425500 A7 B7 經濟部智慧財產局員工消贫合作社印製 大 大 五、發明説明（ί ) [發明之詳細說明] [技術領域] 本發明係有關組裝於半導體製造系統中，針對將半導 體晶圓、玻璃基板等之工作件搬送至既定之半導體處理裝 置’同時進行其出入之工作件搬送機械手，能進行有效率 且安全之示教的工作件搬送機械手之示教系統。 [習知技術] 以往’使用於半導體裝置製造系統之工作件搬送機械 手’係由機械手控制器依據示教之內容進行半導體晶圓等 工作件之搬送控制。 例如圖9所示’工作件搬送機械手25，係設置於無塵 室24內，透過纜線23以機械手控制器2〇控制。工作件搬 送機械手25，例如係採用蛙腿型機械手，藉手部臂之轉動 來移動作爲末端效應之手部26，於手部上裝載搬送半導體 晶圓等之工作件。而此工作件搬送機械手Μ之搬送動作， 係預先使用鍵盤等之示教機構及示教處理部21進行示教， 根據此示教之內容進行既定之搬送動作。 [發明欲解決之問題] 然而’近年來應處理之半導體晶圓等之工作件越來越 導致進行各種半導體製程之半導體處理裝置亦越來越 工作件搬送機械手25之作業區域亦越來越廣。 因此’在對工作件搬送機械手進行既定搬送動作之示 ,-----------裝------訂------線 (請先g讀背面之注意亊項再填寫本頁) 6紙張尺度適用_國國家標準（（^5)^4规格（2丨0父297公釐 經濟部智慧財產局員工消費合作社印製 4 25 5 () ^ Α7 ____Β7 五、發明説明（入） 教時，鍵盤等之示教機構係直接連接於機械手控制器20， 而且，當工作件搬送機械手與機械手控制器20相隔一距離 時，自此機械手控制器2〇之位置即無法看到該工作件搬送 機械手，有無法確實進行對該工作件搬送機械手之示教的 問題。 是以，使用懸吊式示教控制器對工作件搬送機械手進 行示教時，即可以纜線連接此懸吊式示教控制器與機械手 控制器間而進行。 但，上述工作件搬送機械手25之作業區域，例如有 l〇m見方，在此10m見方間延伸多對纜線實在非常麻煩， 將顯著的惡化操作性。 而且，由於係處理半導體晶圓等，而將上述之工作件 搬送機械手配於無麈室24內，因此拖拉此纜線移動至工作 件搬送機械手之附近，即會使無塵室內產生灰麈，降低言亥 無塵室之潔淨度。 再者，由於工作件搬送機械手25之作業區域27係無 麈室24內，需要適度的維持無塵室24之潔淨度，故無塵 室之大小，皆儘量設計成與作業區域27之大小相同。因此 ，當人進入無麈室24內，以示教機構進行對工作件搬送機 械手25之示教時，若工作件搬送機械手25係處於搬逯動 作狀態而非示教狀態時，未設人的退避區域及空隙而非常 危險。 因此，亦有需要確實而適當的劃分工作件搬送機械手 25之示教狀態及搬送動作狀態，以確保安全。 ___5___425500 A7 B7 Printed by the Anti-Poverty Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the Invention (Detailed Description of the Invention) [Technical Field] The present invention relates to the assembly of semiconductor wafers and glass in semiconductor manufacturing systems. Workpieces such as substrates are transferred to a predetermined semiconductor processing device. The workpiece transfer robot that performs simultaneous access to and from it can perform an efficient and safe workpiece transfer robot teaching system. [Knowledge technology] In the past, a 'workpiece transfer robot used in a semiconductor device manufacturing system' has been controlled by a robot controller based on the teaching content, such as semiconductor wafers. For example, as shown in FIG. 9, the 'work piece transfer robot 25 is installed in the clean room 24, and is controlled by the robot controller 20 through the cable 23. The work piece transfer robot 25 is, for example, a frog-leg type robot, which uses the rotation of the hand arm to move the hand portion 26 as an end effect, and loads work pieces such as semiconductor wafers on the hand. The transfer operation of the work piece transfer robot M is performed by using a teaching mechanism such as a keyboard and the teaching processing unit 21 in advance, and a predetermined transfer operation is performed according to the contents of the teaching. [Problems to be Solved by the Invention] However, in recent years, work pieces such as semiconductor wafers to be processed have led to more and more semiconductor processing devices that perform various semiconductor processes. The work area of the work piece transfer robot 25 has also increased. wide. Therefore, 'the intended conveying action for the work piece conveying robot is indicated by the --------------------------- order line (please read the note on the back first) (Please fill in this page again for the item) 6 Paper size applicable _ national standard ((^ 5) ^ 4 specifications (2 丨 0 parent 297 mm printed by the Intellectual Property Bureau employee consumption cooperative of the Ministry of Economic Affairs 4 25 5 () ^ Α7 ____ Β7 5 、 Explanation (introduction) When teaching, the teaching mechanism such as keyboard is directly connected to the robot controller 20, and when the work piece transfer robot is separated from the robot controller 20 by a distance, the robot controller The position of 20 means that the work piece transfer robot cannot be seen, and there is a problem that teaching of the work piece transfer robot cannot be performed reliably. Therefore, the suspension type teaching controller is used to perform the work piece transfer robot. When teaching, you can connect the suspension teaching controller and the robot controller with a cable. However, the working area of the robot 25 for the work piece transfer is, for example, 10m square, and 10m square here. It is really troublesome to extend multiple pairs of cables between them, which will significantly deteriorate the operability. Processing semiconductor wafers, etc., and disposing the above-mentioned work piece transfer robot in the clean room 24, so dragging this cable and moving it to the vicinity of the work piece transfer robot will cause gray dust in the clean room and reduce speech The cleanliness of the clean room. Furthermore, since the work area 27 of the work piece transfer robot 25 is inside the clean room 24, the cleanliness of the clean room 24 needs to be maintained moderately, so the size of the clean room is designed as much as possible. The size is the same as that of the work area 27. Therefore, when a person enters the chamberless room 24 and teaches the work piece transfer robot 25 with a teaching mechanism, if the work piece transfer robot 25 is in the moving state When it is not in the teaching state, it is very dangerous without human back-off areas and gaps. Therefore, it is also necessary to accurately and appropriately divide the teaching state and operation state of the work piece transfer robot 25 to ensure safety. ___5___
本紙張尺度適用中國國家標準（CNS ) Μ規格（210X297公H J------------裝 訂 線 (請先間讀背而之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 425500 五、發明説明（今） 是故’本發明即以提供一除去上述問題，提升對工作 件搬送機械手之示教處理之操作性，同時能確保安全性的 工作件搬送機械手之示教系統爲目的。 [解決問題之方法及效果] 本案之第1發明，其特徵在於具備：於大範圍之作業 區域搬送既定之工作件的工作件搬送機械手，依據示教之 內容控制前述工作件搬送機械手進行既定之工作件搬送的 控制機構’和前述控制機構分開設置、對藉前述工作件搬 送機械手之既定工作件之搬送動作進行示教之示教機構， 以及透過設於前述作業區域周圍之連接點將前述示教機構 連接於前述控制機構之連接機構。 此第1發明中，因可將連接示教機構之連接點配置於 工作件搬送機械手之附近，故有示教操作容易之作用效果 ’同時不需要延長用以連接示教機構與控制機構之長的纜 線’例如於工作件搬送機械手在無塵室內進行搬送動作時 ’具有不致因爲拉動纜線而使附著於纜線之垃圾及灰塵降 低無麈室內潔淨度之作用效果。 本案之第2發明，其特徵在於：前述第1發明中，前 述連接點係設於前述作業區域外。 此第2發明中，因每一次以示教機構進行示教時皆強 制要求將示教機構連接於連接點之操作，藉此具有確保示 教時之安全性的作用效果。 本案之第3發明’其特徵在於：前述之連接點係複數。 本紙張尺度適用中國國家標準（CNS ) A4規格（2iGX &7公釐) ,-----------寒------.玎------，^ (讀先間讀背而之注意事項再填莴本1) 4 255 0 0 A7 __B7_ 五、發明説明（斗） 此第3發明中，因連接點係設置複數個，能縮短示教 機構與連接點間之配線，同時具有容易進行示教操作之作 用效果。 本案之第4發明，其特徵在於：前述第1發明中，更 進一步的具備辨識前述示教機構是否已連接於連接機構之 辨識機構，當前述辨識機構確認已連接前述示教機構時， 前述控制機構，即自對前述工作件搬送機械手之搬送控制 切換至以前述示教機構之示教處理。 此第4發明中，因係依據連接之狀態適當的在搬送控 制狀態與示教處理狀態間進行切換，故具有在進行示教時 確實的確保安全性之作用效果。 本案之第5發明，其其特徵在於：前述第3發明中， 更進一步的具備有顯示前述連接機構之連接點未被使用之 暫置插頭，以及辨識前述暫置插頭是否已連接於前述連接 機構之連接點之暫置插頭辨識機構，當前述暫置插頭辨識 機構確認全部的暫置插頭皆連接於連接點時，前述控制機 構即進行工作件搬送機械手之搬送控制。 經濟部智慧財產局員工消費合作社印製 此第5發明中，因只有在全部的暫置插頭皆連接時才 進行工作件搬送機械手之搬送控制，能確實的分離示教處 理狀態及搬送控制處理確保安全性。 本案之第6發明，其特徵在於：前述第5發明中，當 前述暫置插頭辨識機構確認有一個以上之暫置插頭未連接 於連接點時，前述控制機構即禁止前述工作件搬送機械手 之搬送動作。 _2_ 本紙張尺度適用中國國家標皁（CNS ) A4規格（210 X 297公釐） 25 〇 A7 B7 五、發明説明（ς") 此第6發明中’與第5之發明相反的，因係當有一個 以上之暫置插頭未連接於連接點時即不進行搬送動作，與 第5之發明同樣的能確實的分離示教處理狀態及搬送控制 處理確保安全性。 本案之第7發明，其特徵在於具備：於大範圍之作業 區域搬送既定之工作件的工作件搬送機械手，依據示教之 內容控制前述工作件搬送機械手進行既定之工作件搬送的 控制機構，和前述控制機構分開設置、對藉前述工作件搬 送機械手之既定工作件之搬送動作進行示教之示教機構， 以及透過設於前述作業區域周圍複數之連接點將前述複數 之示教機構分別連接於前述控制機構之連接機構，前述控 制機構自前述複數之示教機構中任擇其一，依所選擇之示 教機構切換至示教處理。 此第7發明中，因能藉控制機構進行示教機構之選擇 以取代拔出暫置插頭，故具有移向示教處理狀態之操作更 爲提升之作用效果。 本案之第8發明，其特徵在於具備：於大範圍之作業. 區域搬送既定之工作件的工作件搬送機械手，依據示教之 內容控制前述工作件搬送機械手進行既定之工作件搬送的 控制機構，和前述控制機構分開設置、對藉前述工作件搬 送機械手之既定工作件之搬送動作進行示教之示教機構選 擇按鍵，以及透過設於前述作業區域周圍複數之連接點將 前述複數之示教機構分別連接於前述控制機構之連接機構 ，前述控制機構在前述示教機構之選擇按鍵被選擇時，即 ----S«______ 本紙張尺度適用中國國家標準（CNS ) A4規格（21〇X 297公釐） (請先Μ讀背面之注意事項再填寫本買) -裝. 訂 經濟部智慧財產局員工消賫合作社印製 25 25 經濟部智慧財產局員工消費合作社印製 Α7 Β7 五、發明説明（心） 自前述工作件搬送機械手之搬送控制切換至藉具有該選擇 按鍵之示教機構的示教處理。 此第8發明中，因藉由只按壓下選擇按鍵之操作以取 代拔出暫置插頭即能移至示教處理狀態，故具有移至示教 處理狀態時之操作性更爲提升之作用效果。 [發明之實施形態] 以下，參照圖式說明本發明之實施形態。 圖1係顯示本發明第1實施形態之半導體裝置製造系 統10之構成槪要圖。圖1中，半導體裝置製造系統10具 有無麈室1及透過柵門9a〜9d連接於無塵室1之四個處理 加工裝置2a〜2d。各個處理加工裝置2a〜2d，係對半導體 晶圓等之工作件進行既定之加工處理，例如熱處理等之處 理加工’藉以各處理加工裝置2a〜2d實施各處理加工，針 對工作件進行一連串的處理加工。 此工作件，係與處理加工裝置2a〜2d同樣的作爲處理 加工對象而整齊的配置於連接至無麈室1之卡匝3內，藉 活動於無麈室1內之工作件搬送機械手R取出。工作件搬 送機械手R ’係由例如圖1所示之蛙腿形機械手構成。蛙 腿形機械手’顧名思義，係如蛙腿般之手部臂進行伸縮動 作’搬送安裝於手部臂前端作爲末端效應之手部Η上所裝 載之工作件。手部臂之伸縮，係藉將各手部臂之軸向互不 相同的方向轉動而達成，而藉將各手部臂之軸在相同方向 轉動即能以繞軸之方式轉動手部Η。再者，此蛙腿型機械 Λ~ tl J I ! - - i— In 訂- - 線 (#先閱讀背面之注意事項再填寫本頁) •425500 A7 B7____ 五、發明説明（?） 手’藉在延伸於無塵室1長軸方向之既定的軌道Ln上移 動’能在各處理加裝置2a〜2d及匣3的前面槪略的移動。 (請先閲讀背而之注意寧項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 藉控制工作件搬送機械手R而對工作件進行既定之處 理加工時’首先工作件搬送機械手R，自匣3內取出未處 理之工作件。此取出動作，係藉由使匣或手部Η上下，將 工作件搬送機械手R裝載於手部Η上而進行。之後，Η上 之工作件，被搬送至最初的處理加工裝置，例如處理加工 裝置2a的前面，透過柵門9a送至處理加工裝置2a內。然 後’以處理加工裝置2a處理加工之工作件，再度以工作件 搬送機械手R取出，被搬送至下一個處理加工裝置，例如 處理加工裝置2b，透過柵門9b送至處理加工裝置2b內， 實施既定之處理加工。其後以同樣的方式，順序實施每一 個處理加工裝置之加工處理，結束一連串之加工處理。例 如’最後的處埂加工係以處理加工裝置2c進行時，工作件 搬送機械手R，即透過柵門9c將被處理加工之工作件取出 ，搬送至匣8的前面，再將處理加工完畢之工作件收納於 匣3內。工作件搬送機械手R，針對複數個工作件係同時 平行的使各處理加工裝置2a〜2d進行處理加工的方式，實 行有效率的搬送處理。 此工作件搬送機械手R的搬送控制，係藉由配置於無 塵室〖外之機械手控制器4進行控制。 另一方面，無塵室1長軸方向的側壁，設置有四個連 接插頭6a〜6d。此連接插頭6a〜6d，係分別電性連接於機 械手控制器4。當暫置插頭7a〜7d皆連接於所有的連接插 本紙張尺度適用中國國家橾準（CNS ) A4規格（2丨0X297公釐） 425500 經濟部智慧財產局員工消费合作杜印製 A7 五、發明説明（名） 頭6a〜W時，機械手控制器4係在非示教狀態下進行搬送 控制。又，當連接懸吊式示教控制器TP之懸吊式示教控 制器連接插頭8連接於連接插頭6a〜6d中任一者，且暫置 插頭h〜Μ連接於所有其他的連接插頭6a〜6d時，機械 手控制器4即辨識其爲示教狀態。此辨識判斷，係由機械 手控制器4之連接辨識部5a進行。機械手控制器4， 由此連接辨識部5a之爭識在搬送控制狀態及示教處理狀^ 間進行切換。 無塵室1，具有四個開關門la〜Id，懸吊式示教控制 器TP係通過此門被帶入無塵室1。例如圖1中，在處埋加 工裝置2b附近針對工作件搬送機械手R進行示教時，自 位於最靠近的連接插頭6b取下暫置插頭7b，將懸吊式示 教控制器連接插頭8連接於連接插頭6b，通過開關門^ 將懸吊式示教控制器TP帶入無麈室1在工作件搬送彳幾械 手R的附近進行示教。示教處理部5b，即進行收納自與吊 式示教控制器TP所指示之內容等的示教處理。 其次參照圖2之流程圖，說明機械手控制器4以連接 辨識部5a的辨識結果所作之於搬送控制狀態及示教處理狀_ 間之切換處理。 圖2中，首先機械手控制器4，係使工作件搬送機械 手R處於停止狀態(步驟100)。之後’以連接辨識部5a的 辨識結果判斷暫置插頭7a〜7d是否全部連接於連接插頭 6a〜6d(步驟 1〇2)。 若暫置插頭7a〜7d全部未連接時，機械手控制器4即 本紙張尺度適用中國國家操率（CMS ) A4規格（210X297公釐） ------------裝------訂---I 線 f請先閩讀背面之注意事項再填寫本頁} 4 25 5 0 Ο Α7 __；_____Β7 五、發明説明（7 ) 進一步藉連接辨識部5a的辨識結果，判斷懸吊式示教控制 器tp是否連接於一個連接插頭，且暫置插頭是否連接於 所有其他的連接插頭(步驟l〇4h若無法滿足此步驟104時 ，即移至步驟102判斷暫置插頭7a〜7d是否全部連接。另 一方面，若滿足步驟104時’即移至示教處理狀態（步驟 106)。藉此，即能以懸吊式示教控制器TP進行示教。 經濟部智慧財產局員工消費合作社印製 之後，機械手控制器4即判斷懸吊式示教控制器TP 之示教結束按鍵是否已被壓下（步驟108)，若示教結束按鍵 已被壓下時，即開始計時器的計時(步驟110)，判斷是否已 經過既定時間(步驟II2)。在經過此既定時間之階段才移至 步驟100，工作件搬送機械手R成爲停止狀態，重複上述 之處理狀態。另一方面，在步驟108示教結束按鍵未壓下 時’即判斷懸吊式示教控制器TP是否連接於一個連接插 頭’且暫置插頭是否連接於所有其他的連接插頭(步驟120.) ，當判斷結果係滿足此條件時，即移至步驟108，當判斷 結果係並未滿足此條件時，則移至步驟100重複上述處理 。如此般將壓下示教結束按鍵作爲移向停止狀態的條件係 爲了確保安全性。又，將經過既定時間作爲移向停止狀態 的條件，係因爲進行示教之人有可能仍在無麈室1內，而 自無塵室1出來至少需要既定之時間之故。以上述之方式 藉二種、三種的檢查以確保安全性。特別是因無塵室1之 空間與工作件搬送機械手R之作業區域間的空隙非常的少 ，有可能因爲工作件搬送機械手R之搬送控制而對無塵室 1內的人造成傷害。再者，亦可進二步的設置辨識各開關 - ---;_____--一\2 -------- 本紙珉尺度適用中國國家梯準（CNS ) A4規格（210X297公釐） 4255 Ο Ο Α7 __Β7___ 五、發明説明（（G ) 門la〜Id之開關的裝置，將此開關門之關閉作爲移向停止 狀態的條件。 (請先閱讀背面之注意事項再填寫本頁) 另一方面，在步驟102中當判斷所有的暫置插頭7a〜 7d皆連接於連接插頭時，即進一步的判斷機械手控制器4 上之搬送控制按鍵是否已被壓下（步驟130)。若搬送控制按 鍵並未被壓下時即移至步驟102重複上述之處理，若搬送 控制按鍵已被壓下時，即移至搬送控制狀態(步驟Π2)。亦 即，機械手控制器4根據示教之內容使工作件搬送機械手 R進行工作件之搬送。之後，判斷是否所有的暫置插頭^ 〜7d皆已連接於連接插頭6a〜6d(步驟134)，僅在當判斷 所有的暫置插頭7a〜7d未連接於連接插頭6a〜6d時’才 移至步驟100使工作件搬送機械手R成爲停止狀態。 接著，參照圖3說明連接插頭6a〜6d與暫置插頭7a 〜7d之連接機構以及連接插頭6a〜6d與懸吊式示教控制 器TP之連接機構。 經濟部智慧財產局員工消費合作社印製 圖3(a)係顯示連接插頭6a與暫置插頭7a之連接狀態 的圖。圖3(a)所示之暫置插頭7a，具有直接連接端子T2 與端子Τη之配線。當此暫置插頭7a被連接時，連接辨識 部5a，即辨識端子T2與端子Τη之連接，據此辨識連接插 頭6a上連接有暫置插頭7a。 圖3(b)係顯示連接插頭6a與懸吊式示教控制器TP之 連接狀態的圖。圖3(b)所示之懸吊式示教控制器連接插頭 8，至少具有端子T1與端子Tri之短路配線。當此懸吊式 示教控制器連接插頭8被連接時，連接辨識部5a，即辨識 -—------ 本紙張又度適用中國國家標準（CNS ) A4規格（210X 297公釐） 經濟部智葱財產局員工消免合作杜印製 4 255 Ο Ο Α7 _______Β7 五、發明説明（丨I ) 端子Τ1與端子Τη之連接，據此辨識連接插頭6a上連接 有懸吊式示教控制器連接插頭8，亦即連接有懸吊式示教 控制器TP。此懸吊式示教控制器連接插頭8，將來自懸吊 式示教控制器TP所指示之資訊送至機械手控制器4，或也 連接用以接收來自機械手控制器4之資訊的線。 用以進行上述方式之連接辨識機構可有各種各樣之樣 態。例如，不於暫置插頭7a〜7d或懸吊式示教控制器連接 插頭8側設置短路配線，僅於既定位置設置小孔，並於與 此小孔之對應位置之連接插頭6a〜6d設備凹部，藉由根據 辨識將小孔插入此凹部之連接亦能進行連接辨識。或者， 不由連接辨識部5a進行連接辨識，而於連接插頭6a〜6d 側設置連接檢測部，將此檢測結果設於機械手控制器4亦 可。再者’不採用檢測電性、機械性的接觸狀態，而採用 檢測光學性的接觸狀態之方式亦可。 根據此第1實施形態，因能在工作件搬送機械手R的 附近進行示教，能飛躍的提升示教時之操作性。又，自最 接近工作件搬送機械手R之連接點拉一纜線即可，故不需 在無塵室1內拖曳過長的纜線，不致產生使附著於纜線外 層之垃圾及灰塵等散亂於無塵室1內，而能適當的維持潔 淨度。再者，於無塵室1內進行示教之際，因須強制要求 進行將懸吊式示教控制器連接插頭8連接於連接插頭6a〜 6d中任一者之手部動操作，以使工作件搬送機械手R停止 ，故能防範示教時之事故於未然。又，因僅在所有的暫置 插頭皆連接時才允許進行工作件搬送機械手之搬送控制， *7— ----14....~~— _______ 本紙張尺度適用中國國家標準（CNS ) Μ規格（210X297公釐） ."——^-----g------IT------# (讀先聞讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製· ^ 4 2 5 5 Ο ί] < Α7 ____________87 五、發明説明（（>) 能更進一步的提升安全性。 其次，參照圖4及圖5說明第2實施形態。第1實施 形態中’係採用將連接插頭設於無塵室1之外側，而將懸 吊式示教控制器連接插頭8連接於此連接插頭中任一者之 方式’但在第2實施形態中，係將連接插頭設於無塵室1 之內側。 亦即:，如圖4所示，係在無塵室1之內部側設置連接 暫置插頭7a〜7d或懸吊式示教控制器連接插頭8之機構。 此時，不強制要求將懸吊式示教控制器連接插頭8連接於 連接插頭6a〜6d之手部動操作，而係在無塵室1內將懸吊 式示教控制器連接插頭8連接於連接插頭6a〜6d，故會產 生無法確實的確保安全性的期間。因此，於各開關門la〜 Id設置辨識開關之檢測機構，將此檢測機構與機械手控制 器4連接，使機械手控制器4能辨識開關門la〜Id之開關 〇 參照圖5之流程圖說明此第2實施形態之搬送控制狀 態與示教處理狀態間之切換處理。 圖5中，首先機械手控制器4，係使工作件搬送機械 手R處於停止狀態(步驟100)。之後，以連接辨識部5a之 辨識結果判斷全部的暫置插頭7a〜7d是否連接於連接插頭 6a〜6d(步驟 102)。 當暫置插頭7a〜7d並未全部連接時，即進行與圖2相 同之自步驟104至120之處理而移至示教處理狀態，進而 再移至停止狀態。 —-- 本紙法尺度適用中國國家標準（CNS) A4規格（210X297公釐） J . ~, , 裝 ~~ 訂 . ..線 (請先閱讀背面之注意亊項再填寫本頁) 經濟部智慧財產局員工消費合作社印製This paper size applies to China National Standard (CNS) M specifications (210X297 male H J ------------ binding line (please read the precautions before filling in this page) Intellectual Property of the Ministry of Economic Affairs Printed by the Bureau ’s Consumer Cooperative Cooperative 425500. 5. Description of the invention (now) “The present invention is to provide a work piece that removes the above problems and improves the operability of the teaching and processing of the work piece transfer manipulator while ensuring the safety of the work piece. [Teaching method and effect of the problem] The first invention of the present case is characterized in that it includes a work piece transfer robot that transfers a predetermined work piece in a large-scale work area, and is based on the teaching. The control mechanism that controls the aforementioned work piece transfer robot to perform a predetermined work piece transfer is provided separately from the aforementioned control mechanism, a teaching mechanism that teaches the transfer operation of a predetermined work piece by the aforementioned work piece transfer robot, and through the design The teaching mechanism is connected to the connection mechanism of the control mechanism at a connection point around the operation area. In the first invention, the connection can be taught by connection. The connection point of the structure is arranged near the work piece transfer robot, so it has the effect of easy teaching operation. At the same time, it is not necessary to extend the long cable connecting the teaching mechanism and the control mechanism. For example, in the work piece transfer robot When transporting in a clean room, it has the effect of preventing the dust and dust adhering to the cable from reducing the cleanliness of the clean room by pulling the cable. The second invention of the present invention is characterized in that: The above-mentioned connection point is located outside the aforementioned work area. In this second invention, the operation of connecting the teaching mechanism to the connection point is mandatory when teaching with the teaching mechanism each time, thereby ensuring the teaching time. The third invention of this case is characterized in that the aforementioned connection points are plural. The paper size applies the Chinese National Standard (CNS) A4 specification (2iGX & 7 mm), --- ------ Cold ------. 玎 ------, ^ (Read the notes before reading the back and fill in the lettuce 1) 4 255 0 0 A7 __B7_ V. Description of the invention ( Bucket) In this third invention, since a plurality of connection points are provided, The wiring between the teaching mechanism and the connection point can be shortened, and at the same time, it has the effect of facilitating teaching operations. The fourth invention of the present invention is characterized in that in the first invention, it is further provided to identify whether the teaching mechanism has been identified. The identification mechanism connected to the connection mechanism. When the identification mechanism confirms that the teaching mechanism is connected, the control mechanism is switched from the transfer control of the work piece transfer robot to the teaching processing of the teaching mechanism. In the fourth invention, since the transfer control state and the teaching processing state are appropriately switched in accordance with the state of the connection, it has the effect of ensuring the safety during teaching. The fifth invention of the present invention, which has It is characterized in that the third invention further includes a temporary plug indicating that the connection point of the connection mechanism is not used, and a temporary plug identification that identifies whether the temporary plug is connected to the connection point of the connection mechanism. Mechanism, when the aforementioned temporary plug identification mechanism confirms that all the temporary plugs are connected to the connection point, the aforementioned control That mechanism work piece transfer robot of the transport control. In the fifth invention printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, the work piece transfer robot is controlled only when all the temporary plugs are connected, which can reliably separate the teaching processing status and the transfer control processing. Ensure safety. The sixth invention of the present case is characterized in that in the fifth invention, when the temporary plug identification mechanism confirms that more than one temporary plug is not connected to the connection point, the control mechanism prohibits the work piece from being transported to the robot. Transport action. _2_ This paper size applies to China National Standard Soap (CNS) A4 specification (210 X 297 mm) 25 〇A7 B7 V. Description of invention (ς ") This 6th invention is the opposite of the 5th invention because it should be When one or more temporary plugs are not connected to the connection point, the transfer operation is not performed, and the teaching process state and the transfer control process can be reliably separated to ensure safety as in the fifth invention. The seventh invention of the present case is characterized in that it includes a work piece transfer robot that transfers a predetermined work piece in a large-scale work area, and a control mechanism that controls the aforementioned work piece transfer robot to perform a predetermined work piece transfer according to the teaching content. Separate from the aforementioned control mechanism, a teaching mechanism that teaches the movement of a predetermined work piece by the aforementioned work piece transfer manipulator, and connects the plurality of teaching mechanisms to each other through a plurality of connection points provided around the operation area. The connection mechanism of the aforementioned control mechanism, the aforementioned control mechanism selects one of the plurality of teaching mechanisms, and switches to teaching processing according to the selected teaching mechanism. In this seventh invention, since the teaching mechanism can be selected by the control mechanism instead of pulling out the temporary plug, it has the effect of improving the operation of moving to the teaching processing state. The eighth invention of the present case is characterized in that it is provided with: a large-area work. A work piece transfer robot that transfers a predetermined work piece in an area, and a control mechanism that controls the aforementioned work piece transfer robot to perform a predetermined work piece transfer based on the teaching content. , A teaching mechanism selection button that is set separately from the aforementioned control mechanism to teach the movement of a predetermined workpiece by the aforementioned workpiece transfer robot, and the aforementioned plural teaching mechanisms are provided through plural connection points provided around the aforementioned operating area The connection mechanism connected to the aforementioned control mechanism respectively. When the selection button of the aforementioned teaching mechanism is selected, the aforementioned control mechanism ---- S «______ This paper size is applicable to China National Standard (CNS) A4 specification (21〇X 297) (Mm) (Please read the precautions on the back before filling out this purchase)-Pack. Order printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 25 25 Printed by the Consumer ’s Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Α7 Β7 V. Description of the invention (Heart) Switching from the transfer control of the work piece transfer robot to the one with the teaching mechanism with the selection button Teaching process. In the eighth invention, since the operation can be moved to the teaching processing state by replacing only the temporary plug by pulling down the selection button, it has the effect of improving the operability when moving to the teaching processing state. . [Embodiment of the invention] Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a schematic diagram showing a configuration of a semiconductor device manufacturing system 10 according to a first embodiment of the present invention. In FIG. 1, a semiconductor device manufacturing system 10 includes a chamber-less chamber 1 and four processing and processing apparatuses 2a to 2d connected to the clean-room 1 through gates 9a to 9d. Each processing and processing device 2a to 2d performs a predetermined processing on a work piece such as a semiconductor wafer. For example, processing processing such as heat treatment, etc., each processing and processing device 2a to 2d performs each processing and a series of processing is performed on the work piece. machining. This work piece is the same as the processing equipment 2a to 2d, and is arranged neatly as a processing object in the card turn 3 connected to the ballastless room 1. The work piece transfer robot R is moved by the work piece in the ballastless room 1. take out. The work piece transfer robot R 'is constituted by, for example, a frog leg robot as shown in FIG. The frog leg-shaped manipulator ', as its name implies, is a telescopic movement of a hand arm like a frog leg. It transports the work piece mounted on the hand cymbal mounted on the front end of the hand arm as an end effect. The telescoping of the hand arms is achieved by rotating the axial directions of the hand arms in mutually different directions, and by rotating the shafts of the hand arms in the same direction, the hand can be rotated around the axis. Furthermore, this frog leg type machine Λ ~ tl JI!--I- In Order--Thread (#Read the precautions on the back before filling this page) • 425500 A7 B7____ 5. Description of the invention (?) The hand is borrowed Moving on a predetermined track Ln extending in the long axis direction of the clean room 1 can be moved slightly in front of each of the processing units 2a to 2d and the cassette 3. (Please read the note on the back and fill in this page first) When the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs prints the work piece by controlling the work piece transfer robot R, the work piece is processed and processed 'First the work piece transfer robot R. Take out the unprocessed work pieces from the cassette 3. This take-out operation is performed by placing the cassette or hand Η up and down, and loading the work piece transfer robot R on the hand Η. After that, the work piece on the stack is transported to the first processing apparatus, for example, in front of the processing apparatus 2a, and is sent to the processing apparatus 2a through the gate 9a. Then the work piece processed by the processing processing device 2a is taken out again by the work piece transfer robot R, and is transported to the next processing processing device, such as the processing processing device 2b, and sent to the processing processing device 2b through the gate 9b. Carry out the predetermined processing. Thereafter, in the same manner, the processing of each processing device is sequentially performed, and a series of processing is ended. For example, when the last processing is performed by the processing processing device 2c, the work piece transfer robot R, that is, the work piece to be processed is taken out through the gate 9c, transferred to the front of the box 8, and the processing is completed. The work pieces are stored in the cassette 3. The work piece transfer robot R performs efficient transfer processing for a method in which a plurality of work pieces are processed in parallel by the processing devices 2a to 2d at the same time. The conveyance control of the work piece conveying robot R is controlled by the robot controller 4 arranged outside the clean room. On the other hand, the side wall in the longitudinal direction of the clean room 1 is provided with four connecting plugs 6a to 6d. The connecting plugs 6a to 6d are electrically connected to the robot controller 4 respectively. When the temporary plugs 7a to 7d are connected to all the connection papers, the paper size is applicable to the Chinese National Standard (CNS) A4 specification (2 丨 0X297 mm) 425500 Employees ’cooperation in the intellectual property bureau of the Ministry of Economic Affairs. Du printed A7. V. Invention Explanation (name) For the heads 6a to W, the robot controller 4 performs the conveyance control in a non-teaching state. In addition, when the pendant teaching controller connection plug 8 to which the pendant teaching controller TP is connected is connected to any one of the connection plugs 6a to 6d, and the temporary plugs h to M are connected to all other connection plugs 6a At ~ 6d, the robot controller 4 recognizes that it is a teaching state. This identification judgment is performed by the connection identification section 5a of the robot controller 4. The robot controller 4 switches between the conveyance control state and the teaching processing status by the connection recognition unit 5a. The clean room 1 has four opening doors la to Id, and the pendant teaching controller TP is taken into the clean room 1 through this door. For example, in FIG. 1, when teaching the work piece transfer robot R near the buried processing device 2 b, remove the temporary plug 7 b from the nearest connecting plug 6 b and connect the pendant teaching controller to the plug 8. It is connected to the connecting plug 6b, and the pendant teaching controller TP is brought into the non-chambered room 1 through the door opening and closing. The teaching processing unit 5b performs teaching processing such as storing contents instructed by the self-hanging teaching controller TP. Next, referring to the flowchart of FIG. 2, the switching process between the transport control state and the teaching process state by the robot controller 4 based on the recognition result of the connection recognition unit 5a will be described. In Fig. 2, the robot controller 4 first stops the work piece transfer robot R (step 100). After that, it is determined whether the temporary plugs 7a to 7d are all connected to the connecting plugs 6a to 6d based on the recognition result of the connection recognition unit 5a (step 102). If all the temporary plugs 7a ~ 7d are not connected, the robot controller 4 is the paper size applicable to the Chinese national operating rate (CMS) A4 specification (210X297 mm) ------------ install- ----- Order --- I line f, please read the notes on the back before filling in this page} 4 25 5 0 〇 Α7 __; _____ Β7 V. Description of the invention (7) The identification result of the connection identification section 5a is further borrowed. To determine whether the pendant teaching controller tp is connected to one connection plug, and whether the temporary plug is connected to all other connection plugs (if step 104h cannot meet this step 104, it moves to step 102 to determine the temporary Are all the plugs 7a to 7d connected. On the other hand, if step 104 is satisfied, the process is moved to the teaching processing state (step 106). With this, the pendant teaching controller TP can be used for teaching. Ministry of Economic Affairs After printing by the Intellectual Property Bureau employee consumer cooperative, the robot controller 4 judges whether the teaching end button of the pendant teaching controller TP has been pressed (step 108). If the teaching end button has been pressed, , That is, start the timer (step 110), and determine whether a predetermined time has elapsed (step Step II2). The process moves to step 100 only after the predetermined time has elapsed, and the work piece conveying robot R is stopped and the above-mentioned processing state is repeated. On the other hand, when the teaching end button is not depressed in step 108, that is, Determine whether the pendant teaching controller TP is connected to one connection plug 'and whether the temporary plug is connected to all other connection plugs (step 120.). When the judgment result meets this condition, go to step 108, when If the result of the judgment is that this condition is not satisfied, the process proceeds to step 100 and the above process is repeated. In this way, pressing the teaching end button as the condition for moving to the stop state is to ensure safety. Also, the predetermined time has passed as the moving direction. The condition of the stop state is because the person performing the teaching may still be in the clean room 1, and it takes at least a predetermined time to get out of the clean room 1. In the above manner, two or three inspections are borrowed to ensure safety. In particular, because the space between the clean room 1 and the work area of the work piece transfer robot R is very small, it may be due to the transfer control of the work piece transfer robot R. Cause harm to the people in the clean room 1. In addition, you can further identify the switches by setting two steps----; _____-- 一 \ 2 -------- The standard of this paper is applicable to the Chinese national ladder Standard (CNS) A4 (210X297 mm) 4255 Ο Ο Α7 __Β7 ___ V. Description of the invention ((G) The device of the door la ~ Id switch, closing the door of the switch as a condition to move to the stop state. (Please first Read the precautions on the back and fill in this page) On the other hand, in step 102, when it is judged that all the temporary plugs 7a to 7d are connected to the connection plug, it is further judged whether the transport control button on the robot controller 4 is Has been depressed (step 130). If the transport control button has not been pressed, it moves to step 102 to repeat the above-mentioned processing. If the transport control button has been pressed, it moves to the transport control state (step Π2). That is, the robot controller 4 causes the work piece transfer robot R to carry the work piece according to the teaching contents. After that, it is determined whether all the temporary plugs ^ ~ 7d have been connected to the connecting plugs 6a to 6d (step 134), and only when it is determined that all the temporary plugs 7a to 7d are not connected to the connecting plugs 6a to 6d. Proceeding to step 100, the work piece transfer robot R is brought to a stop state. Next, the connection mechanism of the connection plugs 6a to 6d and the temporary plugs 7a to 7d and the connection mechanism of the connection plugs 6a to 6d and the pendant teaching controller TP will be described with reference to Fig. 3. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Figure 3 (a) is a diagram showing the connection state of the connecting plug 6a and the temporary plug 7a. The temporary plug 7a shown in FIG. 3 (a) has wiring for directly connecting the terminal T2 and the terminal Tn. When the temporary plug 7a is connected, the connection identification part 5a, that is, the connection between the terminal T2 and the terminal Tn, is identified based on which the temporary plug 7a is connected to the connection plug 6a. Fig. 3 (b) is a diagram showing the connection state of the connection plug 6a and the pendant teaching controller TP. The pendant teaching controller connection plug 8 shown in FIG. 3 (b) has at least short-circuit wiring between the terminal T1 and the terminal Tri. When the pendant teaching controller connection plug 8 is connected, the connection identification section 5a recognizes ----------- this paper is also applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm) Employees of the Intellectual Property Bureau of the Ministry of Economic Affairs canceled the cooperation and printed 4 255 Ο Ο Α7 _______ Β7 V. Description of the invention (丨 I) The connection between the terminal T1 and the terminal τη, based on which it was identified that the pendant teaching control is connected to the connection plug 6a The device is connected to the plug 8, that is, the pendant teaching controller TP is connected. This pendant teaching controller is connected to the plug 8 and sends the information indicated by the pendant teaching controller TP to the robot controller 4 or a line for receiving the information from the robot controller 4 . The connection identification mechanism for performing the above-mentioned methods may have various forms. For example, short-circuit wiring is not provided on the side of the temporary plugs 7a to 7d or the connection plug 8 of the pendant teaching controller. Only small holes are provided in the predetermined positions, and the plugs 6a to 6d are connected to the corresponding positions of the small holes Concave part, connection identification can also be performed by inserting a small hole into this concave part according to the identification. Alternatively, instead of the connection identification by the connection identification portion 5a, a connection detection portion may be provided on the connection plugs 6a to 6d side, and the detection result may be set in the robot controller 4. Furthermore, it is not necessary to detect the electrical and mechanical contact states, but to detect the optical contact states. According to this first embodiment, teaching can be performed in the vicinity of the work piece transfer robot R, and the operability during teaching can be greatly improved. In addition, it is sufficient to pull a cable from the connection point closest to the work piece transfer robot R, so there is no need to drag an excessively long cable in the clean room 1, so as not to cause garbage and dust attached to the outer layer of the cable, etc. It is scattered in the clean room 1, and the cleanliness can be appropriately maintained. In addition, when teaching in the clean room 1, it is mandatory to perform manual operation to connect the pendant teaching controller connection plug 8 to any of the connection plugs 6a to 6d in order to work. The piece transfer robot R stops, so that accidents during teaching can be prevented beforehand. In addition, because the transfer control of the work piece transfer manipulator is allowed only when all the temporary plugs are connected, * 7— ---- 14 .... ~~ — _______ This paper size applies the Chinese National Standard (CNS ) M specifications (210X297 mm). &Quot; —— ^ ----- g ------ IT ------ # (Read the notes on the back and then fill out this page) Ministry of Economic Affairs Printed by the Intellectual Property Bureau's Consumer Cooperatives · ^ 4 2 5 5 Ο ί] < Α7 ____________87 V. Explanation of the invention (>) can further improve the security. Secondly, the second implementation will be described with reference to FIGS. 4 and 5 In the first embodiment, 'the connection plug is provided outside the clean room 1 and the pendant teaching controller connection plug 8 is connected to any of the connection plugs', but in the second embodiment, In the embodiment, the connection plug is provided inside the clean room 1. That is, as shown in FIG. 4, a connection temporary plug 7a to 7d or a suspension type teaching is provided on the inner side of the clean room 1. Mechanism of the controller connection plug 8. At this time, it is not mandatory to connect the pendant teaching controller connection plug 8 to the hands of the connection plugs 6a to 6d. In order to operate, the pendant teaching controller connection plug 8 is connected to the connection plugs 6a to 6d in the clean room 1. Therefore, a period in which safety cannot be surely ensured occurs. Therefore, each of the opening and closing doors 1a to 1d A detection mechanism is provided for the identification switch, and the detection mechanism is connected to the robot controller 4 so that the robot controller 4 can identify the switches of the opening and closing doors la to Id. The transport control of this second embodiment will be described with reference to the flowchart of FIG. 5. The switching process between the state and the teaching process state. In Fig. 5, the robot controller 4 first stops the work piece transfer robot R (step 100). After that, it judges all based on the recognition result of the connection recognition unit 5a. Whether the temporary plugs 7a to 7d are connected to the connecting plugs 6a to 6d (step 102). When the temporary plugs 7a to 7d are not all connected, the same processing as in FIG. 2 is performed from steps 104 to 120 and moved to Teach the processing state, and then move to the stop state. --- The size of the paper method is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) J. ~,, Installed ~~ Ordered .. Line (Please read the back first Please fill in this note ) Ministry of Economic Affairs Intellectual Property Office employees consumer cooperatives printed
4 25 5 G A7 _____ B7________ 五、發明説明（〇) 另一方面，當判斷在步驟102中全部的暫置插頭7a〜 7d皆連接於連接插頭6a〜6d時，即進一步判斷機械手控 制器4上之搬送控制按鍵是否已被壓下（步驟130)。若搬送 控制按鍵並未被壓下時即移至步驟102重複上述之處理， 若搬送控制按鏈已被壓下時，即移至搬送控制狀態（步驟 I32)。亦即，機械手控制器4根據示教之內容使工作件搬 送機械手R進行工作件之搬送。之後，根據開關門la〜Id 之檢測機構之檢測結果判斷是否至少有一個開關門已打開（ 步驟133)，若有，則立即移至步驟1〇〇進入停止狀態。若 沒有開關門打開時，即進一歩判斷是否所有的暫置插頭7a 〜7d皆已連接於連接插頭6a〜6d(步驟13^。此步驟134 中，僅在判斷所有的暫置插頭7a〜7d未連接於連接插頭 6a〜6d時’才移至步驟100使工作件搬送機械手r成爲停 止狀態。 藉此’因不需如第1實施形態般將懸吊式示教控制器 TP自無塵室1外部導入纜線，故能更爲提高無塵室1之潔 淨度。 接著，參照圖6說明第3實施形態。在第丨及第2實 施形態中，皆係以纜線連接懸吊式示教控制器τρ與懸吊 式示教控制器連接插頭8，但在第3實施形態中，則係以 無線連接懸吊式示教控制器ΤΡ與懸吊式示教控制器連接 插頭8。 亦即，圖6之懸吊式示敎控制器連接插頭8及懸吊式 不教控制器ΤΡ因係相互送 '收信之故，分別具有送、收4 25 5 G A7 _____ B7________ 5. Description of the invention (0) On the other hand, when it is determined that all the temporary plugs 7a to 7d are connected to the connecting plugs 6a to 6d in step 102, the robot controller 4 is further judged. Whether the upper conveyance control button has been depressed (step 130). If the transport control button is not depressed, it moves to step 102 to repeat the above process. If the transport control button chain has been depressed, it moves to the transport control state (step I32). That is, the robot controller 4 causes the work piece transfer robot R to carry the work piece according to the contents of the teaching. After that, it is determined whether at least one of the opening and closing doors has been opened according to the detection result of the detecting mechanism of the opening and closing doors la to Id (step 133), and if there is, it immediately moves to step 100 to enter the stop state. If no door is opened, it is determined whether all the temporary plugs 7a to 7d are connected to the connecting plugs 6a to 6d (step 13 ^. In this step 134, only all the temporary plugs 7a to 7d are judged. When it is not connected to the connection plugs 6a to 6d, the process moves to step 100 to stop the work piece conveying robot r. By doing so, the pendant teaching controller TP does not need to be dust-free as in the first embodiment. Cables are introduced outside the chamber 1, so that the cleanliness of the clean room 1 can be further improved. Next, a third embodiment will be described with reference to Fig. 6. In both the first and second embodiments, the suspension type is connected by a cable. The teaching controller τρ is connected to the pendant teaching controller connection plug 8, but in the third embodiment, the pendant teaching controller TP and the pendant teaching controller connection plug 8 are wirelessly connected. That is, the suspension type controller connection plug 8 of FIG. 6 and the suspension type teach-in controller TP have sending and receiving, because they send and receive each other.
本紙浪尺度適用中國國家標皁（CNS ) Μ規格（210 X ----,---^---批衣------ir------^ (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消资合作社印製 42S5 Ο Ο Α7 ___ Β7 五、發明説明（\七） 信部 TR1、TR2 ° 藉此，因不需在無塵室1內布置纜線即可進行示教， 能飛躍的提升操作性。又，因必須將具有送、收信部TR1 之懸吊式示教控制器連接插頭以手部動連接於連接插頭6a 〜6d之操作，能與第1實施形態同樣的確保安全性。 再者，送、收信部TR1之電源，係透過連接插頭6a〜 6d由機械手控制器供給。又，送、收信部TR2之電源，係 以內藏攜帶式電池實現。 又，爲了防止對無麈室1內工作件搬送機械手R之電 磁干擾，最好是不重複使用頻波帶，或採用頻譜擴散通信 方式較佳。 其次，參照圖7及圖8說明第4實施形態。第1〜第3 實施形態中，懸吊式示教控制器TP及與此相連接之懸吊 式示教控制器連接插頭8,在此半導體製造系統中係設置 一個，但在此實施形態中，則係將懸吊式示教控制器TP 分配於所有的連接插頭6a〜6d，將該數量的懸吊式示教控 制器TP分別連接於連接插頭6a〜6d之狀態。 亦即，圖7中，不使用暫置插頭，而代之以在所有的 連接插頭6a〜6d連接懸吊式示教控制器連接插頭8並在每 一個連接插頭設置懸吊式示教控制器TP。 此情形中，並無如第1及第3實施形態中連接懸吊式 示教控制器TP之首動操作，而係以強制要求壓下懸吊式 示教控制器TP上之選擇按鍵取代。然後，此一壓下選擇 按鍵之手部動操作，被通知至機械手控制器4，機械手控 本紙張適用中國國( CNS ) A4規格（210 X 291·?公釐） ^ 1-----------^------ΐτ~------W (請先閱讀背面之注意事項再填真本頁) 4 255 Ο Ο Α7 _____Β7 五、發明説明 制器4即依據此通知，進行與懸吊式示教控制器連接插頭 8之連接同樣的連接辨識。 圖8，係顯示以圖7之機械手控制器4進行搬送控制 狀態與示教處理狀態間之切換處理順序之流程圖。圖8中 ，首先，機械手控制器4判斷選擇按鍵是否已被壓下(步驟 200)，在此選擇按鏈被壓下前維持搬送控制狀態。若選擇 按鍵被壓下，則立刻使工作件搬送機Μ手R成爲停止狀態（ 步驟202)。更進一步，使工作件搬送機械手R移至示教處 理狀態(步驟204)。據此，即可藉懸吊式示教控制器ΤΡ進 行示教。 接著，.機械手控制器4判斷懸吊式示教控制器ΤΡ之 示教結束按鍵是否已被壓下(步驟206)，若示教結束按鍵並 未被壓下，即重複此判斷處理繼續示教處理狀態。另一方 面，若示教結束按鍵被壓下時，即開始計時器之計時(步驟 208)，判斷是否已經過既定之時間（步驟210)。在經過此既 定時間後才自示教處理狀態移至搬送控制狀態(步驟212)， 再移至步驟100，重複上述處理。 藉此，具有與第1〜第3實施形態同樣的作用效果， 同時因不需拔出暫置插頭等之機械性的操作，故障較少， 且只要進行壓下選擇按鍵之操作即可移至示教處理狀態， 能飛躍的提升操作性。 再者，第4實施形態中，係將壓下懸吊式示教控制器 ΤΡ之選擇按鍵作爲移至夾有停止狀態之示教處理狀態之條 件’但不限於此，例如於機械手控制器4上設置選擇複數 本紙张尺度適用中國國家標準（CNS ) Α4规格（2丨0Χ297公釐） (請先閲讀背面之注意事項再填寫本頁) .裝- 、1Τ 經濟部智慧財產局員工消资合作社印製 經濟部智慈財產局員工消贲合作社印製 4255 0 D . A7 ^· B7__ 五、發明説明（丨L，） 個懸吊式示教控制器TP中任一者之選擇按鍵，將壓下此 選擇按鍵作爲移至夾有停止狀態之示教處理狀態之條件亦 可。 [圖式之簡單說明] 圖1係顯示本發明第1實施形態之半導體裝置製造系 統構成槪P之圖。 圖2係以顯示於圖1之機械手控制器進行搬送控制狀 態與示教處理狀態間之切換處理順序之流程圖。 圖3係顯示連接插頭與暫置插頭或懸吊式示教控制器 連接插頭之連接機構的一例之圖。 圖4係顯示本發明第2實施形態之半導體裝置製造系 統之示教系統之主要部位構成之圖。 圖5係以顯示於圖4之機械手控制器進行搬送控制狀 態與示教處理狀態間之切換處理順序之流程圖。 圖6係顯示本發明第3實施形態之半導體裝置製造系 統之示教系統之主要部位構成之圖。 圖7係顯示本發明第4實施形態之半導體裝置製造系 統之示教系統之主要部位構成之圖.。 圖8係以顯示於圖7之機械手控制器進行搬送控制狀 態與示教處理狀態間之切換處理順序之流程圖。 圖9係顯示含有習知示教系統之半導體裝置製造系統 之構成槪要圖。 本紙張尺度適用中國國家榡芈（CNS ) A4规格（210X297公釐） L 裝 I H . 訂I 1線 (請先閲讀背而之注意事項再填寫本頁) 4 2 5 5： A7 B7 五.、發明説明（丨")） [符號說明] 經濟部智慧財產局員工消費合作社印製 1 無麈室 2a〜2d 處理加工裝置 3 1甲- 4 機械手控制器 5a 連接辨識部 5b 示教處理部 6a〜6d 連接插頭 7a〜7d 暫置插頭' 8 懸吊式示教控制器連接插頭 9a〜9d 開關門. 10 半導體裝置製造系統 R 工作件搬送機械手 H 手部 TR1、TR2 送、收信部 15a 選擇辨識部 iri-----裝-----丨訂--Ml--線 (請先間讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家操準（CNS ) A4規格（210X 297公釐）The scale of this paper is suitable for China National Standard Soap (CNS) M specifications (210 X ----, --- ^ --- batch clothes ------ ir ------ ^ (Please read the Please fill in this page again) Printed on 42S5 〇 〇 Α7 ___ Β7 by the Intellectual Property Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (\ VII) Ministry of Information TR1, TR2 ° As a result, it is not necessary to be in clean room 1. Teaching can be performed by arranging cables, which can greatly improve operability. In addition, it is necessary to manually connect the pendant teaching controller connection plug with the sending and receiving section TR1 to the connection plugs 6a to 6d. The operation can ensure the same safety as the first embodiment. In addition, the power of the sending and receiving unit TR1 is supplied by the robot controller through the connecting plugs 6a to 6d. The power of the sending and receiving unit TR2 is also provided. It is realized by the built-in portable battery. In addition, in order to prevent electromagnetic interference to the robot R in the workless chamber 1, it is better not to reuse the frequency band, or to use a spectrum diffusion communication method. Second, A fourth embodiment will be described with reference to Figs. 7 and 8. In the first to third embodiments, the pendant teaching controller TP and the This connected pendant teaching controller connection plug 8 is provided in this semiconductor manufacturing system, but in this embodiment, the pendant teaching controller TP is distributed to all the connection plugs 6a. ~ 6d, the number of pendant teaching controllers TP are connected to the connection plugs 6a to 6d. That is, in FIG. 7, a temporary plug is not used, and all the connection plugs 6a to 6d are replaced. 6d The pendant teaching controller is connected to the connection plug 8 and a pendant teaching controller TP is provided for each connection plug. In this case, the pendant teaching control is not connected as in the first and third embodiments. The first operation of the controller TP is replaced by the mandatory requirement to press the selection button on the pendant teaching controller TP. Then, the manual operation of this depression of the selection button is notified to the robot controller 4 , The paper controlled by the robot is applicable to China (CNS) A4 specification (210 X 291 ·? Mm) ^ 1 ----------- ^ ------ ΐτ ~ ----- -W (Please read the notes on the back before filling in this page) 4 255 Ο Ο Α7 _____ Β7 V. Inventory Controller 4 is based on this notice The connection identification is the same as the connection of the pendant teaching controller connection plug 8. Fig. 8 is a flowchart showing a switching process sequence between the transport control state and the teaching process state by the robot controller 4 of Fig. 7. In FIG. 8, first, the robot controller 4 judges whether the selection button has been depressed (step 200), and maintains the conveyance control state until the selection button is depressed. If the selection button is depressed, the work piece is immediately made The transfer machine M hand R is stopped (step 202). Furthermore, the work piece transfer robot R is moved to a teaching processing state (step 204). Based on this, teaching can be performed by hanging the teaching controller DP. Next, the robot controller 4 determines whether the teaching end button of the pendant teaching controller TP has been depressed (step 206). If the teaching end button is not depressed, the judgment processing is repeated to continue the teaching. Teach processing status. On the other hand, when the teaching end button is pressed, the timer starts (step 208), and it is determined whether a predetermined time has elapsed (step 210). After this predetermined time has elapsed, the teaching processing state is shifted to the conveyance control state (step 212), and then it is shifted to step 100 to repeat the above process. This has the same function and effect as those of the first to third embodiments. At the same time, there is no need for mechanical operations such as pulling out the temporary plug, so there are fewer failures, and only the operation of pressing the selection button can be moved to Teaching process status can greatly improve operability. In addition, in the fourth embodiment, the selection button of the pendant teaching controller TP is pressed as a condition for moving to the teaching processing state with the stopped state being 'but not limited to this, for example, in a robot controller Set the number of papers selected on 4 to apply the Chinese National Standard (CNS) A4 specification (2 丨 0 × 297 mm) (please read the precautions on the back before filling this page). -1, 1 Intellectual Property Bureau, Ministry of Economic Affairs, employee consumption Cooperative printed by the Intellectual Property Bureau of the Ministry of Economic Affairs and printed by the cooperative. 4255 0 D. A7 ^ · B7__ 5. Description of the invention (丨 L,) Select button of any of the pendant teaching controller TP, It is also possible to press this selection button as a condition to move to the teaching processing state with the stopped state. [Brief description of the drawings] Fig. 1 is a diagram showing a configuration 槪 P of a semiconductor device manufacturing system according to a first embodiment of the present invention. Fig. 2 is a flowchart of a switching process sequence between a transport control state and a teaching process state shown by the robot controller shown in Fig. 1. Fig. 3 is a diagram showing an example of a connection mechanism between a connection plug and a temporary plug or a connection of a suspension teaching controller. Fig. 4 is a diagram showing the configuration of main parts of a teaching system of a semiconductor device manufacturing system according to a second embodiment of the present invention. Fig. 5 is a flowchart of a switching process sequence between a transport control state and a teaching process state shown by the robot controller shown in Fig. 4. Fig. 6 is a diagram showing the configuration of main parts of a teaching system of a semiconductor device manufacturing system according to a third embodiment of the present invention. Fig. 7 is a diagram showing the configuration of main parts of a teaching system of a semiconductor device manufacturing system according to a fourth embodiment of the present invention. Fig. 8 is a flowchart of a switching process sequence between the transport control state and the teaching process state shown by the robot controller shown in Fig. 7. Fig. 9 is a schematic diagram showing a configuration of a semiconductor device manufacturing system including a conventional teaching system. The size of this paper is applicable to China National Standard (CNS) A4 (210X297mm) L for IH. Order I 1 line (please read the precautions on the back before filling this page) 4 2 5 5: A7 B7 V., Description of the invention (丨 ") [Symbols] Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Cooperatives, 1 Non-room 2a ~ 2d Processing equipment 3 1A-4 Robot controller 5a Connection identification unit 5b Teaching processing unit 6a ~ 6d Connection plugs 7a ~ 7d Temporary plugs' 8 Suspended teaching controller connection plugs 9a ~ 9d Open and close the door. 10 Semiconductor device manufacturing system R Workpiece transfer robot H Hand TR1, TR2 Sending and receiving department 15a Select the identification department iri ----- install ------- Ml--line (please read the precautions on the back before filling this page) This paper size is applicable to China National Standards (CNS) A4 Specifications (210X 297 mm)