WO1998010885A1 - Marqueur a laser pour balayage de masque et procede de balayage correspondant - Google Patents

Marqueur a laser pour balayage de masque et procede de balayage correspondant Download PDF

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Publication number
WO1998010885A1
WO1998010885A1 PCT/JP1997/003201 JP9703201W WO9810885A1 WO 1998010885 A1 WO1998010885 A1 WO 1998010885A1 JP 9703201 W JP9703201 W JP 9703201W WO 9810885 A1 WO9810885 A1 WO 9810885A1
Authority
WO
WIPO (PCT)
Prior art keywords
mask
scanning
laser beam
laser
polygon mirror
Prior art date
Application number
PCT/JP1997/003201
Other languages
English (en)
Japanese (ja)
Inventor
Akihiko Souda
Hirokazu Tanaka
Original Assignee
Komatsu Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Ltd. filed Critical Komatsu Ltd.
Priority to JP51349798A priority Critical patent/JP3242411B2/ja
Publication of WO1998010885A1 publication Critical patent/WO1998010885A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks

Definitions

  • the present invention relates to a mask scanning laser marker and a scanning method, and more particularly, to a scanning method capable of efficiently engraving when a required engraving width is small.
  • Conventional mask-scanning laser markers are designed to transmit laser light on a mask surface that is designed to transmit laser light through predetermined characters and patterns to be imprinted and not transmit laser light through other parts.
  • the laser beam transmitted from this mask is irradiated onto the object to be engraved, and characters and pictures drawn on the mask surface are engraved.
  • Many methods of scanning a laser beam with such a mask scanning type laser marker have been conventionally proposed. For example, the method disclosed in Japanese Unexamined Patent Publication No. Hei 5-318149 is shown in FIG.
  • the figure is an example of a liquid crystal mask type laser marker, and will be described below with reference to the figure.
  • the laser oscillator 1 is composed of, for example, a YAG laser oscillator or the like, and pulse oscillation is enabled by the Q switch.
  • the laser beam emitted from the laser oscillator 1 is condensed by the beam shaping lens 2 and guided to the galvanometer scanner 3Y.
  • the laser beam deflected by the galvanometer scanner 3Y passes through the relay lens 4. It is guided to the reflecting surface of the polygon mirror 3X.
  • the laser beam deflected by the rotation of the polygon mirror 3X is guided to the liquid crystal mask 6.
  • the laser light is deflected in the X-axis direction and the Y-axis direction on the surface of the liquid crystal mask 6 by the rotation of the polygon mirror 3X and the driving of the galvanometer scanner 3Y, respectively.
  • the liquid crystal mask 6 transmits or blocks this laser light according to the displayed pattern or the like, and the transmitted laser light is transmitted through the field lens 5.
  • the light is condensed on mirror 7.
  • the laser light reflected by the mirror 7 reaches the work 9 via the objective lens 8 and the lens 40.
  • the lens 40 is fixed in a hole provided substantially at the center of the table 30.
  • the table 30 is driven by the drive unit 11 and the drive unit 11 in the X-axis direction and the Y direction of the engraving surface of the work 9 respectively. Move in the axial direction.
  • the controller 10 displays a pattern or the like to be imprinted on the liquid crystal mask 6, then oscillates a laser beam by the laser oscillator 1, controls the rotation of the polygon mirror 3 X, and controls the surface of the liquid crystal mask 6 with the laser beam.
  • the galvanometer scanner 3Y is driven by a predetermined minute equi-deflection angle and stopped, and in this state again the polygon mirror 3X
  • the surface of the liquid crystal mask 6 is scanned with laser light. This scanning is performed on the entire surface of the liquid crystal mask 6.
  • the drive unit 21 and the drive unit 11 are controlled to move the table 30, and the laser beam transmitted through the liquid crystal mask 6 is irradiated on the work 9 via the objective lens 8 and the lens 40. In this way, the above pattern is engraved.
  • the scanning width of the laser beam on the liquid crystal mask 6 surface in the X direction depends on the following two factors: the distance L between the polygon mirror 3 X and the liquid crystal mask 6 , And Polygon Mirror 3 X is almost uniquely determined by the number of mirror surfaces.
  • the number of mirror surfaces determines the swing angle ⁇ of the laser beam on each surface. For example, if the number of surfaces is 20, the swing angle ⁇ is 18 °, and the number of mirror surfaces is 30. In this case, the swing angle ⁇ is 12 °. Accordingly, the scanning width is substantially proportional to the product of both the distance L between the polygon mirror 3X and the liquid crystal mask 6 and the swing angle ⁇ .
  • the scanning time for one picture of the liquid crystal mask 6 is constant. Therefore, for example, even when a pattern is displayed on the entire area of the scanning width W of the liquid crystal mask 6 as shown in FIG. 7, or when a pattern is displayed on a part of the scanning width W of the liquid crystal mask 6 as shown in FIG.
  • the scanning times are equal.
  • extra scanning is performed, including the part that does not need to be engraved. Inefficient marking with very low laser utilization. As a result, there is a problem that the number of peaks that can be imprinted within the laser oscillation lifetime is small.
  • the engraving speed with respect to the engraved area decreases, that is, even if the engraved area is small, the engraving time does not change, making it difficult to shorten the engraved time according to the engraved area. .
  • the scanning width W on the surface of the liquid crystal mask 6 is changed by adjusting the distance L between the polygon mirror 3X and the liquid crystal mask 6.
  • the conjugation of the field lens 5 is broken, so that the laser beam transmitted through the liquid crystal mask 6 is not focused on the surface of the mirror 17, so that normal engraving is performed. Becomes difficult. Disclosure of the invention
  • the present invention has been made in view of the above problems, and has as its object to provide a mask scanning type laser marker capable of making a scanning width on a mask surface variable and achieving efficient marking, and a scanning method thereof. ing.
  • a mask scanning laser beam includes: a laser beam oscillator that oscillates laser light; a mask having characters and Z or a figure to be stamped; A polygon mirror that guides the laser beam to scan in a predetermined direction on the mask surface, and irradiates a laser beam transmitted from the mask onto the work surface to engrave the characters and / or figures.
  • Type laser marker
  • Scanning width changing means is provided between the laser light oscillator and the mask, and the scanning width changing means can change the scanning width of the laser light from the polygon mirror on the mask surface. It is characterized by the following.
  • the scanning width changing means for changing the scanning width of the laser beam from the polygon mirror on the mask surface.
  • the scanning width can be changed according to. As a result, the engraving time can be shortened, and the laser utilization can be improved.
  • the scanning width changing means includes:
  • a plurality of polygon mirrors having the same diameter, different numbers of surfaces per rotation, being arranged side by side on the same rotation axis, and being movable in the axial direction of the rotation axis;
  • a drive unit for selecting and switching the polygon mirror to scan on the mask surface by moving the plurality of polygon mirrors in the axial direction may be provided. According to this configuration, polygon mirrors having the same diameter but different numbers of surfaces per rotation are used.
  • the swing angle of the laser beam on each surface of the polygon mirror differs depending on the number of surfaces of each polygon mirror, and if the distance between the polygon mirror and the mask is constant, the mask
  • the scanning width on the surface is determined by the swing angle. Therefore, the scanning width on the mask surface can be changed by moving and switching the plurality of polygon mirrors in the direction of the rotation axis. As a result, the scanning width can be changed according to the width of the characters and / or figures to be engraved, so that the number of scanning lines within a certain period of time increases as the number of polygon mirrors increases, and the engraving time decreases. In addition to shortening, the laser utilization can be improved.
  • the scanning width changing means includes:
  • a relay lens having a plurality of sets, each set including at least one or more lenses, and each set having a different magnification;
  • the image forming apparatus may further include a lens exchanging unit for exchanging each set of the relay lens between the polygon mirror and the mask.
  • each set is combined with at least one or more relay lenses, and one set of a plurality of sets of relay lenses configured so that the magnification of each set is different. It is inserted between the polygon mirror and the mask. Laser light from the polygon mirror is focused on the mask surface via the relay lens of this set. At this time, the scanning width on the mask surface is inversely proportional to the magnification of the relay lens of each set. In other words, the scanning width on the mask surface can be changed by replacing a relay lens having a different magnification for each set.
  • the scanning width can be changed according to the width of the characters and / or figures to be engraved, and the required level —Since the power density is constant, the number of rotations of the polygon mirror can be increased in inverse proportion to the decrease in scanning width. Therefore, the scanning time per scanning line is shortened, and as a result, the marking time is shortened and the laser utilization can be improved.
  • the scanning method of the mask scanning laser marker according to the present invention is such that a laser beam from a laser light oscillator is scanned in a predetermined direction by a polygon mirror on a mask surface having characters and / or figures to be engraved.
  • a mask-scanning laser marker that irradiates a laser beam transmitted from the mask onto a work surface, and engraves the character and the letter or the figure
  • the scanning width of the laser beam from the polygon mirror on the mask surface can be changed.
  • the scanning width of the laser beam from the polygon mirror on the mask surface can be changed, so that the scanning width can be changed according to the engraving width required for the engraved characters and / or figures. Can be changed.
  • the engraving time can be shortened and the laser utilization can be improved.
  • a plurality of polygons having the same diameter, different numbers of surfaces per rotation being arranged side by side on the same rotation axis, and being movable in the axial direction of the rotation axis.
  • the gun mirror may be switched by moving in the axial direction.
  • the swing angle of the laser beam on each surface of the polygon mirror differs depending on the number of surfaces of each polygon mirror.
  • the scanning width on the mask surface is determined by the swing angle. Therefore, the scanning width on the mask surface can be changed by switching and using the plurality of polygon mirrors. As a result, the scanning width can be changed according to the width of the characters and / or figures to be engraved, so that the number of scanning lines within a certain time increases as the number of polygon mirrors increases, and the engraving time decreases.
  • the laser utilization can be improved.
  • one set of relay lenses of a plurality of sets each set being composed of at least one lens and having a different magnification of each set, is used as the poly set.
  • the mask may be inserted between the mask and the mask for replacement.
  • each set is combined with at least one or more relay lenses, and one set of a plurality of sets of relay lenses configured so that the magnification of each set is different.
  • the laser light from the polygon mirror is focused on the mask surface via the relay lens of this set.
  • the scanning width on the mask surface is inversely proportional to the magnification of the relay lens of each set.
  • the scanning width on the mask surface can be changed by exchanging a relay lens having a different magnification for each set.
  • the scanning width can be changed in accordance with the width of the character, Z or figure to be engraved, so that the laser power density required for engraving is constant, so the polygon mirror rotation speed is inversely proportional to the decrease in scanning width. Can be increased. Therefore, the scanning time per scanning line is shortened, and as a result, the marking time is shortened and the laser utilization can be improved.
  • FIG. 1 is a side view of a part of a polygon mirror according to a first embodiment of the present invention.
  • FIG. 2 is an explanatory diagram of the scanning width of the polygon mirror 3X-1 in the first embodiment according to the present invention.
  • FIG. 3 is an explanatory diagram of the scanning width of the polygon mirror 3X-2 in the first embodiment according to the present invention.
  • FIG. 4 is an explanatory diagram of a scanning width in the second embodiment according to the present invention.
  • FIG. 5 is an explanatory diagram of another example of the scan width in the second embodiment according to the present invention.
  • FIG. 6 is a configuration diagram of a laser marker for explaining a scanning method according to the related art.
  • Fig. 7 shows an example of a conventional engraved pattern.
  • FIG. 8 shows another example of an engraved pattern for explaining the problem of the prior art.
  • FIG. 1 shows a side view of a polygon mirror portion of the first embodiment according to the present invention.
  • polygon mirrors 3X-1 and 3X-2 are different from each other in the number of surfaces per one rotation, and are arranged side by side on the same rotation axis.
  • the polygon mirror 3X-K3X-2 is rotated by the drive unit 12 and is movable in the axial direction of the rotary shaft.
  • an example is shown in which two polygon mirrors 3X, that is, polygon mirrors 3X-1 and 3X-2, are provided, but the number is not limited to this. is not.
  • FIGS. 2 and 3 are explanatory diagrams of the scanning width W of the laser beam by the polygon mirrors 3X-l and 3X-2, respectively.
  • the polygon mirrors 3X-1 and 3X-2 have 20 planes and 30 planes, respectively.
  • the liquid crystal mask 6 is used as the mask, the present invention is not limited to this.
  • the laser beam 14 is reflected by the surfaces of the polygon mirrors 3X-1 and 3X-2, guided to the liquid crystal mask 6 via the field lens 5, and transmitted through the liquid crystal mask 6.
  • the light is converged on the converging point of the field lens 5.
  • the position of the field lens 5 may be behind the liquid crystal mask 6 (on the side where the laser beam has passed).
  • the centers of the polygon mirrors 3 Xl and 3 X-2 are set so that the positions of the reflection points on the polygon mirrors 3 Xl and 3 X-2 are equal.
  • the position is on a circle whose radius from the rotation axis is equal.
  • the polygon mirror The swing angle a 1 is 18 °
  • the swing angle ⁇ 2 by the polygon mirror 3X2 on the 30 plane is 12 °.
  • the scanning width W is changed by the swing angle a, that is, by the number of surfaces. be able to.
  • a relay lens 50 is inserted between the polygon mirror 3X and the liquid crystal mask 6, and the laser beam 14 is reflected by the polygon mirror 3X, and the relay lens 50 and the field The surface of the liquid crystal mask 6 is scanned via the drain 5. Then, the laser light transmitted through the liquid crystal mask 6 is condensed by the field lens 5 to a condensing point C. Note that the position of the field lens 5 may be behind the liquid crystal mask 6 (on the side where the laser beam is transmitted).
  • the relay lens 50 is configured by combining one or more lenses. For example, in Fig.
  • the relay lens 50-1 is the relay lens 5 in the front group (closer to the polygon mirror-3X side) and the relay lens 52 in the rear group (closer to the LCD mask 6 side).
  • the relay lens 50-2 is constituted by the relay lens 51 of the front group and the relay lens 53 of the rear group.
  • the relay lens 50-1 and the relay lens 50-2 are set to different magnifications, and all or a part of the relay lens 50 (the same as the front group or the rear group). Groups can be exchanged.
  • the relay lens 52 and the relay lens 53 in the rear group of the relay lenses 50-1 and 50-2 are interchangeable.
  • the lens replacement means for performing the replacement may be manually performed by an operator or may be automatically performed. This When replacing the mirror, the reflection point A of the polygon mirror 3X, the light collection point B of the relay lenses 50-1 and 50-2, and the light collection point C of the field lens 5 are in a conjugate positional relationship. Need to keep This makes it possible to make clear engravings.
  • the magnification of the relay lens 51 and the relay lens 52 is 1 and the magnification of the relay lens 53 is 1.5.
  • the angle formed by the laser beam entering the relay lens 51 from the reflection point A with the optical axis of the lens is set to 1.
  • the magnification of the relay lens 51 is equal to that of the relay lens 52
  • the angle formed by the laser light guided from the relay lens 52 to the liquid crystal mask 6 with the optical axis of the lens is also ⁇ 1. Therefore, assuming that the distance between the converging point B and the surface of the liquid crystal mask 6 is L, the scanning width W 3 on the surface of the liquid crystal mask 6 in FIG. Is done. On the other hand, in FIG.
  • the scanning width W on the surface of the liquid crystal mask 6 is inversely proportional to the ratio of the magnification of the relay lens 50 to be exchanged. That is, by changing the magnification of the relay lens 50, the scanning width W can be changed.
  • the scanning width W can be arbitrarily changed within a range that satisfies the limitation on the magnification of the relay lens 50 and the limitation on the arrangement for maintaining a conjugate positional relationship.
  • the application example to the line liquid crystal type mask scanning laser marker is also applicable to the power area liquid crystal type mask scanning type laser marker.
  • the scanning width W in the X-axis direction and the ⁇ -axis direction becomes small, so that the energy density on the marking surface becomes high.
  • the area liquid crystal type for example, in order to change the engraving width only in the X-axis direction and to maintain the engraving width and engraving speed in the ⁇ -axis direction, i) scan in the Y-axis direction (galvanometer scanning). evening It is necessary to increase the scanning angle of the scanner 3 Y), and ii) to increase the scanning speed in the Y direction.
  • the scanning width W can be changed according to the width of the character or figure to be engraved.
  • the laser power density required for engraving is constant, when the scanning width W is reduced, the number of rotations of the polygon mirror 3X, 3X-1, 3X-2 must be increased. Can be.
  • the scanning time per scanning line is shortened, and as a result, the marking time is shortened and the laser utilization can be improved.
  • the present invention is useful as a mask scanning type laser marker capable of making the scanning width on a mask surface variable and improving the efficiency of marking, and a scanning method thereof.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Optical Scanning Systems (AREA)

Abstract

Marqueur à laser pour balayage de masque dont la largeur de balayage sur une surface de masque est variable, et dont l'efficacité de marquage est améliorée. Le marqueur à laser est doté entre une source de faisceaux laser (1) et un masque (6), d'une pluralité d'ensemble de lentilles relais (50-1, 50-2). Chaque ensemble comprend au moins une lentille, toutes les lentilles ayant une échelle de grossissement différente. On prévoit un système de remplacement des lentilles, qui permet de remplacer mutuellement les lentilles relais (50-1, 50-2) par l'insertion des ensembles de lentilles entre un miroir polygonal et le masque (6). Ainsi la largeur de balayage sur la surface du masque (6) d'un faisceau laser depuis le miroir polygonal (3X) est variable.
PCT/JP1997/003201 1996-09-13 1997-09-11 Marqueur a laser pour balayage de masque et procede de balayage correspondant WO1998010885A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51349798A JP3242411B2 (ja) 1996-09-13 1997-09-11 マスク走査型レーザマーカ及びその走査方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP26381196 1996-09-13
JP8/263811 1996-09-13

Publications (1)

Publication Number Publication Date
WO1998010885A1 true WO1998010885A1 (fr) 1998-03-19

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP1997/003201 WO1998010885A1 (fr) 1996-09-13 1997-09-11 Marqueur a laser pour balayage de masque et procede de balayage correspondant

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JP (1) JP3242411B2 (fr)
WO (1) WO1998010885A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008279472A (ja) * 2007-05-08 2008-11-20 Miyachi Technos Corp レーザマーキング装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01280719A (ja) * 1988-05-06 1989-11-10 Matsushita Electric Ind Co Ltd ビーム走査装置
JPH0318491A (ja) * 1989-06-15 1991-01-28 Komatsu Ltd レーザ印字装置
JPH0542379A (ja) * 1991-08-09 1993-02-23 Komatsu Ltd Ｙａｇレーザマスクマーカ
JPH05318149A (ja) * 1992-05-13 1993-12-03 Komatsu Ltd レーザマーカのｘｙ偏光器

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01280719A (ja) * 1988-05-06 1989-11-10 Matsushita Electric Ind Co Ltd ビーム走査装置
JPH0318491A (ja) * 1989-06-15 1991-01-28 Komatsu Ltd レーザ印字装置
JPH0542379A (ja) * 1991-08-09 1993-02-23 Komatsu Ltd Ｙａｇレーザマスクマーカ
JPH05318149A (ja) * 1992-05-13 1993-12-03 Komatsu Ltd レーザマーカのｘｙ偏光器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008279472A (ja) * 2007-05-08 2008-11-20 Miyachi Technos Corp レーザマーキング装置

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Publication number Publication date
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