WO1998029711A1 - Systeme de capteur et procede de polarisation d'un capteur - Google Patents

Systeme de capteur et procede de polarisation d'un capteur Download PDF

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Publication number
WO1998029711A1
WO1998029711A1 PCT/EP1997/007291 EP9707291W WO9829711A1 WO 1998029711 A1 WO1998029711 A1 WO 1998029711A1 EP 9707291 W EP9707291 W EP 9707291W WO 9829711 A1 WO9829711 A1 WO 9829711A1
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WO
WIPO (PCT)
Prior art keywords
sensor
supply
signal
positive
biasing
Prior art date
Application number
PCT/EP1997/007291
Other languages
English (en)
Inventor
Eric Perraud
Marc Osajda
Pierre Collette
Original Assignee
Motorola Semiconductors S.A.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Semiconductors S.A. filed Critical Motorola Semiconductors S.A.
Publication of WO1998029711A1 publication Critical patent/WO1998029711A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/08—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups with provision for safeguarding the apparatus, e.g. against abnormal operation, against breakdown
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/028—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices

Definitions

  • the invention relates to a sensor arrangement and a method of biasing a sensor.
  • Pressure sensors are sometimes used in wet environments. Pressure sensors are used, for example, in applications which need to sense the pressure of a fluid or vapours such as in pressure cookers, water pumps, and central heating systems.
  • the MPX906 pressure sensor supplied by Motorola, Inc. is arranged such that pressure can be applied on the backside of the sensor. This means that the die and the aluminium contact pads are not exposed to the fluid or vapour surrounding the sensor and so corrosion can be avoided.
  • this solution presents some major drawbacks: it can work only with low pressure ranges (less than 100 KPa) otherwise the die may be detached from the package; it cannot work in alkaline solutions (pH > 9) in order to avoid any etching of the wafer; and the electrical performances are not as good compared to arrangements wherein the pressure is applied to the topside of the sensor. Since a huge amount of the market for water compatible pressure sensors is in the industrial market which require mid or high pressures ranges (200KPa - 1000 KPa), in view of some of the above drawbacks the 'backside' pressure sensor does not provide a solution to the corrosion problem for such 'high' pressure applications.
  • Another known solution comprises mounting the sensor die on an intermediate diaphragm which is hermetic to water and filling the gap between the diaphragm and the die with an oil or gel which is not compressible, for example silicon oil.
  • an oil or gel which is not compressible, for example silicon oil.
  • FIG. 1 is a schematic cross-section diagram of a pressure sensor
  • FIG. 2 is an enlarged schematic cross-section of the sensor die and lead frame of FIG. 1
  • FIG. 3 is a block schematic diagram of a sensor arrangement in accordance with the present invention
  • FIG. 4 is a graphical representation of a supply signal for biasing a sensor in accordance with a first embodiment of the present invention
  • FIG. 5 is a graphical representation of sensor lifetime versus biasing 'on- time'
  • FIG. 6 is a block schematic diagram of a first sensor arrangement in accordance with the first embodiment of the present invention.
  • FIG. 7 is a graphical representation of a control signal for controlling a supply switch of the first sensor arrangement of FIG. 6;
  • FIG. 8 is a graphical representation of a signal for clocking part of the first sensor arrangement of FIG. 6;
  • FIG. 9 is a graphical representation of a supply signal for biasing a sensor in accordance with a second embodiment of the present invention.
  • FIG. 10 is a block schematic diagram of a second sensor arrangement in accordance with the second embodiment of the present invention.
  • FIG. 11 is a graphical representation of a control signal for controlling supply switches of the second sensor arrangement of FIG. 10;
  • FIG. 12 is a graphical representation of a signal for clocking part of the second sensor arrangement of FIG. 10;
  • FIG. 13 is a block schematic diagram of an alternative sensor arrangement in accordance with the second embodiment of the present invention.
  • FIG. 14 is a block schematic diagram of a third sensor arrangement in accordance with a third embodiment of the present invention
  • FIG. 15 is a graphical representation of a supply signal for biasing a sensor in accordance with the third embodiment of the present invention
  • FIG. 16 is a graphical representation of a control signal for controlling supply switches of the third sensor arrangement of FIG. 14;
  • FIG. 17 is a graphical representation of a signal for clocking part of the third sensor arrangement of FIG. 14.
  • FIG. 1 is a schematic cross-sectional diagram of a pressure sensor 2, such as a MPX2000 series sensor supplied by Motorola, Inc., comprising a die 4 mounted on an epoxy polymer case 6.
  • a gel 12 such as a silicone polymer, surrounds the die 4 to protect the die and a lead frame 8 and wire bond 10 connects the pressure sensor 2 to a supply Vcc.
  • the sensor 2 transforms a difference in pressure between PI and P2 into a voltage signal by deformation of the diaphragm 5 and through a strain gauge transducer 14 (FIG. 2).
  • FIG. 2 shows the lead frame 8 and die 4 in more detail.
  • the die 4 comprises the transducer 14 and electronic circuitry (not shown) for calibration and compensation which are protected by a silicon nitride passivation layer 16.
  • the passivation layer 16 has a thickness 20 of 0.4 microns.
  • Wire bond 10 is bonded at one end to the lead frame 8, for example by ultrasonic bonding, and at another end to supply contacts 18 of the sensor 2, for example by ball bonding.
  • the supply contacts provide electrical connections between the lead frame 8 and the die 4 and are typically aluminium contacts. In order to make bonding feasible, the supply contacts are not protected by the passivation layer 16 and typically have a thickness 22 of 1.1 microns.
  • Gel 12 surrounds the described assembly.
  • MTTF mean-time-to-failure
  • the present invention seeks to increase the sensor lifetime in aqueous media even at pressures of greater than 200KPa without requiring expensive packaging, complex gels and intricate process steps.
  • a sensor arrangement 30 in accordance with a preferred embodiment of the present invention comprises a sensor 32 having supply contacts 38 coupled to a supply signal generator 34.
  • the supply signal generator 34 generates a supply signal comprising pulses such that the sensor 32 is biased periodically for predetermined periods.
  • an output of the sensor 32 is coupled to sample and hold circuitry 36 which is clocked by a clock signal CLK synchronised with the pulses of the supply signal such that the sample and hold circuitry 36 samples the sensor output signal at an output 40 of the sensor 32 when the sensor is biased only.
  • the sample and hold circuitry 36 provides an output signal Sout representative of a parameter sensed by the sensor 32.
  • the output signal Sout is an analog signal and so the pulsed biasing of the sensor appears transparent to a user of the sensor arrangement 30.
  • the sample and hold circuitry 36 may be omitted but in this case the sensor output signal at the output 40 would be a pulsed signal, with the magnitude of the pulses carrying the pressure value.
  • FIG. 4 shows an example of a pulsed supply signal 42 which may be used to bias the sensor 32 in accordance with a first embodiment of the present invention.
  • the predetermined periods for which the sensor 32 is biased is the on- time Ton.
  • the periods for which the sensor is not biased is the off-time Toff.
  • the supply signal 42 is arranged to have a short duty cycle so that Ton is small.
  • the invention by utilising a pulsed supply signal to bias the sensor for a short periods of time during which measurements can be taken, reduces the electrocorrosion of the supply contacts 38.
  • the value of T will depend on the application and on the response time of the sensor required by the user. If the parameter to be sensed by the sensor changes slowly, a fast response time is not needed so that T can be large. If the parameter to be sensed by the sensor changes quickly, T will have to be small.
  • the on-time Ton must be long enough so that the sensor output signal can be measured but not long enough to start significant corrosion at the supply contacts 38.
  • the inventors of the present invention found by experimental tests with different sensors and different on-times that instead of the lifetime of the sensor being determined by the cumulative time of the sensor when biased or the ratio Ton/T, the sensor lifetime versus on-time Ton appears like an avalanche phenomena as can be seen in FIG. 5. Since the tests are destructive tests, the curve 44 shown in FIG. 5 was obtained with different sensors so it is difficult to extrapolate a generic law of the sensor lifetime versus the bias time. However, the same trend was obtained with another set of sensors. There is clearly a sensor biasing time Ton (20 to 40 ms) under which the sensor lifetime is greatly increased. One explanation could be that when a biasing pulse is short, very few electrons may penetrate the supply contacts and oxidise them.
  • Ton is small in the order of 10 ms, a significant increase in the lifetime of a sensor can be obtained.
  • FIG. 6 shows a first sensor arrangement 46 in accordance with the first embodiment of the invention which is an implementation of the sensor arrangement 30 of FIG. 3 wherein the sensor 32 is a strain-gauge pressure sensor 47 such as the MPX2300D pressure sensor supplied by Motorola, Inc. and the supply signal comprises a plurality of positive pulses as shown in FIG. 4.
  • the supply signal generator 34 comprises clock circuitry 48 which generates a clock signal CLK to clock the sample and hold circuitry 36 as shown in FIG. 7 and a control signal Control (as shown in FIG. 8) to control a voltage supply signal provided by a reference voltage supply Vcc via a switch 50.
  • Switch 50 is coupled between a first supply contact 54 and a first reference voltage terminal (preferably ground) of the reference voltage supply.
  • a second reference voltage terminal (Vcc) of the reference voltage supply is coupled to a second supply contact 56.
  • the control signal Control When the control signal Control is high, the switch 50 is closed and the pressure sensor 47 is biased with the voltage supply signal Vcc coupled to the second supply contact 56.
  • the control signal Control therefore ensures that a pulsed supply signal is applied to the pressure sensor 47.
  • An amplifier 52 is coupled to outputs Vs4- and Vs- of the pressure sensor 47.
  • An output of the amplifier 52 is sampled by the sample and hold circuitry 36 to provide the analog output signal Sout.
  • the signals are arranged so that there is a delay between the rising edge of the control signal Control and the rising edge of the clock signal CLK in order to ensure that the sensor has settled before the output of the amplifier 52 is sampled (i.e. before a measurement is taken).
  • the period T of the control signal determines the response time of the pressure sensor 47.
  • the ratio Ton/T determines the value and hence the size of the capacitor (not shown) of the sample and hold circuitry 36. Since pressure is a slow moving parameter compared to the speed of electronic operations, such as sampling, a control signal period T of 100ms and an on-time Ton of 10ms is a good compromise between the sensor lifetime, sensor response time (100ms) and the size of the sensor arrangement 46. For a period T of 100ms, a capacitor of a few nF is needed for the sample and hold circuitry 36. This means that the circuitrv 36 can therefore be mounted in a surface mount technology package and can thus provide a very small and integrated arrangement. In the first sensor arrangement 46, electrocorrosion only occurs at the supply contact coupled to the positive electrode (Vcc) of the supply signal generator 34 with the result that this supply contact corrodes faster than the other supply contact.
  • a second embodiment of the invention addresses this problem by generating a supply signal comprising alternate positive 58 and negative 60 pulses as shown in FIG. 9.
  • a supply signal comprising alternate positive 58 and negative 60 pulses as shown in FIG. 9.
  • one of supply contacts will only be corroded when the sensor is positively biased and the other supply contact will only be corroded when the sensor is negatively biased.
  • a second sensor arrangement 62 in accordance with a second embodiment of the invention is similar to the first sensor arrangement 46 in accordance with the first embodiment and like components are referred to by the same reference numeral.
  • the strain-gauge structure of the pressure sensor 47 is symmetric so that the sensor output signal is the same whether the first supply contact 54 is coupled to ground or Vcc and the second supply contact 56 is coupled to Vcc or ground respectively provided that the output signal is sensed between the Vs+ and Vs- pins and the Vs- and Vs+ pins respectively.
  • the second sensor arrangement 62 comprises a first switch 64 for switching the first supply contact 54 between ground and Vcc of the reference voltage supply in response to a control signal Scont (signal 61 in FIG. 11) generated by the clock circuitry 48 and a second switch 66 for switching the second supply contact 56 between Vcc and ground of the reference voltage supply in response to the control signal Scont (signal 63 in FIG. 11) generated by the clock circuitry 48.
  • the outputs Vs+ and Vs- of the pressure sensor 47 are coupled to a multiplexer 68 which is clocked by the same clock signal CLK which clocks the sample and hold circuitry 36.
  • the outputs of the multiplexer 68 are coupled to the sample and hold circuitry 36 via the amplifier 52.
  • the multiplexer 68 ensures that the input signal to the sample and hold circuitry 36 is always a positive analog voltage.
  • the multiplexer couples the sensor output signal across the outputs Vs+ and Vs- to the sample and hold circuitry 36 via the amplifier 52.
  • the multiplexer couples the sensor output signal across the outputs Vs- and Vs+ to the sample and hold circuitry 36 via the amplifier 52.
  • the second sensor arrangement 62 in accordance with the second embodiment of the invention therefore ensures that the second supply contact 56 will be corroded only when the sensor 47 is positively biased and the first supply contact 54 will be corroded only when the sensor 47 is negatively biased.
  • the lifetime of the sensor 47 of the second sensor arrangement 62 (FIG. 10) should therefore be doubled compared to the lifetime of the sensor 47 of the first sensor arrangement 46 (FIG. 6).
  • the architecture of the second sensor arrangement 62 in accordance with the second embodiment is more complex than the first sensor arrangement 46 in accordance with the first embodiment.
  • the analog multiplexer 68 needs to have very low differential voltage drops and hence is expensive to implement.
  • An alternative sensor arrangement 72 in accordance with the second embodiment, which arrangement avoids the need to use an expensive multiplexer 68, is shown in FIG. 13.
  • the sensor arrangement 72 is similar to the second sensor arrangement 62 except that the multiplexer 68 and amplifier 52 are replaced by first 74 and second 76 amplifiers. Like components are referred to by the same reference numeral.
  • the non-inverting input of the first amplifier 74 is coupled to the output Vs+ of the sensor 47 and the inverting input of the first amplifier 74 is coupled to the output Vs- of the sensor 47.
  • the non-inverting input of the second amplifier 76 is coupled to the output Vs- of the sensor 47 and the inverting input of the second amplifier 76 is coupled to the output Vs+ of the sensor 47.
  • the outputs of the first 74 and second 76 amplifiers are coupled to the sample and hold circuitry 36.
  • the first 74 and second 76 amplifiers are clocked by the clock signal CLK generated by the clock circuitry 48 and ensure that, like the multiplexer 68, the input signal to the sample and hold circuitry 36 is always a positive analog voltage.
  • the sensor arrangement 72 operates in a similar manner to that of the second sensor arrangement 62.
  • the first amplifier 74 When positively biased (when the first supply contact 54 is coupled to ground and the second supply contact 56 is coupled to Vcc), the first amplifier 74 is biased and couples the sensor output signal across the outputs Vs+ and Vs- to the sample and hold circuitry 36 and the second amplifier 76 is disabled.
  • the second amplifier 76 When negatively biased (when the first supply contact 54 is coupled to ground and the second supply contact 56 is coupled to Vcc), the second amplifier 76 is biased and couples the sensor output signal across the outputs Vs- and Vs+ to the sample and hold circuitry 36 and the first amplifier 74 is disabled.
  • the sensor arrangement 72 in accordance with the second embodiment of the invention therefore ensures that the second supply contact 56 will be corroded only when the sensor 47 is positively biased and the first supply contact 54 will be corroded only when the sensor 47 is negatively biased.
  • a third sensor arrangement in accordance with a third embodiment of the invention avoids the need for a multiplexer 68 and first 74 and second 76 amplifiers by generating a supply signal 78, as shown in FIG. 15, comprising a negative pulse after a positive pulse and by only measuring the sensor output signal during a positive pulse.
  • Like components to those of the sensor arrangements 46, 62, 72 are referred to by the same reference numeral.
  • the supply signal 78 is generated using the first 64 and second 66 switches and in response to the control signal Scont (signals 80 and 82 respectively of FIG. 16) generated by the clock circuitry 48.
  • the clock signal CLK (see FIG. 17) generated by the clock circuitry 48 ensures that the sample and hold circuitry 36 only samples the sensor output signal during a positive pulse.
  • FIG. 15 shows a negative pulse immediately following a positive pulse.
  • the principle of the third embodiment may equally be applied to a supply signal as shown in FIG. 9 but wherein the sensor output signal is only measured during the positive pulses of the supply signal.
  • the sensor arrangement in accordance with the present invention may be arranged such that a negative pulse occurs at any time between two positive pulses.
  • the method of biasing the sensor in accordance with the third embodiment was found by experiment to increase the lifetime of the sensor 47 compared to the method in accordance with the first embodiment (FIG. 3).
  • One explanation could be that the chemical agents coming from the aqueous solution and causing electrocorrosion do not penetrate the aluminium pad but are very close to the surface since the positive pulse is very short and these agents are then removed from the aluminium pad during the negative pulse thereby radically stopping any electrocorrosion.
  • the present invention generates and applies a supply signal comprising pulses so that the sensor is only biased for a predetermined period during which the sensor output signal can be measured. Since the sensor is not biased all the time, the electrocorrosion of the supply contacts is considerably reduced thereby increasing the lifetime of the sensor.
  • the present invention utilises simple circuitry to generate the supply signal and so is much simpler and cheaper to implement compared to the solutions of the known arrangements described above.
  • the sensor arrangement in accordance with the present invention can be used at any pressures.
  • the sensor and additional circuitry may be implemented on one die or as a module.
  • the pulsed biasing method of the present invention can be made transparent to the user of the sensor arrangement.
  • the principle of the present invention applies to any sensor having supply contacts which are exposed to aqueous media.
  • pressure sensors which are to be used in pressure cookers
  • chemical sensors which are to be used to detect certain chemicals in a solution
  • temperature sensors and humidity sensors In the field of chemical sensors, which sensors comprise a sensitive layer and a heater for heating the sensitive layer, the principle of applying a pulsed supply signal to the sensitive layer in accordance with the invention could also be utilised but for another purpose: to limit the drift of the sensitive layer which may occur when the sensitive layer is under voltage.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L'invention concerne un système de capteur (30). Ce système comprend un capteur (32) possédant des contacts d'alimentation (38) et un générateur de signaux d'alimentation (34) pour générer un signal d'alimentation (42) comprenant des impulsions, et pour appliquer le signal d'alimentation à impulsions aux contacts d'alimentation de telle sorte que, en service, le capteur (32) est polarisé périodiquement pendant une période prédéterminée (Ton) et un signal de sortie du capteur est mesuré pendant, au moins, certaines des périodes prédéterminées. Le signal d'alimentation peut comprendre, par exemple, plusieurs impulsions positives et négatives alternées, ou plusieurs impulsions positives.
PCT/EP1997/007291 1996-12-31 1997-12-22 Systeme de capteur et procede de polarisation d'un capteur WO1998029711A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9616280A FR2757942A1 (fr) 1996-12-31 1996-12-31 Ensemble capteur et procede de polarisation d'un capteur travaillant en presence d'humidite
FR9616280 1996-12-31

Publications (1)

Publication Number Publication Date
WO1998029711A1 true WO1998029711A1 (fr) 1998-07-09

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PCT/EP1997/007291 WO1998029711A1 (fr) 1996-12-31 1997-12-22 Systeme de capteur et procede de polarisation d'un capteur

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WO (1) WO1998029711A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10122912A1 (de) * 2001-05-11 2002-11-21 Infineon Technologies Ag Vorrichtung und Verfahren zum Erzeugen einer vorbestimmten Positionsbeziehung zweier zueinander beweglicher Elektroden
US7900521B2 (en) 2009-02-10 2011-03-08 Freescale Semiconductor, Inc. Exposed pad backside pressure sensor package
EP3217816B1 (fr) 2014-11-12 2018-10-10 RAI Strategic Holdings, Inc. Capteur à base de mems pour un dispositif de distribution d'aérosol

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6065346A (en) * 1999-03-29 2000-05-23 Honeywell Inc. Measurement system utilizing a sensor formed on a silicon on insulator structure
US20010038300A1 (en) * 2000-02-24 2001-11-08 Endevco Corporation Apparatus and method for sensor detection
US7284438B2 (en) 2005-11-10 2007-10-23 Honeywell International Inc. Method and system of providing power to a pressure and temperature sensing element

Citations (4)

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Publication number Priority date Publication date Assignee Title
US4782699A (en) * 1986-11-17 1988-11-08 General Motors Corporation Pulsed fuel level indicating system
US4872349A (en) * 1986-10-31 1989-10-10 General Electric Company Microcomputerized force transducer
EP0590292A2 (fr) * 1992-10-01 1994-04-06 Motorola, Inc. Circuit à interrogation par impulsions pour un capteur de pression et sa méthode d'utilisation
DE4417228A1 (de) * 1994-05-17 1995-11-23 Michael Dr Altwein Dehnungsmeßstreifen-Meßanordnung, Verwendung derselben und Modulationsverstärker für derartige Meßanordnungen

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4872349A (en) * 1986-10-31 1989-10-10 General Electric Company Microcomputerized force transducer
US4782699A (en) * 1986-11-17 1988-11-08 General Motors Corporation Pulsed fuel level indicating system
EP0590292A2 (fr) * 1992-10-01 1994-04-06 Motorola, Inc. Circuit à interrogation par impulsions pour un capteur de pression et sa méthode d'utilisation
DE4417228A1 (de) * 1994-05-17 1995-11-23 Michael Dr Altwein Dehnungsmeßstreifen-Meßanordnung, Verwendung derselben und Modulationsverstärker für derartige Meßanordnungen

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10122912A1 (de) * 2001-05-11 2002-11-21 Infineon Technologies Ag Vorrichtung und Verfahren zum Erzeugen einer vorbestimmten Positionsbeziehung zweier zueinander beweglicher Elektroden
US7900521B2 (en) 2009-02-10 2011-03-08 Freescale Semiconductor, Inc. Exposed pad backside pressure sensor package
EP3217816B1 (fr) 2014-11-12 2018-10-10 RAI Strategic Holdings, Inc. Capteur à base de mems pour un dispositif de distribution d'aérosol
EP3424352B1 (fr) 2014-11-12 2021-04-28 RAI Strategic Holdings, Inc. Capteur mems destiné à un dispositif d'administration d'aérosol
US11051554B2 (en) 2014-11-12 2021-07-06 Rai Strategic Holdings, Inc. MEMS-based sensor for an aerosol delivery device

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Publication number Publication date
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