WO2000002714A1

WO2000002714A1 - System for teaching robot for work transfer

Info

Publication number: WO2000002714A1
Application number: PCT/JP1999/003663
Authority: WO
Inventors: Kazuhide Asada
Original assignee: Komatsu Ltd.
Priority date: 1998-07-08
Filing date: 1999-07-07
Publication date: 2000-01-20
Also published as: TW425500B; KR20010052839A; JP2000024971A

Abstract

The operability of teaching a robot for work transfer is improved and the safety is ensured. A robot (R) for work transfer controlled by a robot controller (4) transfers a work in the work area in a clean room (1). Connection plugs (6a to 6d) electrically wired to the robot controller (4) are provided outside the clean room (1). Before teaching the robot (R), dummy plugs (7a to 7d) connected to the nearest one of the connection plugs (6a to 6d) to the robot (R) are detached, and a teaching pendant connection plug (8) for connection of a teaching pendant (TP) is connected to the connection plug. When a connection detecting section (5a) detects that the teaching pendant (TP) is connected and dummy plugs are connected to the other connection plugs, the connection detecting section (5a) stops the robot (R) and shifts the operating mode from the transfer control mode to the teaching mode.

Description

Specification

Work transfer robot teaching system

Technical field

The present invention teaches a work transfer robot that is incorporated into a semiconductor device (eg, semiconductor wafer, liquid crystal glass substrate, etc.) manufacturing system to transfer a work such as a semiconductor wafer or a glass substrate to a predetermined semiconductor processing apparatus and to put the work in and out. The present invention relates to a work transfer robot teaching system capable of efficiently and safely performing the work. Background art

Conventionally, in a work transfer robot used in a semiconductor device manufacturing system, a robot controller controls transfer of a work such as a semiconductor wafer according to the contents taught.

For example, as shown in FIG. 9, the work transfer robot 25 is installed in a clean room 24 and is controlled by a robot controller 20 via a cable 23. The work transfer robot 25 employs, for example, a frog-leg type robot. The arm 26 rotates a hand 26 as an end effector, and places and transfers a work such as a semiconductor wafer on the hand. The transfer operation of the work transfer robot 25 is preliminarily taught using a teaching means such as a keyboard and a teaching processing unit 21, and a predetermined transfer operation is performed according to the taught contents.

However, in recent years, works such as semiconductor wafers to be handled have become larger, and accordingly, semiconductor processing apparatuses for performing various semiconductor processes have become larger, and the operation area of the work transport robot 25 has been expanding.

Therefore, when teaching a predetermined transfer operation to the work transfer robot, the teaching means such as a keyboard is directly connected to the robot controller 20, and the work transfer port robot is far from the robot controller 20. However, from the position of the robot controller 20, there is a problem that it is not possible to see the work transfer robot, and it is impossible to reliably teach the work transfer robot.

Here, when teaching to the work transfer robot using the teaching pendant, connect the teaching pendant and the robot controller with a cable. Can be done.

However, the working area of the above-mentioned work transfer robot 25 is, for example, as large as 10 m square, and it is not easy to extend a multi-pair cable within this 10 m, and the operability is significantly deteriorated. Become.

In addition, since a semiconductor wafer or the like is handled, the work transfer robot is disposed in the clean room 24 as described above. Therefore, it is difficult to move the work transfer robot to the vicinity of the work transfer robot by dragging the cable. Dust will be generated inside and the cleanliness of the clean room will be reduced.

Also, the working area 27 of the workpiece transfer robot 25 is inside the clean room 24, and it is necessary to maintain the cleanness of the clean room 24 properly. Therefore, the size of the clean room 24 should be as small as possible. It is designed to be approximately equal to the size of 27. Therefore, when a human enters the clean room 24 and teaches the work transfer robot 25 by the teaching means, if the work transfer robot 25 is not in the teaching state and is in the transfer operation state, the human is evacuated. Very dangerous because there are no areas or gaps ^

Therefore, it is necessary to reliably and properly separate the teaching state and the transfer operation state for the work transfer robot 25 to ensure safety.

Disclosure of the invention

Accordingly, an object of the present invention is to provide a teaching system for a work transfer robot capable of eliminating such a problem and improving the operability of teaching processing for the work transfer robot and ensuring safety. .

A first invention is a work transfer robot for transferring a predetermined work in a work area, control means for controlling transfer of a predetermined work performed by the work transfer port bot based on the contents taught, A teaching unit that is separated from the control unit and teaches a predetermined work transfer operation by the work transfer port pot; and connects the teaching unit to the control unit via a connection point provided around the work area. Connection means.

According to the first aspect, the connection point for connecting the teaching means can be arranged to the vicinity of the work transfer robot, so that it has an effect of facilitating the teaching operation. In addition, it is not necessary to extend a long cable for connecting the teaching means and the control means. For example, when a work transfer robot performs a transfer operation in a clean room, dust attached to the cable due to the routing of the cable. This has the effect that the degree of cleanness in the clean room is not reduced by the scattering of the like.

According to a second invention, in the first invention, the connection point is provided outside the work area.

In the second invention, the operation of connecting the teaching means to the connection point is forced every time the teaching is performed by the teaching means, which has an operational effect of ensuring safety during teaching.

According to a third invention, in the first or second invention, the number of the connection points is plural.

In the third invention, since a plurality of connection points are provided, the wiring between the teaching means and the connection points can be shortened, and the teaching operation is facilitated.

In a fourth aspect based on the first aspect, the apparatus further comprises a recognition unit that recognizes whether or not the teaching unit is connected to a connection point of the connection unit. When it is recognized that the means is connected, the control is switched from the transfer control of the work transfer robot to the teaching processing by the teaching means.

In the fourth invention, the transport control state and the teaching processing state are appropriately switched according to the connection state, so that there is an operational effect that the safety at the time of teaching can be reliably ensured.

In a fifth aspect based on the third aspect, a dummy plug indicating that a connection point of the connection means is not used, and a dummy plug for recognizing whether a dummy plug is connected to the connection point of the connection means. A recognition unit, wherein the control unit performs the transfer control of the workpiece transfer robot when the dummy plug recognition unit recognizes that the dummy plug is connected at all the connection points. . In the fifth invention, the transfer control of the work transfer robot is performed only after all the dummy plugs are connected, so that the teaching processing state and the transfer control processing can be reliably separated to ensure safety. it can. In a sixth aspect based on the fifth aspect, the control means inhibits the transfer operation of the work transfer robot when the dummy plug recognition means recognizes that the dummy plug is not connected to one or more connection points. It is characterized by doing.

In the sixth invention, as opposed to the fifth invention, when the dummy plug is not connected to one or more connection points, the transfer operation is not performed, so that the same as in the fifth invention. The safety can be ensured by reliably separating the teaching processing state and the transport control processing.

A seventh invention is a work transfer robot for transferring a predetermined work in a work area, control means for controlling transfer of a predetermined work performed by the work transfer robot based on the taught contents, and the control means And a plurality of teaching means for teaching a transfer operation of a predetermined work by the work transfer robot, and controlling the plurality of teaching means via a plurality of connection points provided around the work area. Connection means for connecting to the means, wherein the control means selects one of the plurality of teaching means and switches to the teaching processing by the selected teaching means.

According to the seventh aspect, since the teaching means can be selected by the control means in place of the removal of the dummy plug, the operation for shifting to the teaching processing state is significantly improved.

An eighth invention provides a work transfer robot for transferring a predetermined work in a work area, control means for controlling transfer of the predetermined work performed by the work transfer robot based on the taught contents, and the control means Teaching means having a selection button for teaching a transfer operation of a predetermined work by the work transfer robot and instructing selection of the teaching means, and a plurality of connections provided around the work area Connecting means for connecting each of the plurality of teaching means to the control means via a point, wherein the control means, when a selection button of the teaching means is selected, from the transfer control of the work transfer robot. It is characterized by switching to teaching processing by teaching means having a selection button.

In the eighth invention, since the state can be shifted to the teaching processing state only by pressing the selection button instead of removing the dummy plug, the state shifts to the teaching processing state. There is an operational effect that the operability at the time of operation is remarkably improved.

BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a diagram showing a schematic configuration of a semiconductor device manufacturing system according to a first embodiment of the present invention.

FIG. 2 is a flowchart showing a procedure for switching between a transfer control state and a teaching processing state by the robot controller shown in FIG.

FIG. 3 is a diagram showing an example of a connection mechanism between a connection plug and a dummy plug or a teaching pendant connection plug.

FIG. 4 is a diagram showing a main configuration of a teaching system of a semiconductor device manufacturing system according to a second embodiment of the present invention.

FIG. 5 is a flowchart showing a procedure for switching between the transfer control state and the teaching processing state by the robot controller shown in FIG.

FIG. 6 is a diagram showing a main configuration of a teaching system of a semiconductor device manufacturing system according to a third embodiment of the present invention.

FIG. 7 is a diagram showing a main configuration of a teaching system of a semiconductor device manufacturing system according to a fourth embodiment of the present invention.

FIG. 8 is a flowchart showing a procedure for switching between the transfer control state and the teaching processing state by the robot controller shown in FIG.

FIG. 9 is a diagram showing a schematic configuration of a semiconductor device manufacturing system including a conventional teaching system.

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a diagram showing a schematic configuration of a semiconductor device manufacturing system 10 according to a first embodiment of the present invention. In FIG. 1, a semiconductor device manufacturing system 10 includes a clean room 1 and four processing devices 2 a to 2 d connected to the clean room 1 via gates 9 a to 9 d. Each of the processing devices 2a to 2d performs a predetermined processing power, such as heat treatment, on a work such as a semiconductor wafer. Each of the processing devices 2a to 2d By performing each processing, a series of processing is performed on the work. This work is arranged neatly as a processing object in a cassette 3 connected to the clean room 1 similarly to the processing apparatuses 2 a to 2 d, and is taken out by a work transfer robot R operating in the clean room 1. The work transfer robot R is realized by, for example, a frog-leg type robot as shown in FIG. As the name implies, the frog leg type robot has an arm that expands and contracts like a frog's foot, and conveys a work placed on a hand H as an end effector attached to the end of the arm. The expansion and contraction of the arm is achieved by rotating the axes of the arms in directions different from each other, and the hand H can be rotated around the axis by rotating the axes of the arms in the same direction. In addition, the frog-leg type robot can move substantially to the front of each of the processing devices 2 a to 2 d and the cassette 3 by moving on a predetermined trajectory Ln extending in the longitudinal direction of the clean room 1. it can.

When performing predetermined processing on a work by controlling the work transfer robot R, the work transfer robot R first takes out an unprocessed work in the cassette 3. This removal is performed by moving the cassette up and down or the hand H up and down, and placing the workpiece transport robot R on the hand H. Thereafter, the workpiece on the hand H is transported to the front of the first processing apparatus, for example, the processing apparatus 2a, and is sent into the processing apparatus 2a via the gate 9a. Then, the workpiece processed by the processing apparatus 2a is taken out again by the workpiece transfer robot R, transported to the next processing apparatus, for example, the front of the processing apparatus 2b, and processed through the gate 9b. It is sent into the processing device 2b and is subjected to predetermined processing. In the same manner as described above, the processing for each processing apparatus is sequentially performed, and a series of processing is completed. For example, when the final processing is performed by the processing apparatus 2c, the workpiece transfer robot R takes out the processed workpiece through the gate 9c, transports the workpiece to the front of the cassette 3, and returns to the cassette 3 again. The processed work is stored in the inside.ク —The transfer robot R performs an efficient transfer process so as to cause each of the processing devices 2 a to 2 d to perform processing on a plurality of workpieces simultaneously and in parallel.

The transfer control of the work transfer robot R is controlled by a robot controller 4 arranged outside the clean room 1.

On the other hand, on the longitudinal side wall of the clean room 1, four connection plugs 6a to 6d Is installed. The connection plugs 6 a to 6 d are electrically connected to the robot controller 4 respectively. When the dummy plugs 7a to 7d are connected to all of the connection plugs 6a to 6d, the robot controller 4 performs transport control assuming that the robot is not in the teaching state. In the robot controller 4, a teaching pendant connection plug 8 for connecting the teaching pendant TP is connected to one of the connection plugs 6a to 6d, and the other connection plugs 6a to 6d are connected. If all of the dummy plugs 7a to 7d are connected, it is recognized as being in the teaching state. This recognition judgment is performed by the connection recognition unit 5a of the robot controller 4. The robot controller 4 switches between the transport control state and the teaching processing state based on the recognition of the connection recognition unit 5a.

The clean room 1 has four opening / closing doors 1 a to 1 d, and the teaching pendant TP is brought into the clean room 1 through the opening / closing doors la to 1 d. For example, in Fig. 1, when teaching to the workpiece transfer robot R near the processing equipment 2b, remove the dummy plug 7b from the nearest connection plug 6b and connect the teaching pendant connection plug 8 to the connection plug. 6b, and bring the teaching pendant TP into the clean room 1 through the opening / closing door 1b to teach near the work transfer robot R. The teaching processing unit 5b performs a teaching process such as storing the content instructed from the teaching pendant TP.

Next, referring to the flowchart of FIG. 2, the switching process between the transport control state and the teaching processing state performed by the mouth controller 4 based on the recognition result of the connection recognition unit 5a will be described.

In FIG. 2, the robot controller 4 first stops the work transfer robot R (step 100). Thereafter, it is determined whether or not all of the dummy plugs 7a to 7d are connected to the connection plugs 6a to 6d based on the recognition result of the connection recognition unit 5a (step 102).

When all of the dummy plugs 7a to 7d are not connected, the robot controller 4 further connects the teaching pendant TP to one connection plug, and connects the dummy plugs to all of the other connection plugs. It is determined based on the recognition result of the connection recognition unit 5a whether or not there is (Step 104). Conditions for this step 104 If is not satisfied, the process proceeds to step 102 to determine whether all of the dummy plugs 7a to 7d are connected. On the other hand, if the condition of step 104 is satisfied, the state shifts to the teaching processing state (step 106). This allows teaching by the teaching vendor TP.

Thereafter, the robot controller 4 determines whether or not the teaching end button of the teaching pendant TP has been pressed (step 108). If the teaching end button has been pressed, the timer starts counting. Then (step 110), it is determined whether a predetermined time has elapsed (step 112). After the elapse of the predetermined time, the process proceeds to step 100 for the first time, the work transfer robot R is stopped, and the above-described processing is repeated. On the other hand, if the teaching end button has not been pressed in step 108, it is determined whether or not the teaching pendant TP is connected to one connection plug and dummy plugs are connected to all of the other connection plugs. Judgment is made (step 120), and if the judgment result satisfies this condition, the process proceeds to step 108. If the judgment result does not satisfy this condition, the process proceeds to step 100. And repeat the above process. The reason why the pressing of the teaching end button is set as the condition for shifting to the stop state is to ensure safety. In addition, the transition to the stop state is defined as the lapse of the predetermined time because the instructor may still be present in the clean room 1 and it takes at least the predetermined time before the human leaves the clean room 1. It is considered that. Safety is ensured by such double and triple checks. In particular, since the gap between the space of the clean room 1 and the work area of the work transfer robot R is small, there is a possibility that the transfer control of the work transfer robot R may harm a person in the clean room 1. A device for recognizing the opening / closing of each of the opening / closing doors 1a to 1d may be provided, and the closing of the opening / closing door may be further added as a condition for shifting to the stop state.

On the other hand, if it is determined in step 102 that all of the dummy plugs 7 a to 7 d are connected to the connection plugs 6 a to 6 d, it is further determined whether the transfer control button on the robot controller 4 has been pressed. Determine (Step 130). If the transfer control button has not been pressed, the process proceeds to step 102 and the above-described processing is repeated. If the transfer control button has been pressed, the process shifts to the transfer control state (step 1). 32). That is, the robot controller 4 causes the workpiece transport robot R to transport the workpiece according to the contents taught. Thereafter, it is determined whether or not all of the dummy plugs 7a to 7d are connected to the connection plugs 6a to 6d (step 134), and all of the dummy plugs 7a to 7d are connected to the connection plugs 6a to 6d. Only when it is determined that it is not connected to d, proceed to step 100 and move the work transfer robot R to the stop state.

Next, a connection mechanism between the connection plugs 6a to 6d and the dummy plugs 7a to 7d and a connection mechanism between the connection plugs 6a to 6d and the teaching pendant TP will be described with reference to FIG.

FIG. 3A is a diagram showing a connection state between the connection plug 6a and the dummy plug 7a. The dummy plug 7a shown in FIG. 3A has a wiring for short-circuiting the terminal T2 and the terminal Tn. When the dummy plug 7a is connected, the connection recognition unit 5a recognizes the connection between the terminal T2 and the terminal Tn, and thereby recognizes that the dummy plug 7a is connected to the connection plug 6a. I do.

FIG. 3 (b) is a diagram showing a connection state between the connection plug 6A and the teaching pendant TP. The teaching pendant connection plug 8 shown in FIG. 3 (b) has a wiring for short-circuiting the terminal T1 and the terminal Tn. When the teaching-bent connection plug 8 is connected, the connection recognition unit 5a recognizes the connection between the terminal T1 and the terminal Tn, and accordingly, the teaching-bend connection plug 8, That is, it recognizes that the teaching pendant TP is connected. The teaching pendant connection plug 8 transmits information specified by the teaching pendant TP to the robot controller 4 side, or also connects a line for receiving information from the robot controller 4 side. Is done.

Various modes are conceivable for a mechanism for performing such connection recognition. For example, no short-circuit wiring is provided on the dummy plugs 7a to 7d side or on the teaching pendant connection plug 8 side, a bin is simply provided at a predetermined position, and the connection plugs 6a to 6d are provided at positions corresponding to the bins. The connection can also be recognized by providing a concave portion on the side and recognizing the connection based on the insertion of the bin into the concave portion. Alternatively, instead of the connection recognition unit 5 a performing connection recognition, a connection detection unit is provided on the connection plug 6 a to 6 d side, The detection result may be transmitted to the robot controller 4. Furthermore, the contact state may be optically detected instead of detecting the electrical or mechanical contact state.

According to the first embodiment, teaching can be performed in the vicinity of the work transfer robot R, so that operability at the time of teaching can be significantly improved. Also, it is sufficient to extend the cable from the connection point closest to the workpiece transfer robot R, and it is not necessary to drag a long cable into the clean room 1.Therefore, dust and dirt adhering to the cable coating are scattered in the clean room 1. And cleanliness can be maintained properly. Further, when teaching in the clean room 1, a manual operation of connecting the teaching pendant connection plug 8 to one of the connection plugs 6a to 6d must be performed to stop the work transfer robot R. Therefore, it is possible to prevent accidents during teaching. Also, since the transfer control of the work transfer robot is permitted only when all the dummy plugs are connected, the safety can be further improved.

Next, a second embodiment will be described with reference to FIGS. In the first embodiment, a connection plug is provided outside the clean room 1, and the teaching pendant connection plug 8 is connected to one of the connection plugs. However, in the second embodiment, A connection plug is provided inside the clean room 1.

That is, as shown in FIG. 4, a mechanism for connecting the dummy plugs 7 a to 7 d or the teaching pendant connection plug 8 is provided inside the clean room 1. In this case, the manual operation of connecting the teaching pendant connection plug 8 to the connection plugs 6a to 6d as in the first embodiment is not required, and the teaching pendant connection plug 8 is connected in the clean room 1. Since the plugs are connected to the plugs 6a to 6d, there is a period during which safety cannot be ensured. For this reason, a detection means for recognizing opening / closing is provided in each of the opening / closing doors 1 a to ld, and this detection means is connected to the robot controller 4 so that the robot controller 4

Recognize the opening and closing of 1 a to l d.

Switching processing between the transport control state and the teaching processing state in the second embodiment is described. This will be described with reference to the flowchart of FIG.

In FIG. 5, first, the robot controller 4 stops the work transfer robot R (step 100). Thereafter, it is determined whether or not all of the dummy plugs 7a to 7d are connected to the connection plugs 6a to 6d from the recognition result of the connection recognition unit 5a (step 102).

When all of the dummy plugs 7a to 7d are not connected, the same processing as the processing from steps 104 to 120 in Fig. 2 is performed, and the state shifts to the teaching processing state, and further shifts to the stop state. I do.

On the other hand, if it is determined in step 102 that all of the dummy plugs 7 a to 7 d are connected to the connection plugs 6 a to 6 d, it is further determined whether the transfer control button on the robot controller 4 has been pressed. Determine (Step 130). If the transfer control button has not been pressed, the flow proceeds to step 102 to repeat the above-described processing. If the transfer control button has been pressed, the flow shifts to the transfer control state (step 1332). That is, the robot controller 4 causes the workpiece transport robot R to perform the workpiece transport according to the content taught. Thereafter, it is determined whether at least one of the doors has been opened based on the detection results from the detection means of the doors 1a to 1d (step 1333). And transition to the stopped state. If the opening / closing door is not open, it is further determined whether or not all of the dummy plugs 7a to 7d are connected to the connection plugs 6a to 6d (step 1334). Only when it is determined that all of the dummy plugs 7 a to 7 d are not connected to the connection plugs 6 a to 6 d in this step 1 34, the process proceeds to step 100, where Set to the stop state.

This eliminates the need to introduce a cable from outside the clean room 1 into the teaching pendant TP as in the first embodiment, so that the cleanness of the clean room 1 can be further increased.

Next, a third embodiment will be described with reference to FIG. In each of the first and second embodiments, the teaching pendant TP and the teaching pendant connection plug 8 are connected by a cable, but in the third embodiment, the teaching pendant TP is connected to the teaching pendant TP. Connect the teaching pendant connection plug 8 wirelessly. I have.

That is, in FIG. 6, the teaching pendant connection plug 8 and the teaching pendant TP transmit and receive each other, and therefore have transmission / reception units TR 1 and TR 2 respectively.

As a result, teaching can be performed without having to lay cables in the clean room 1, so that operability can be significantly improved. In addition, since it is necessary to manually connect the teaching pendant connection plug having the transmission / reception unit TR1 to the connection plugs 6a to 6d, security is ensured as in the first embodiment. Can be

The power of the transmitting / receiving unit TR1 is supplied from the robot controller via the connection plugs 6a to 6d. In addition, the power supply of the transmission / reception unit TR2 can be realized by incorporating a portable battery.

In addition, in order to prevent electromagnetic interference with the workpiece transfer robot R in the clean room 1, it is desirable to avoid using overlapping frequency bands and to employ a spread spectrum communication method.

Next, a fourth embodiment will be described with reference to FIGS. In the first to third embodiments, one teaching pendant TP and one teaching pendant connection plug 8 for connecting the teaching pendant are provided in this semiconductor device manufacturing system. All the connecting plugs 6a to 6d are assigned, and the teaching pendants TP of that number are connected to the connecting plugs 6a to 6d, respectively.

That is, in FIG. 7, the dummy plug is not used, and instead of the dummy plug, the teaching pendant connection plug 8 is connected to all the connection plugs 6a to 6d, and the teaching pendant TP is provided for each connection plug. Is provided. In this case, the manual operation of connecting the teaching pendant TP as in the first or third embodiment is eliminated, but instead of this operation, the operation of pressing the selection button on the teaching TP is forced. . Then, the manual operation of pressing the selection button is notified to the robot controller 4, and the robot controller 4 receives the notification from the robot controller 4 in response to the connection of the teaching pendant connection plug 8. -Perform connection recognition in the same way.

FIG. 8 is a flowchart showing a procedure for switching between the transfer control state and the teaching processing state by the robot controller 4 of FIG. In FIG. 8, first, the robot controller 4 determines whether or not the selection button has been pressed (step 200), and maintains the transfer control state until the selection button is pressed. When the selection button is pressed, the work transfer robot R is immediately stopped (step 202). Further, the work transfer robot R is shifted to the teaching processing state (step 204). This enables teaching using the teaching pendant TP.

Thereafter, the robot controller 4 determines whether or not the teaching end button of the teaching pendant TP has been pressed (step 206). If the teaching end button has not been pressed, this determination processing is performed. The repetitive teaching processing state is continued. On the other hand, if the teaching end button is pressed, the timer starts counting (Step 208) and determines whether a predetermined time has elapsed (Step 210). Only after the elapse of the predetermined time, the state shifts from the teaching processing state to the transfer control state (step 2 12), shifts to step 100, and repeats the above processing.

This has the same operational effects as the first to third embodiments, and eliminates the need for mechanical operations such as pulling out dummy plugs, thereby reducing failures and only pressing the selection button. Can be shifted to the teaching processing state, so that the operability can be remarkably improved.

In the fourth embodiment, the pressing of the selection button of the teaching pendant TP is a condition for shifting to the teaching processing state via the stop state. However, the present invention is not limited to this. A selection button for selecting one of the plurality of teaching pendants TP may be provided, and pressing this selection button may be used as a condition for transition to the teaching processing state via the stop state.

Claims

The scope of the claims

1. A work transfer robot for transferring a predetermined work in a work area, and control means for controlling transfer of the predetermined work performed by the work transfer robot based on the contents taught,

Teaching means which is separated from the control means and which teaches a predetermined work carrying operation by the work carrying robot;

Connecting means for connecting the teaching means to the control means via a connection point provided around the work area;

A teaching system for a work transport robot, comprising:

2. The teaching system for a work transport robot according to claim 1, wherein the connection point is provided outside the work area.

3. The teaching system for a workpiece transfer robot according to claim 1 or 2, wherein a plurality of the connection points are provided.

4. It further comprises recognition means for recognizing whether or not the teaching means is connected to a connection point of the connection means,

2. The work according to claim 1, wherein, when the recognition unit recognizes that the teaching unit is connected, the control unit switches from a transfer control of the work transfer robot to a teaching process by the teaching unit. Transfer robot teaching system.

5. A dummy plug indicating that the connection point of the connection means is not used, and a dummy for recognizing whether a dummy plug is connected to the connection point of the connection means.

—With plug recognition means

Further comprising

4. The work according to claim 3, wherein the control unit controls the transfer of the work transfer robot when the dummy plug recognition unit recognizes that the dummy plug is connected at all connection points. Transfer robot teaching system.

6. The control means, wherein when the dummy plug recognition means recognizes that the dummy plug is not connected to one or more connection points, the control means prohibits the work transfer robot from performing a transfer operation. A teaching system for a work transfer robot according to item 1.

7. A work transfer robot for transferring a predetermined work in a work area, and control means for controlling transfer of the predetermined work performed by the work transfer robot based on the contents taught.

A plurality of teaching units that are separated from the control unit and that teach a transfer operation of a predetermined work by the work transfer robot;

Connecting means for connecting each of the plurality of teaching means to the control means via a plurality of connection points provided around the work area;

With

The said control means selects any one of the said several teaching means, It switches to the teaching process by the said selected teaching means, The teaching system of the workpiece | work transfer robot characterized by the above-mentioned.

8. A work transfer robot that transfers a predetermined work in a work area, and a control unit that controls transfer of the predetermined work performed by the work transfer robot based on the content taught.

A plurality of teaching means separated from the control means, the plurality of teaching means having a selection button for teaching a transfer operation of a predetermined work by the work transfer robot and instructing selection of the teaching means;

Connecting means for connecting the plurality of teaching means to the control means via a plurality of connection points provided around the work area;

With

When the selection button of the teaching means is selected, the control means switches from transfer control of the work transfer robot to teaching processing by the teaching means having the selection button. system.