WO2001002084A1 - Module de separation detachable - Google Patents

Module de separation detachable Download PDF

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Publication number
WO2001002084A1
WO2001002084A1 PCT/JP2000/004467 JP0004467W WO0102084A1 WO 2001002084 A1 WO2001002084 A1 WO 2001002084A1 JP 0004467 W JP0004467 W JP 0004467W WO 0102084 A1 WO0102084 A1 WO 0102084A1
Authority
WO
WIPO (PCT)
Prior art keywords
housing element
separation module
head
module according
port
Prior art date
Application number
PCT/JP2000/004467
Other languages
English (en)
Japanese (ja)
Inventor
Ryohichi Sugita
Original Assignee
Pall Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pall Corporation filed Critical Pall Corporation
Priority to JP2001507569A priority Critical patent/JP4698105B2/ja
Priority to AU58482/00A priority patent/AU5848200A/en
Publication of WO2001002084A1 publication Critical patent/WO2001002084A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D65/00—Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes

Definitions

  • the present invention relates to a detachable separation module.
  • a separation module can be suitably used as a membrane filtration module, and in particular, can be suitably used for filtering an ultraclean fluid such as a fluid used in a semiconductor manufacturing process.
  • killer defects can typically be caused by particles as small as 110, the smallest feature size of a semiconductor chip. Therefore, at all stages of the semiconductor manufacturing process, a membrane filter for cleaning both liquid and gas is used. In a semiconductor manufacturing process device, if the membrane filtration module is designed to be sandwiched between a pair of connecting portions, it becomes difficult to connect the membrane filtration module to the process device.
  • the design shape of the membrane filtration module requires that all the connecting parts be provided on one end side of the membrane filtration module. Many.
  • the feed and permeate ports are typically placed in a horizontal orientation on top of the membrane filtration module or on the end called the "head”. Is done.
  • This membrane filtration module is referred to as "T" shaped because of its shape. This T-shaped membrane filtration module simplifies coupling to the rest of the fluid processing system.
  • Japanese Patent Application Laid-Open No. H10-66684 describes a power cartridge type filter installed inside a vending machine or the like for filtering tap water or the like.
  • This filter Has a cap and a filter main body, and the filter main body has a double structure including a metal outer cylinder and a synthetic resin inner cylinder that can be detachably mounted in the outer cylinder. Then, the engagement piece attached to the inside of the cap and the projection provided on the outer cylinder can engage with each other.
  • the membrane filtration module In the conventional membrane filtration module, it was not always easy to attach and detach the head part provided with the port and the housing element in which the separation element was incorporated. For example, you may want to replace a housing element while the head port remains connected to the process piping. Then, depending on the position where the membrane filtration module is arranged, the engaging portion between the housing element and the head cannot always be visually confirmed. For example, when the membrane filtration module is placed near the floor due to design reasons, it is cumbersome for workers to squat down or lie down on the floor to see the engagement. It is hoped that they can be replaced without relying on the eyes to see and feel.
  • the work may need to be done by the participant.Therefore, the head and the housing element must be connected with the same level of strength, regardless of who removes and attaches the housing element. Is desired. Furthermore, not all workers are muscular, some are delicate and not strong. It is desired that even a worker having limited strength can easily replace the housing element.
  • an object of the present invention is to provide a filtration module that can be easily attached and detached.
  • a head having an inflow port and an outflow port, a housing having a separation element incorporated therein,
  • a connection member for detachably connecting the head part and the housing element, a separation module comprising:
  • a separation module wherein positioning means for determining a relative positional relationship between the head part and the housing element is formed on at least one of the head part and the housing element. Is provided.
  • the positioning means includes the housing element and the head portion. At least one fitting portion formed on one of the housing element and the other of the housing element and the head portion so as to be detachably fitted to the fitting portion. It is preferable that the connecting member includes a fitting portion.
  • the housing element has a contact surface that comes into contact with the head portion, and the head portion comes into contact with the housing element.
  • a contact surface wherein the positioning means comprises: at least one protrusion formed on one of the contact surface of the housing element and the contact surface of the head portion; It preferably comprises at least one recess formed in the other of the contact surface of the housing element and the contact surface of the head portion so as to be detachably fitted to the housing element.
  • the convex portion or the concave portion extends substantially parallel to a radial direction of the housing element or the head portion. Furthermore, it is preferable that a taper is formed in the convex portion or the concave portion. Further, it is preferable that a step is formed in the convex portion or the concave portion.
  • the housing element or the head portion has a locking portion
  • the connecting member has a locked portion that is removably locked to the locking portion
  • the locking portion is formed at a radial end of the positioning means.
  • the locking portion is a radially projecting portion, and the locked portion corresponds to the projecting portion, an insertion portion extending in the axial direction, and a continuous with the insertion portion, and a circumferential direction orthogonal to the insertion portion.
  • the groove extends. More preferably, the groove is tapered.
  • the separating element includes a filter element or a plurality of hollow fiber membranes.
  • the separation element comprises a microporous membrane, an ultrafiltration membrane, a reverse osmosis membrane.
  • the connecting member has a ring shape.
  • a step of permeating a feed solution through the separation module to obtain a permeate solution in another aspect of the present invention, a step of permeating a feed solution through the separation module to obtain a permeate solution
  • a step of manufacturing a semiconductor device using the permeate; A method for manufacturing a semiconductor device is provided.
  • a packaging element having a separation element incorporated therein, which can be used in the separation module.
  • FIG. 1 is a sectional view of a preferred embodiment of the separation module of the present invention.
  • FIG. 2 is an exploded perspective view of the separation module shown in FIG.
  • FIG. 3 is a side view of the separation module shown in FIG.
  • FIG. 4 is a top view of the separation module shown in FIG.
  • FIG. 5 is a sectional view of a port that can be used in one embodiment of the separation module of the present invention.
  • FIG. 6 shows another embodiment of the positioning means of the present invention.
  • FIG. 6 (a) is a top view of a housing element
  • FIG. 6 (b) is a side view of a housing element.
  • FIG. 7 shows another embodiment of the positioning means of the present invention.
  • FIG. 7 (a) is a top view of a housing element
  • FIG. 7 (b) is a side view of a housing element.
  • FIG. 8 shows another embodiment of the positioning means of the present invention.
  • FIG. 8 (a) is a top view of a housing element
  • FIG. 8 (b) is a side view of a housing element.
  • FIG. 9 shows another embodiment of the positioning means of the present invention.
  • FIG. 9 (a) is a top view of a housing element
  • FIG. 9 (b) is a side view of a housing element.
  • FIG. 10 shows another embodiment of the positioning means of the present invention.
  • FIG. 10 (a) is a top view of a housing element
  • FIG. 10 (b) is a side view of a housing element.
  • FIG. 11 shows another embodiment of the positioning means of the present invention.
  • FIG. 11 (a) is a top view of a housing element
  • FIG. 11 (b) is a side view of a housing element.
  • FIG. 12 shows another embodiment of the positioning means of the present invention.
  • FIG. 12 (a) is a top view of a housing element
  • FIG. 12 (b) is a side view of a housing element.
  • the separation module 1 of the present embodiment includes a head part 10, a housing element 20 in which a separation element 40 is incorporated, the head part and the housing part. And a connecting member 30 for detachably connecting the housing element to the housing element.
  • positioning means 18, 22 for determining a relative positional relationship between the head portion 10 and the housing element 20 include the head portion 10 and the housing element 2. It is formed on at least one of zero.
  • the positioning means includes at least one fitting portion, for example, a convex portion 22 formed on one of the housing element and the head portion, and It is preferable that the housing element and the head portion include at least one fitted portion, for example, a concave portion 18 formed on the other of the housing portion so as to be detachably fitted.
  • the positioning between the head part and the housing element can be facilitated, and it is possible to confirm with the touch from the hand at the time of work without visually confirming the engagement part of both. it can. Therefore, the housing part can be easily fixed to the head part.
  • the positioning means when a force is applied to the connecting member 30 so as to connect the head portion 10 and the housing element 20, when the force is applied to the connecting member 30, the positioning means is connected to the ports lla, llb, 1 1 of the head portion 10. 1c can be prevented from being applied with force.
  • the positioning means 18, 22 resist the rotational force. This prevents the ports lla, llb, and 11c from being stressed.
  • the housing element or the head portion has a locking portion 23, and the locked member 35 is provided so that the connecting member 30 is removably locked to the locking portion. It is preferred to have.
  • the connecting member having the locked portion the housing element can be always fixed to the head with a constant strength.
  • the locking portion and locked portion are only used herein to clarify that they are paired with each other, and the locking portion 35 is attached to the connecting member 30. It may be said that it is provided.
  • the head section 10 is preferably located at the top of the membrane filtration module. It can be positioned at the bottom or bottom without leaving the essence. From now on, the terms “top” and “head” refer to the end of the membrane filtration module where the connection port is located, and the terms “bottom” and “bottom” refer to the opposite end. Is used to indicate The membrane filtration module is not always used in the vertical direction, that is, in the axial direction of the module, but may be used in the horizontal direction.
  • the head portion 10 is, for example, disc-shaped and has a first port 11a, a second port 11b, and a third port 11c.
  • the first port 11a acts as an inflow port
  • the second port 11b acts as an outflow port
  • the third port 11c acts as a vent port. Is also good.
  • the first port 11a may act as an outflow port
  • the second port 11b may act as an inflow port.
  • the first port 11a, the second port lib, and the third port 11c are preferably arranged linearly in parallel with the radial direction of the head portion 10.
  • the head portion 10 has a contact surface 10b that contacts the housing element
  • the housing element 20 has a contact surface 21a that contacts the head portion 10.
  • the positioning means includes a convex portion 22 formed on the contact surface 21 a of the housing element 20 and a head portion 10 so as to be detachably fitted to the convex portion 22. And a concave portion 18 formed in the contact surface 10b of the contact hole 10b. It is preferable that the convex portions 22 and the concave portions 18 extend in parallel with the radial direction.
  • the convex portion 22 of the housing element 20 has a first opening 24 a and a second opening 2 corresponding to the first port 11 a, the second port 11 b and the third port 11 c, respectively. 4b and a third opening 24c are preferably provided.
  • a locking portion is formed at a radial end of the convex portion 22 of the housing element 20 so as to be removably locked to the locked portion of the connecting member. 3 is formed. That is, it is preferable that the side surface of the housing element 20 on the side of the contact surface 21 a has a protruding portion 23 protruding in the radial direction.
  • the upper surface of the protrusion 22 and the upper surface of the protrusion 23 may be on the same plane. Of course, there may be a step between the upper surface of the protrusion 22 and the upper surface of the protrusion 23, or a taper may be formed continuously.
  • the housing element 20 is composed of a hollow cylindrical body 2 1 and a separating element disposed therein. 40.
  • the separating element is preferably a filter element, and as shown in FIG. 1, may be a cylindrical filter element which can be housed inside the housing element 20. Good.
  • the filter element preferably comprises a microporous membrane, an ultrafiltration,] reverse osmosis membrane.
  • the fill element may be a pleat.
  • the separation element is a hollow fiber membrane arranged in a cylindrical shape, and each hollow fiber membrane is a microporous membrane. Ultrafiltration, reverse osmosis membranes may also be used.
  • Microporous, ultrafiltration, and reverse osmosis membranes can be used in semiconductor manufacturing processes to remove particulates or gases from liquids.
  • the present invention can remove particulate matter or gas in a liquid other than the semiconductor manufacturing process. Furthermore, it does not prevent the removal of particulate matter in the gas.
  • pure water from which ions have been removed can be obtained by using a granular ion exchange resin as a separation element, for example, a mixture of a cation exchange resin and an anion exchange resin.
  • the filter element 40 includes, for example, a core member 41, a filter main body 42 fixed to the core member, and a coating layer 43 fixed to the filter main body in this order in the radial direction. May be arranged.
  • the core member 41, the filter body 42, and the coat layer 43 may be sandwiched between the end members 44 and 45.
  • the end member 44 may have an opening communicating with the port 11b, while the end member 45 may be closed.
  • the connecting member 30 includes a cylindrical main body 31 and a pressing portion 32 extending inward of the upper edge of the main body 31.
  • the main body 31 includes an insertion portion 33 formed from the lower edge in the axial direction of the main body 31, and a groove 34 continuous with the insertion portion 33 and extending in a circumferential direction orthogonal to the insertion portion 33. It is preferable that the locked portion 35 is formed. ⁇ The projection 23 of the housing element 20 is inserted into the insertion portion 33 of the connecting member 30, and then the housing element 20 is By rotating the connecting member 30, the protruding portion 23 rotates along the groove 34, and the head portion 10 and the housing element 20 can be pressed against each other and fixed.
  • the groove 34 is preferably provided with a taper 34a.
  • the groove 34 has a slight play in the axial direction, and as the protrusion 23 rotates, the play in the axial direction decreases. It can be shaped to be tight and progressively tighter.
  • the protrusion 23 has a rectangular shape, and is formed so as to extend outward from the peripheral edge of the cylindrical body 21. Further, two protruding portions 23 are provided so as to form a straight line with the ports 11a to 11c.
  • the locked portion 35 is provided at two places so as to correspond to the pair of projecting portions 23, and the insertion portion 33 is formed in a rectangular shape.
  • the numbers of the protruding portions and the locked portions are not limited, and may be one or three or more.
  • the inside and the outside of the housing element 20 are communicated with each other via pipes 12a, 12b, and 12c. That is, the first to third openings 24a, 24b, and 24c are through holes that pass through the upper portion of the housing element 20, respectively, and the first opening 24a and the second opening 25 are respectively formed in the filter main body 42.
  • the third opening 26 is located directly above the hollow portion surrounded by the core member 41.
  • 27a, 27b and 27c are formed.
  • Seal member installation part 27a, 271, 27. Is formed such that the end of the first to third openings 24a, 24b, 24c on the contact surface 2la side is wider than the inner diameter of each of the openings 24a, 24b, 24c and is circularly concave.
  • Sealing member mounting portions 27a, 27b, 27c are provided with sealing members, for example, 0-rings 28a, 28b, 28c, respectively, and are liquid-tight by the sealing members 28a, 28b, 28c.
  • the structure is made.
  • the seal members 28a, 28b, 28c are not limited as long as the head portion and the housing element can be formed in a liquid-tight structure.
  • the depth of the seal member installation portion 27 is slightly smaller than the thickness of the seal members 28a, 28b, and 28c, and the outer diameter of the seal member installation portion 27 is slightly larger than the outside diameter of a, 28b, 28c.
  • the inner diameter surfaces of the pressed and crushed seal members 28a, 28b, 28c are connected to the respective pipes 12a. , 12b, 12c.
  • one sealing member 28a, 28b, 28c allows the contact portion between the sealing member 28a, 28b, 28c and each pipe 12a, 12b, 12c and the sealing member 28a, 28c.
  • the seal can be made at two places of contact between the b and 28 heads and the contact surface 10b of the head portion 10, and a higher liquid-tight structure can be achieved as compared with the conventional one.
  • One embodiment of the first port 11a is shown in FIG.
  • the shape and structure of the port are not limited to this embodiment, and there is no limitation as long as fluid can pass through.
  • the first port 11a, the second port 11b, and the third port 11c may all have the same shape, structure, material, or the like, or may have any or all of different shapes, structures, and materials. May be.
  • the first port 11a, the second port lib, and the third port 11c are respectively the first pipe 12a, the second pipe 12b, and the third pipe 12b. c.
  • the first pipe 12a, the second pipe 12b, and the third pipe 12c respectively extend in the axial direction of the separation module 1, penetrate the head part 10, and face the surface 10a and abut.
  • Surface 10b extends from the side.
  • the first port lla, the second port lib, and the third port 1lc respectively have removable sealing members 50a, 50b in order to maintain the internal cleanliness. , 50 c. Sealing members are reused They may be disposable or disposable.
  • a sealing member 50 is attached to each open end of the first port lla, the second port 11b, and the third port 11c.
  • Adhesive tapes are affixed as a, 50b, and 50c.
  • the sealing members 50a, 50b, and 50c are removed, and the first port 11a, the second port 11b, and the third port 11c are respectively processed by a process not shown.
  • an open nut member is provided at the end of the port 11a.
  • a cap member having a U-shaped cross section may be arranged as a sealing member instead of the nut member that is open.
  • the first port 11a and the second port 11b of the head portion 10 are connected to the process piping. Then, the housing element 20 can be replaced. Thereby, when exchanging the housing element 20, the work of connecting and disconnecting the first port 11a and the second port 11b can be omitted.
  • the positioning means of the present invention is not limited to the above embodiment, but can be variously modified. 6 to 12 show another embodiment of the positioning means of the present invention.
  • reference numeral 20 indicates a housing element
  • reference numeral 22 indicates a projection
  • Reference numbers 23a to 23n and 23p indicate protrusions. 6 to 12, the opening communicating with the inside of the housing element 20 is omitted for convenience of explanation.
  • the projections 22 and the projections 23 a to 23 n and 23 p continuous with the projections 22 are provided on the housing element 20.
  • a concave portion or a corresponding shape is formed in the head portion 10. This facilitates the positioning of the housing element 20 and the head.
  • the projection 22, in particular the center line of the projection 22 extends substantially parallel to the radial direction of the housing element 20.
  • the center line of each of the protrusions 22 extending in three directions extends substantially parallel to the radial direction of the housing element 20.
  • the projection 22 has a step 22 a parallel to the axial direction.
  • the side surfaces of the convex portions 22 are tapered.
  • the upper surface of the projection 22 is tapered.
  • a step 22b parallel to the horizontal direction is provided.
  • protrusions 23 i and 23 j are formed, which also function as positioning means.
  • a recess 22c is formed between the pair of protrusions 23k and 231, based on the protrusions 23k and 231.
  • the recess 22 protrudes upward with reference to the surface 20 a of the housing element 20.
  • FIG. 12 it can be said that a step is formed in the convex portion 22.
  • the projection 22 is continuous with the three projections 23 m, 23 n, and 23 p.
  • the head 10 is oriented in a specific direction with respect to the housing element 20, i.e. from the projections 23 a, 23 c, 23 e and 23 g, respectively.
  • the head portion 10 can be easily fitted to the housing element by sliding in a direction parallel to the radial direction in the protruding portions 23 b, 23 d, 23 mm, and 23 h.
  • the head portion 10 is difficult to slide in the reverse direction in parallel with the radial direction with respect to the housing element 20, which is preferable in certain applications.
  • the housing element may have a concave portion and the head portion may have a convex portion.
  • a protruding portion that acts as a locking portion in the radial direction may be further provided continuously to the protruding portion of the head portion. That is, in the embodiment of FIG. 2 and FIGS. 6 to 12, the housing element 20 is formed with the protrusion 22, but instead of the protrusion 22, a recess may be formed. .
  • the protrusion 22 and the protrusions 23a to 23n, 23p in the embodiment of FIGS. 2 and 6 to 12 may be formed on the head.
  • the upper surface and the side surfaces of the projection 22 need not be flat, but may be curved.
  • the concave portion corresponding to the convex portion 22 may be similarly formed with a curved surface.
  • At least one convex portion and at least one concave portion are formed on the contact surface of the housing element, and the contact surface of the head portion is detachably fitted to the convex portion of the housing element.
  • each protrusion and recess may be smaller than the protrusion 22 of the embodiment of FIGS. 2 and 6 to 12.
  • the cross-sectional shape of each of the concave portions and the convex portions may be circular, polygonal, or the like, and the depth of one concave portion does not need to be uniform. You may.
  • the positioning means is not limited to the convex portion and the concave portion, and includes, for example, a shape, a structure, and a mechanism that can be fitted to each other.
  • a fluororesin such as tetrafluoroethylene, a thermoplastic resin such as polyethylene, polypropylene, or polyamide; a metal material such as stainless steel is used.
  • a fluororesin such as tetrafluoroethylene, a thermoplastic resin such as polyethylene, polypropylene, or polyamide; a metal material such as stainless steel is used.
  • a fluorine resin such as tetrafluoroethylene
  • a thermoplastic resin such as polyethylene, polypropylene, or polyamide
  • a fluororesin such as tetrafluoroethylene, a thermoplastic resin such as polyethylene or polypropylene; and a metal material such as stainless steel are used.
  • thermoplastic resin such as fluororesin, polyethylene, polypropylene, or polyamide
  • metal material such as stainless steel
  • sealing members 28a, 28b, 28c for example, a rubber material such as perfluoro rubber, fluoro rubber, ethylene propylene rubber, and silicone rubber is used.
  • sealing member 50 include a fluororesin such as tetrafluoroethylene, a thermoplastic resin such as polyethylene, polypropylene, and polyamide; a rubber material such as polyfluoro rubber, fluoro rubber, ethylene propylene rubber, and silicone rubber. Is used.
  • Examples of the connecting member 40 include a metal material such as stainless steel; a thermoplastic resin, Plastic materials such as thermosetting resins and engineering plastics are used.
  • the plastic material includes a plastic material containing a reinforcing material such as glass fiber.
  • the connecting member 40 may be made of a plastic material containing a reinforcing material.
  • the first port 11a is connected to a supply liquid discharge pipe (not shown) for various manufacturing processes
  • the second boat 11b is connected to a permeate supply pipe (not shown).
  • the separation module 1 of the present embodiment is provided with the positioning means, the positioning is facilitated, and the housing element can be easily replaced.
  • the aspect of membrane separation has been mainly described.
  • the present invention is not limited to membrane separation, but can be applied to ion removal using an ion exchange resin.
  • the separation module of the present invention can be suitably used in a semiconductor manufacturing process.
  • the property that the housing element can be easily replaced is not limited to the semiconductor manufacturing process, but is applied to, for example, nuclear power, pharmaceuticals, food, wastewater (domestic wastewater, industrial wastewater) treatment, water supply, purification of reagents, etc. be able to.
  • the present invention is not limited to the above embodiment, and can be variously modified.
  • the pipes 12a, 12b, and 12c protrude from the contact surface 10b of the head 10 in the direction of the filter element 40.
  • the pipes 12a, 12b, and 12c do not need to protrude from the contact surface 10b of the head 10 in the direction of the fill element 40.
  • the pipes 12a, 12b, 12 are made by injection molding or the like.
  • a liquid separator module described in Japanese Patent Application Laid-Open No. H10-666836 may be used as the housing element.
  • the ring-shaped connecting member 30 will be described as an example. did.
  • the connecting member 30 may be another embodiment.
  • an outer cylinder described in JP-A-10-66804 may be used for the connecting member.
  • the housing element and the head portion are formed in a rectangular cross-sectional shape, and a flange is provided on each of the housing element and the head portion. Head parts may be connected.
  • the connecting member does not need to be separate from the housing element or the head part, and may be previously connected to the housing element or the head part in some form.
  • the “circumferential direction” does not need to be strictly along the circumferential direction, and may have a slight angle instead of a direction perpendicular to the axial direction.
  • the “radial direction” does not need to be strictly along the diametrical direction, but may be a direction substantially perpendicular to the axial direction, and may have a slight angle.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)

Abstract

L'invention porte sur un module de séparation détachable qui permet de remplacer facilement des éléments de boîtier. Le module comprend une tête (10) et un élément de raccord (30) pour raccorder la tête (10) de manière détachable aux éléments de boîtier (20). Des moyens de positionnement (18, 22) déterminant la relation positionnelle relative entre la la tête (10) et les éléments de boîtier (20) sont formés dans la tête ou dans les éléments de boîtier, ce qui permet d'utiliser le module de séparation comme un système de filtration sur membrane, notamment pour filtrer un fluide très propre, tel qu'un fluide utilisable dans un procédé de production de semi-conducteurs.
PCT/JP2000/004467 1999-07-05 2000-07-05 Module de separation detachable WO2001002084A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2001507569A JP4698105B2 (ja) 1999-07-05 2000-07-05 着脱可能な分離モジュール
AU58482/00A AU5848200A (en) 1999-07-05 2000-07-05 Detachable separation module

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP11/190790 1999-07-05
JP19079099 1999-07-05

Publications (1)

Publication Number Publication Date
WO2001002084A1 true WO2001002084A1 (fr) 2001-01-11

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PCT/JP2000/004467 WO2001002084A1 (fr) 1999-07-05 2000-07-05 Module de separation detachable

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JP (1) JP4698105B2 (fr)
AU (1) AU5848200A (fr)
WO (1) WO2001002084A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005349283A (ja) * 2004-06-09 2005-12-22 Japan Organo Co Ltd カートリッジ式ろ過器
JP2019217437A (ja) * 2018-06-18 2019-12-26 三浦工業株式会社 水処理装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7051163B1 (ja) 2021-05-31 2022-04-11 Wota株式会社 膜ユニット、および手洗い装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6083003U (ja) * 1983-11-11 1985-06-08 日東電工株式会社 液体分離装置
US5308483A (en) * 1992-08-27 1994-05-03 Gelman Sciences Inc. Microporous filtration funnel assembly

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56126412A (en) * 1980-02-06 1981-10-03 Samueru Muua Rojiya Water treatment device and filter cartridge used for said device
JPS643514Y2 (fr) * 1981-01-29 1989-01-30
JPH0353756Y2 (fr) * 1987-02-16 1991-11-25
JPH0228794U (fr) * 1988-08-10 1990-02-23
JPH02137909U (fr) * 1989-04-24 1990-11-16
JPH1066804A (ja) * 1996-08-27 1998-03-10 Japan Organo Co Ltd カートリッジ式濾過器

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6083003U (ja) * 1983-11-11 1985-06-08 日東電工株式会社 液体分離装置
US5308483A (en) * 1992-08-27 1994-05-03 Gelman Sciences Inc. Microporous filtration funnel assembly

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005349283A (ja) * 2004-06-09 2005-12-22 Japan Organo Co Ltd カートリッジ式ろ過器
JP2019217437A (ja) * 2018-06-18 2019-12-26 三浦工業株式会社 水処理装置
JP7110748B2 (ja) 2018-06-18 2022-08-02 三浦工業株式会社 水処理装置

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JP4698105B2 (ja) 2011-06-08
AU5848200A (en) 2001-01-22

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