WO2001040138A1 - Comprime en carbure de silicium poreux fritte et composite de carbure de silicium et de metal adapte a une utilisation dans une table de machine de polissage de plaquettes - Google Patents
Comprime en carbure de silicium poreux fritte et composite de carbure de silicium et de metal adapte a une utilisation dans une table de machine de polissage de plaquettes Download PDFInfo
- Publication number
- WO2001040138A1 WO2001040138A1 PCT/JP2000/008284 JP0008284W WO0140138A1 WO 2001040138 A1 WO2001040138 A1 WO 2001040138A1 JP 0008284 W JP0008284 W JP 0008284W WO 0140138 A1 WO0140138 A1 WO 0140138A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- silicon carbide
- weight
- parts
- metal
- average particle
- Prior art date
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 178
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 139
- 229910021426 porous silicon Inorganic materials 0.000 title claims abstract description 31
- 238000005498 polishing Methods 0.000 title claims description 62
- 239000002905 metal composite material Substances 0.000 title claims description 36
- 239000013078 crystal Substances 0.000 claims abstract description 121
- 239000002245 particle Substances 0.000 claims abstract description 97
- 239000011148 porous material Substances 0.000 claims abstract description 41
- 229910052751 metal Inorganic materials 0.000 claims description 89
- 239000002184 metal Substances 0.000 claims description 89
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 87
- 229910052710 silicon Inorganic materials 0.000 claims description 84
- 239000010703 silicon Substances 0.000 claims description 84
- 239000000463 material Substances 0.000 claims description 75
- 239000000843 powder Substances 0.000 claims description 57
- 239000000758 substrate Substances 0.000 claims description 37
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- 238000000034 method Methods 0.000 claims description 25
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 11
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- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 150000004696 coordination complex Chemical class 0.000 claims description 3
- 239000005416 organic matter Substances 0.000 claims 1
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- HMUNWXXNJPVALC-UHFFFAOYSA-N 1-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperazin-1-yl]-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)N1CCN(CC1)C(CN1CC2=C(CC1)NN=N2)=O HMUNWXXNJPVALC-UHFFFAOYSA-N 0.000 description 14
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 14
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- VZSRBBMJRBPUNF-UHFFFAOYSA-N 2-(2,3-dihydro-1H-inden-2-ylamino)-N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]pyrimidine-5-carboxamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C(=O)NCCC(N1CC2=C(CC1)NN=N2)=O VZSRBBMJRBPUNF-UHFFFAOYSA-N 0.000 description 7
- 229910052786 argon Inorganic materials 0.000 description 7
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- LDXJRKWFNNFDSA-UHFFFAOYSA-N 2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)-1-[4-[2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidin-5-yl]piperazin-1-yl]ethanone Chemical compound C1CN(CC2=NNN=C21)CC(=O)N3CCN(CC3)C4=CN=C(N=C4)NCC5=CC(=CC=C5)OC(F)(F)F LDXJRKWFNNFDSA-UHFFFAOYSA-N 0.000 description 5
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- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
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- YLZOPXRUQYQQID-UHFFFAOYSA-N 3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)-1-[4-[2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidin-5-yl]piperazin-1-yl]propan-1-one Chemical compound N1N=NC=2CN(CCC=21)CCC(=O)N1CCN(CC1)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F YLZOPXRUQYQQID-UHFFFAOYSA-N 0.000 description 2
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- 229910052581 Si3N4 Inorganic materials 0.000 description 2
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- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000001694 spray drying Methods 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- QNRATNLHPGXHMA-XZHTYLCXSA-N (r)-(6-ethoxyquinolin-4-yl)-[(2s,4s,5r)-5-ethyl-1-azabicyclo[2.2.2]octan-2-yl]methanol;hydrochloride Chemical compound Cl.C([C@H]([C@H](C1)CC)C2)CN1[C@@H]2[C@H](O)C1=CC=NC2=CC=C(OCC)C=C21 QNRATNLHPGXHMA-XZHTYLCXSA-N 0.000 description 1
- FYELSNVLZVIGTI-UHFFFAOYSA-N 2-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]-5-ethylpyrazol-1-yl]-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C=1C=NN(C=1CC)CC(=O)N1CC2=C(CC1)NN=N2 FYELSNVLZVIGTI-UHFFFAOYSA-N 0.000 description 1
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- FHVDTGUDJYJELY-UHFFFAOYSA-N 6-{[2-carboxy-4,5-dihydroxy-6-(phosphanyloxy)oxan-3-yl]oxy}-4,5-dihydroxy-3-phosphanyloxane-2-carboxylic acid Chemical compound O1C(C(O)=O)C(P)C(O)C(O)C1OC1C(C(O)=O)OC(OP)C(O)C1O FHVDTGUDJYJELY-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
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- 229910017945 Cu—Ti Inorganic materials 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/14—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
- B24D3/348—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties utilised as impregnating agent for porous abrasive bodies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
- B24D7/02—Wheels in one piece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
- B24D7/10—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with cooling provisions
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
- C04B38/0051—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof characterised by the pore size, pore shape or kind of porosity
- C04B38/0058—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof characterised by the pore size, pore shape or kind of porosity open porosity
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/4584—Coating or impregnating of particulate or fibrous ceramic material
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
- C04B41/88—Metals
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1409—Abrasive particles per se
- C09K3/1418—Abrasive particles per se obtained by division of a mass agglomerated by sintering
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/10—Alloys containing non-metals
- C22C1/1005—Pretreatment of the non-metallic additives
- C22C1/1015—Pretreatment of the non-metallic additives by preparing or treating a non-metallic additive preform
- C22C1/1021—Pretreatment of the non-metallic additives by preparing or treating a non-metallic additive preform the preform being ceramic
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/10—Alloys containing non-metals
- C22C1/1036—Alloys containing non-metals starting from a melt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
Definitions
- the present invention relates to a porous silicon carbide sintered body and a silicon carbide / metal composite, and more particularly, to a porous silicon carbide sintered body suitable for a table used in an apparatus for polishing Xa,
- the present invention relates to a metal composite and a method for producing the same.
- semiconductor devices that have fine conductive circuits formed on silicon chips.
- Such a semiconductor device is generally manufactured through the following procedure using a single crystal silicon ingot as a starting material.
- an ingot of single crystal silicon is sliced thinly, and pieces obtained by the slicing are polished in a rubbing step and a polishing step.
- the bare wafer obtained through these steps is called a mirror wafer because it has a mirror surface.
- a bare wafer obtained by performing an epitaxial growth layer forming step after the rubbing step and before the polishing step is particularly called an epitaxial wafer.
- oxidation, etching, and impurity diffusion are repeatedly performed on the bare wafer.
- the desired semiconductor device is finally completed by squeezing the bare wafer having undergone the above-described steps into an appropriate size in the dicing step.
- a typical wafer polisher has a table, a pusher plate, and a cooling jacket.
- the table is fixed on the upper part of the cooling jacket.
- Both the table and the cooling jacket are made of a metal material such as stainless steel.
- a flow path for circulating cooling water used for cooling the table is provided.
- the wafer to be polished is attached to the holding surface (lower surface) of the pusher plate placed above the table using thermoplastic wax.
- the table for a wafer polishing apparatus is often heated to a high temperature during a polishing operation. Therefore, the material for forming the table is required to have heat resistance and thermal shock resistance. In addition, since the frictional force constantly acts on the polished surface of the table, the material for forming the table must also have wear resistance. Furthermore, in order to realize large-diameter, high-quality wafers, it is necessary to avoid the generation of thermal stress that causes the wafer to warp. To that end, it is necessary to minimize the temperature variation in the table . Therefore, the material is required to have higher thermal conductivity.
- Silicon carbide has suitable characteristics such as excellent thermal conductivity, heat resistance, thermal shock resistance, abrasion resistance, hardness, oxidation resistance, corrosion resistance, and the like. Therefore, silicon carbide is used in mechanical seals, wear-resistant materials such as bearings, refractory materials for high-temperature furnaces, heat-resistant structural materials such as heat exchangers and combustion tubes, and pump parts that are easily exposed to acids and aluminum alloys. It can be said that it is a widely usable material such as corrosion-resistant materials such as.
- various characteristics of the above silicon carbide There is a movement to pay particular attention to high thermal conductivity and to add this to the table.
- a metal complex is impregnated into the open pores present in the porous silicon carbide body to produce a silicon carbide ′ metal composite having better thermal conductivity than the non-impregnated body. ing.
- the silicon carbide sintered body has a property of efficiently conducting heat, there is an advantage that temperature variation hardly occurs inside the sintered body. Therefore, the sintered body is provided with high thermal uniformity and thermal responsiveness. In addition, as a result of avoiding the occurrence of thermal stress and making the substrate less likely to warp, the shape stability is improved.
- the silicon carbide sintered body has a higher thermal conductivity than other ceramic sintered bodies, the value of the thermal conductivity of the porous body is 1 O WZm ⁇ K to 70 WZ m ⁇ K It was only a degree.
- the silicon carbide and metal composites have higher thermal conductivity than the silicon carbide non-impregnated body, the value of the thermal conductivity at present is 10 O WZm ⁇ K to 150 W / m. ⁇ It was about K.
- thermal conductivity was indispensable in order to realize a material with better thermal uniformity, thermal responsiveness, and shape stability.
- this material is used for a table, it has been considered necessary to improve the thermal conductivity in order to realize a large-diameter and high-quality wafer.
- the conventional method of joining substrates uses a low thermal conductivity and an adhesive, so the adhesive causes an increase in the thermal resistance at the joining interface, and a decrease in the thermal conductivity of the entire table.
- the adhesive causes an increase in the thermal resistance at the joining interface, and a decrease in the thermal conductivity of the entire table.
- the silicon carbide / metal composite having high thermal conductivity as the base material, it was practically impossible to realize sufficient heat uniformity and thermal responsiveness.
- the silicon carbide-metal composite and the adhesive have significantly different coefficients of thermal expansion, cracks and peeling are likely to occur at the joint interface. Therefore, the table was easily broken when subjected to a heat cycle, and the long-term reliability was low.
- Ma when a brazing material is used to join base materials in place of the adhesive, the problem of increased thermal resistance is resolved, but cracks and peeling due to differences in thermal expansion coefficients can be avoided. Did not.
- a first object of the present invention is to provide a porous silicon carbide sintered body and a silicon carbide / metal composite which are extremely excellent in heat uniformity, thermal responsiveness, and shape stability.
- a second object of the present invention is to provide a method for reliably producing such a suitable sintered body or composite.
- a third object of the present invention is to provide a member for a wafer polishing apparatus and a table for a wafer polishing apparatus which are suitable for producing a large-diameter and high-quality wafer.
- a porous sintered body having an open pore in a structure composed of silicon carbide crystals.
- Silicon carbide crystals have an average particle size of at least 20 / zm, a porosity of at most 40%, and a thermal conductivity of at least 8 OW / m * K.
- a porous sintered body having an open pore in a structure constituted by silicon carbide crystals.
- the average particle size of the silicon carbide crystal is 20 / m to 100 ⁇ , the porosity is 5% to 30%, and the thermal conductivity is 80 W / m ⁇ K or more.
- open pores are present in a structure constituted by silicon carbide crystals, the average particle size of the silicon carbide crystals is 20 / m or more, the porosity is 30% or less,
- the average particle size is 0.! 1 to 100 parts by weight of ⁇ -type silicon carbide fine powder is mixed, and the coarse powder and the fine powder are uniformly mixed.
- a molded body is obtained by molding the mixture obtained in the mixing step into a predetermined shape.
- a sintered body is obtained by firing the formed body in a temperature range of 170 ° C. to 240 ° C.
- a table having a polished surface for polishing a semiconductor wafer held on a wafer holding plate.
- the table is made of the above porous silicon carbide It comprises a plurality of substrates made of an elementary sintered body and joined to each other, and a fluid channel formed at a joint interface between the substrates.
- a silicon carbide-metal composite in which open pores are present in a porous structure constituted by silicon carbide crystals, and a metal is impregnated in the open pores.
- Silicon carbide crystal has an average particle size of at least 20 im, a porosity of at most 30%, a thermal conductivity of at least 16 OW / mK, and 15 parts by weight with respect to 100 parts by weight of silicon carbide. ⁇ 50 parts by weight of metal is impregnated.
- a silicon carbide-metal composite in which open pores are present in a porous structure composed of silicon carbide crystals, and a metal is impregnated in the open pores.
- Silicon carbide crystal having an average particle size of 20 ⁇ m to 100 ⁇ m, porosity of 5% to 30%, thermal conductivity of 16 OW / mK or more, and silicon carbide of 100 weight Parts are impregnated with 15 to 50 parts by weight of metal.
- open pores are present in a porous structure composed of silicon carbide crystals, and the open pores have 15 to 50 parts by weight based on 100 parts by weight of silicon carbide.
- Part metal is impregnated, the average grain size of the silicon carbide crystal is 20 ⁇ m or more, the porosity is 30% or less, and the thermal conductivity is 16 OW / mK or more.
- a method of manufacturing is provided. Average particle size 5 ⁇ ! Fine powder of ⁇ - type silicon carbide having an average particle size of 0.1 ⁇ to 1.0 ⁇ m is 10 weight per 100 weight parts of coarse silicon carbide powder of 100 ⁇ m Parts to 100 parts by weight, and the coarse powder and the fine powder are uniformly mixed.
- a molded article is obtained by molding the mixture obtained by the mixing step into a predetermined shape.
- the sintered body is obtained by firing the molded body in a temperature range of 170 ° C. to 240 ° C.
- a metal is impregnated in the compact or sintered body.
- a table having a polished surface for polishing a semiconductor wafer held on a wafer holding plate.
- the table is made of the above-described silicon carbide / metal composite, and includes a plurality of base materials joined to each other and a fluid flow path formed at a bonding interface between the base materials.
- a semiconductor wafer held on a wafer holding plate is polished.
- a table having a polished surface for polishing is provided.
- the table is composed of a ceramic-metal composite in which the open pores of a porous body made of silicon-containing ceramic are impregnated with metal silicon, and a metal-silicon joint that joins the substrates together.
- FIG. 1 is a schematic diagram showing a wafer polishing apparatus according to a first embodiment of the present invention.
- FIG. 2 is an enlarged sectional view of a main part of a table used in the wafer polishing apparatus of FIG.
- FIG. 3 is a schematic enlarged sectional view of the table of FIG.
- 4A, 4B and 4C are graphs showing the particle size distribution of the porous silicon carbide sintered body constituting the table of FIG.
- FIG. 5 is a schematic enlarged sectional view of a table according to a second embodiment of the present invention.
- FIG. 6A is an enlarged sectional view of a main part of a table according to a third embodiment of the present invention
- FIG. 6B is a schematic enlarged sectional view of the table of FIG. 6A.
- FIG. 7A, 7B, and 7C are schematic cross-sectional views for explaining a manufacturing process of the table in FIG. 6A.
- FIG. 1 schematically shows a wafer polishing apparatus 1 of the present embodiment.
- the table 2 constituting the wafer polishing apparatus 1 has a disk shape.
- the upper surface of the table 2 is a polished surface 2 a for polishing the semiconductor wafer 5.
- a polishing cloth (not shown) is attached to the polishing surface 2a.
- the table 2 of the present embodiment is directly and horizontally fixed to the upper end surface of the cylindrical rotating shaft 4 without using a cooling jacket. Therefore, when the rotating shaft 4 is driven to rotate, the table 2 rotates physically together with the rotating shaft 4.
- the wafer polishing apparatus 1 includes a plurality (two in FIG.
- a pusher bar 7 is fixed to the center of one side surface (non-holding surface 6 b) of each wafer holding plate 6.
- Each pusher bar 7 is located above the table 2 and is connected to driving means (not shown).
- Each pusher bar 7 horizontally supports each wafer holding plate 6. At this time, the holding surface 6a faces the polished surface 2a of the table 2. Further, each pusher bar 7 can not only rotate with the wafer holding plate 6 but also move up and down within a predetermined range. Instead of moving the plate 6 up and down, a structure that moves the table 2 up and down may be adopted.
- the semiconductor wafer 5 is adhered to the holding surface 6a of the wafer holding plate 6 using, for example, an adhesive such as thermoplastic resin.
- the semiconductor wafer 5 may be evacuated or electrostatically attracted to the holding surface 6a.
- the polished surface 5 a of the semiconductor wafer 5 needs to face the polished surface 2 a of the table 2.
- Table 2 of the present embodiment is a multilayer ceramic structure composed of two base materials 11 A and 11 B made of a porous silicon carbide sintered body.
- grooves 13 forming a part of a cooling water channel 12 as a fluid flow channel are formed in a predetermined pattern.
- the two substrates 11 A 11 B are integrated by being joined to each other via the silver brazing material layer 14.
- a water channel 12 is formed at the joint interface between the substrates 11A11B.
- a through hole 15 is formed substantially at the center of the lower substrate 11B.
- the groove 13 that constitutes a part of the water channel 12 is a grinding groove formed by grinding the back surface of the upper substrate 11A after raw processing and before firing.
- the depth of the groove 13 can be set to about 3 mn 10 mm, and the width can be set to about 520.
- the average particle size of the carbonized: silicon crystal constituting the porous structure was 20%. It is set to a relatively large value of m or more. Since the efficiency of heat conduction inside the crystal is generally higher than the efficiency of heat conduction between crystals, the larger the average grain size, the higher the thermal conductivity. In addition, the porosity is set to a small value of 40% or less. This also contributes to the improvement of thermal conductivity. That is, when the porosity is reduced, the voids in the sintered body are reduced, so that heat is easily conducted.
- the thermal conductivity can be set to a high value of 8 OW / m-K or more. It becomes difficult. Therefore, it is not possible to sufficiently improve the thermal uniformity, the thermal responsiveness, and the shape stability.
- the value of the thermal conductivity needs to be 8 O WZ m ⁇ K or more, more preferably 10 OW / m or more, and 1 ° O W_ / m ⁇ K: ⁇ 180 Particularly preferred is W / m ⁇ K.
- the average particle size of the silicon carbide crystal is preferably set to 20 ⁇ m to 100 ⁇ m, more preferably to 30 ⁇ m to 90 ⁇ m, and more preferably 40 ⁇ m to 70 ⁇ m. Most preferably, it is set to m. If the average grain size is too large, voids may increase and the density of the sintered body may decrease.
- the porosity of the open pores is preferably set to 5% to 30%, more preferably to 10% to 25%, and most preferably to 10% to 20%. I like it.
- the sintered body contains 10% by volume to 50% by volume of fine silicon carbide crystals (hereinafter, referred to as fine crystals 21) having an average particle size of 0.1 / im to 1.0 m, and It is preferable to contain 50% by volume to 90% by volume of coarse silicon carbide crystals having an average particle size of 25 ⁇ m to 65 ⁇ (hereinafter referred to as coarse crystals 22).
- the thermal resistance of the sintered body becomes even smaller, which is thought to have contributed significantly to the improvement of thermal conductivity.
- the average particle diameter of the fine crystal 2 1, 0. 1 ⁇ ⁇ 1. 0 ⁇ may be set to m, 0. 1 ⁇ ⁇ 0. It is more preferable to set the 9 mu m, 0 Most preferably, it is set to 1 ⁇ to 0.7 ⁇ m. If the average grain size of the fine crystals 21 is to be made extremely small, expensive fine powders must be used, which may lead to a rise in material costs. Conversely, if the average grain size of the fine crystals 21 is too large, the voids formed between the coarse crystals 22 cannot be sufficiently filled, and the thermal resistance of the sintered body cannot be sufficiently reduced. There is a risk.
- Fine crystals 21 in the sintered body are preferably contained at 10% by volume to 50% by volume, and 15 volumes by volume. /. ⁇ 40 volumes. /. More preferably, it is contained, and most preferably, it is contained at 20 to 40% by volume. If the content ratio of the fine crystals 21 becomes too small, it becomes difficult to secure a sufficient amount of the fine crystals 21 to fill the voids formed between the coarse crystals 22, and to reduce the thermal resistance of the sintered body. There is a possibility that it cannot be reduced reliably. Conversely, if the content ratio of the fine crystals 21 is too large, the fine crystals 21 that fill the voids become rather excessive, and the coarse crystals 22 that are originally necessary for improving the thermal conductivity cannot be secured. Therefore, the thermal resistance of the sintered body may be rather increased.
- the average grain size of the coarse crystals 22 in the sintered body is preferably set to 25 ⁇ m to 150 m, and more preferably 40 ⁇ to 100 ⁇ . Preferably, 60 ⁇ ! Most preferably, it is set to 880 ⁇ m. If the average particle size of the coarse crystals 22 is to be made extremely small, the difference in particle size from the fine particles 21 becomes small, so that the effect of reducing the thermal resistance by mixing the fine crystals 21 and the coarse crystals 22 cannot be expected. There is a risk. Conversely, if the average grain size of the coarse crystals 22 becomes too large, individual voids formed between the coarse crystals 22 increase, so that even if there is a sufficient amount of fine crystals 21 It is difficult to sufficiently fill the gap.
- the thermal resistance of the sintered body may not be sufficiently reduced.
- the crude crystal 22 preferably contains ::, 50% to 90% by volume, and 60% to 85% by volume. / 0 volume% is more preferable, and 60 to 80 volume% is most preferable. If the content ratio of the coarse crystals 22 is too small, the coarse crystals 22 required to improve the thermal conductivity cannot be secured, and the thermal resistance of the sintered body may be rather increased. Conversely, if the content ratio of the coarse crystals 22 becomes too large, the content ratio of the fine crystals 21 becomes relatively small, and the voids formed between the coarse crystals 22 may be sufficiently filled. become unable. Therefore, there is a possibility that the thermal resistance of the sintered body cannot be reliably reduced.
- This porous silicon carbide sintered body is manufactured through a material preparation step, a molding step, and a firing step in which a fine powder and a coarse powder are mixed and mixed at a predetermined ratio.
- ct-type silicon carbide having an average particle size of 0.1 to 1 and ⁇ m is added to 100 parts by weight of coarse ⁇ -type silicon carbide powder having an average particle size of 5 ⁇ m to 100 ⁇ m. 10 parts by weight to 100 parts by weight of the fine powder is mixed and uniformly mixed.
- the average particle size of the coarse powder of ⁇ -type silicon carbide is 5 ⁇ ! ⁇ 100 / m, often 15 ⁇ ! It is more preferably set to ⁇ 75 / im, 25 ⁇ ! Most preferably, it is set to about 60 ⁇ . If the average particle size of the coarse powder of ⁇ -type silicon carbide is less than 5 ⁇ m, the effect of suppressing abnormal grain growth may be reduced. Conversely, if the average particle size of the ⁇ -type silicon carbide coarse powder exceeds 60 m, the moldability is deteriorated and the strength of the obtained porous body may be reduced.
- the average particle size of the ⁇ -type silicon carbide fine powder is preferably set to 1 ⁇ to 1. ⁇ , and 0.1 ⁇ ! It is more preferably set to 0.8 / m, most preferably set to 0.2 m to 0.5 ⁇ m.
- the average particle size of the fine powder of ⁇ -type silicon carbide is less than 0.1 m, it becomes difficult to control the grain growth, and in addition, high darning of the material cost cannot be avoided.
- the average particle size of the fine silicon carbide powder exceeds 1.O im, the voids formed between the coarse crystals 22 may be difficult to fill.
- the reason why the cast was selected as the fine powder is that the crystal orientation is improved compared to the i3 type, This is because the thermal conductivity tends to be somewhat higher.
- the compounding amount of the fine powder is preferably from 10 to 100 parts by weight, more preferably from 15 to 65 parts by weight, and more preferably from 20 to 60 parts by weight. Is most preferred. If the blending amount of the fine powder is too small, it becomes difficult to secure a sufficient amount of the fine crystals 21 to fill the voids formed between the coarse crystals 22, and to sufficiently increase the thermal resistance of the sintered body. The reduction may not be possible. Further, in order to obtain a desired pore diameter of 20 or more, it is necessary to set the firing temperature to an extremely high temperature, which is disadvantageous in cost. Conversely, if the amount of the fine powder is too large, the coarse crystals 22 required to improve the thermal conductivity cannot be secured, and the thermal resistance of the sintered body may increase. Also, it becomes difficult to obtain a sintered body having excellent strength.
- a binder for dispersing a molding binder is blended together with the two kinds of powders as necessary. Then, the mixture is uniformly mixed and kneaded to adjust the viscosity appropriately, so that a raw material slurry is first obtained.
- a means for mixing the raw slurry there are a vibration mill, an attritor, a ball mill, a colloid mill, a high-speed mixer, and the like.
- a means for kneading the mixed raw material slurry there is, for example, a kneader.
- the molding binder examples include polyvinyl alcohol, methylcellulose, carboxymethinoresenorelose, hydroxyshechinoresenorelose, polyethylene glycolone, phenolic resin, epoxy resin, and acrylic resin. It is preferable that the compounding ratio of the molding binder is generally in the range of 1 part by weight to 10 parts by weight with respect to 100 parts by weight of the total silicon carbide powder. If this ratio is less than 1 part by weight, the strength of the obtained molded article will be insufficient, and the workability will be poor. Conversely, if this ratio exceeds 10 parts by weight, cracks are likely to occur in the molded body when the molding binder is removed by drying or the like, and the yield will be reduced.
- organic solvents such as benzene and cyclohexane, alcohols such as methanol, and water can be used.
- Silicon carbide powder As a method for granulation, a conventional general-purpose technique such as a granulation method by spray drying (so-called spray drying method) can be used. That is, a method in which the raw material slurry is sprayed into a container maintained at a high temperature and then dried rapidly can be applied.
- spray drying method a method in which the raw material slurry is sprayed into a container maintained at a high temperature and then dried rapidly can be applied.
- the water content of the granules is 0.1 weight. /. ⁇ 2.0 weight. / 0 , more preferably from 0.2% by weight to 1.0% by weight.
- the reason for this is that if the moisture content of the granules is within the above range, the density of the compact and the density of the sintered compact increase, resulting in an increase in the thermal conductivity. If the water content of the granules is less than 0.1% by weight, the density of the compact and the density of the sintered body will not be sufficiently high, and the thermal conductivity will not easily increase. Conversely, if the water content of the granules exceeds 2.0% by weight, cracks may easily be formed in the molded product during drying, which leads to deterioration in yield.
- granules made of the mixture obtained in the material preparation step are molded into a predetermined shape to produce a molded article.
- the molding pressure at that time is preferably 1.0 t Zcm 2 to l.5 t / cm 2 , and more preferably 1.lt Z cm : to l.4 t / cm 2 , .
- the reason for this is that the heat conductivity increases as a result of an increase in the density of the formed body grooves and the sintered body. If the molding pressure is less than 1.0 t / c, the density of the molded body and the density of the sintered body will not be sufficiently high, and the heat conductivity will not easily increase. Conversely, if molding is performed at a pressure greater than 1.5 t / c nr ', the density of the compact can be sufficiently increased, but a dedicated press is required, and the cost of equipment is high. And the production becomes difficult.
- the density of the molded body 2. 0 gZc m 3 or more often set to, in particular 2. 2 gZc m 3 ⁇ 2. 7 gZc m 3 is preferably set to.
- the reason is that if the density of the formed body is too low, the number of bonding sites between the silicon carbide particles decreases. Therefore, the strength of the obtained porous body is reduced, and the take-up property is deteriorated. Conversely, if the density of the molded body is to be increased, a dedicated press device is required as described above, resulting in an increase in equipment costs and difficulty in manufacturing.
- the compact obtained by the compacting step is heated at a temperature of 170 (TC to 2400 ° C, preferably 2000 to 2300 ° C, particularly preferably Alternatively, it is fired at a temperature in the range of 2000 ° C. to 230 ° C. to produce a sintered body.
- the firing temperature is too low, it becomes difficult to sufficiently develop a neck portion that connects the silicon carbide particles, and it may not be possible to achieve high thermal conductivity and high strength. Conversely, if the firing temperature is too high, the thermal decomposition of silicon carbide starts, resulting in a reduction in the strength of the sintered body. Moreover, the amount of heat energy to be applied to the firing furnace is increased, resulting in a disadvantage in cost.
- the inside of the firing furnace is at least one kind of gas atmosphere selected from among argon, helium, neon, nitrogen, hydrogen and carbon monoxide (ie, non-oxidizing atmosphere, inert atmosphere). Should be kept. At this time, the inside of the firing furnace may be in a vacuum state.
- the time of firing it is advantageous to suppress the volatilization of silicon carbide from the compact in order to promote the growth of the neck portion.
- a method for suppressing the volatilization of silicon carbide from the compact it is effective to charge the compact in a heat-resistant container capable of blocking the invasion of outside air.
- a material for forming the heat-resistant container graphite or silicon carbide is preferable.
- the granules of the mixture was molded in 1. 3 t-flop-less pressure Z cm 2 using a metal stamping die.
- the density of the obtained disk-shaped formed body (50 mm ⁇ 5 mmt) was 2.6 g Z cm 3 .
- the formed body was charged into a crucible and fired using a Tamman-type firing furnace.
- the firing was performed in an argon gas atmosphere at 1 atm.
- heating was performed at a heating rate of 10 ° CZ to a maximum temperature of 220 ° C, and thereafter, the temperature was maintained for 4 hours.
- the resulting porous silicon carbide sintered body 11A, 11B has an open pore 23 of 20% porosity, a thermal conductivity of 130 WZm ⁇ K, and a density of 2.5. It was g Z cm 3.
- the average particle size of the silicon carbide crystals was 30 ⁇ m. Specifically, 20 volumes of fine crystals 21 having an average particle size of 1.0 ⁇ m. /. 80 volumes of crude crystals 22 containing and having an average particle size of 40 ⁇ m. / 0 included.
- Figure 4C shows a graph of the particle size distribution of the sintered body of Reference Example 1-1.
- the table 2 of Reference Example 1-1 obtained in this manner is set in the above various polishing apparatuses 1, and polishing of the semiconductor wafers 5 of various sizes is performed while constantly circulating the cooling water W in the water channel 12. Done. Then, when the semiconductor wafer 5 obtained through polishing by various polishing apparatuses 1 was observed, the wafer 5 was not damaged irrespective of the wafer size. Also, no large warpage of the wafer 5 occurred. In other words, it was found that when Table 2 of the present reference example was used, an extremely large-diameter and high-quality semiconductor wafer 5 could be obtained.
- FIG. 3 is a cross-sectional view conceptually showing an enlarged table 2 of Reference Example 11-1.
- the porous silicon carbide sintered body constituting the table 2 has fine crystals 21 and coarse crystals 22. Contains.
- the voids formed between the coarse crystals 22 are almost filled with the fine crystals 21. Therefore, it can be understood that the substantial ratio of voids, that is, the porosity of the open pores 23 is considerably small.
- the obtained porous silicon carbide sintered body substrate 11 A, 11 B, the open porosity of 23, the porosity of 17%, the thermal conductivity of 14.5 W / mK, density was 2. 5 5 g / cm 3 .
- the average particle size of the silicon carbide crystals was 36 ⁇ . Specifically, it contains 20% by volume of fine crystals 21 having an average particle size of 1.0 // m, and 80 volumes of coarse crystals 22 having an average particle size of 45 wm. /. Included.
- Fig. 4B shows a graph of the particle size distribution of the sintered bodies of Reference Examples 1-2.
- the resulting porous silicon carbide substrate 11 1 1, 1 IB had open porosity 23 with a porosity of 15%, a thermal conductivity of 15 OW / m ⁇ K, and a density of It was 2.6 g Z cm 3 .
- the average particle size of the silicon carbide crystals was 65 m. Specifically, it contained 20% by volume of fine crystals 21 having an average particle size of 1.0 ⁇ m and 80% by volume of coarse crystals 22 having an average particle size of 80 ⁇ m.
- Fig. 4 A Reference Example 1 Of particle size distribution in sintered body of After completing Table 2 in the same procedure as in Reference Example 1, it was set in the above various polishing apparatuses 1 and polished semiconductor wafers 5 of various sizes. Excellent results were obtained.
- Comparative Example 1 In the preparation of Comparative Example 1, a coarse powder of ( ⁇ -type silicon carbide having an average particle size of 10 ⁇ ! ⁇ 1 was used, and an average particle size of 0.7 ⁇ 11 was added to 100 parts by weight of the coarse powder. 45 parts by weight of the fine silicon carbide powder were blended and uniformly mixed, and the other conditions were basically the same as in Reference Example 11-11.
- a groove 13 having a depth of 5 mm and a width of 10 mm was formed on almost the entire bottom surface by grinding the bottom surface of the molded body to become the upper base material 11 A later.
- the formed body was charged into a graphite crucible capable of shutting out outside air, and was fired using a tantalum-type firing furnace.
- the firing was performed in an atmosphere of argon gas at 1 atm. During firing, heating was performed at a heating rate of 10 ° C./min to the maximum temperature of 170 ° C., and thereafter, the temperature was maintained for 4 hours.
- the resulting porous silicon carbide base material 11 A, 1 IB had open porosity 23, a porosity of 38%, a thermal conductivity of 5 O WZ m ⁇ K, and a density of 2 O g Z cm 3 .
- the average particle size of the silicon carbide crystals was 10 ⁇ m.
- the average particle diameter of the silicon carbide crystal is 20 ⁇ ! ⁇ 100 ⁇ m, porosity 5% ⁇ 30%, thermal conductivity Is 8 OW / m ⁇ K or more.
- Each of these sintered bodies has a fine crystal 21 having an average particle size of 0.1 m to 1.0 ⁇ m in an amount of 10% by volume to 50% by volume. / 0 , and 50 to 90% by volume of coarse crystals 22 having an average particle size of 25 ⁇ m to 65; xm. Therefore, the thermal conductivity value exceeds 100 WZm ⁇ K, and extremely high thermal conductivity is given to Table 2.
- the cooling water W can flow through the water channel 12 existing at the joint interface between the base materials 11A and 11B. Therefore, the heat generated during polishing of the semiconductor wafer 5 can be directly and efficiently released from the table 2 and the temperature can be finely controlled. Therefore, as compared with the conventional apparatus in which the table 2 is placed on the cooling jacket to perform indirect cooling, the temperature variation in the table 2 is extremely small, and the heat uniformity and the thermal response are remarkably improved. Therefore, according to this apparatus 1, the wafer 5 is less likely to be adversely affected by heat, and can cope with an increase in the diameter of the wafer 5. Since the wafer 5 can be polished with high precision, it is possible to cope with high quality.
- This embodiment can be modified as follows.
- the base materials 11A and 11B may be joined using a metal-based joining material represented by a brazing material, or may be joined using a resin adhesive (for example, epoxy resin). You can.
- the base materials 11 A and 11 B do not necessarily have to be joined via the brazing material layer 14.
- the base materials 11 A and 11 B may be integrated by fastening the bolt and the nut.
- a table having a three-layer structure may be embodied.
- a laminated structure of four or more layers may be used.
- Groove 13 may be formed only in upper substrate 11A, may be formed only in lower substrate 11B, or both substrates 11A, 11 It may be formed in B.
- a liquid other than water may be circulated in the water channel 12 or a gas may be circulated.
- the porous silicon carbide sintered body of the present invention may be used for a table 2 in a wafer polishing apparatus, or may be used for a member other than a table (such as a wafer top plate).
- the present invention is not limited to being used as a constituent material of a semiconductor manufacturing apparatus represented by the wafer polishing apparatus table 2 and the like.
- the sintered body may be used as a radiator of a substrate for mounting electronic components.
- the sintered body is used for wear-resistant materials such as mechanical seals and bearings, refractory materials for high-temperature furnaces, heat-resistant structural materials such as heat exchangers and combustion tubes, and corrosion-resistant materials such as pump parts. It is of course possible to do so.
- Table 2 of the second embodiment will be described with reference to FIG. The detailed description of the configuration common to the first embodiment is omitted.
- the average particle size of the silicon carbide crystal is 20 / m or more, the porosity is 30% or less, and the thermal conductivity is 16 OWZm ⁇ K or more.
- the metal is impregnated with 15 to 50 parts by weight of metal based on 100 parts by weight of silicon carbide.
- the average particle size of the silicon carbide crystal constituting the porous structure is set to a relatively large value of 20 ⁇ m or more. The reason is that the efficiency of heat conduction inside the crystal is generally higher than the efficiency of heat conduction between crystals, so that the larger the average particle size, the higher the thermal conductivity.
- the porosity of the porous structure is set to a small value of 30% or less also contributes to the improvement of the thermal conductivity. That is, as the porosity decreases, voids are formed in the porous structure, so that heat is easily conducted. Further, the fact that the metal is impregnated with 15 to 50 parts by weight with respect to 100 parts by weight of silicon carbide also contributes to improvement in thermal conductivity.
- the overall thermal conductivity is much lower than 16 OW / mK Compared to conventional composites, temperature variation is less likely to occur inside. As a result, the composite is provided with extremely high heat uniformity and thermal responsiveness. In addition, the generation of thermal stress is reliably avoided, and the substrates 11A and 11B are less likely to warp, so that extremely high shape stability is imparted to the composite.
- the thermal conductivity is 16 OW / m ⁇ K even after impregnation. It is difficult to set the above high value. Therefore, it is not possible to sufficiently improve the thermal uniformity, the thermal responsiveness, and the shape stability.
- the value of the thermal conductivity needs to be 160 WZm'K or more, and more preferably 180 WZmK to 280 W / mK. W / m ⁇ K to 260 W / m ⁇ K is particularly preferable.
- 15 to 50 parts by weight of metal is impregnated with 100 parts by weight of silicon carbide. Must have been. This is because, when the metal is impregnated, the metal is buried in the open pores 23 of the sintered body to become apparently dense, and as a result, the thermal conductivity and the strength are improved.
- metallic silicon 24 has high thermal conductivity in itself, in addition to being a material that is familiar with silicon carbide. Therefore, by filling the metal silicon 24 into the open pores of the sintered body, it is possible to reliably achieve improvements in thermal conductivity and strength.
- the metal silicon 24 is preferably impregnated with 15 to 45 parts by weight, more preferably 15 to 30 parts by weight, based on 100 parts by weight of silicon carbide. Is preferred. If the impregnation amount is less than 15 parts by weight, the open pores 23 cannot be sufficiently filled, and the thermal resistance of the composite may not be reduced reliably. Conversely, if the impregnated amount exceeds 30 parts by weight, the ratio of the crystal part relatively decreases, and in some cases, the thermal conductivity may be reduced. In the case where a material other than metal silicon 24, for example, metal aluminum is selected, it is preferable to impregnate it with 20 to 50 parts by weight with respect to 100 parts by weight of silicon carbide. If the impregnation amount is outside the above range, the thermal conductivity may be reduced.
- the porous silicon carbide sintered body of this example is manufactured through a material preparation step of mixing and mixing a fine powder and a coarse powder in a predetermined ratio, a forming step, a firing step, and a metal impregnation step.
- the metal impregnation step may be performed after the firing step, or may be performed before the firing step. Note that the material preparation step, the forming step, and the baking step have been described in detail in the first embodiment, and a description thereof will be omitted.
- the sintered body that is, the unimpregnated composite
- metal is impregnated with metal as follows.
- a carbonaceous substance in advance.
- various organic substances such as bullfural resin, phenol resin, lignin sulfonate, polybutyl alcohol, corn starch, molasses, coal tar pitch, and alginate can be used.
- pyrolytic carbon such as carbon black and acetylene black can be used as well.
- the reason why the carbon chamber material is impregnated beforehand is that a new silicon carbide film is formed on the surface of the open pores 23 of the sintered body, and thus the bond between the molten silicon and the porous body is strong. Because it becomes. In addition, the impregnation of the carbon chamber material increases the strength of the sintered body.
- the metal silicon 24 As a method of filling the metal silicon 24 into the open pores 23, for example, there is a method of impregnating the metal silicon 24 by heating and melting.
- a method in which finely divided metal silicon 24 is dispersed in a dispersion medium, the dispersion is impregnated into a porous material, dried, and then heated to a temperature equal to or higher than the melting temperature of the metal silicon is also applicable. It is.
- the metal impregnation step is performed on the molded body, in other words, before the firing step. You may. According to this method, although the quality of the obtained product is slightly inferior, the cost can be reduced by saving power.
- the starting materials were a coarse powder of silicon carbide having an average particle diameter of 30 111 (# 400) and a fine powder of ⁇ - type silicon carbide having an average particle diameter of 0.3 m. (GM F—15 ⁇ 2). Then, 30 parts by weight of the fine powder was blended with 100 parts by weight of the coarse powder, and this was uniformly mixed.
- the green compact was charged into a graphite crucible and fired using a Tamman firing furnace.
- the firing was performed in an argon gas atmosphere at 1 atm. During firing, heating was performed at a heating rate of 10 ° C / min to a maximum temperature of 220 ° C, and thereafter, the temperature was maintained for 4 hours.
- the obtained porous sintered body was previously impregnated with a phenol resin (carbonization ratio: 30% by weight) under vacuum, and dried. Thereafter, a slurry containing metal silicon 24 was coated on the surface of the porous sintered body.
- a slurry 100 parts by weight of metal silicon powder having an average particle diameter of 20 / xrn and a purity of 99.99.99% or more, and 60% by weight of a 5% acrylate / benzene solution And the mixture was used.
- the porous sintered body coated with metallic silicon 24 is placed in an argon gas stream for 4 hours. The mixture was heated at a heating rate of 50 ° C.Z for a period of about 1 hour at a maximum temperature of 150 ° C. By such a treatment, metallic silicon was permeated into the porous sintered body to obtain a silicon carbide / metal composite.
- the impregnation amount of metal silicon 24 to 100 parts by weight of silicon carbide was set to 30 parts by weight.
- the porosity of the open pores 23 in the porous structure is 20%, and the overall thermal conductivity is 21 O.
- the WZm ⁇ K had an overall density of 3.0 O g Z cm 3 .
- the average particle size of the silicon carbide crystals was 30 ⁇ m. Specifically, it contained 20% by volume of fine crystals 21 having an average particle size of 1.0 m and 80% by volume of coarse crystals 22 having an average particle size of 40 m.
- the graph in Fig. 4C shows the particle size distribution in Reference Example 2-1.
- the table 2 of Example 2-1 thus obtained is set in the above-mentioned various polishing apparatuses 1, and polishing of the semiconductor wafers 5 of various sizes is performed while the cooling water W is constantly circulated in the water channel 12. Done. Then, when the semiconductor wafer 5 obtained through polishing by various polishing apparatuses 1 was observed, the wafer 5 was not damaged irrespective of the wafer size. Also, no large warpage of the wafer 5 occurred. In other words, it was found that when Table 2 of this reference example was used, an extremely large-sized high-quality semiconductor wafer 5 could be obtained.
- FIG. 5 is an enlarged conceptual cross-sectional view of Table 2 of Reference Example 2-1.
- the silicon carbide / metal composite constituting table 2 includes fine crystals 21 and coarse crystals 22.
- the voids formed between the coarse crystals 22 are almost filled with the fine crystals 21. Therefore, it can be understood that the substantial ratio of voids, that is, the porosity of the open pores 23 is considerably small.
- the remaining voids are filled with metallic silicon 24.
- Example 2-2 In the preparation of Example 2-2, a coarse powder of ⁇ -type silicon carbide having an average particle size of 35 ⁇ m (# 360) was used, and 4 parts by weight of fine powder was 0 parts by weight were blended and uniformly mixed. Other conditions were basically the same as in Reference Example 2-1.
- the porosity of the open pores of the obtained porous structure of the silicon carbide / metal composite substrate 11A and 11B was 17%, and the overall thermal conductivity was 220 W / m. ⁇ K, density was 3.0 gZcm 3 .
- the average particle size of silicon carbide crystals was 36 / m. Specifically, it contained 20% by volume of fine crystals 21 having an average particle size of 1.0 ⁇ m and 80% by volume of coarse crystals 22 having an average particle size of 45 m.
- the graph in FIG. 4B shows the particle size distribution in Reference Example 2-2.
- Reference Example 2-3 In the preparation of Reference Example 2-3, a c-type silicon carbide coarse powder (# 240) having an average particle diameter of 57 ⁇ m was used, and a fine powder was added to 100 parts by weight of a fine powder. Parts by weight were mixed and uniformly mixed. Other conditions were basically the same as in Reference Example 2-1.
- the porosity of the open porosity 23 of the obtained silicon carbide / metal composite substrate 11 1 and 11B was 15%, the thermal conductivity was 23 OWZm ⁇ , and the density was 3. l gZc m 3 der ivy.
- the average particle size of the silicon carbide crystals was 65 ⁇ . Specifically, 20 volumes of fine crystals 21 with an average particle size of 1.0 ⁇ m. /. And 80% by volume of crude crystals 22 having an average particle size of 80 ⁇ m.
- the graph in FIG. 4A shows the particle size distribution in Reference Examples 2-3.
- Comparative Example 2 In the preparation of Comparative Example 2, a coarse powder of ⁇ - type silicon carbide having an average particle size of 10 ⁇ m was used, and a carbonized carbon powder having an average particle size of 0.7 ⁇ m was added to 100 parts by weight of the coarse powder. Forty-five parts by weight of the silicon fine powder was blended and uniformly mixed. Other conditions were basically the same as in Reference Example 2-1.
- the green compact was charged into a graphite crucible and fired using a Tamman firing furnace.
- the firing was performed in an argon gas atmosphere at 1 atm.
- heating was performed at a heating rate of 10 CZ to a maximum temperature of 170 ° C., and thereafter, the temperature was maintained for 4 hours.
- the obtained porous substrate 11A, 11B of the silicon carbide / metal composite has an open pore 23 of a porous structure 23, a porosity of 38%, and a thermal conductivity of 130 WZmK.
- the density was 2.8 g Z cm 3 .
- the average particle size of the silicon carbide crystals was 10 m.
- the average grain size of the silicon carbide crystal is 20 ⁇ ! Up to 100 m, the porosity of the porous structure is 5% to 30%, and the overall thermal conductivity is more than 160 WZm ⁇ K. Further, 15 to 45 parts by weight of metallic silicon 24 is impregnated with respect to 100 parts by weight of silicon carbide.
- each of these composites has an average particle size of 0.1 ⁇ ! ⁇ 1. ⁇ ⁇ ⁇ PT / JP00 / 08284
- It contains 10% to 50% by volume of crystals and 50% to 90% by volume of coarse crystals having an average particle size of 25 ⁇ m to 150 ⁇ m.
- the value of the thermal conductivity exceeds 160 W / m ⁇ K in all cases, and the extremely high thermal conductivity is given to the table 2. For this reason, temperature variation is less likely to occur inside the composite than in the conventional product. As a result, the composite is provided with extremely high heat uniformity and thermal responsiveness. Further, the occurrence of thermal stress is reliably avoided, and the substrates 11A and 11B are hardly warped, so that extremely high shape stability is imparted to the composite. As a result, the diameter and quality of the wafer 5 can be reliably improved.
- the cooling water W can flow through the water channel 12 existing at the joint interface between the base materials 11A and 11B. Therefore, the heat generated during polishing of the semiconductor wafer 5 can be directly and efficiently released from the table 2 and the temperature can be finely controlled. Therefore, as compared with the conventional apparatus in which the table 2 is placed on the cooling jacket to perform indirect cooling, the temperature variation in the table 2 is extremely small, and the heat uniformity and the thermal response are significantly improved. Therefore, according to this apparatus 1, the wafer 5 is less likely to be adversely affected by heat, and it is possible to cope with an increase in the diameter of the wafer 5. In addition, since the wafer 5 can be polished with high accuracy, it is possible to cope with high quality.
- This embodiment can be modified as follows.
- the impregnating metal impregnated in the sintered body is not limited to the metal silicon 24 shown in the present embodiment.
- the impregnation may be performed using a conductive metal material such as aluminum, gold, silver, copper, and titanium.
- the silicon carbide / metal composite 18 is joined via the joining layer 31 made of metallic silicon 24 instead of the mouth material layer 14.
- the thickness of the bonding layer 31 made of metallic silicon 24 is preferably 10 ⁇ m to 150 ⁇ m, and more preferably 1 ⁇ m to 500 ⁇ .
- the reason is that if the bonding layer 31 is thinner than 10 ⁇ m, sufficient bonding strength may not be obtained. Conversely, if the thickness of the bonding layer 31 is set to be larger than 1500 ⁇ , it becomes difficult to set conditions such as temperature and time during the impregnation, which may make the bonding operation difficult.
- metal silicon 24 was particularly selected as the impregnating metal is that metal silicon 24 originally has a high thermal conductivity in addition to being a material that is familiar with silicon carbide. Because it is. Therefore, by filling the open pores 23 of the porous body 17 with the metal silicon 24, the thermal conductivity and the strength can be reliably improved. Also, the metal silicon 24 is suitable as a material for the bonding layer 31 because the thermal expansion coefficient is very similar to that of silicon carbide unlike a resin material such as an adhesive.
- the porous body 17 of silicon carbide is manufactured through a material preparation step, a molding step, a sintering step, and a metal impregnation / substrate bonding step in which a coarse powder and a fine powder are mixed and mixed in a predetermined ratio.
- the material preparation step, the forming step, and the baking step have already been described in detail in the previous examples, and thus description thereof is omitted here.
- the unimpregnated porous body 17 is impregnated with metal silicon 24 as follows. It is preferable that the porous body 17 be impregnated with a carbonaceous material in advance when the metal silicon 24 is impregnated.
- a plurality of porous bodies 17 are laminated, and a solid metal silicon 24 is placed on the top of the laminate (see FIGS. 7A and 7B).
- a solid metal silicon 24 is used.
- a powdery material, a granular material, a sheet material, or the like may be used.
- pasted metal silicon 24 may be used in place of the fixed metal silicon 24, and may be applied to the top of the laminate.
- the laminate is set in a heating furnace and heated at a predetermined temperature for a predetermined time (see FIG. 7).
- the solid or pasted metal silicon 24 melts and flows down through the open pores 23 of the porous body 17.
- the porous body 17 is impregnated with the metal silicon 24, and the desired silicon carbide ′ metal composite 18 is obtained.
- the composites 18 are joined together via the joining layer 31 made of metal silicon 24.
- the heating temperature at this time is preferably set to 150 ° C. to 200 ° C.
- the reason is that, when the temperature is lower than 150 ° C., the metal silicon 24 cannot be completely melted and fluidized, so that an unimpregnated portion is formed in the composite 18 or the bonding interface is not formed. This is because there is a possibility that a joint may occur.
- the temperature is higher than 2000 ° C., the metal silicon 24 vaporizes (sublimates), so that a sufficient amount of the metal silicon 24 does not remain at the bonding interface, and the bonding strength is reduced. This is because there is a danger that In addition, heat energy is wasted during heating, which may reduce economic efficiency and productivity.
- the heating time is preferably set to one hour or more. The reason is that if the time is less than 1 hour, there is a possibility that an unimpregnated portion may be generated in the composite 18 or an unbonded portion may be generated at the bonding interface.
- the heating of the laminate is preferably performed under reduced pressure, particularly under the condition of 5 torr or less.
- reduced pressure the air in the porous body 17 easily escapes from the open pores, and it is possible to smoothly impregnate the metallic silicon: .24.
- by setting the environment low in oxygen This is to prevent the oxidation of kon 24.
- the starting materials were a coarse powder of ⁇ - type silicon carbide having an average particle size of 30 ⁇ m (# 400) and an ⁇ - type silicon carbide having an average particle size of 0.3 m.
- a fine powder (GMF-15H2) was prepared. Then, 30 parts by weight of the fine powder was blended with 100 parts by weight of the coarse powder, and this was uniformly mixed.
- a groove 13 having a depth of 5 mm and a width of 10 mm was formed on almost the entire bottom surface by grinding the bottom surface of the molded body to become the upper base material 11 A later.
- the green compact was charged into a graphite crucible and fired using a Tamman firing furnace.
- the firing was performed in an argon gas atmosphere at 1 atm.
- heating was performed at a heating rate of 10 ° CZ to the maximum temperature of 220 ° C., and thereafter, the temperature was maintained for 4 hours.
- the obtained porous body 17 was impregnated in advance with a phenol resin (carbonization ratio: 30% by weight) and dried. Then, two porous bodies 17 are laminated, and massive metallic silicon 24 is placed on the top of the laminate. Here, massive metal silicon 24 having a purity of 99.9% or more was used. Then, the laminate on which the massive metal silicon 24 was placed was set in a heating furnace, and this was heated under a reduced pressure of 1 torr, and kept at a maximum temperature of 180 ° C. for about 3 hours. . As a result of such a treatment, the solid-state metallic silicon 24 is melted and Was impregnated with metallic silicon 24.
- the composites 18 were joined together via the joining layer 31 made of metal silicon 24.
- the impregnation amount of metal silicon 24 to 100 parts by weight of silicon carbide was set to 30 parts by weight.
- the thickness of the bonding layer 31 made of the metal silicon 24 was set to 150 ⁇ m.
- the porosity of the open pores 23 in the porous structure is 20%, and the thermal conductivity as a whole is 21 OW. / m ⁇ K, and the overall density was 3.0 Og / cm 3 .
- the average particle size of silicon carbide crystals 21 and 22 was 30 ⁇ m. Specifically, 20 volumes of fine crystals 21 having an average particle size of 1.0 m. /. 80 volumes of crude crystals 22 containing and having an average particle size of 40 m. /. Included.
- the thermal expansion coefficient of the porous body 17 of this example was 4.0 ⁇ 10 6 Z ° C.
- the thermal expansion coefficient of the bonding layer 31 made of the metal silicon 24 was 4.2 ⁇ 1CT 6 / ° C., which was very similar to that of the porous body 17.
- the thermal conductivity of the bonding layer 31 made of metallic silicon 24 was 150 W / m ⁇ K, which was a high thermal conductor. Subsequently, the surface of the upper substrate 11A was polished to finally complete the table 2.
- the metal silicon 24 impregnated in the porous body 17 and the metal silicon 24 forming the bonding layer 31 are continuously and seamlessly. In the state that existed. Therefore, this is considered to have contributed somewhat to the improvement in bending strength.
- the table 2 was cut along the thickness direction, and the cut surface was observed with the naked eye and a microscope. As a result, no cracking or peeling was observed at the joint interface.
- the table 2 of Reference Example 3-1 thus obtained is set in the above-mentioned various polishing apparatuses 1, and while constantly circulating the cooling water W through the water channel 12 ⁇ , semiconductor wafers of various sizes are provided. Polishing of 5 was performed. Then, when the semiconductor wafer 5 obtained through polishing by various polishing apparatuses 1 was observed, the wafer 5 was not damaged irrespective of the wafer size. Also, no large warpage of the wafer 5 occurred. In other words, it was found that when Table 2 of Reference Example 3-1 was used, a large-diameter, high-quality semiconductor wafer 5 could be obtained.
- the thickness of the bonding layer 31 was set to 50 ⁇ m, and the other conditions were basically the same as in Reference Example 3-1 to prepare Table 2.
- the bending strength of the obtained Table 2 was measured plural times. As a result, the average value was about 550 MPa.
- the cut surface of Table 2 was observed after a heat cycle for a certain period of time, no crack or peeling at the bonding interface was observed at all.
- the table 2 was set in the above-mentioned various polishing apparatuses 1 and the semiconductor wafers 5 of various sizes were polished. As a result, almost the same excellent results as in Reference Example 3-1 were obtained. That is, it was found that the wafer 5 was not damaged or warped, and a large-diameter and high-quality semiconductor wafer 5 was obtained.
- the thickness of the bonding layer 31 was set to 1500 ⁇ m, and the other conditions were basically the same as in Reference Example 3 _ 1 to prepare Table 2. .
- the average value was about 550 MPa.
- the cut surface of Table 2 was observed after a heat cycle for a certain period of time, no crack or peeling at the bonding interface was observed at all.
- the table 2 was set in the above-mentioned various polishing apparatuses 1 and the semiconductor wafers 5 of various sizes were polished. As a result, almost the same excellent results as in Reference Example 3-1 were obtained. That is, no damage or warpage of the wafer 5 was observed, and it was found that a large-diameter and high-quality semiconductor wafer 5 could be obtained.
- the metal silicon 24 was separately prepared for each porous body 17 in advance.
- Base materials 11 A and 11 B are prepared by impregnation, and then base materials 11 A and 11 B are joined together by brazing using a brazing material consisting of Ag-Cu-Ti.
- Table 2 was made basically in the same manner as in Reference Example 3-1.
- the thermal conductivity of the mouth material was slightly higher than that of metallic silicon 24, that is, 170 W / m ⁇ K.
- the thermal expansion coefficient of the brazing material was 18.5 X 1 CT G / ° C, which was somewhat larger than that of metallic silicon 24.
- the average value was about 400 MPa, which was lower than those of the three reference examples.
- the cut surface of the table 2 was observed after a heat cycle for a certain period of time, cracks and peeling were sometimes observed at the joint interface.
- each of the porous bodies 17 was separately impregnated with metal silicon 24 to prepare substrates 11A and 11B, and then a resin adhesive (manufactured by Cemedine)
- the substrates 11A and 11B were bonded to each other by using the above.
- Other conditions were basically the same as in Reference Example 3-1 to produce Table 2.
- the thermal conductivity of the adhesive was 0.16 W / m-K, which was significantly lower than that of metallic silicon 24.
- the thermal expansion coefficient of the adhesive was 65 X 1 CT 6 Z ° C, which was considerably larger than that of metallic silicon 24.
- the occurrence of cracks and peeling at the joint interface is prevented, and it is difficult to break even when subjected to a heat cycle.
- water leakage from the cooling water channel 12 is prevented beforehand, and the table 2 has excellent long-term reliability.
- the bonding layer 31 made of the metal silicon 24 does not increase the thermal resistance at the bonding interface, the table 2 has extremely excellent thermal conductivity. Therefore, temperature variation hardly occurs inside the table 2, and extremely high uniformity and thermal responsiveness are provided. Therefore, if the wafer is polished by the wafer polishing apparatus 1 using the table 2, a large-diameter, high-quality wafer 5 can be reliably manufactured.
- This embodiment can be modified as follows.
- the table 2 may be manufactured using a material other than silicon carbide, for example, silicon nitride. Also, instead of using a plurality of composites 18 made of the same type of ceramic, a plurality of composites made of different types of ceramics are used. Body 18 (for example, a combination of silicon carbide and silicon nitride) may be used.
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Description
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Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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EP00977905A EP1174400A4 (en) | 1999-11-30 | 2000-11-24 | FRESH POROUS SILICON CARBIDE TABLET AND SILICON CARBIDE AND METAL COMPOSITE SUITABLE FOR USE IN A PLATELET POLISHING MACHINE TABLE |
KR10-2004-7017499A KR100507046B1 (ko) | 1999-11-30 | 2000-11-24 | 웨이퍼 연마장치용 테이블에 적합한 탄화규소·금속 복합체 |
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JP11/340408 | 1999-11-30 | ||
JP34040999A JP2001158680A (ja) | 1999-11-30 | 1999-11-30 | 炭化珪素・金属複合体及びその製造方法、並びにウェハ研磨装置用部材及びウェハ研磨装置用テーブル |
JP11/340409 | 1999-11-30 | ||
JP34040899A JP2001158674A (ja) | 1999-11-30 | 1999-11-30 | 多孔質炭化珪素焼結体及びその製造方法、並びにウェハ研磨装置用部材及びウェハ研磨装置用テーブル |
JP2000126085 | 2000-04-26 | ||
JP2000-126085 | 2000-04-26 |
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JP2008119819A (ja) | 2006-10-20 | 2008-05-29 | Jtekt Corp | 凹部入り砥石の製造方法 |
JP4999560B2 (ja) | 2007-06-07 | 2012-08-15 | 豊田バンモップス株式会社 | 研削盤における砥石軸装置 |
KR101090275B1 (ko) | 2009-03-13 | 2011-12-07 | 한국에너지기술연구원 | 뮬라이트 결합 탄화규소 세라믹스 소재 제조용 조성물, 세라믹스 및 그 제조방법 |
JP5551778B2 (ja) * | 2009-07-24 | 2014-07-16 | サン−ゴバン セラミックス アンド プラスティクス,インコーポレイティド | 乾湿低摩擦炭化ケイ素シール |
DE102009054574B3 (de) * | 2009-12-11 | 2011-03-03 | Sgl Carbon Se | Wärmetauscherrohr oder Wärmetauscherplatte mit offenporigem Siliciumcarbidnetzwerk und Verfahren zu deren Herstellung |
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- 2000-11-24 KR KR10-2004-7017499A patent/KR100507046B1/ko active IP Right Grant
- 2000-11-24 KR KR10-2001-7009596A patent/KR100507049B1/ko active IP Right Grant
- 2000-11-24 WO PCT/JP2000/008284 patent/WO2001040138A1/ja not_active Application Discontinuation
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Also Published As
Publication number | Publication date |
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EP1174400A1 (en) | 2002-01-23 |
EP1174400A4 (en) | 2006-02-01 |
KR20020005582A (ko) | 2002-01-17 |
KR20040106426A (ko) | 2004-12-17 |
KR100507049B1 (ko) | 2005-08-05 |
KR100507046B1 (ko) | 2005-08-08 |
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