WO1999032236A1 - Piezoelektrischer schwinger mit temperaturabhängigem bauelement - Google Patents
Piezoelektrischer schwinger mit temperaturabhängigem bauelement Download PDFInfo
- Publication number
- WO1999032236A1 WO1999032236A1 PCT/DE1998/003300 DE9803300W WO9932236A1 WO 1999032236 A1 WO1999032236 A1 WO 1999032236A1 DE 9803300 W DE9803300 W DE 9803300W WO 9932236 A1 WO9932236 A1 WO 9932236A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- component
- electrode
- temperature
- piezoelectric
- piezoelectric vibrator
- Prior art date
Links
- 230000001419 dependent effect Effects 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 6
- 239000003990 capacitor Substances 0.000 claims description 5
- 238000010276 construction Methods 0.000 claims 1
- 239000000919 ceramic Substances 0.000 abstract description 9
- 238000002604 ultrasonography Methods 0.000 abstract description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/176—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of ceramic material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
- B06B1/0651—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element of circular shape
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/66—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
- G01F1/662—Constructional details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
- G01F23/22—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
- G01F23/28—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring the variations of parameters of electromagnetic or acoustic waves applied directly to the liquid or fluent solid material
- G01F23/296—Acoustic waves
- G01F23/2968—Transducers specially adapted for acoustic level indicators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/802—Drive or control circuitry or methods for piezoelectric or electrostrictive devices not otherwise provided for
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/02—Compensating or correcting for variations in pressure, density or temperature
- G01F15/022—Compensating or correcting for variations in pressure, density or temperature using electrical means
Definitions
- the present invention relates to a piezoelectric vibrator that can be used as an ultrasonic transducer.
- a temperature measurement is therefore generally required before or during operation.
- the temperature is realized in many cases by an external temperature sensor.
- the external temperature sensor for recording the temperature must be led to the measuring point directly at the acoustic measuring point next to the ultrasonic transducer. This requires additional wiring and complicates the whole arrangement.
- the piezoelectric vibrator consists of a piezoelectric substrate, preferably a piezoceramic, which has a first electrode on a first surface and a second electrode on a second surface opposite the first surface.
- the first electrode does not completely cover the first surface of the vibrator, so that there is an electrode-free edge surface.
- this can be achieved by selecting the diameter of the preferably circular electrode to be smaller than the diameter of the circular substrate surface.
- the diameter of the piezoelectric substrate used is larger than the necessary radiating area (aperture) of the piezoelectric vibrator. This aperture is approximately determined by the overlap of the two opposite electrodes.
- a component with temperature-dependent behavior is attached or integrated on the electrode-free edge surface.
- a connection of this component is conductively connected to at least one of the two electrodes.
- This design of the piezoelectric vibrator allows the temperature to be measured directly at the acoustic measuring point via the temperature-dependent component. Due to the integration of the component on the surface of the piezoelectric substrate, an uncomplicated Ornate temperature detection guaranteed. By connecting the component in parallel or in series with the capacitor formed by the two electrodes, the temperature can be measured directly via the two-pole lead for the electrodes. An additional supply line for the temperature sensor or the temperature-dependent component is therefore not necessary, so that complex cabling is avoided.
- connection pads which are formed by the first and / or second electrode on a surface of the piezoelectric substrate
- the integration of the temperature-dependent component can be implemented using a simple connection technology. Claims 3 and 4 ⁇ . There is no additional wiring between the or the electrodes and the component is required.
- the piezoelectric vibrator according to the invention can therefore be produced with little effort.
- Fig. 1 shows an example of a piezoceramic transducer according to the invention before attaching the component in rear view (a), front view (b) and side view (O;
- FIG. 2 shows the rear view of the vibrator from FIG. 1 with an integrated component (here: temperature-dependent resistance);
- 3 shows the oscillator from FIG. 2 in a housing; and 4 shows a basic circuit diagram of the connection of the component with the capacitor formed by the two electrodes, as a parallel connection (a) or a series connection (b).
- FIG. 1 shows an example of a piezo-ceramic transducer according to the invention in side, rear and front views before it is provided with a temperature-dependent component.
- a circular, disk-shaped piezoceramic is used as the substrate (1).
- On the back of the ceramic is also a circular electrode (2) (except for the foothills (4,5)), the diameter of which is smaller than the diameter of the piezoelectric ceramic.
- the radiating surface of the vibrator is determined by the size of the electrode, a piezoceramic is therefore used in the present case, the diameter of which is larger than the radiating surface (aperture) of the vibrator required for the intended application.
- an electrode-free edge surface (3) is available on the rear surface of the ceramic.
- the rear electrode also has two extensions (4, 5) which extend into the electrode-free edge surface. These extensions form connection pads for the subsequent contacting of the electrode with a supply line (extension 4) and with the component with temperature-dependent behavior (extension 5).
- the front electrode (6) over the entire front surface of the piezoceramic extends.
- this front electrode also has two extensions (7, 8) which are guided around the edge of the disk-shaped piezoceramic in order to form two connection pads (7, 8) in the electrode-free edge region (3) on the back.
- these two connection pads are provided for contacting the front electrode with a supply line (extension 7) and with the component (extension 8).
- a sectional view through the line A-A 'in partial image (a) shows partial image (c).
- the piezoelectric ceramic (1), the rear electrode (2) and the front electrode (6) with the extension (8) guided around the edge of the piezoceramic can be seen to form a connection pad on the opposite surface.
- the electrodes are shown at a distance from the piezoceramic. In fact, however, they are in contact with the piezoceramic.
- PZT lead zirconium titanate
- Silver, gold or nickel are preferably used as electrode materials.
- Typical dimensions of the piezoceramic are a thickness of 1 to 4 mm with a diameter of approx. 10 - 30 mm.
- Fig. 2 shows the embodiment of Fig. 1 with integrated temperature-dependent resistor (9) and attached supply lines (10) to the electrodes.
- the connection of the temperature-dependent resistor with the capacitor formed by the two electrodes corresponds in the present example to a parallel connection as shown schematically in FIG. 4 (a).
- the feed approximately lines can be soldered to the connection pads (4, 7), for example.
- the piezoelectric ceramic is advantageously used simultaneously as a circuit board.
- the connection pads which are formed by the electrodes themselves, enable a very simple connection technique to be implemented with little wiring effort.
- Such a vibrator can be used, for example, for external measurement of the filling level of gas cylinders.
- the temperature-dependent resistor can be a PTC or an NTC, for example.
- Another type of temperature sensor which should preferably be of SMD design, is also possible.
- FIG. 3 shows a side view of a vibrator according to the invention, which is built into a housing (11) with a coupling layer (12) and has an integrated temperature-dependent resistor (for example SMD-NTC (9)).
- the connecting cables (10) can also be seen.
- FIG. 4 shows the two circuit variants when the component is integrated.
- a high-resistance NTC should be used in conjunction with a low-resistance ceramic.
- a 1.5 MHz oscillator which has an impedance of approximately 50 ⁇ (preferably the minimum of impedance at this frequency)
- a low-resistance PTC should be used in series connection with a high-resistance piezoceramic.
- the parallel connection or series connection shown makes it possible to transmit the temperature information with its low-frequency signal behavior via the same two-pole feed line (10) which is also used for the high-frequency ultrasound information. It is therefore not necessary to provide additional supply lines.
- This simplified arrangement in particular allows the structure when using the vibrator to be significantly simplified.
- the arrangement of the electrodes according to the invention in connection with the provision of a piezoceramic, the diameter of which is larger than the necessary radiating surface, offers the possibility of a very simple connection technique of the component with the electrodes via integrated connection pads.
Abstract
Description
Claims
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19756534 | 1997-12-18 | ||
DE19756534.4 | 1997-12-18 | ||
DE19820208.3 | 1998-05-06 | ||
DE19820208A DE19820208C2 (de) | 1997-12-18 | 1998-05-06 | Piezoelektrischer Schwinger |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1999032236A1 true WO1999032236A1 (de) | 1999-07-01 |
Family
ID=26042612
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE1998/003300 WO1999032236A1 (de) | 1997-12-18 | 1998-11-03 | Piezoelektrischer schwinger mit temperaturabhängigem bauelement |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1039975A1 (de) |
DE (1) | DE19820208C2 (de) |
WO (1) | WO1999032236A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104048713A (zh) * | 2014-06-06 | 2014-09-17 | 姜跃炜 | 超声波换能与温度采集器 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10057188C8 (de) * | 2000-11-17 | 2016-10-06 | Endress + Hauser Flowtec Ag | Ultraschall-Durchflußmeßgerät mit Temperaturkompensation |
DK1377804T3 (da) * | 2001-04-09 | 2006-03-06 | M & Fc Holding Llc | Varmemængdemåleapparat |
DE102004045354A1 (de) * | 2004-09-17 | 2006-04-06 | Nexans | Anordnung zur lokalen Temperaturüberwachung |
DE102005012041B4 (de) * | 2005-03-16 | 2008-05-08 | Werner Turck Gmbh & Co. Kg | Ultraschallsende- und -empfangsvorrichtung für einen Ölpeilstab |
DE102007020491A1 (de) * | 2007-04-27 | 2008-10-30 | Hydrometer Gmbh | Verfahren zur Bestimmung einer Eigenschaft eines strömenden Mediums sowie Ultraschallzähler |
DE102010063050B4 (de) * | 2010-12-14 | 2021-02-11 | Robert Bosch Gmbh | Verfahren zur Herstellung von piezoelektrischen akustischen Wandlern |
DE102013100670B4 (de) | 2013-01-23 | 2022-09-29 | Endress + Hauser Flowtec Ag | Ultraschall-Durchflußmeßgerät mit Temperaturkompensation |
DE102015110050A1 (de) | 2015-06-23 | 2016-12-29 | Endress + Hauser Flowtec Ag | Feldgerät mit Kompensationsschaltung zur Eliminierung von Umgebungseinflüssen |
DE102018201404B3 (de) | 2018-01-30 | 2019-04-11 | Pi Ceramic Gmbh | Ultraschallwandler mit einer Piezokeramik und Verfahren zur Herstellung eines solchen Ultraschallwandlers |
DE102021110706A1 (de) | 2021-04-27 | 2022-10-27 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Verfahren und Vorrichtung zur parallelen Temperaturmessung und Ultraschallaussendung oder -erfassung |
FR3124893B1 (fr) * | 2021-07-01 | 2023-10-27 | Areco Finances Et Tech Arfitec | Element piezoelectrique pour nebulisateur, avec une duree de vie amelioree |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5060506A (en) * | 1989-10-23 | 1991-10-29 | Douglas David W | Method and apparatus for monitoring the content of binary gas mixtures |
JPH0835954A (ja) * | 1994-07-22 | 1996-02-06 | Hitachi Constr Mach Co Ltd | 超音波探触子 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DD300585A7 (de) * | 1988-12-01 | 1992-06-25 | Adw Inst Physikalisch Tech | Verfahren und schaltungsanordnung zur temperaturkompensation eines piezoelektrischen wandlerantriebes |
DE9209977U1 (de) * | 1991-08-09 | 1992-11-19 | Vega Grieshaber Gmbh & Co, 7620 Wolfach, De |
-
1998
- 1998-05-06 DE DE19820208A patent/DE19820208C2/de not_active Expired - Fee Related
- 1998-11-03 WO PCT/DE1998/003300 patent/WO1999032236A1/de not_active Application Discontinuation
- 1998-11-03 EP EP98962248A patent/EP1039975A1/de not_active Withdrawn
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5060506A (en) * | 1989-10-23 | 1991-10-29 | Douglas David W | Method and apparatus for monitoring the content of binary gas mixtures |
JPH0835954A (ja) * | 1994-07-22 | 1996-02-06 | Hitachi Constr Mach Co Ltd | 超音波探触子 |
Non-Patent Citations (1)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 096, no. 006 28 June 1996 (1996-06-28) * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104048713A (zh) * | 2014-06-06 | 2014-09-17 | 姜跃炜 | 超声波换能与温度采集器 |
Also Published As
Publication number | Publication date |
---|---|
DE19820208A1 (de) | 1999-07-01 |
EP1039975A1 (de) | 2000-10-04 |
DE19820208C2 (de) | 2003-08-28 |
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