 2001-05-01 TW TW90110388A patent/TW524866B/en not_active IP Right Cessation
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101396751B (en) * | 2007-09-27 | 2011-03-02 | 比亚迪股份有限公司 | Solder-reflow soldering method |
| CN101768723B (en) * | 2009-12-30 | 2012-05-09 | 宁波江丰电子材料有限公司 | Large-size target ultrasonic treatment device and treatment method thereof |
| CN103842120A (en) * | 2011-05-17 | 2014-06-04 | 弗劳恩霍弗实用研究促进协会 | Method for the cohesive connection of elements |
| CN103128390A (en) * | 2011-11-30 | 2013-06-05 | 亚企睦自动设备有限公司 | Prefixing device for welding ring and prefixing method for welding ring |
| CN103521871B (en) * | 2012-07-05 | 2016-12-28 | 贝思瑞士股份公司 | For the method and apparatus distributing fluxless solder on substrate |
| CN103921499A (en) * | 2014-04-22 | 2014-07-16 | 刘建忠 | Metal material with excellent soldering performance |
| CN103921499B (en) * | 2014-04-22 | 2017-02-15 | 刘建忠 | Metal material with excellent soldering performance |
Also Published As
| Publication number | Publication date |
|---|---|
| TW524866B (en) | 2003-03-21 |
| CN1193855C (en) | 2005-03-23 |
| JP3319740B2 (en) | 2002-09-03 |
| WO2001094068A1 (en) | 2001-12-13 |
| JP2001340959A (en) | 2001-12-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1193855C (en) | Coating method and device for solder material | |
| US6457632B1 (en) | Solder alloy and bonding method of substrate and electric or electronic parts with solder alloy | |
| US5672260A (en) | Process for selective application of solder to circuit packages | |
| JP3592486B2 (en) | Soldering equipment | |
| US5328520A (en) | Solar cell with low resistance linear electrode | |
| EP0278166B1 (en) | Soldering apparatus | |
| KR100270837B1 (en) | Method of applying solder to connection surfaces, and method of producing a solder alloy | |
| CN102248243A (en) | Method and device for introducing solder onto a workpiece | |
| CN109256337B (en) | Eutectic welding device and method for millimeter-scale elements with circumferences | |
| CN113182644B (en) | Fixture for relieving deformation of electric arc additive manufacturing component and process method | |
| EP0842772B1 (en) | Printing method and apparatus | |
| WO2007029452A1 (en) | Method of forming conductive pattern and wiring board | |
| US20240139847A1 (en) | Brazing joint, brazing method and device, for promoting solder rheology and gas overflow | |
| Shan et al. | Laser direct printing of solder paste | |
| US20040266252A1 (en) | Structure of terminal member | |
| CN1636663A (en) | Jet type welding apparatus | |
| CN111910228A (en) | Alloy film electrodeposition equipment and application thereof in preparation of Au80Sn20 eutectic solder | |
| US20020108864A1 (en) | Method and device for simultaneous are processing and chemical etching | |
| Wang et al. | Effect of ultrasonic power on wettability, porosity and mechanical properties of ultrasonic-aided laser reflow soldering | |
| JPH03118962A (en) | Vapor reflowing type soldering apparatus | |
| CN106077862B (en) | A kind of laser welding-brazing method of extrusion forming | |
| CN1922942A (en) | Electronic component mounting method, and circuit board and circuit board unit used therein | |
| Li et al. | Cutting for QFN packaging by diode pumping solid state laser system | |
| CN214694405U (en) | Alloy film electrodeposition equipment | |
| CN106028667A (en) | Method for improving contact performance of PCB bonding pad |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: NIPPON MINING AND METALS CO., LTD. Free format text: FORMER NAME OR ADDRESS: NIKKO MATERIALS CO. LTD |
|
| CP03 | Change of name, title or address |
Address after: Tokyo, Japan Patentee after: Nippon Mining & Metals Co., Ltd. Address before: Tokyo, Japan Patentee before: Nikko Materials Company, Limited |
|
| C56 | Change in the name or address of the patentee |
Owner name: JX NIPPON MINING + METALS CORPORATION Free format text: FORMER NAME: NIPPON MINING + METALS CO., LTD. |
|
| CP01 | Change in the name or title of a patent holder |
Address after: Tokyo, Japan Patentee after: JX Nippon Mining & Metals Corporation Address before: Tokyo, Japan Patentee before: Nippon Mining & Metals Co., Ltd. |
|
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20050323 Termination date: 20130323 |