KR20010052839A - System for teaching robot for work transfer - Google Patents

Abstract

The present invention improves the operability of the teaching process for the workpiece transport robot and ensures safety. The workpiece conveyance robot R conveyed and controlled by the robot controller 4 performs a workpiece conveyance operation | movement in the working area in the clean room 1. Outside the clean room 1, connection plugs 6a to 6d are connected to the robot controller 4 in a wired manner. When teaching to the workpiece conveyance robot R, the dummy plugs 7a-7d connected to one of the connection plugs 6a-6d closest to the workpiece conveyance robot R are removed, and the teaching pendant TP is removed. The teaching pendant connecting plug 8 to be connected is connected to the connecting plug. When it recognizes that this teaching pendant TP is connected and the dummy plug is connected to another connection plug, the connection recognition part 5a stops the workpiece conveyance robot R, and transfers from a conveyance control state to a teaching process state.

Description

Teaching system of workpiece transfer robot {SYSTEM FOR TEACHING ROBOT FOR WORK TRANSFER}

BACKGROUND ART In a conventional work conveying robot used in a semiconductor device manufacturing system, a robot controller controls a work conveyance such as a semiconductor wafer in accordance with the teachings.

For example, as shown in FIG. 9, the workpiece transport robot 25 is installed in the clean room 24 and controlled by the robot controller 20 through the cable 23. The workpiece transfer robot 25 adopts a frog-leg type robot, for example, moves a hand 26 as an end effector according to the rotation of the arm, and the workpiece such as a semiconductor wafer on the hand. It carries and carries it. And the conveyance operation | movement of this workpiece conveyance robot 25 is previously taught using the teaching means, such as a keyboard, and the teaching process part 21, and it performs a predetermined conveyance operation according to this teaching content.

However, in recent years, workpieces, such as a semiconductor wafer to be handled, have become large, and accordingly, the semiconductor processing apparatus which performs various semiconductor processes has also become large, and the movable area of the workpiece conveyance robot 25 is also expanded.

Therefore, when teaching a predetermined conveyance operation to a workpiece conveyance robot, the teaching means, such as a keyboard, is directly connected to the robot controller 20, and when the workpiece conveyance robot is separated from the robot controller 20, this robot controller ( From the position of 20), there is a problem in that the workpiece transfer robot cannot be seen, so that the workpiece transfer robot cannot be taught reliably.

Here, when teaching to a workpiece conveyance robot using a teaching pendant, it can carry out by connecting between this teaching pendant and a robot controller with a cable.

However, the movable area of the above-mentioned workpiece conveyance robot 25 is 10m in all directions, for example, and it is very cumbersome to extend and install a pair of cables between these 10m, and remarkably degrade operability.

In addition, since the workpiece conveyance robot is disposed in the clean room 24 as described above in terms of handling semiconductor wafers and the like, the pulling of this cable and moving it near the workpiece conveyance robot generates dust in the clean room, which causes the clean. It will reduce the cleanliness of the room.

In addition, since the movable area 27 of the workpiece transfer robot 25 is in the clean room 24, the size of the clean room 24 is as large as possible in order to maintain the cleanliness of the clean room 24 properly. It is designed to be approximately equal in size. Therefore, when a person enters the clean room 24 and teaches the workpiece transfer robot 25 by the teaching means, when the workpiece transfer robot 25 is not in the teaching state and is in the transfer operation state, an area or gap that a person will avoid This is very dangerous.

Therefore, it is also necessary to ensure the safety by dividing the teaching state and the conveying operation state with respect to the workpiece conveyance robot 25 reliably and appropriately.

The present invention is assembled to a semiconductor device (e.g., semiconductor wafer, liquid crystal glass substrate, etc.) manufacturing system, and conveys the workpiece (work), such as semiconductor wafer, glass substrate to a predetermined semiconductor processing device, and at the same time transport the workpiece It relates to a teaching system of a workpiece transport robot that can teach effectively and safely to a robot.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 shows a schematic configuration of a semiconductor device manufacturing system as a first embodiment of the present invention.

FIG. 2 is a flowchart showing a procedure of switching between a transfer control state and a teaching process state by the robot controller shown in FIG. 1; FIG.

3 shows an example of a connection mechanism between a connection plug, a dummy plug or a teaching pendant connection plug.

Fig. 4 is a diagram showing the configuration of main parts of the teaching system of the semiconductor device manufacturing system which is the second embodiment of the present invention.

FIG. 5 is a flowchart showing a procedure of switching between a transfer control state and a teaching process state by the robot controller shown in FIG. 4; FIG.

Fig. 6 is a diagram showing the configuration of main parts of the teaching system of the semiconductor device manufacturing system as the third embodiment of the present invention.

Fig. 7 is a diagram showing the configuration of main parts of the teaching system of the semiconductor device manufacturing system as the fourth embodiment of the present invention.

FIG. 8 is a flowchart showing a procedure of switching between a transfer control state and a teaching process state by the robot controller shown in FIG. 7; FIG.

9 shows a schematic configuration of a semiconductor device manufacturing system including a conventional teaching system.

Accordingly, an object of the present invention is to provide a teaching system for a workpiece transfer robot that can solve such problems and improve the operability of the teaching process for the workpiece transfer robot and ensure safety.

According to a first aspect of the present invention, there is provided a workpiece conveyance robot for conveying a predetermined workpiece in a work area, control means for controlling a predetermined workpiece conveyance performed by the workpiece conveyance robot based on the teachings, and a workpiece conveyance separated from the control means. Teaching means for teaching a predetermined workpiece conveyance operation by a robot, and connecting means for connecting said teaching means to said control means via a connection point provided around said working area.

In the first aspect of the invention, the connection point for connecting the teaching means can be arranged near the workpiece transport robot, so that the teaching operation becomes easy, and it is necessary to pull a long cable for connecting the teaching means and the control means. Since the workpiece conveyance robot performs a conveyance operation in a clean room, for example, it has the effect of scattering dust or dust adhering to a cable by dragging off a cable, and reducing the cleanliness in a clean room.

According to a second aspect of the invention, in the first aspect of the invention, the connection point is provided outside the work area.

According to the second aspect of the invention, an operation for connecting the teaching means to the connection point is forced every time the teaching by the teaching means is performed, and accordingly, it has the effect of ensuring the safety when teaching.

The third invention is characterized in that a plurality of connection points are provided in the first or second invention.

In the third aspect of the present invention, since a plurality of connection points are provided, the wiring between the teaching means and the connection point can be shortened and the teaching operation becomes easy.

The fourth invention further comprises recognizing means for recognizing whether the teaching means is connected to the connection point of the connecting means in the first invention, and wherein the control means recognizes that the teaching means is connected, Switching from the conveyance control of the said workpiece conveyance robot to the teaching process by the said teaching means is characterized by the above-mentioned.

In the fourth aspect of the invention, the transfer control state and the teaching process state are appropriately switched in accordance with the connection state, and therefore, there is an effect that the safety at the time of teaching can be securely ensured.

The fifth invention further includes a dummy plug indicating that the connection point of the connection means is not used in the third invention, and a dummy plug recognition means for recognizing whether or not the dummy plug is connected to the connection point of the connection means. And the control means controls the conveyance of the workpiece transfer robot when the dummy plug recognition means recognizes that the dummy plug is connected at all connection points.

In the fifth aspect of the present invention, since all dummy plugs are connected to control the conveyance of the workpiece conveyance robot for the first time, the teaching processing state and the conveyance control process can be reliably separated to ensure safety.

The sixth invention is characterized in that in the fifth invention, the control means prohibits the conveying operation of the workpiece transfer robot when the dummy plug recognition means recognizes that the dummy plug is not connected to at least one connection point.

In the sixth invention, contrary to the fifth invention, when the dummy plug is not connected to one or more connection points, the conveying operation is not performed. Therefore, as in the fifth invention, the teaching processing state and the conveyance control process are reliably separated to ensure safety. It can be secured.

A seventh invention provides a workpiece conveyance robot for conveying a predetermined workpiece in a work area, control means for controlling a predetermined workpiece conveyance performed by the workpiece conveyance robot based on the teachings, and a workpiece conveyance separated from the control means. And a plurality of teaching means for teaching a predetermined workpiece conveyance operation by a robot, and connecting means for connecting the plurality of teaching means to the control means, respectively, through a plurality of connection points provided around the work area, and the control means. Is selected from the plurality of teaching means to switch to the teaching process by the selected teaching means.

In the seventh aspect of the invention, since the teaching means can be selected by the control means instead of the removal of the dummy plug, there is an effect that the transition operation to the teaching process state is greatly improved.

A eighth invention provides a workpiece conveyance robot for conveying a predetermined workpiece in a work area, control means for controlling a predetermined workpiece conveyance performed by the workpiece conveyance robot based on the teachings, and a workpiece conveyance separated from the control means. Controlling the plurality of teaching means through a plurality of teaching means having a selection button for teaching a predetermined workpiece conveyance operation by a robot and instructing selection of the teaching means, and a plurality of connection points provided around the work area, respectively. A connecting means connected to the means, wherein the control means switches from the transfer control of the workpiece transfer robot to the teaching process by the teaching means having the selection button when the selection button of the teaching means is selected. .

According to the eighth aspect of the present invention, the operation can be shifted to the teaching processing state only by pressing only the selection button instead of the removal of the dummy plug. Thus, the operability at the transition to the teaching processing state is greatly improved.

EMBODIMENT OF THE INVENTION Hereinafter, the Example of this invention is described with reference to drawings.

FIG. 1 is a diagram showing a schematic configuration of a semiconductor device manufacturing system 10 as a first embodiment of the present invention. In FIG. 1, the semiconductor device manufacturing system 10 has a clean room 1 and four processing apparatuses 2a to 2d connected to the clean room 1 through gates 9a to 9d. Each of the processing apparatuses 2a to 2d performs a predetermined processing, for example, heat treatment, on a workpiece such as a semiconductor wafer, and performs processing by each processing apparatus 2a to 2d. As a result, a series of processing is performed on the workpiece.

This workpiece is arranged in the cassette 3 connected to the clean room 1 as the processing object in the same manner as the processing apparatuses 2a to 2d, and the workpiece transfer robot R which operates in the clean room 1 is operated. Is withdrawn. The workpiece transfer robot R is realized by, for example, a program leg robot as shown in FIG. 1. As the name suggests, a frog leg-type robot carries a workpiece, such as a frog leg, whose arm is stretched and mounted on the hand H as an end effector mounted at the tip of the arm. Stretching of the arm is achieved by rotating the axes of the arms in different directions, and the hand H can be rotated around the axis by rotating the axes of each arm in the same direction. Moreover, this program leg type robot can move substantially to the front surface of each processing apparatus 2a-2d and the cassette 3 by moving on the predetermined | prescribed track | orbit Ln extended in the longitudinal direction of the clean room 1. .

In the case of performing a predetermined processing on the work by controlling the work conveying robot R, the work conveying robot R first takes out the unprocessed work in the cassette 3. This withdrawal is performed by moving the cassette up and down, or by moving the hand H up and down, and mounting the workpiece transfer robot R on the hand H. Thereafter, the workpiece on the hand H is conveyed to the front surface of the first processing apparatus, for example, the processing apparatus 2a, and is sent into the processing apparatus 2a through the gate 9a. And the workpiece processed by the processing apparatus 2a is again taken out by the workpiece conveyance robot R, is conveyed to the front surface of the next processing apparatus, for example, the processing apparatus 2b, and the gate ( It is sent to the processing apparatus 2b via 9b), and predetermined processing is performed. In the same manner below, processing for each processing apparatus is sequentially performed, and a series of processing is completed. For example, when the final processing is performed by the processing apparatus 2c, the workpiece conveyance robot R pulls out the processed workpiece through the gate 9c, transfers it to the front surface of the cassette 3, and then returns the cassette ( 3) The workpiece | work which the processing process completed is stored in it. The workpiece conveyance robot R performs an effective conveyance process so that a process may be performed with respect to each of the processing apparatuses 2a to 2d at the same time with respect to a plurality of workpieces.

The conveyance of this workpiece conveyance robot R is controlled by the robot controller 4 arrange | positioned outside the clean room 1.

On the other hand, four connection plugs 6a-6d are provided in the longitudinal side wall of the clean room 1. These connection plugs 6a-6d are electrically connected to the robot controller 4, respectively. When the dummy plugs 7a to 7d are connected to all the connection plugs 6a to 6d, the robot controller 4 recognizes that it is not a teaching state and controls the conveyance. The robot controller 4 is connected to a teaching pendant connecting plug 8 for connecting the teaching pendant TP to any one of the connecting plugs 6a to 6d, and a dummy plug (all to the other connecting plugs 6a to 6d). When 7a-7d) are connected, it recognizes that it is a teaching state. This recognition determination is made by the connection recognition part 5a of the robot controller 4. The robot controller 4 switches between a conveyance control state and a teaching process state by the recognition of this connection recognition part 5a.

The clean room 1 has four opening / closing doors 1a to 1d and passes through the opening and closing doors 1a to 1d to teach the teaching pendant TP into the clean room 1. For example, when teaching with respect to the workpiece conveyance robot R near the processing apparatus 2b in FIG. 1, the dummy plug 7b is isolate | separated from the connection plug 6b located closest, and a teaching pendant connection plug ( 8) is connected to the connection plug 6b, the teaching pendant TP is brought into the clean room 1 through the opening / closing door 1b, and is taught in the vicinity of the workpiece conveyance robot R. FIG. The teaching processing unit 5b performs a teaching process such as storing contents instructed by the teaching pendant TP.

Next, with reference to the flowchart of FIG. 2, the switching process of the conveyance control state and the teaching process state which the robot controller 4 performs based on the recognition result of the connection recognition part 5a is demonstrated.

In FIG. 2, first, the robot controller 4 puts the workpiece conveyance robot R into a stop state (step 100). Then, it is judged whether all the dummy plugs 7a-7d are connected to the connection plugs 6a-6d from the recognition result of the connection recognition part 5a (step 102).

When all of the dummy plugs 7a to 7d are not connected, the robot controller 4 again connects whether the teaching pendant TP is connected to one connection plug and whether the dummy plug is not connected to all of the other connection plugs. It judges based on the recognition result of the recognition part 5a (step 104). If the condition of step 104 is not satisfied, the process proceeds to step 102 to determine whether all of the dummy plugs 7a to 7d are connected. On the other hand, when the condition of Step 104 is satisfied, the process shifts to the teaching processing state (Step 106). Accordingly, teaching by the teaching pendant TP is possible.

Thereafter, the robot controller 4 determines whether the teaching end button of the teaching pendant TP is pressed (step 108), and when the teaching end button is pressed, starts the counting of the timer (step 110), and determines the predetermined value. It is determined whether time has elapsed (step 112). When the predetermined time has elapsed, the process proceeds to step 100 for the first time, and the workpiece transport robot R is stopped and the above-described processing is repeated. On the other hand, if the teaching end button is not pressed in step 108, it is determined whether the teaching pendant TP is connected to one connection plug and the dummy plug is connected to all of the other connection plugs (step 120). If the result of the determination is satisfactory, the process proceeds to step 108. If the result of the determination does not satisfy this condition, the process proceeds to step 100 and the above-described processing is repeated. Thus, it is for ensuring safety that pushing the teaching end button is set to the transition condition to a stop state. In addition, setting the elapsed time of the predetermined time to the stop condition is that the person who has taught may still be in the clean room 1, and it takes at least a predetermined time until the person leaves the clean room 1. Because it becomes. Such double and triple checks ensure safety. In particular, since the clearance between the space of the clean room 1 and the work area of the workpiece conveyance robot R is small, there is a possibility of causing harm to a person in the clean room 1 by the conveyance control of the workpiece conveyance robot R. FIG. Because. Further, an apparatus for recognizing the opening and closing of each of the opening and closing doors 1a to 1d may be provided, and the closing of the opening and closing doors may be further added as the transition condition to the stop state.

On the other hand, when it is determined in step 102 that all of the dummy plugs 7a to 7d are connected to the connection plugs 6a to 6d, it is determined whether or not the transfer control button on the robot controller 4 is pressed again (step 130). . If the conveyance control button is not pressed, the process proceeds to step 102, and the above-described processing is repeated, and if the conveyance control button is pressed, the process proceeds to the conveyance control state (step 132). That is, the robot controller 4 causes the workpiece conveyance robot R to convey the workpiece in accordance with the teachings. After that, it is determined whether all of the dummy plugs 7a to 7d are connected to the connection plugs 6a to 6d (step 134), and all of the dummy plugs 7a to 7d are connected to the connection plugs 6a to 6d. Only when it is judged that it is not done, it transfers to step 100 and makes the workpiece conveyance robot R transition to a stop state.

Next, with reference to FIG. 3, the connection mechanism of the connection plug 6a-6d and the dummy plugs 7a-7d, and the connection mechanism of the connection plug 6a-6d and the teaching pendant TP are demonstrated.

FIG. 3A is a diagram showing a connection state between the connection plug 6a and the dummy plug 7a. The dummy plug 7a shown in FIG. 3A has a wiring for short-circuit connecting the terminal T2 and the terminal Tn. When the dummy plug 7a is connected, the connection recognizing unit 5a recognizes the connection between the terminal T2 and the terminal Tn, and thereby recognizes that the dummy plug 7a is connected to the connection plug 6a. .

Fig. 3B is a diagram showing a connection state between the connection plug 6A and the teaching pendant TP. The teaching pendant connection plug 8 shown in FIG. 3B has a wiring for connecting at least a short circuit between the terminal T1 and the terminal Tn. When the teaching pendant connecting plug 8 is connected, the connection recognizing unit 5a recognizes the connection between the terminal T1 and the terminal Tn and accordingly the teaching pendant connecting plug 8 is connected to the connecting plug 6a. Recognize that the teaching pendant TP is connected. The teaching pendant connection plug 8 is connected to a diagram for transmitting the information indicated by the teaching pendant TP to the robot controller 4 side or for receiving information from the robot controller 4 side.

Various forms are considered about the mechanism for making such connection recognition. For example, a pin is simply provided at a predetermined position without providing short-circuit wiring at the dummy plugs 7a to 7d or the teaching pendant connection plug 8, and the connection plugs 6a to 6d are positioned at positions corresponding to the pins. A concave portion is formed on the side, and connection recognition can also be performed by recognizing a connection by inserting a pin into the concave portion. Alternatively, the connection recognizing section 5a may be provided with a connection detecting section on the connection plugs 6a to 6d instead of the connection recognizing, and the detection result may be transmitted to the robot controller 4. It is also possible to detect the contact state optically instead of detecting the electrical and mechanical contact state.

According to this first embodiment, since the teaching can be performed near the workpiece transport robot R, the operability at the time of teaching can be greatly improved. In addition, since the cable is pulled from the connection point closest to the workpiece transport robot R, the long cable is not dragged in the clean room 1, so that dust, dust, etc. attached to the sheath of the cable is not scattered in the clean room 1. Therefore, the cleanliness can be properly maintained. When teaching in the clean room 1, the manual operation of connecting the teaching pendant connection plug 8 to one of the connection plugs 6a to 6d must be forced to stop the workpiece transport robot R. Since this makes it possible to prevent accidents when teaching. In addition, since the transfer control of the workpiece transfer robot is allowed only when all the dummy plugs are connected, safety can be further improved.

Next, a second embodiment will be described with reference to FIGS. 4 and 5. In the first embodiment, the connection plug is provided outside the clean room 1, and the teaching pendant connection plug 8 is connected to any one of the connection plugs. In the second embodiment, the connection plug is connected inside the clean room 1; Install the plug.

That is, as shown in FIG. 4, the mechanism which connects the dummy plug 7a-7d or the teaching pendant connection plug 8 to the inside of the clean room 1 is provided. In this case, the teaching pendant connecting plug 8 is connected to the teaching pendant connecting plug 8 in the clean room 1 without forcing a manual operation of connecting the teaching pendant connecting plug 8 to the connecting plugs 6a to 6d as in the first embodiment. Since it is connected to (6a-6d), the period in which safety cannot be reliably ensured arises. For this reason, the detection means which recognizes opening and closing is provided in each opening / closing door 1a-1d, and this detection means and the robot controller 4 are connected, and the robot controller 4 opens and closes each opening / closing door 1a-1d. Be aware.

The switching process between the conveyance control state and the teaching process state of this second embodiment will be described with reference to the flowchart of FIG. 5.

In FIG. 5, first, the robot controller 4 puts the workpiece conveyance robot R into a stopped state (step 100). Then, it is judged whether all the dummy plugs 7a-7d are connected to the connection plugs 6a-6d from the recognition result of the connection recognition part 5a (step 102).

When all of the dummy plugs 7a to 7d are not connected, the same processing as in the processing from step 104 to 120 in Fig. 2 is performed, the process shifts to the teaching processing state, and the state shifts to the stop state again.

On the other hand, when it is determined in step 102 that all of the dummy plugs 7a to 7d are connected to the connection plugs 6a to 6d, it is determined whether or not the transfer control button on the robot controller 4 is pressed again (step 130). . If the conveyance control button is not pressed, the process proceeds to step 102, and the above-described processing is repeated, and if the conveyance control button is pressed, the process proceeds to the conveyance control state (step 132). That is, the robot controller 4 causes the workpiece conveyance robot R to convey the workpiece in accordance with the teachings. Thereafter, it is determined whether the at least one open / close door is opened on the basis of the detection result from the detection means of the open / close doors 1a to 1d (step 133). do. When the opening / closing door is not open, it is again determined whether all of the dummy plugs 7a to 7d are connected to the connection plugs 6a to 6d (step 134). In step 134, only when it is judged that all of the dummy plugs 7a to 7d are not connected to the connection plugs 6a to 6d, the routine advances to step 100 to set the workpiece transfer robot R to a stopped state.

Accordingly, since the teaching pendant TP does not need to introduce a cable from the outside of the clean room 1 as in the first embodiment, the cleanliness of the clean room 1 can be further improved.

Next, a third embodiment will be described with reference to FIG. In both the first and second embodiments, the teaching pendant TP and the teaching pendant connecting plug 8 are connected by cables. In the third embodiment, the teaching pendant TP and the teaching pendant connecting plug 8 are wirelessly connected. .

That is, in FIG. 6, the teaching pendant connection plug 8 and the teaching pendant TP have transmission / reception units TR1 and TR2 to transmit and receive each other.

This makes it possible to teach without causing the cable to extend in the clean room 1, so that the operability can be improved significantly. In addition, since the operation of manually connecting the teaching pendant connection plug having the transmission / reception section TR1 to the connection plugs 6a to 6d is required, safety can be ensured as in the first embodiment.

The power supply of the transceiver TR1 is supplied from the robot controller via the connection plugs 6a to 6d. The power supply of the transmission / reception unit TR2 can be realized by incorporating a portable battery.

Moreover, in order to prevent electromagnetic interference with the workpiece conveyance robot R in the clean room 1, it is preferable not to overlap a use frequency band, or to adopt the spread spectrum communication system.

Next, a fourth embodiment will be described with reference to FIGS. 7 and 8. In the first to third embodiments, the teaching pendant TP and one teaching pendant connecting plug 8 for connecting the same are provided in this semiconductor device manufacturing system, but the teaching pendant TP is connected to the connecting plugs 6a to 6d. ) And all the teaching pendants TP corresponding to the number are connected to the connection plugs 6a to 6d, respectively.

That is, in Fig. 7, the dummy pendant is not used and the teaching pendant connecting plug 8 is connected to all the connecting plugs 6a to 6d instead of the dummy plug so that the teaching pendant TP is provided for each connecting plug.

In this case, the manual operation of connecting the teaching pendant TP as in the first or third embodiment is eliminated, but the operation of pressing the selection button on the teaching pendant TP is forced instead of this operation. The manual operation of pressing this selection button is notified to the robot controller 4, and by this notification, the robot controller 4 performs connection recognition in the same manner as the connection of the teaching pendant connection plug 8.

FIG. 8 is a flowchart showing a procedure of switching between the transfer control state and the teaching process state by the robot controller 4 of FIG. 7. In Fig. 8, the robot controller 4 first determines whether the selection button is pressed (step 200), and maintains the transport control state until the selection button is pressed. When the selection button is pressed, the workpiece transport robot R is immediately stopped (step 202). In addition, the workpiece transfer robot R is shifted to the teaching processing state (step 204). Accordingly, teaching by the teaching pendant TP is possible.

Thereafter, the robot controller 4 determines whether the teaching end button of the teaching pendant TP is pressed (step 206). If the teaching end button is not pressed, the robot controller 4 repeats this determination process and continues the teaching processing state. do. On the other hand, when the teaching end button is pressed, the timer count is started (step 208), and it is determined whether a predetermined time has elapsed (step 210). In the step after this predetermined time has elapsed, the process shifts from the teaching processing state to the transport control state for the first time (step 212), and the process proceeds to step 100 to repeat the above-described processing.

As a result, the same operation and effect as those of the first to third embodiments can be achieved, and since there is no need to perform mechanical operations such as pulling out the dummy plug, the trouble is reduced and the process can be transferred to the teaching processing state by only pressing the selection button. The operability can be greatly improved.

In the fourth embodiment, the pressing of the selection button of the teaching pendant TP is set as a transition condition to the teaching processing state through the stop state, but the present invention is not limited thereto. For example, a plurality of teaching pendants are provided on the robot controller 4. It is also possible to provide a selection button for selecting any one of (TP) and to press the selection button as a transition condition to the teaching processing state through the stop state.

Claims (8)

A workpiece conveyance robot for conveying a predetermined workpiece in the work area; Control means for controlling a predetermined workpiece conveyance performed by the workpiece conveyance robot based on the taught contents; Teaching means separated from the control means for teaching a predetermined workpiece conveyance operation by the workpiece conveyance robot; Connecting means for connecting the teaching means to the control means through a connection point provided around the work area; Teaching system of the workpiece transfer robot, characterized in that it comprises a. The method of claim 1, And the connection point is provided outside the working area. The method according to claim 1 or 2, Teaching system of a workpiece transfer robot, characterized in that the plurality of connection points. The method of claim 1, Further comprising recognition means for recognizing whether the teaching means is connected to a connection point of the connection means, And the control means switches from the transfer control of the workpiece transfer robot to the teaching process by the teaching means when the recognition means recognizes that the teaching means is connected. The method of claim 3, A dummy plug indicating that the connection point of the connecting means is not used; Dummy plug recognition means for recognizing whether or not the dummy plug is connected to the connection point of the connection means Additionally provided, And the control means controls the conveyance of the workpiece conveyance robot when the dummy plug recognition means recognizes that the dummy plug is connected at all connection points. The method of claim 5, And the control means prohibits the transfer operation of the workpiece transfer robot when the dummy plug recognition means recognizes that the dummy plug is not connected to at least one connection point. A workpiece conveyance robot for conveying a predetermined workpiece in the work area; Control means for controlling a predetermined workpiece conveyance performed by the workpiece conveyance robot based on the taught contents; A plurality of teaching means separated from the control means for teaching a predetermined workpiece conveyance operation by the workpiece conveyance robot; Connecting means for connecting the plurality of teaching means to the control means, respectively, through a plurality of connection points provided around the work area; And And said control means selects one of said plurality of teaching means and switches to teaching processing by said selected teaching means. A workpiece conveyance robot for conveying a predetermined workpiece in the work area; Control means for controlling a predetermined workpiece conveyance performed by the workpiece conveyance robot based on the taught contents; A plurality of teaching means separated from said control means and having a selection button for teaching a predetermined workpiece conveyance operation by said workpiece conveyance robot and for instructing selection of said teaching means; Connecting means for connecting the plurality of teaching means to the control means, respectively, through a plurality of connection points provided around the work area; And And the control means switches from the transfer control of the workpiece transfer robot to the teaching process by the teaching means having the selection button when the selection button of the teaching means is selected.