WO1998016348A1 - Meule comportant un siege et son procede de fabrication - Google Patents

Meule comportant un siege et son procede de fabrication Download PDF

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Publication number
WO1998016348A1
WO1998016348A1 PCT/JP1996/002999 JP9602999W WO9816348A1 WO 1998016348 A1 WO1998016348 A1 WO 1998016348A1 JP 9602999 W JP9602999 W JP 9602999W WO 9816348 A1 WO9816348 A1 WO 9816348A1
Authority
WO
WIPO (PCT)
Prior art keywords
pedestal
whetstone
grindstone
polishing
resin
Prior art date
Application number
PCT/JP1996/002999
Other languages
English (en)
Japanese (ja)
Inventor
Masanori Kobayashi
Hisao Nakayama
Shuki Gohda
Original Assignee
Kanebo Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanebo Limited filed Critical Kanebo Limited
Priority to PCT/JP1996/002999 priority Critical patent/WO1998016348A1/fr
Publication of WO1998016348A1 publication Critical patent/WO1998016348A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/06—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental

Definitions

  • the present invention relates to a grindstone used in a plane polishing apparatus, and more particularly to a pedestal grindstone suitable for uniformly and efficiently polishing the surface of a metal, glass, semiconductor wafer or the like.
  • a lapping platen has been used as a grinding stone containing abrasive grains, and water or a water containing a small amount of surfactant has been constantly supplied as a polishing liquid while polishing.
  • a method of polishing by sliding a body on a grindstone has been used.
  • this method is becoming popular in the polishing of relatively soft metals such as aluminum alloys.
  • the above-mentioned surface polishing apparatus is generally one in which a plurality of segment-shaped solid grindstones are mounted on a surface plate directly or through a mounting plate so that their working surfaces form the same plane, and in particular, through a mounting plate.
  • a method is usually employed in which a grindstone is first fixed to a mounting plate, and the mounting plate is screwed to a polishing apparatus surface plate with bolts or the like. For this reason, bolt working holes are drilled in the working surface of the solid grinding wheel.
  • the polishing operation also generates a waste liquid composed of a polishing liquid containing a large amount of dropped abrasive grains, polishing debris, and debris of an abrasive grain binding material. This causes clogging and the like, which significantly impairs good polishing action. Therefore, such waste liquid must be quickly discharged out of the system together with the supply of a new polishing liquid.
  • the above-mentioned bolt holes are closed holes, the waste liquid accumulates in the bolt holes. In particular, the bolt hole in the lower platen has no place for the accumulated waste liquid to escape, Filled, falling abrasive grains, polishing debris, etc. will gradually accumulate.
  • a method of engraving a groove and forming a side hole with the groove and the mounting plate was proposed.
  • the shape of the groove engraved on the solid grindstone is not particularly limited, and a shallow and wide groove is suitable. With such a shape, the solid whetstone can be used as thin as possible.
  • the required cross-sectional area for increasing the discharge capacity can be secured.
  • the cross-sectional shape of the groove is not particularly limited. Examples include a square and a trapezoid.
  • the direction in which the grooves are carved is preferably in the direction opposite to the direction of rotation of the platen or outward from the center of rotation from the bolt holes, in order to facilitate drainage of waste liquid.
  • a good polishing action is maintained for a long time, and further, the waste of the grindstone is reduced as compared with a conventional solid grindstone obtained by forming side holes. Less, the service life of the grinding wheel can be extended, and workability is improved. Further, in order to form the side hole according to the present invention, a groove may be provided on the surface of the solid grindstone, which can be easily processed as compared with the conventional method of carefully drilling a solid grindstone. It is. Next, a method of manufacturing a solid wheel with a pedestal according to the related art will be described.
  • a mixture of abrasive grains and resin is made into a porous body, which is then solidified by a chemical reaction and heat treatment to form a grindstone. Then, after cutting out from the material of the grindstone into a predetermined grindstone piece and forming it into a plane, the grindstone piece has a bolt through hole corresponding to the mounting hole of the aluminum pedestal, a groove for discharging polishing debris, etc. Processes the discharge groove for discharging the polishing liquid oozing from the solid whetstone. Furthermore, a pedestal-equipped whetstone is manufactured by fixing the whetstone to the pedestal with an adhesive or the like.
  • the aluminum pedestal is made of an aluminum plate and is expensive, so the aluminum pedestal is not used between the manufacturer of the solid whetstone with the pedestal and the user who owns the plane polishing device. It is reused repeatedly.
  • the used whetstone with pedestal is returned to the manufacturer and adhered to the aluminum pedestal.
  • the remaining whetstone is peeled off (peeling process).
  • the distortion of the aluminum pedestal generated when the whetstone is peeled off is corrected, and the pedestal is flattened to be ready for reuse (adhesion preparation step).
  • the solid whetstone having the holes and grooves processed as described above is adhered to the pedestal (adhesion step). Then, the pedestal-equipped whetstone thus manufactured is supplied to the user again.
  • the pedestal and the solid grindstone are firmly adhered to each other so that the solid grindstone does not fall off from the aluminum pedestal during polishing. Therefore, a great amount of labor is required to separate the solid grindstone from the pedestal.
  • the aluminum base is deformed when separated. If the pedestal is deformed, high-precision polishing cannot be performed. Therefore, it is necessary to correct the pedestal, and there is a problem that the cost for regenerating the pedestal increases.
  • the conventional technology of engraving a groove communicating with the side of the solid grindstone from the lower end of the bolt ⁇ through hole is applied to the grindstone.
  • the pedestal itself can be grooved to increase the area where the solid whetstone can be used effectively.However, if the pedestal is grooved, the groove will be deformed when correcting the deformation of the pedestal. Therefore, it is difficult to simply groove the pedestal, and the method of forming a groove on the grindstone had to be adopted.Therefore, the problem that the grindstone cannot be used effectively to the end still remains. Had not been resolved.
  • the whetstone with the pedestal becomes heavy, which makes it difficult to handle when attaching and detaching to and from each surface plate, and increases the transportation cost.
  • the present invention has been made in view of the above-mentioned problems of the related art, and provides a solid wheel with a pedestal and a method of manufacturing the same, which can effectively use the wheel with a low cost and a short delivery time and can improve handleability. It is intended to be. Disclosure of the invention
  • the pedestal-equipped whetstone according to the present invention is a surface for polishing a surface by rubbing a plurality of whetstones attached via a mounting plate on a lapping plate via a mounting plate such that the working surface constitutes the same plane.
  • the polishing device In the polishing device,
  • the mounting plate is used as a pedestal, the whetstone is mounted on the pedestal, the pedestal is formed of a resin material, and a discharge groove for discharging a polishing liquid is formed on a whetstone bonding surface of the resin pedestal. It is a whetstone with a pedestal.
  • the pedestal is made of a resin material, the pedestal can be easily formed even with a large number of discharge grooves, and the weight is light.
  • the discharge groove is formed in the resin base, the grindstone can be used effectively to the end.
  • each mounting hole, each discharge groove, etc. can be formed simultaneously during resin molding of the pedestal, requiring complicated processing as in the past. Therefore, the pedestal can be manufactured extremely easily, so that the productivity can be greatly improved and the manufacturing cost can be significantly reduced.
  • a resin having sufficient strength and rigidity as the base is preferable, and examples thereof include resin materials such as phenol resin, melamine resin, xylene resin, epoxy resin, urea resin, and furan resin.
  • resin materials such as phenol resin, melamine resin, xylene resin, epoxy resin, urea resin, and furan resin.
  • phenolic resin is suitable as the material of the present invention.
  • the resin pedestal is formed as a fan-shaped or trapezoidal flat plate by molding the above resin. Further, by forming fine irregularities (not shown) on the grindstone bonding surface on the front surface side of the pedestal, the affinity with the adhesive can be increased. This can also be easily formed at the time of molding if it is a resin base. Further, in the present invention, the discharge groove is formed in the radial direction of the resin pedestal, so that as the resin pedestal rotates, the polishing debris or the like that has entered the discharge groove can be discharged radially outward together with the polishing liquid. Further, by arranging a plurality of discharge grooves radially, the polishing liquid or the like can be effectively discharged to the outer peripheral side by centrifugal force.
  • the discharge groove is formed in the direction of centrifugal force of the resin pedestal. With the rotation of the resin pedestal, polishing debris or the like that has entered the discharge groove can be discharged in the centrifugal force direction together with the polishing liquid. Further, in the present invention, since a large amount of polishing liquid can be made to flow radially outward from the center of the discharge groove, the polishing liquid increases in the polishing step from the rotation center side to the radial outside.
  • the pedestal is provided with a mounting hole to the surface plate, the mounting hole communicates with at least one of the discharge grooves, and the abrasion which enters the mounting hole and the bolt ⁇ through hole.
  • the powder and polishing debris can be discharged through the discharge groove.
  • a planar polishing apparatus for polishing a surface by rubbing a plurality of whetstones attached via a mounting plate to a lapping plate via a mounting plate and a surface of a material to be polished, wherein the surface is polished.
  • a mounting hole for the surface polishing apparatus surface plate and a discharge groove for allowing the polishing liquid to escape to the bonding surface side of the grindstone can be simultaneously formed.
  • the grinding wheel with the pedestal can be easily formed by forming the mounting hole communicating with the mounting hole of the resin pedestal and the discharge groove of the polishing debris and the polishing liquid in the grinding stone in the processing step. Can be manufactured.
  • FIG. 1 is a plan view showing a whetstone with a pedestal according to one embodiment of the present invention.
  • FIG. 2 is a plan view of the pedestal of the whetstone with the pedestal
  • FIG. 3 is a diagram of FIG.
  • FIG. 4 is a process explanatory view showing a method for manufacturing such a pedestal-equipped whetstone.
  • FIG. 5 is an external view showing a main part of a planar polishing apparatus applied to the present embodiment.
  • 6 is a plan view of a pedestal showing a discharge groove according to a first modification of the present invention.
  • FIG. 7 is a second modification
  • FIG. 8 is a third modification
  • FIG. 9 is a fourth modification.
  • FIG. 10 is a plan view of a pedestal showing a fifth modification
  • FIG. 11 is a plan view of a pedestal showing a sixth modification.
  • FIG. 12 is an explanatory view of a mounted state of the pedestal-equipped whetstone to the surface plate according to one embodiment of the present invention.
  • FIG. 1 shows a whetstone with a pedestal according to one embodiment of the present invention.
  • a pedestal-equipped whetstone 1 is composed of a pedestal 2 and a whetstone 5.
  • FIG 2 shows a plan view of the pedestal of the whetstone with pedestal.
  • the pedestal 2 is a pedestal made of a resin material, and is formed as a fan-shaped or trapezoidal flat plate by molding a phenol resin.
  • the pedestal 2 is formed with two mounting holes 3 and 3 spaced apart in the radial direction. Each of the mounting holes 3 has a bolt (not shown) for mounting the pedestal 2 to the surface plate 12 or 15. ) Is attached.
  • the grinding wheel bonding surface 2A on the front side of the pedestal 2 has fine irregularities (illustrated) for enhancing the affinity with the adhesive as in the sanding process. Is formed).
  • the discharge grooves 4 are formed on the whetstone bonding surface 2 A side of the pedestal 2, and extend in the radial direction of the pedestal 2 at regular intervals to be radially arranged as a whole.
  • each of the discharge grooves 4 allows the polishing liquid or the like to escape to the outer peripheral side by centrifugal force during polishing.
  • the preparation time is shortened by allowing water to be absorbed.
  • each of the discharge grooves 4 is directed toward the outer peripheral side so that the inner peripheral side (center side) becomes the shallow groove section 4A and the outer peripheral side becomes the deep groove section 4B.
  • the amount of the polishing liquid increases from the center side to the outer peripheral side, but the amount of the polishing liquid that increases toward the outer peripheral side is smoothly increased without resistance.
  • the central one of the discharge grooves 4 is disposed so as to penetrate through the mounting holes 3 in the radial direction. Debris and the like can be released together with the polishing liquid.
  • Each of the discharge grooves 4 is formed simultaneously with each of the mounting holes 3 when the pedestal 2 is formed by resin molding.
  • the grinding wheel 5 is bonded to the grinding wheel bonding surface 2A.
  • the grindstone 5 is formed by mixing and reacting abrasive grains with a resin as a sponge raw material to form a porous body, and then solidifying it with the resin, and is used for polishing while containing water.
  • the whetstone 5 is provided with bolt holes 6, 6 which are mounting holes corresponding to the mounting holes 3, 3 of the pedestal 2. Further, two grooves 7, 7 are formed in the grindstone 5 in a diagonal direction by groove processing, and the grindstone 5 is radially divided into three by the discharge grooves 7.
  • the groove 7 is for discharging a polishing liquid or the like supplied at the time of polishing, thereby preventing polishing debris from remaining on the surface of the grindstone 5 and causing damage to the polished surface.
  • a method for manufacturing the pedestal-equipped whetstone 1 will be described with reference to FIGS.
  • the resin material is subjected to resin molding by hot pressing, so that a fan-shaped and trapezoidal pedestal having each mounting hole 3 and each discharge groove 4 as shown in FIG. Is molded.
  • the whetstone of pedestal 2 Fine irregularities are formed on surface 2A to increase the affinity with the adhesive.
  • a grindstone forming step is performed in parallel with the pedestal forming step. In this grindstone forming step, the grindstone 5 is cut out with regular outer dimensions, and further subjected to a plane forming process.
  • the grindstone 5 separately formed in a plane as described above is bonded to the grindstone bonding surface 2A of the resin-made pedestal 2 formed in advance.
  • the process proceeds to the machining process.
  • two bolts 6 and 6 corresponding to the mounting holes 3 and 3 of the pedestal 2
  • the pedestal-equipped whetstone 1 manufactured in this manner is mounted on a flat surface polishing apparatus and used for disk polishing.
  • a flat-surface polishing apparatus using the pedestal-equipped whetstone 1 will be described with reference to FIGS.
  • the known surface polishing apparatus 11 includes a lower surface plate 12, a sun gear 13 provided at the center of the surface plate 12, and an inner gear provided on the outer peripheral side of the surface plate 12.
  • a toothed gear 14 and an upper surface plate 15 provided above the surface plate 12 so as to be able to ascend and descend, and the surface plates 12 and 15, a sun gear 13 and an internal gear 14 are each rotated by a drive motor.
  • a plurality of pedestal grindstones 1 are mounted on each of the surface plates 12 and 15 so as to face each other, and a sun gear 13 and internal teeth are provided on each of the pedestal wheels 1 of the lower surface plate 12.
  • a holding plate 17 for holding the aluminum disk 16 is provided so as to be engaged with the gear 14.
  • a plurality of grinding wheels 3 are bolted to the surface plate 12 or the surface plate 15 via the pedestal 2 so that their working surfaces form the same plane. I have.
  • the grindstone 5 used in the present embodiment is a solid grindstone
  • the pedestal grindstone 1 when it is used for the first time, the pedestal grindstone 1 is immersed in water for a certain period of time, and after the whole grindstone 5 contains moisture, Attach it to the platens 1 2 and 15.
  • each discharge groove 4 is formed on the whetstone bonding surface 2A of the pedestal 2 which is the back side of the whetstone 5, moisture is absorbed from the back side of the whetstone 5 as well.
  • the entire grinding wheel 5 can be made to contain moisture in a short time.
  • the grindstone 5 expands in volume.
  • the pedestal 2 has sufficient rigidity. There is no deformation.
  • each aluminum disk 16 was assembled to the holding plate 17, and the holding plate 17 was placed on each of the pedestal whetstones 1 arranged below, and the sun gears 13 and Align with internal gear 14 After attaching the holding plate 17 (aluminum disk 16), lower the upper platen 15 and lower each aluminum disk 16 held on the holding plate 17 with the whetstone 1 with each pedestal. Pinch.
  • each aluminum disk 16 held by the holding plate 17 revolves around the sun gear 13 while rotating, and is polished by the upper and lower whetstones 5.
  • the pedestal 2 is formed with the respective discharge grooves 4 extending in the radial direction, so that the polishing liquid discharged from the grindstone 5 is released to the outer peripheral side so that the amount of water contained in the grindstone 5 can be properly adjusted.
  • the grinding wheel 5 is prevented from being clogged by discharging the abrasive powder and the like sucked into the grinding wheel 5 together with the polishing liquid.
  • the depth of each of the discharge grooves 4 is increased by an angle ⁇ so that the inner peripheral side becomes a shallow groove section 4A and the outer peripheral side becomes a deep groove section 4B. Abrasive powder and abrasive debris can be discharged smoothly without resistance.
  • the polishing operation is performed in this manner. Then, as the grinding progresses, the grindstone also wears out and becomes thinner. Since the groove is provided on the pedestal side, the grindstone can be used to the very end of the pedestal.
  • the present invention as shown in FIG. 6, by providing a plurality of discharge grooves 21 so as to extend in the direction of centrifugal force on the whetstone bonding surface 2 ⁇ of the pedestal 2, wear powder in each discharge groove 21 is reduced. The centrifugal force at the time of rotation can be effectively applied to the polishing debris and polishing liquid, and the Can be improved.
  • each of the discharge grooves 41 has an angle /? Gradually so as to have a narrow portion 41A on the inner peripheral side and a wide portion 41B on the outer peripheral side. May be widened.
  • the arrangement interval of the discharge grooves 51 may be gradually reduced from the inner peripheral side to the outer peripheral side.
  • the grindstone 5 is divided into three in the radial direction by the two discharge grooves 7, 7 has been exemplified, but the grindstone 5 may be divided into two or four or more. May be divided.
  • the pedestal is formed by molding the resin material, mounting holes, discharge grooves, and the like can be simultaneously formed at the time of resin molding of the pedestal.
  • the pedestal can be manufactured very easily without any processing. As a result, productivity can be greatly improved and manufacturing costs can be significantly reduced.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

Appareil de meulage de surface comprenant une pluralité de meules fixées par l'intermédiaire d'une plaque de montage à un disque de meulage, de sorte que les surfaces de meulage des meules se trouvent dans le même plan afin de meuler un objet. Ces meules sont fixées à un siège en plastique moulé servant de plaque de montage. Ce siège en plastique moulé comporte des canaux servant à décharger un liquide de meulage sur sa surface adhérant aux meules, ainsi que des trous de montage reliés à au moins un des canaux de déchargement. Cette structure facilite la fabrication du siège, améliore la productivité et diminue les coûts de fabrication. De plus, étant donné que le siège en plastique est jetable, on peut raccourcir la durée de livraison.
PCT/JP1996/002999 1996-10-16 1996-10-16 Meule comportant un siege et son procede de fabrication WO1998016348A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP1996/002999 WO1998016348A1 (fr) 1996-10-16 1996-10-16 Meule comportant un siege et son procede de fabrication

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP1996/002999 WO1998016348A1 (fr) 1996-10-16 1996-10-16 Meule comportant un siege et son procede de fabrication

Publications (1)

Publication Number Publication Date
WO1998016348A1 true WO1998016348A1 (fr) 1998-04-23

Family

ID=14153986

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP1996/002999 WO1998016348A1 (fr) 1996-10-16 1996-10-16 Meule comportant un siege et son procede de fabrication

Country Status (1)

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WO (1) WO1998016348A1 (fr)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55129762U (fr) * 1979-03-03 1980-09-13
JPH03111169A (ja) * 1989-09-22 1991-05-10 Nippon Steel Corp ＨｇＣｄＴｅウエハの研磨方法
JPH03100070U (fr) * 1990-02-01 1991-10-18
JPH06226640A (ja) * 1993-02-05 1994-08-16 Nippon Tokushu Kento Kk 平面研磨装置及び該装置に使用する扇形固形砥石片
JPH06226608A (ja) * 1993-02-05 1994-08-16 Nippon Tokushu Kento Kk 平面研磨装置及びこの装置に使用される砥石
JPH0871916A (ja) * 1994-09-07 1996-03-19 Toshiba Mach Co Ltd 研磨装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55129762U (fr) * 1979-03-03 1980-09-13
JPH03111169A (ja) * 1989-09-22 1991-05-10 Nippon Steel Corp ＨｇＣｄＴｅウエハの研磨方法
JPH03100070U (fr) * 1990-02-01 1991-10-18
JPH06226640A (ja) * 1993-02-05 1994-08-16 Nippon Tokushu Kento Kk 平面研磨装置及び該装置に使用する扇形固形砥石片
JPH06226608A (ja) * 1993-02-05 1994-08-16 Nippon Tokushu Kento Kk 平面研磨装置及びこの装置に使用される砥石
JPH0871916A (ja) * 1994-09-07 1996-03-19 Toshiba Mach Co Ltd 研磨装置

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