WO1998018154A1 - Vorrichtung zum behandeln von substraten - Google Patents
Vorrichtung zum behandeln von substraten Download PDFInfo
- Publication number
- WO1998018154A1 WO1998018154A1 PCT/EP1997/005406 EP9705406W WO9818154A1 WO 1998018154 A1 WO1998018154 A1 WO 1998018154A1 EP 9705406 W EP9705406 W EP 9705406W WO 9818154 A1 WO9818154 A1 WO 9818154A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substrates
- substrate
- container
- substrate holder
- walls
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a batch of workpieces
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S134/00—Cleaning and liquid contact with solids
- Y10S134/902—Semiconductor wafer
Definitions
- the invention relates to a device for treating substrates with a container containing a treatment fluid, and with at least one substrate holder that moves the substrates up and / or down without a substrate carrier.
- Such substrate carriers or cassettes are very disadvantageous, among other things, because optimal, uniform fluid flow in the fluid container is not possible due to the flow obstacles through the cassette, and because the substrates in such a cassette are not treated with ultrasound can, as described for example in the unpublished DE 197 22 473 AI or DE 196 16 402 AI.
- the substrate carriers or cassettes also represent a major disadvantage when drying substrates, for example wafers, because, owing to their large area, edges, corners and slits are very difficult to dry and take a lot of time.
- Substrate package The outer substrates or at least the outer surfaces of the outer substrates facing the container walls are therefore treated poorly, rinsed or dried, so that there are also disadvantages and the productivity of the system leaves something to be desired.
- the invention is therefore based on the object of providing a device for treating substrates with which the treatment measures, such as, for example, the
- Rinsing or drying process can be carried out in the same way for all substrates regardless of their arrangement within the container.
- the object is achieved in that parallel to the substrates with these up and / or down substrate side walls between them and the container walls are provided. Due to the substrate side walls provided according to the invention, each delimiting a substrate package, the flow conditions on the outer surfaces of the most external substrates are no different than between the individual substrates in the interior of the substrate package, so that the external substrates of a substrate package set the same good treatment, rinsing and drying results. These external substrates therefore do not have to be discarded as rejects. In addition, no charges occur on the outer substrates due to the substrate side walls, because there are no longer any relative movements between the outer substrates and the container wall.
- the substrate side walls are preferably mechanically connected to the substrate holder and can be moved up and down with it.
- the arrangement is therefore structurally simple.
- a substrate holder arm is arranged outside the substrate region formed by the substrate side walls, the substrate holder arm preferably lying in an arm shaft which is formed in one of the container walls.
- the internal volume of the container can be kept small, which is very advantageous with regard to the time saved for the inlet and outlet and in particular with regard to the required volume of the treatment fluid.
- Flushing liquid is essential, especially with regard to the expensive materials, processing methods and possible environmental pollution required for this.
- inlet nozzles and / or holes for introducing the treatment fluid are inside the arm shaft intended. In this way it is ensured that there is a corresponding circulation of the treatment fluid in the arm shaft and thus a flushing of the arm shaft, so that higher degrees of contamination of the treatment fluid do not occur in the arm shaft and between the substrate holder arm and the arm shaft.
- the device according to the invention is advantageously provided for a drying device using the Marangoni process.
- a gas preferably isopropyl alcohol, nitrogen or a gas mixture consisting of it, is passed onto the fluid surface, for example via a hood arranged above the container, in order to effect the drying process by utilizing the To improve and shorten the marangoni effect.
- a tube is provided in the arm shaft and / or in the substrate holder arm for the defined discharge of the gas introduced via the treatment fluid if this gas is displaced in the hood when the substrates and the substrate side walls are raised.
- Fig. 1 is a schematic representation of a device according to the invention, in supervision, and
- FIG. 2 shows the device shown in FIG. 1 as a cross section along the section line I-I.
- a fluid container 1 has longitudinal walls 2, 3 and transverse walls 4, 5. Parallel to the transverse walls 4, 5 and adjacent thereto, substrate side walls 6, 7 are provided in the fluid container 1, which are connected to a substrate holder 8 and can be moved up and down with this in the fluid container 1. Are between the substrate side walls 6, 7 Arranged parallel to this substrate 9, which are held by the substrate holder 8. In the embodiment shown, the substrate holder 8 is knife-like, and the substrates are guided in guide slots (not shown) in or on the longitudinal walls 2, 3 of the fluid container 1.
- the substrate holder 8 is fastened to a substrate holder arm 10, which lies in a substrate holder arm shaft 11.
- the substrate holder arm shaft 11 like the interior of the fluid container 1, is acted upon from below with the treatment fluid, which flows upward and flows off via an overflow edge or opening, as is described in detail in the cited documents and applications by the applicant.
- the substrate side walls 6, 7, which serve as separation plates for the substrates 9 with respect to the transverse walls 4, 5 of the fluid container 1, are also moved out and thereby create uniform, uniform flow conditions within the substrate package, This also applies to the outer substrates 9 of a package and its outward-facing substrate surfaces. In this way, in contrast to conventional devices, it is also possible to treat, rinse and / or dry the outer substrates 9 evenly in the same way as the other substrates 9, so that these substrates 9 also do not have to be discarded as rejects. This also applies with regard to the charging effects on at least the outer substrates 9, which cause a high scrap, due to the relative movement of these substrates 9 with respect to the transverse walls 4, 5 of the fluid container 1.
- the substrate side walls 6, 7 preferably have a wall surface which is not smaller than the substrate area, so that the entire substrate area is shielded and separated from the transverse walls 4, 5 of the fluid container 1.
- an arm shaft 11 in one of the two transverse walls 4, 5 of the fluid container 1 makes it possible to keep the container volume small, which is not only advantageous for the optimization of the flow conditions, but also makes it possible to save treatment fluid, which is expensive and requires extensive preparation must be and may not be environmentally friendly.
- a gas introduced onto the surface 12 of the treatment fluid can escape in a controlled manner through the arm shaft 11 and / or through the substrate holder arm 10 if this gas is displaced in a hood arranged above it when the substrates are raised.
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/297,218 US6257255B1 (en) | 1996-10-24 | 1997-10-01 | Substrate treatment device |
JP51887798A JP3307652B2 (ja) | 1996-10-24 | 1997-10-01 | 基板を処理するための装置 |
EP97910404A EP0946970A1 (de) | 1996-10-24 | 1997-10-01 | Vorrichtung zum behandeln von substraten |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19644255.9 | 1996-10-24 | ||
DE19644255A DE19644255C1 (de) | 1996-10-24 | 1996-10-24 | Vorrichtung zum Behandeln von Substraten und Verwendung der Vorrichtung |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1998018154A1 true WO1998018154A1 (de) | 1998-04-30 |
Family
ID=7809901
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP1997/005406 WO1998018154A1 (de) | 1996-10-24 | 1997-10-01 | Vorrichtung zum behandeln von substraten |
Country Status (7)
Country | Link |
---|---|
US (1) | US6257255B1 (de) |
EP (1) | EP0946970A1 (de) |
JP (1) | JP3307652B2 (de) |
KR (1) | KR100363754B1 (de) |
DE (1) | DE19644255C1 (de) |
TW (1) | TW343931B (de) |
WO (1) | WO1998018154A1 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002032825A1 (en) * | 2000-10-13 | 2002-04-25 | The Regents Of The University Of California | Surface contouring by controlled application of processing fluid using marangoni effect |
CN112235926A (zh) * | 2020-09-26 | 2021-01-15 | 江苏亚电科技有限公司 | 一种晶圆去静电和清洗方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JOP20190303A1 (ar) * | 2006-02-17 | 2017-06-16 | Esco Group Llc | تجميعة مقاومة للتآكل |
KR102576522B1 (ko) | 2023-04-17 | 2023-09-07 | (주)원영씰 | 유압 실린더용 씰 제조 장치 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5143103A (en) * | 1991-01-04 | 1992-09-01 | International Business Machines Corporation | Apparatus for cleaning and drying workpieces |
WO1996014944A1 (en) * | 1994-11-14 | 1996-05-23 | Yieldup International Corporation | Ultra-low particle semiconductor cleaner |
Family Cites Families (32)
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US563914A (en) * | 1896-07-14 | Dish-cleaner | ||
US448383A (en) * | 1891-03-17 | Photograph ic-plate-washing apparatus | ||
US800439A (en) * | 1905-03-10 | 1905-09-26 | Gustave Charles Gennert | Photographic solution-box. |
US1141314A (en) * | 1914-12-19 | 1915-06-01 | Eugene W Caldwell | Photographic developing apparatus. |
US1234641A (en) * | 1916-10-07 | 1917-07-24 | Benjamin M Dickson | Photographic developing-tank and rack. |
US1902338A (en) * | 1930-10-21 | 1933-03-21 | Clarence E Riley | Photoengraver's glass dipping rack |
US2682213A (en) * | 1951-11-10 | 1954-06-29 | Shapiro Mitchell | Apparatus for washing photographic prints |
US2663304A (en) * | 1951-12-10 | 1953-12-22 | John Ray Jennings | Radiator cleaning apparatus |
US3077155A (en) * | 1960-08-08 | 1963-02-12 | Pako Corp | Device for treating photographic sheet material |
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US3461008A (en) * | 1965-10-21 | 1969-08-12 | Lee Laurie Jr | Method and apparatus for etching printed circuit boards |
US3559553A (en) * | 1967-10-23 | 1971-02-02 | Werner W Buechner | Automatic forwarding mechanism for photographic materials |
AT290245B (de) * | 1968-01-11 | 1971-05-25 | Voest Ag | Verfahren zum Beizen von Bunden |
US3794053A (en) * | 1971-10-18 | 1974-02-26 | O Jones | Cleaning apparatus |
US3739706A (en) * | 1971-12-09 | 1973-06-19 | H Carstens | Photographic processor |
DE3300666C3 (de) * | 1982-01-26 | 1998-04-09 | Guido Zucchini | Waschverfahren für metallhaltige und nicht-metallhaltige Teile wie Kleinteile, mechanische Komponenten und Teile für die elektronische Industrie sowie eine Maschine zur Durchführung dieses Verfahrens |
DE3205816A1 (de) * | 1982-02-18 | 1983-08-25 | Robert Bosch Gmbh, 7000 Stuttgart | Verfahren zum reinigen von einzelteilen und vorrichtung zur durchfuehrung des verfahrens |
US4547065A (en) * | 1982-10-05 | 1985-10-15 | Kis France | Device for simultaneously printing and developing photographs |
US4493418A (en) * | 1983-08-17 | 1985-01-15 | Empak Inc. | Wafer processing cassette |
DE3413386A1 (de) * | 1984-04-10 | 1985-10-17 | Miele & Cie GmbH & Co, 4830 Gütersloh | Spuelmaschine zum reinigen, desinfizieren und trocknen von medizinischem zubehoer |
US4817650A (en) * | 1988-01-04 | 1989-04-04 | Herbert Tilton | Self-contained tiltable basket for plating, washing or otherwise treating hollow articles |
US5154301A (en) * | 1991-09-12 | 1992-10-13 | Fluoroware, Inc. | Wafer carrier |
JPH0684871A (ja) * | 1992-09-02 | 1994-03-25 | Nec Kyushu Ltd | 半導体基板薬液処理装置 |
DE19537879C2 (de) | 1994-04-15 | 1998-04-09 | Steag Micro Tech Gmbh | Verfahren und Vorrichtung zum Behandeln von Substraten |
DE4413077C2 (de) * | 1994-04-15 | 1997-02-06 | Steag Micro Tech Gmbh | Verfahren und Vorrichtung zur chemischen Behandlung von Substraten |
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DE19637875C2 (de) | 1996-04-17 | 1999-07-22 | Steag Micro Tech Gmbh | Anlage zur Naßbehandlung von Substraten |
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DE19616402C2 (de) | 1996-04-24 | 2001-11-29 | Steag Micro Tech Gmbh | Vorrichtung zum Behandeln von Substraten in einem Fluid-Behälter |
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US5807439A (en) * | 1997-09-29 | 1998-09-15 | Siemens Aktiengesellschaft | Apparatus and method for improved washing and drying of semiconductor wafers |
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-
1996
- 1996-10-24 DE DE19644255A patent/DE19644255C1/de not_active Expired - Lifetime
-
1997
- 1997-10-01 WO PCT/EP1997/005406 patent/WO1998018154A1/de not_active Application Discontinuation
- 1997-10-01 JP JP51887798A patent/JP3307652B2/ja not_active Expired - Fee Related
- 1997-10-01 KR KR1019997003571A patent/KR100363754B1/ko not_active IP Right Cessation
- 1997-10-01 US US09/297,218 patent/US6257255B1/en not_active Expired - Fee Related
- 1997-10-01 EP EP97910404A patent/EP0946970A1/de not_active Withdrawn
- 1997-10-15 TW TW086115100A patent/TW343931B/zh active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5143103A (en) * | 1991-01-04 | 1992-09-01 | International Business Machines Corporation | Apparatus for cleaning and drying workpieces |
WO1996014944A1 (en) * | 1994-11-14 | 1996-05-23 | Yieldup International Corporation | Ultra-low particle semiconductor cleaner |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002032825A1 (en) * | 2000-10-13 | 2002-04-25 | The Regents Of The University Of California | Surface contouring by controlled application of processing fluid using marangoni effect |
CN112235926A (zh) * | 2020-09-26 | 2021-01-15 | 江苏亚电科技有限公司 | 一种晶圆去静电和清洗方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20000052764A (ko) | 2000-08-25 |
KR100363754B1 (ko) | 2002-12-06 |
DE19644255C1 (de) | 1998-04-30 |
JP2000505243A (ja) | 2000-04-25 |
EP0946970A1 (de) | 1999-10-06 |
US6257255B1 (en) | 2001-07-10 |
TW343931B (en) | 1998-11-01 |
JP3307652B2 (ja) | 2002-07-24 |
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