WO2001012942A1 - Fabrication de panneau de verre sous vide comportant un getter - Google Patents

Fabrication de panneau de verre sous vide comportant un getter Download PDF

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Publication number
WO2001012942A1
WO2001012942A1 PCT/AU2000/000984 AU0000984W WO0112942A1 WO 2001012942 A1 WO2001012942 A1 WO 2001012942A1 AU 0000984 W AU0000984 W AU 0000984W WO 0112942 A1 WO0112942 A1 WO 0112942A1
Authority
WO
WIPO (PCT)
Prior art keywords
getter
glass sheets
chamber
glass
evacuated
Prior art date
Application number
PCT/AU2000/000984
Other languages
English (en)
Inventor
Richard Edward Collins
Original Assignee
The University Of Sydney
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by The University Of Sydney filed Critical The University Of Sydney
Priority to AU65490/00A priority Critical patent/AU759904B2/en
Priority to EP00952793A priority patent/EP1204805A1/fr
Priority to JP2001517019A priority patent/JP2003507845A/ja
Priority to CA002391831A priority patent/CA2391831A1/fr
Publication of WO2001012942A1 publication Critical patent/WO2001012942A1/fr

Links

Classifications

    • EFIXED CONSTRUCTIONS
    • E06DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
    • E06BFIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
    • E06B3/00Window sashes, door leaves, or like elements for closing wall or like openings; Layout of fixed or moving closures, e.g. windows in wall or like openings; Features of rigidly-mounted outer frames relating to the mounting of wing frames
    • E06B3/66Units comprising two or more parallel glass or like panes permanently secured together
    • E06B3/6612Evacuated glazing units
    • EFIXED CONSTRUCTIONS
    • E06DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
    • E06BFIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
    • E06B3/00Window sashes, door leaves, or like elements for closing wall or like openings; Layout of fixed or moving closures, e.g. windows in wall or like openings; Features of rigidly-mounted outer frames relating to the mounting of wing frames
    • E06B3/66Units comprising two or more parallel glass or like panes permanently secured together
    • E06B3/663Elements for spacing panes
    • E06B3/66304Discrete spacing elements, e.g. for evacuated glazing units
    • EFIXED CONSTRUCTIONS
    • E06DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
    • E06BFIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
    • E06B3/00Window sashes, door leaves, or like elements for closing wall or like openings; Layout of fixed or moving closures, e.g. windows in wall or like openings; Features of rigidly-mounted outer frames relating to the mounting of wing frames
    • E06B3/66Units comprising two or more parallel glass or like panes permanently secured together
    • E06B3/677Evacuating or filling the gap between the panes ; Equilibration of inside and outside pressure; Preventing condensation in the gap between the panes; Cleaning the gap between the panes
    • E06B3/6775Evacuating or filling the gap during assembly
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02ATECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A30/00Adapting or protecting infrastructure or their operation
    • Y02A30/24Structural elements or technologies for improving thermal insulation
    • Y02A30/249Glazing, e.g. vacuum glazing
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02BCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B80/00Architectural or constructional elements improving the thermal performance of buildings
    • Y02B80/22Glazing, e.g. vaccum glazing

Definitions

  • This invention relates to an evacuated glass panel that incorporates a getter and to a method of constructing the panel.
  • the evacuated glass panel is formed with a chamber located between two spaced-apart glass sheets and a fused seal surrounding the chamber.
  • the invention has particular application to vacuum glazing and is hereinafter described in that context. However, it will be appreciated that the invention does have broader application including, for example, in the fabrication of glass display panels.
  • the pressure level (i.e., vacuum pressure) required for effective performance is very low relative to atmospheric pressure.
  • the internal pressure is typically 10 ⁇ 3 Pa or less, whereas in thermal insulating structures, such as vacuum glazing, the pressure is typically 10 "1 Pa or less.
  • the stability of a vacuum within a device or structure is dependent upon a low emission of gas from the internal surfaces of the device or structure after evacuation and sealing. Therefore, devices or structures in which a stable vacuum is to be maintained typically are subjected to a high temperature outgassing process, to release as much of the surface (adsorbed) and bulk (absorbed) gas as possible, whilst pumping is proceeding. In order to ensure that the outgassing occurs as quickly as possible, it typically is performed at the highest possible temperature.
  • a small quantity of a highly reactive material i.e., a
  • getter is located inside the device to aid in the maintenance of the vacuum.
  • Suitable getter materials include chemically active metals such as aluminium, barium, strontium, titanium and zirconium.
  • a getter provides for the formation of stable, inert, low vapour pressure compounds with most species of gas atoms that may be emitted from the devices, thereby effectively removing gas atoms from the internal volume of the devices.
  • a getter may only be employed in circumstances where the getter itself will not be degraded during a manufacturing process.
  • the present invention seeks to avoid the above stated difficulties and it may be defined broadly as providing a method of fabricating an evacuated glass panel having a chamber defined by two spaced-apart glass sheets and a fused edge seal.
  • the method comprises the steps of: (a) positioning the glass sheets in spaced-apart relationship and locating a getter within a region of the chamber to be formed between the glass sheets, (b) depositing a fusible sealant material around the edges of the glass sheets,
  • the invention may also be defined as providing an evacuated glass panel per se when formed by the above defined method. Preferred Feature of the Invention
  • the method steps (c) and (d) preferably are combined, so that the inert gas is admitted to the space between the glass sheets in a manner to displace the air from between the glass sheets .
  • the air preferably is displaced through the sealant material that is deposited around the edges of the glass sheets prior to fusing of the sealant material.
  • the getter may be activated at any time following displacement of the air and admission of the inert gas.
  • the getter preferably is activated at the same time as method step (e) is performed; that is by heating the glass sheets in a substantially uniform manner to a temperature sufficient to effect fusing of the sealant material and to activate the getter.
  • the getter preferably will be activated following evacuation of the chamber.
  • the getter When the getter is in the form of an evaporable type, the getter may be heated by passing an electrical current through the getter by way of electrical connections. Alternatively, heating current may be induced to flow through the getter by an induced heating process. In this latter case, an induction coil may be located outside of the glass panel and be energised in a manner to couple radio frequency energy into the getter.
  • Figure 1 shows a diagrammatic representation of a panel in the form of evacuated glazing incorporating a getter
  • Figure 2 is a flow chart showing sequential steps in fabrication of the evacuated glazing when employing a non- evaporable getter
  • Figure 3 is a flow chart showing sequential steps in fabrication of the evacuated glazing when employing an evaporable getter
  • Figures 4A to 4D show sectional elevation views of a portion of the evacuated glazing during fabrication by a first process
  • Figure 5 shows a variation of the arrangement shown in
  • Figure 4 Figures 6A to 6D show sectional elevation views of a portion of the evacuated glazing during fabrication by a second process
  • Figures 7A to 7D show sectional elevation views of a portion of the evacuated glazing during fabrication by a third process
  • Figures 8A to 8D show sectional elevation views of a portion of the evacuated glazing during fabrication by a fourth process.
  • the evacuated glazing comprises two planar sheets 10 and 12 of glass that are maintained in spaced-apart relationship by an array of pillars 14.
  • the glass sheets 10 and 12 typically have the following dimensions -
  • the upper glass sheet 10 has a peripheral dimension that is marginally smaller than the lower glass sheet 12, and fused solder glass is employed to form an edge seal 16 around the periphery of the glass sheets.
  • a chamber 18 is defined by the spaced-apart glass sheets 10 and 12 and the fused edge seal 16, and the chamber is evacuated to a pressure in the order of 10 "1 Pa or below. This provides for heat conduction between the glass sheets 10 and 12 that is negligible relative to other heat flow mechanisms.
  • a getter 20, 21 or 23 is located within a region 22 of the chamber 18 between the glass sheets and is activated for the purpose of sustaining the vacuum within the chamber.
  • the getter may be of a non-evaporable type or an evaporable type, and Figures 2 and 3 present flow charts containing the sequential steps of fabricating the evacuated glazing using the respective types of getters.
  • the two glass sheets 10 and 12 are initially placed in spaced-apart confronting relationship and the solder glass 16, in paste form, is deposited around the marginal edges of the sheets in a manner to contact the vertical edge of the upper glass sheet 10 and to rest on a horizontal projecting portion of the lower glass sheet 12.
  • the glass sheets 10 and 12 are maintained in spaced-apart relationship by the pillars 14 as shown in Figure 1, with the chamber 18 being located between the confronting glass sheets .
  • a pellet-form non-evaporable getter 20 is located in the region 22 of the chamber 18.
  • the region 22 is formed as a recess in the lower glass sheet 12.
  • a pump-out channel 24 is provided in the upper glass sheet 10, and a glass pump-out tube 26 is connected to the upper end of the channel 24 to extend beyond the upper surface of the upper glass sheet 10.
  • a further deposit 28 of solder glass in paste form is located around the pump- out tube 26 on the upper surface of the glass sheet 10.
  • An evacuating tool 30 is removably mounted to the upper surface of the upper glass sheet 10.
  • the evacuating tool incorporates an annular recess 32 from which air is evacuated by a pump (not shown) which is connected to an evacuating line 34. With evacuation of the recess 32, seals are established between the upper surface of the glass sheet 10 and lands 36 of the evacuating tool.
  • an inert gas such as Argon is directed into the chamber 18 by way of a gas supply line 38.
  • the gas is caused to flow into a central recess 40 of the evacuating tool 30 and through the channel 24 to enter the chamber 18.
  • the solder glass 16, as indicated in Figure 4A, remains permeable prior to fusing, and admission of the inert gas to the chamber 18 causes displacement of air from the chamber 18 through the unfused solder glass. When all air has been displaced from the chamber 18, the getter 20 is surrounded by the inert gas.
  • the complete assembly as shown in Figure 4A including the contained inert gas, is exposed to heat within an oven chamber (not shown) and the complete structure is heated to a level sufficient to create the fused solder glass seals 16 and 28, as indicated in Figure 4B.
  • the inflow of inert gas is maintained until such time as the solder glass deposits 16 and 28 are fused to form impermeable seals around the edges of the glass sheets and, also, around the pump-out tube 26.
  • the getter 20 is maintained in an inert gas environment at all times during the heating process .
  • the complete assembly is heated to a temperature in the order of 450°C to fuse the solder glass seals 16 and 28, and this temperature is sufficient to activate the non- evaporable getter 20.
  • Activation of the getter 20 occurs as a consequence of rupturing of a native oxide layer on the surface of the getter. This results in exposure of un-reacted reactive material to gas molecules surrounding the getter 20.
  • the native oxide layer on the surface of the getter is formed originally when the getter is exposed to air, even at room temperature. Therefore should the getter 20 be surrounded by air at the time of activation, the reactive material of the getter 20 would react rapidly with gas molecules of the air. However, as the gas molecules of the inert gas do not form compounds with the material of the getter 20, no reaction occurs for such time as the getter is enveloped by the inert gas, this ensuring that the getter will remain active after the native oxide layer has been ruptured and the inert gas is evacuated from the chamber 18. The complete assembly is then cooled progressively to cause solidification of the fused seals 16 and 28 whilst maintaining the inert gas within the chamber 18.
  • the supply of inert gas is terminated and the chamber 18 is evacuated by way of the glass pump-out tube 26 and what previously was the gas supply line 38, as indicated in Figure 4C.
  • a vacuum pump (not shown) is connected to the line 38.
  • the complete arrangement is maintained at an elevated temperature, typically in the order of 250°C or greater, to effect outgassing of the internal surfaces of the chamber 18.
  • the glass pump- out tube 26 is sealed by melting its open end, so as to form the structure as shown in Figure 4D.
  • a resistive heating coil 42 is located within the evacuating tool 30 and is connected electrically with an external power supply.
  • Figure 5 shows an alternative arrangement to that of Figure 4 (in particular Figure 4A) but in which a slender getter 21 is provided and is sandwiched between the two glass sheets 10 and 12. This arrangement avoids the need to provide the recess 22 which is shown in the embodiment illustrated in Figure 4.
  • Figures 6A to 6D show an arrangement that is similar to that in Figures 4A to 4D and like reference numerals are used to identify like parts.
  • the arrangement of Figures 6A to 6D comprises an embodiment in which an evaporable (as distinct from a non-evaporable) getter 23 is employed ultimately for sustaining a vacuum within the chamber 18.
  • the evaporable getter 23 is contained within a cylindrical ring-like housing 44 that is formed from a metal such as stainless steel.
  • the housing 44 has an open lower end that faces the bottom of the recess 22 in the lower glass sheet 12. Also, the housing 44 is held in place within the recess 22 by slender supporting fingers 46 which provide for low thermal conduction between the housing and the glass sheet 12.
  • the outer layers of an evaporable getter react immediately with gas molecules when the getter is first exposed to air, even at room temperature. Reaction at a level sufficient to degrade the getter would then occur if the getter were to be exposed to air during the seal-forming heating process. As in the case of a non-evaporable getter, the reacted outer layers of an evaporable getter rupture at temperatures around 450°C, thereby exposing the un-reacted bulk material to air. This would result in immediate reactions between the bulk material and the gas molecules in the air and consequential degradation of the evaporable getter .
  • the evaporable getter 23 is activated by heating the getter to a temperature in the order of 800°C. This may be achieved by passing electrical current through the housing 44 or by coupling radio frequency energy into the housing material from a coil (not shown) that is located outside of the lower glass sheet 12.
  • the supporting fingers 46 for the housing 44 serve during heating of the getter to minimise thermal conduction between the housing 44 and the glass sheet 12. Any significant thermal conduction between the housing 44 and the glass sheet 12 would make it almost impossible to heat the evaporable getter 23 to the required temperature for evaporation. Furthermore, minimisation of heat transfer between the housing 44 and the glass sheets 10 and 12 will ensure that the glass sheets will not be subjected to excessive stresses that might otherwise be induced by the localised heating.
  • a film 48 of active getter material is deposited at the bottom of the recess 22, this providing for the maintenance of the required vacuum within the chamber 18 over long periods of time .
  • Figures 7A to 7D and 8A to 8D show arrangements that are similar to those in Figures 4A to 4D and 6A to 6D respectively.
  • the use of the evacuating tool 30 is obviated, and the admission and evacuation of gases are effected by way of a single glass tube 50.
  • the glass tube 50 has a length sufficient to locate its upper end outside of a heating chamber (not shown) in which the evacuated glazing is located during the fabrication process . This is required to enable coupling of gas delivery/extracting fittings (not shown) to the glass tube 50 when the fittings incorporate O-rings that would be degraded by the heating processes .
  • Other variations and modifications may be made in the invention as above described without departing from the scope of the invention as defined in the appendant claims.

Landscapes

  • Engineering & Computer Science (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)

Abstract

L'invention concerne un procédé de fabrication de panneau de verre sous vide, en particulier sous la forme de vitrage sous vide, qui comprend une chambre (18) définie par deux feuilles de verre espacées (10 et 12) et un scellement à lisière obtenue par fusion (16). Le procédé consiste à placer les feuilles de verre (10) et (12) en position espacée à l'aide de colonnes (14), et à placer un getter (20, 21 ou 23) dans une zone (22) de la chambre destinée à être formée entre les feuilles de verre. Un matériau de scellement fusible (16) est déposé autour des bordures des feuilles de verre (10 et 12), et l'air est déplacé depuis l'espace compris entre les feuilles de verre par injection de gaz inerte dans cet espace. Après l'injection du gaz inerte, le matériau de scellement est fondu, ce qui donne le scellement à lisière obtenue par fusion (16) autour des feuilles de verre, et l'on maintient simultanément le gaz inerte dans la chambre formée par la fusion du matériau de scellement. Ensuite, le vide est fait dans la chambre et, en fonction du type de getter (20, 21 or 23) utilisé, on active ce getter suite à l'établissement du vide dans la chambre ou pendant la fusion du scellement à lisière autour des feuilles de verre.
PCT/AU2000/000984 1999-08-18 2000-08-17 Fabrication de panneau de verre sous vide comportant un getter WO2001012942A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
AU65490/00A AU759904B2 (en) 1999-08-18 2000-08-17 Evacuated glass panel having a getter
EP00952793A EP1204805A1 (fr) 1999-08-18 2000-08-17 Fabrication de panneau de verre sous vide comportant un getter
JP2001517019A JP2003507845A (ja) 1999-08-18 2000-08-17 ゲッターを有する真空排気されたガラスパネル
CA002391831A CA2391831A1 (fr) 1999-08-18 2000-08-17 Fabrication de panneau de verre sous vide comportant un getter

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AUPQ2304A AUPQ230499A0 (en) 1999-08-18 1999-08-18 Evacuated glass panel with getter and method of construction thereof
AUPQ2304 1999-08-18

Publications (1)

Publication Number Publication Date
WO2001012942A1 true WO2001012942A1 (fr) 2001-02-22

Family

ID=3816479

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/AU2000/000984 WO2001012942A1 (fr) 1999-08-18 2000-08-17 Fabrication de panneau de verre sous vide comportant un getter

Country Status (5)

Country Link
EP (1) EP1204805A1 (fr)
JP (1) JP2003507845A (fr)
AU (1) AUPQ230499A0 (fr)
CA (1) CA2391831A1 (fr)
WO (1) WO2001012942A1 (fr)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1439152A1 (fr) * 2001-10-25 2004-07-21 Nippon Sheet Glass Co., Ltd. Panneau de verre et procede de fabrication correspondant
EP1529921A2 (fr) 2003-10-27 2005-05-11 Werner Wüthrich Elément de fermeture réduisant la transmission de la chaleur
WO2006058517A1 (fr) * 2004-12-01 2006-06-08 Elino Industrie-Ofenbau Carl Hanf Gmbh & Co.Kg Procede et dispositif pour realiser des unites destinees a la fabrication d'ecrans plats et analogues, et systeme pour vider/remplir l'espace intermediaire d'unites de ce type
CN101792253A (zh) * 2010-04-14 2010-08-04 左树森 一种真空玻璃吸气剂的封装方法
GB2498455A (en) * 2012-01-13 2013-07-17 Univ Nottingham Window with vacuum containing body
WO2014022118A1 (fr) * 2012-07-31 2014-02-06 Guardian Industries Corp. Procédé de réalisation d'unités de fenêtres avec vitrage à isolation sous vide, comprenant l'activation d'absorbeurs
EP3002642A3 (fr) * 2014-09-30 2016-04-20 Honeywell International Inc. Systèmes et procédés pour un récipient à double effet getter
US9388628B2 (en) 2012-07-31 2016-07-12 Guardian Industries Corp. Vacuum insulated glass (VIG) window unit with getter structure and method of making same
US9416581B2 (en) 2012-07-31 2016-08-16 Guardian Industries Corp. Vacuum insulated glass (VIG) window unit including hybrid getter and making same
US20170107753A1 (en) * 2014-07-30 2017-04-20 Asahi Glass Company, Limited Manufacturing method of vacuum multilayer glass and vacuum multilayer glass
US10378272B2 (en) 2014-09-30 2019-08-13 Panasonic Intellectual Property Management Co., Ltd. Glass panel unit, temporary assembly of glass panel unit, completed assembly of glass panel unit, method for manufacturing glass panel unit
CN110615623A (zh) * 2019-10-24 2019-12-27 湖南玉丰真空科学技术有限公司 真空玻璃生产线用吸气剂供给装置
US11913277B2 (en) 2018-07-31 2024-02-27 Panasonic Intellectual Property Management Co., Ltd. Method for manufacturing glass panel unit

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100400790C (zh) * 2003-11-25 2008-07-09 唐健正 使用在真空玻璃中的包封吸气剂及解封方法
WO2013073883A1 (fr) * 2011-11-16 2013-05-23 (주)엘지하우시스 Panneau de verre sous vide comportant un agent de remplissage à dégazeur et son procédé de fabrication
US20210300822A1 (en) * 2018-07-18 2021-09-30 Panasonic Intellectual Property Management Co., Ltd. Glass panel unit and method for manufacturing the glass panel unit

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US3658401A (en) * 1970-01-06 1972-04-25 Rca Corp Method of manufacture of cathode ray tubes having frit-sealed envelope assemblies
US4430537A (en) * 1981-03-31 1984-02-07 Hans Sauer Getter and electrical switching system using such getter
WO1991002878A1 (fr) * 1989-08-23 1991-03-07 The University Of Sydney Vitrage thermo-isolant et procede de fabrication associe
EP0421239A2 (fr) * 1989-10-03 1991-04-10 Ppg Industries, Inc. Unité d'isolation de vacuum
USH1455H (en) * 1994-03-21 1995-07-04 The United States Of America As Represented By The United States Department Of Energy Titanium hermetic seals
WO1996001492A1 (fr) * 1994-07-01 1996-01-18 Saes Getters S.P.A. Procede permettant de creer et d'entretenir une atmosphere controlee dans un dispositif a emission de champ a l'aide d'un produit degazeur
US5537001A (en) * 1994-03-31 1996-07-16 Pixtech S.A. Flat vacuum chambers without pumping stem

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3658401A (en) * 1970-01-06 1972-04-25 Rca Corp Method of manufacture of cathode ray tubes having frit-sealed envelope assemblies
US4430537A (en) * 1981-03-31 1984-02-07 Hans Sauer Getter and electrical switching system using such getter
WO1991002878A1 (fr) * 1989-08-23 1991-03-07 The University Of Sydney Vitrage thermo-isolant et procede de fabrication associe
EP0421239A2 (fr) * 1989-10-03 1991-04-10 Ppg Industries, Inc. Unité d'isolation de vacuum
USH1455H (en) * 1994-03-21 1995-07-04 The United States Of America As Represented By The United States Department Of Energy Titanium hermetic seals
US5537001A (en) * 1994-03-31 1996-07-16 Pixtech S.A. Flat vacuum chambers without pumping stem
WO1996001492A1 (fr) * 1994-07-01 1996-01-18 Saes Getters S.P.A. Procede permettant de creer et d'entretenir une atmosphere controlee dans un dispositif a emission de champ a l'aide d'un produit degazeur

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1439152A1 (fr) * 2001-10-25 2004-07-21 Nippon Sheet Glass Co., Ltd. Panneau de verre et procede de fabrication correspondant
EP1439152A4 (fr) * 2001-10-25 2006-03-15 Nippon Sheet Glass Co Ltd Panneau de verre et procede de fabrication correspondant
US7115308B2 (en) 2001-10-25 2006-10-03 Nippon Sheet Glass Co., Ltd. Glass panel and method of manufacturing the glass panel
EP1529921A2 (fr) 2003-10-27 2005-05-11 Werner Wüthrich Elément de fermeture réduisant la transmission de la chaleur
WO2006058517A1 (fr) * 2004-12-01 2006-06-08 Elino Industrie-Ofenbau Carl Hanf Gmbh & Co.Kg Procede et dispositif pour realiser des unites destinees a la fabrication d'ecrans plats et analogues, et systeme pour vider/remplir l'espace intermediaire d'unites de ce type
CN101792253A (zh) * 2010-04-14 2010-08-04 左树森 一种真空玻璃吸气剂的封装方法
GB2498455A (en) * 2012-01-13 2013-07-17 Univ Nottingham Window with vacuum containing body
US9388628B2 (en) 2012-07-31 2016-07-12 Guardian Industries Corp. Vacuum insulated glass (VIG) window unit with getter structure and method of making same
US10207486B2 (en) 2012-07-31 2019-02-19 Guardian Glass, LLC Method of making vacuum insulated glass (VIG) window unit including activating getter
US10458176B2 (en) 2012-07-31 2019-10-29 Guardian Glass, Llc. Vacuum insulated glass (VIG) window unit with getter structure and method of making same
WO2014022118A1 (fr) * 2012-07-31 2014-02-06 Guardian Industries Corp. Procédé de réalisation d'unités de fenêtres avec vitrage à isolation sous vide, comprenant l'activation d'absorbeurs
US9416581B2 (en) 2012-07-31 2016-08-16 Guardian Industries Corp. Vacuum insulated glass (VIG) window unit including hybrid getter and making same
US10427395B2 (en) 2012-07-31 2019-10-01 Guardian Glass, LLC Method of making vacuum insulated glass (VIG) window unit including activating getter
US9764538B2 (en) 2012-07-31 2017-09-19 Guardian Glass, LLC Method of making vacuum insulated glass (VIG) window unit including activating getter
US9290984B2 (en) 2012-07-31 2016-03-22 Guardian Industries Corp. Method of making vacuum insulated glass (VIG) window unit including activating getter
US20170107753A1 (en) * 2014-07-30 2017-04-20 Asahi Glass Company, Limited Manufacturing method of vacuum multilayer glass and vacuum multilayer glass
US10378272B2 (en) 2014-09-30 2019-08-13 Panasonic Intellectual Property Management Co., Ltd. Glass panel unit, temporary assembly of glass panel unit, completed assembly of glass panel unit, method for manufacturing glass panel unit
EP3002642A3 (fr) * 2014-09-30 2016-04-20 Honeywell International Inc. Systèmes et procédés pour un récipient à double effet getter
US11913277B2 (en) 2018-07-31 2024-02-27 Panasonic Intellectual Property Management Co., Ltd. Method for manufacturing glass panel unit
CN110615623A (zh) * 2019-10-24 2019-12-27 湖南玉丰真空科学技术有限公司 真空玻璃生产线用吸气剂供给装置
CN110615623B (zh) * 2019-10-24 2023-12-29 湖南玉丰真空科学技术有限公司 真空玻璃生产线用吸气剂供给装置

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JP2003507845A (ja) 2003-02-25
AUPQ230499A0 (en) 1999-09-09
EP1204805A1 (fr) 2002-05-15

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