WO2001086257A3 - Ellipsometer - Google Patents

Ellipsometer Download PDF

Info

Publication number
WO2001086257A3
WO2001086257A3 PCT/DE2001/001807 DE0101807W WO0186257A3 WO 2001086257 A3 WO2001086257 A3 WO 2001086257A3 DE 0101807 W DE0101807 W DE 0101807W WO 0186257 A3 WO0186257 A3 WO 0186257A3
Authority
WO
WIPO (PCT)
Prior art keywords
sample
ellipsometer
measuring spot
provision
emission side
Prior art date
Application number
PCT/DE2001/001807
Other languages
English (en)
French (fr)
Other versions
WO2001086257A2 (de
Inventor
Uwe Wielsch
Michael Arens
Uwe Richter
Georg Dittmar
Albrecht Krueger
Helmut Witek
Original Assignee
Sentech Instr Gmbh
Uwe Wielsch
Michael Arens
Uwe Richter
Georg Dittmar
Albrecht Krueger
Helmut Witek
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sentech Instr Gmbh, Uwe Wielsch, Michael Arens, Uwe Richter, Georg Dittmar, Albrecht Krueger, Helmut Witek filed Critical Sentech Instr Gmbh
Priority to US10/276,353 priority Critical patent/US6897955B2/en
Publication of WO2001086257A2 publication Critical patent/WO2001086257A2/de
Publication of WO2001086257A3 publication Critical patent/WO2001086257A3/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry

Abstract

Diese Erfindung betrifft ein Ellipsometer zur Untersuchung einer Probe (50), wobei das Ellipsometer eine breitbandige Lichtquelle (1) auf einer Senderseite (A) und einen Detektor (8) für einen von der Probe (50) reflektierten Empfängerlichtstrahl (3B) auf einer Empfängerseite (B) aufweist. Eine refraktive Optik zur Erzeugung eines Meßflecks auf der Probe und eine auf der Senderseite (A) angeordnete erste Blende (2) zur Definition eines Meßflecks auf der Probe. Dadurch ist es möglich, mit einem spektroskopischen Ellipsometer auf einfache Weise einen genau definierten Meßfleck auf der Probe (50) zu erzeugen.
PCT/DE2001/001807 2000-05-10 2001-05-10 Ellipsometer WO2001086257A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US10/276,353 US6897955B2 (en) 2000-05-10 2001-05-10 Ellipsometer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10023477A DE10023477C2 (de) 2000-05-10 2000-05-10 Ellipsometer
DE10023477.1 2000-05-10

Publications (2)

Publication Number Publication Date
WO2001086257A2 WO2001086257A2 (de) 2001-11-15
WO2001086257A3 true WO2001086257A3 (de) 2002-08-08

Family

ID=7641917

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2001/001807 WO2001086257A2 (de) 2000-05-10 2001-05-10 Ellipsometer

Country Status (3)

Country Link
US (1) US6897955B2 (de)
DE (1) DE10023477C2 (de)
WO (1) WO2001086257A2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7304737B1 (en) 1995-09-20 2007-12-04 J.A. Woollam Co., Inc Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence
US7567345B1 (en) 2007-01-05 2009-07-28 J.A. Woollam Co., Inc. Ellipsometer meeting scheimpflug condition with provision of an essentially circular electromagnetic radiation spot on a sample
US7330277B2 (en) * 2003-08-20 2008-02-12 Xyratex Technology Limited Resonant ellipsometer and method for determining ellipsometric parameters of a surface
JP3977303B2 (ja) * 2003-08-21 2007-09-19 シャープ株式会社 位置検出システム、位置検出システムにおける発信装置および受信装置
KR100574776B1 (ko) * 2004-01-15 2006-04-28 한국표준과학연구원 분광결상을 이용한 타원계측 장치 및 타원계측 방법
DE102004012134B4 (de) * 2004-03-12 2006-06-29 Nanofilm Technologie Gmbh Ellipsometer mit Blendenanordnung
US20070024851A1 (en) * 2005-07-28 2007-02-01 Zaghloul Mervat A Method and smart device to determine the substrate optical constant and the film thickness of absorbing-film-absorbing-substrate systems in an absorbing medium using a closed-form formula and reflection ellipsometry
US8345241B1 (en) 2006-12-19 2013-01-01 J. A. Woollam Co., Inc. Application of digital light processor in imaging ellipsometer and the like systems
US8749782B1 (en) 2006-12-19 2014-06-10 J.A. Woollam Co., Inc. DLP base small spot investigation system
NL1036772A1 (nl) * 2008-04-15 2009-10-19 Asml Netherlands Bv Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method.
US9217717B2 (en) * 2012-12-17 2015-12-22 Kla-Tencor Corporation Two dimensional optical detector with multiple shift registers
US10152998B2 (en) 2014-04-07 2018-12-11 Seagate Technology Llc Features maps of articles with polarized light
KR20180076592A (ko) 2016-12-28 2018-07-06 삼성전자주식회사 반도체 장치의 계측 방법
CN109520621A (zh) * 2017-09-19 2019-03-26 睿励科学仪器（上海）有限公司 三维空间光源系统及相关的光测量设备
FR3079028B1 (fr) * 2018-03-15 2020-05-15 Horiba France Sas Ellipsometre ou scatterometre spectroscopique instantane et procede de mesure associe
US10746530B2 (en) * 2018-12-07 2020-08-18 Onto Innovation Inc. Optical metrology device for measuring samples having thin or thick films

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4671660A (en) * 1984-09-25 1987-06-09 Richard Distl Dual-beam-real-time polarimeter
US5166752A (en) * 1990-01-11 1992-11-24 Rudolph Research Corporation Simultaneous multiple angle/multiple wavelength ellipsometer and method
US5793480A (en) * 1995-09-01 1998-08-11 Phase Metrics, Inc. Combined interferometer/ellipsometer for measuring small spacings
US5910841A (en) * 1991-11-19 1999-06-08 Masao; Katsuya Ellipsometer using an expanded beam
US5910842A (en) * 1995-01-19 1999-06-08 Kla-Tencor Corporation Focused beam spectroscopic ellipsometry method and system
JPH11173994A (ja) * 1997-09-22 1999-07-02 Hdi Instrumentation 光学的測定システム
US5955139A (en) * 1995-05-03 1999-09-21 Sony Corporation Automatic film deposition control
US6060237A (en) * 1985-02-26 2000-05-09 Biostar, Inc. Devices and methods for optical detection of nucleic acid hybridization

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Publication number Priority date Publication date Assignee Title
US3880524A (en) * 1973-06-25 1975-04-29 Ibm Automatic ellipsometer
DE19622212C1 (de) * 1996-06-03 1997-12-04 Fraunhofer Ges Forschung Ellipsometrisches Meßverfahren
DE19708036C2 (de) * 1997-02-27 2000-06-29 Gunther Elender Ellipsometrisches Mikroskop
US5859424A (en) * 1997-04-08 1999-01-12 Kla-Tencor Corporation Apodizing filter system useful for reducing spot size in optical measurements and other applications
US6278519B1 (en) * 1998-01-29 2001-08-21 Therma-Wave, Inc. Apparatus for analyzing multi-layer thin film stacks on semiconductors
US5917594A (en) * 1998-04-08 1999-06-29 Kla-Tencor Corporation Spectroscopic measurement system using an off-axis spherical mirror and refractive elements
DE19842364C1 (de) * 1998-09-16 2000-04-06 Nanophotonics Ag Mikropolarimeter und Ellipsometer

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4671660A (en) * 1984-09-25 1987-06-09 Richard Distl Dual-beam-real-time polarimeter
US6060237A (en) * 1985-02-26 2000-05-09 Biostar, Inc. Devices and methods for optical detection of nucleic acid hybridization
US5166752A (en) * 1990-01-11 1992-11-24 Rudolph Research Corporation Simultaneous multiple angle/multiple wavelength ellipsometer and method
US5910841A (en) * 1991-11-19 1999-06-08 Masao; Katsuya Ellipsometer using an expanded beam
US5910842A (en) * 1995-01-19 1999-06-08 Kla-Tencor Corporation Focused beam spectroscopic ellipsometry method and system
US5955139A (en) * 1995-05-03 1999-09-21 Sony Corporation Automatic film deposition control
US5793480A (en) * 1995-09-01 1998-08-11 Phase Metrics, Inc. Combined interferometer/ellipsometer for measuring small spacings
JPH11173994A (ja) * 1997-09-22 1999-07-02 Hdi Instrumentation 光学的測定システム

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 12 29 October 1999 (1999-10-29) *

Also Published As

Publication number Publication date
US6897955B2 (en) 2005-05-24
US20040090626A1 (en) 2004-05-13
DE10023477A1 (de) 2001-11-29
WO2001086257A2 (de) 2001-11-15
DE10023477C2 (de) 2002-09-19

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