WO1999059764A1 - An apparatus for determining the position of the focal point in a laser machining system - Google Patents

An apparatus for determining the position of the focal point in a laser machining system Download PDF

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Publication number
WO1999059764A1
WO1999059764A1 PCT/SE1999/000756 SE9900756W WO9959764A1 WO 1999059764 A1 WO1999059764 A1 WO 1999059764A1 SE 9900756 W SE9900756 W SE 9900756W WO 9959764 A1 WO9959764 A1 WO 9959764A1
Authority
WO
WIPO (PCT)
Prior art keywords
mirror
radiation
laser
detector
focal point
Prior art date
Application number
PCT/SE1999/000756
Other languages
English (en)
French (fr)
Inventor
Sven-Olov Roos
Per-Arne Torstensson
Original Assignee
Permanova Lasersystem Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Permanova Lasersystem Ab filed Critical Permanova Lasersystem Ab
Priority to US09/674,805 priority Critical patent/US6528761B1/en
Priority to EP99952082A priority patent/EP1091824A1/en
Priority to AU43053/99A priority patent/AU4305399A/en
Priority to JP2000549417A priority patent/JP2002515343A/ja
Publication of WO1999059764A1 publication Critical patent/WO1999059764A1/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light

Definitions

  • the present invention relates to an apparatus for determining the position of the focal point in a laser machining system in which a laser beam is transmitted via an optical fibre to a workpiece to be machined by the laser beam.
  • laser machining systems are frequently used for cutting, welding and marking operations in the manufacturing industry- Thanks to the recent development of optical fibre technique such laser machining stations are designed with flexible transmission of the laser beam to the work- piece by means of optical fibres.
  • a machining head is mounted in the arm of an articulated robot for manipulating the laser beam relative to the workpiece.
  • the z coordinate position of the focal point is often dis- placed in high power machining systems if the optical system is not the best. Such displacement has usually not been considered in prior adjustment systems, due to the fact that the adjustments in such cases must be carried out at full laser power conditions.
  • figure 1 illustrates an optical fibre machining head
  • figure 2 illustrates the shape of an focused laser beam
  • figure 3 illustrates a detector for determining the waist of the laser beam in x, y and z coordinates
  • figure 4 illustrates three different cases (A, B and C) for the image of the end surface of the fibre on a mirror
  • figure 5A is a first example of the detection of back-reflected radiation according to the invention.
  • figure 5B is another example of the detection of back-reflected radiation according to the invention.
  • figure 6A illustrates an embodiment with a so-called beam dump for determining the position of the focal point at full laser power condition
  • figure 6B is another example with a direct liquid cooling for determining the position of the focal point at full laser power condition.
  • Figure 1 illustrates schematically an optical fibre machining head. A laser beam is transmitted from a laser source, not illustrated here, via an optical fibre to the workpiece to be machined. The end surface 1 of the optical fibre, i e the end surface of the fibre faced to the work- piece, is imaged on the workpiece 3 by means of optics 2.
  • the shape of the focused laser beam is illustrated in figure 2.
  • the beam converges to a minimal sectional area and then diverges with the same angle.
  • the object of the invention is to determine this waist 4 in the z coordinate as well as in the x and y cordinates.
  • Figure 3 illustrates a detector for determining the x, y and z coordinates.
  • the main part is a position sensitive detector plate 5 covered by a mirror 6 and possibly a damping filter 7 therebetween.
  • the mirror has a specific transmission for the wave-length in question.
  • the x and y coordinates are then determined by means of the position sensitive detector plate 5, which for instance could be of the type lateral photo diode or a CCD-array.
  • a damping filter 7 between the mirror 6 and the detector plate 5.
  • the z coordinate (i e perpendicular to the plane of the detector plate) can be determined by adjusting either the detector or the focusing optics along the z axis and then take into account that part of the radiation which is reflected back through the fibre to the laser.
  • Figure 4A illustrates a case in which the image of the end surface of the fibre is located below the surface of the mirror. The back-reflected image is then located behind (above in the figure) the end position of the fibre, and there is only a small part of the reflected laser radiation which is transmitted back through the fibre.
  • Figure 4C illustrates a corresponding situation in which the image of the end surface of the optical fibre is located above the surface of the mirror. The back-reflected image is then located iri front of (below in the figure) the end surface of the fibre and, again, there is only a small part of the reflected radiation that is transmitted back through the fibre.
  • Figure 4B illustrates a case in which the image of the end surface of the optical fibre is located on the surface of the mirror.
  • the back-reflected image will be located on the end surface of the optical fibre and substantially all of the back-re- fleeted radiation (beam power) will then also be transmitted back through the fibre.
  • the maximum of the back-reflected radiation i e the radiation that emerges from the end surface of the optical fibre on the laser side, the z coordinate position of the focus point could be determined.
  • the detection itself of the back-reflected radiation can be carried out in different ways, for instance:
  • FIG. 5A The principle is illustrated in figure 5A.
  • An angular, anti-reflex coated plate 10 is arranged in the beam path between the laser 8 and the outgoing fibre 9. Back-reflected radiation is detected through the residual reflection on the plate by means of a detector 11.
  • damping unit 12 in the form of one or more partial transmissive mirror plates are arranged in the beam path between the laser 8 and the outgoing fibre 9.
  • the damping unit 12 is angulated as in figure 5A and the back-reflected radiation will be reflected by the damping unit 12 and detected by detector 11. Detection of back-reflected radiation, alternative 3:
  • the principle is illustrated in figure 5C.
  • the laser beam is deviated by means of a mirror 13 towards the optical fibre 9.
  • the mirror has a small amount of optical leakage which means that back-reflected radiation can be detected behind the mirror by means of a detector 11.
  • the detector 11 which detects the residual radiation can be of the photo diode type or a thermal sensor. Such detectors are known per se and will not be described in any detail here.
  • a detecting mirror 16 When determining the z coordinate position of the focal point for a laser operating at full power it is preferred to use a detecting mirror 16 having a low reflection only.
  • the reflecting surface of the mirror must withstand high power densities, which means that the type of material is critical. In case of Nd-YAG laser radiation, uncoated quartz is recommended as it has a reflection of 3,5 % only. If also the back side of the mirror is cooled by means of a suitable liquid, the reflection on the rear surface will not disturb the measuring operation.
  • a so-called beam dump 14 is arranged below the measuring mirror
  • an alternative embodiment with a direct liquid coolant 15 is illustrated.

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
PCT/SE1999/000756 1998-05-07 1999-05-05 An apparatus for determining the position of the focal point in a laser machining system WO1999059764A1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US09/674,805 US6528761B1 (en) 1998-05-07 1999-05-05 Apparatus for determining the position of the focal point in a laser machining system
EP99952082A EP1091824A1 (en) 1998-05-07 1999-05-05 An apparatus for determining the position of the focal point in a laser machining system
AU43053/99A AU4305399A (en) 1998-05-07 1999-05-05 An apparatus for determining the position of the focal point in a laser machining system
JP2000549417A JP2002515343A (ja) 1998-05-07 1999-05-05 レーザー機械加工システムにおける焦点の位置を決定するための装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9801590A SE9801590L (sv) 1998-05-07 1998-05-07 Anordning för att bestämma fokalpunktens läge i ett laserbearbetningssystem
SE9801590-2 1998-05-07

Publications (1)

Publication Number Publication Date
WO1999059764A1 true WO1999059764A1 (en) 1999-11-25

Family

ID=20411212

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/SE1999/000756 WO1999059764A1 (en) 1998-05-07 1999-05-05 An apparatus for determining the position of the focal point in a laser machining system

Country Status (6)

Country Link
US (1) US6528761B1 ( )
EP (1) EP1091824A1 ( )
JP (1) JP2002515343A ( )
AU (1) AU4305399A ( )
SE (1) SE9801590L ( )
WO (1) WO1999059764A1 ( )

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2458304A (en) * 2008-03-13 2009-09-16 Gsi Group Ltd Process Monitoring
RU2466840C2 (ru) * 2010-06-30 2012-11-20 ООО Научно-производственный центр "Лазеры и аппаратура ТМ" Установка для лазерной обработки материалов

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100985744B1 (ko) * 2002-03-14 2010-10-06 히다치 조센 가부시키가이샤 레이저 가공기에 있어서의 광학부품으로의 부착오염방지방법 및 장치
JP5814652B2 (ja) 2011-06-22 2015-11-17 株式会社東芝 レーザ照射装置及びレーザ照射方法
JP5789527B2 (ja) * 2012-01-18 2015-10-07 株式会社アマダホールディングス レーザ加工装置及びレーザ発振制御方法
JP6363680B2 (ja) * 2016-11-16 2018-07-25 ファナック株式会社 レーザ装置
DE102018105319A1 (de) * 2018-03-08 2019-09-12 Precitec Gmbh & Co. Kg Vorrichtung zur Bestimmung einer Fokuslage in einem Laserbearbeitungssystem, Laserbearbeitungssystem mit derselben und Verfahren zur Bestimmung einer Fokuslage in einem Laserbearbeitungssystem
WO2020175609A1 (ja) * 2019-02-27 2020-09-03 株式会社フジクラ レーザ装置
EP3892414A1 (de) * 2020-04-06 2021-10-13 Bystronic Laser AG Laserbearbeitungsmaschine

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0364366A2 (fr) * 1988-10-14 1990-04-18 Framatome Procédé et dispositif de soudage à distance dans un tube notamment dans un générateur de vapeur de centrale nucléaire
EP0421135A2 (de) * 1989-10-04 1991-04-10 DORRIES SCHARMANN GmbH Verfahren und Vorrichtung zur Bestimmung der Position und des Durchmessers des Brennflecks (Fokus) eines Laserstrahls, insbesondere zur Verwendung für die Werkstoffbearbeitung mit einem Hochleistungs-Laserstrahl
US5166504A (en) * 1990-09-13 1992-11-24 Messerschmitt-Bolkow-Blohm Gmbh Apparatus for controlling high-power laser beams with flexible member and mirror
DE4140182A1 (de) * 1991-12-05 1993-06-09 Carl Baasel Lasertechnik Gmbh, 8130 Starnberg, De Vorrichtung zum ueberwachen der laserbearbeitung eines werkstuecks
DE4336136A1 (de) * 1992-12-28 1994-07-07 Mitsubishi Electric Corp Laserbearbeitungsvorrichtung und -verfahren
WO1995027188A1 (en) * 1994-04-05 1995-10-12 British Nuclear Fuels Plc Radiation beam position sensor
EP0811453A2 (en) * 1996-06-07 1997-12-10 Lumonics Ltd. Focus control of lasers in material processing operations

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02259711A (ja) * 1989-03-31 1990-10-22 Citizen Watch Co Ltd オートフォーカス制御方法
US5521374A (en) * 1994-09-07 1996-05-28 Lumonics Corporation Focused laser beam measurement system and method of beam location
FR2726496B1 (fr) * 1994-11-09 1997-01-17 Aerospatiale Procede de localisation spatiale du point focal d'un faisceau laser d'une machine d'usinage et outillage pour la mise en oeuvre de ce procede
US5609780A (en) * 1994-11-14 1997-03-11 International Business Machines, Corporation Laser system
US6163010A (en) * 1996-10-25 2000-12-19 E. I. Du Pont De Nemours And Company Method and apparatus for laser cutting materials
US6215118B1 (en) * 1995-11-02 2001-04-10 Agilent Technologies, Inc. Autoalignment and autofocus mechanism for coupling light between an optical fiber and a physical specimen
SE9701710L (sv) * 1997-05-07 1998-09-14 Inst Verkstadstek Forsk Ivf Anordning för detektering och beräkning av en laserstråles fokusläge, form och effektfördelning

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0364366A2 (fr) * 1988-10-14 1990-04-18 Framatome Procédé et dispositif de soudage à distance dans un tube notamment dans un générateur de vapeur de centrale nucléaire
EP0421135A2 (de) * 1989-10-04 1991-04-10 DORRIES SCHARMANN GmbH Verfahren und Vorrichtung zur Bestimmung der Position und des Durchmessers des Brennflecks (Fokus) eines Laserstrahls, insbesondere zur Verwendung für die Werkstoffbearbeitung mit einem Hochleistungs-Laserstrahl
US5166504A (en) * 1990-09-13 1992-11-24 Messerschmitt-Bolkow-Blohm Gmbh Apparatus for controlling high-power laser beams with flexible member and mirror
DE4140182A1 (de) * 1991-12-05 1993-06-09 Carl Baasel Lasertechnik Gmbh, 8130 Starnberg, De Vorrichtung zum ueberwachen der laserbearbeitung eines werkstuecks
DE4336136A1 (de) * 1992-12-28 1994-07-07 Mitsubishi Electric Corp Laserbearbeitungsvorrichtung und -verfahren
WO1995027188A1 (en) * 1994-04-05 1995-10-12 British Nuclear Fuels Plc Radiation beam position sensor
EP0811453A2 (en) * 1996-06-07 1997-12-10 Lumonics Ltd. Focus control of lasers in material processing operations

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2458304A (en) * 2008-03-13 2009-09-16 Gsi Group Ltd Process Monitoring
RU2466840C2 (ru) * 2010-06-30 2012-11-20 ООО Научно-производственный центр "Лазеры и аппаратура ТМ" Установка для лазерной обработки материалов

Also Published As

Publication number Publication date
EP1091824A1 (en) 2001-04-18
AU4305399A (en) 1999-12-06
SE9801590L (sv) 2000-01-21
US6528761B1 (en) 2003-03-04
SE9801590D0 (sv) 1998-05-07
JP2002515343A (ja) 2002-05-28

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