WO1997042653A1 - Vorrichtung zur ortsgenauen fixierung eines mikrochips - Google Patents
Vorrichtung zur ortsgenauen fixierung eines mikrochips Download PDFInfo
- Publication number
- WO1997042653A1 WO1997042653A1 PCT/DE1997/000926 DE9700926W WO9742653A1 WO 1997042653 A1 WO1997042653 A1 WO 1997042653A1 DE 9700926 W DE9700926 W DE 9700926W WO 9742653 A1 WO9742653 A1 WO 9742653A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- microchip
- heating
- radiation
- optical
- imaging optics
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/005—Soldering by means of radiant energy
- B23K1/0056—Soldering by means of radiant energy soldering by means of beams, e.g. lasers, E.B.
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
- H05K13/046—Surface mounting
- H05K13/0465—Surface mounting by soldering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
Definitions
- T he invention relates to a device for the spatially exact Fixie ⁇ tion of a microchip on a support having a lung heating as Strah ⁇ formed heating means for supplying heat radiation for mounting of the microchip on the support by heating and soldering, whereby the heat radiation through an imaging optical system on the microchip and with an optical monitoring device which is assigned to the same imaging optics.
- microchip should be interpreted broadly. These can be, for example, semiconductor diodes or microlenses which are to be mounted with high precision on a carrier, which is also called a submount.
- microchip is picked up with a suction nozzle or a pair of pliers and brought into the desired position with the aid of micromanipulators.
- the exact setting of the position takes place with the aid of an image recognition system, which usually has a camera with a tube and an imaging optics and is located axially above the mounting position.
- the microchip is then lowered onto the respective carrier.
- the microchip and carrier are soldered or glued to one another by heating. Resistance heating, gas heating or also radiation heating can be considered as heating. This creates the problem that a large number of subcomponents for the heat source and the axial position monitoring have to be spatially installed next to one another in a system in a relatively narrow space. In addition, it is not always optimal to bring the heating energy into the correct position.
- the invention is based on the object of creating a device of the type mentioned at the outset, which is of particularly compact design and with which a particularly precise position tionation and fixation of the microchip on the carrier is possible.
- the object is achieved in that the optical monitoring device is designed as an optical position monitoring device for the precise adjustment of the microchip on the carrier.
- the main advantage of the invention is that the heating energy for soldering or gluing the microchip can be introduced directly into the microchip itself.
- the same imaging optics are used, which are used to observe the microchip and to control the adjustment position by means of the optical monitoring device. In this way, a coaxial optical power coupling is created for simultaneous adjustment and fixation.
- the optical position monitoring is arranged in an optical axis of the imaging optics.
- Radiation that can be recognized by position monitoring is supplied laterally and is reflected in the optical axis of the imaging optics with the aid of optical elements.
- Mirrors or, preferably, beam splitters are used for this.
- monitoring systems for monitoring and regulating the radiation power can be arranged behind the beam splitters.
- photodiodes can be used.
- the beam splitters are designed in such a way that more than 90% of the radiation power is directed towards the imaging optics and only a small remnant hits the photodiode.
- the optical position monitoring has a camera, a tube-shaped body and an imaging optical system, the camera preferably being arranged in the optical axis of the imaging optical system.
- a filter in particular an edge filter, is advantageously arranged in front of the camera, which filter is only permeable to the light of the optical position monitoring, that is to say to visible light or infrared light, and is impermeable to the wavelength of the heating radiation. This measure will the camera is effectively protected from the heating radiation of the heating device.
- a laser is preferably provided for generating the heating radiation, since a very high energy density can be achieved with it.
- NdYag lasers or a fiber-bundled high-power semiconductor laser system are particularly suitable here.
- a xenon vapor lamp or the like can also be used under certain circumstances.
- a light guide is provided for supplying the heating radiation to the device. If the light is radiated into the tube by means of a fiber or a fiber bundle, the tube structure can be made very small.
- optics are provided for parallelizing and regulating the focus of the radiant heat so that the focus positions for the radiant heat and the surveillance radiation can be brought into agreement.
- This optic also serves to first parallelize the radiant heat.
- a microchip 1 which rests on a carrier 2.
- the optical position monitoring 3 essentially consists of a camera 5, a tube 6 and an imaging optical system 4.
- the imaging optical system 4 has an optical axis 15 in which the camera 5 is arranged in a center.
- An illumination device 10 for image recognition generates visible or infrared light, which is fed into the tube 6 at the side. This light is deflected on the optical axis 15 in the direction of the microchip 1 via a beam splitter 8.
- the optical axis 15 extends axially in the center of the tube 6.
- optics 14 are provided for parallelizing the heating radiation, so that the heating radiation falls in parallel on a beam splitter 7 and is deflected by this to over 90% in the direction of imaging optics 4 and microchip 1.
- the parallelization optics 14 ensure that the heating radiation is also irradiated on the optical axis 15 of the imaging optics and the focus position of the heating radiation is adjustable and can, for example, match the focus position of the light for image recognition.
- the beam splitter 7 allows a small portion of the heating radiation to pass, so that this portion, which is below 10% of the radiation power, falls on a monitoring system 11, which has a photodiode as an essential component. With this monitoring system 11, the radiation energy can be measured and regulated according to the requirements.
- an edge filter 13 is provided, which is only permeable to the light of the lighting device and is impermeable in the wavelength range of the heating device.
- the camera 5 also has a connection 16 with which the recorded images are fed to a data processing system.
- the microchip is brought into this position with a micromanipulator and placed there. With the help of a light pulse, the microchip is fixed by the optics of the image recognition system. This ensures that the microchip is positioned exactly and that exactly the position that is to be heated is actually heated.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Plasma & Fusion (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Optical Couplings Of Light Guides (AREA)
- Laser Beam Processing (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP97923787A EP0953206B1 (de) | 1996-05-08 | 1997-05-07 | Vorrichtung zur ortsgenauen fixierung eines mikrochips |
JP9539436A JP2000509558A (ja) | 1996-05-08 | 1997-05-07 | マイクロチップを正確に位置固定するための装置 |
DE59712634T DE59712634D1 (de) | 1996-05-08 | 1997-05-07 | Vorrichtung zur ortsgenauen fixierung eines mikrochips |
US09/562,260 US6538229B1 (en) | 1996-05-08 | 2000-05-02 | Method for the positionally accurate adjustment and fixing of a microoptical element |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19618533A DE19618533A1 (de) | 1996-05-08 | 1996-05-08 | Vorrichtung zur ortsgenauen Fixierung von Mikrochips |
DE19618533.5 | 1996-05-08 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US18872898A Continuation | 1996-05-08 | 1998-11-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1997042653A1 true WO1997042653A1 (de) | 1997-11-13 |
Family
ID=7793734
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE1997/000926 WO1997042653A1 (de) | 1996-05-08 | 1997-05-07 | Vorrichtung zur ortsgenauen fixierung eines mikrochips |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP0953206B1 (de) |
JP (1) | JP2000509558A (de) |
KR (1) | KR20000010742A (de) |
CN (1) | CN1217819A (de) |
DE (2) | DE19618533A1 (de) |
WO (1) | WO1997042653A1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100489462B1 (ko) * | 2002-08-13 | 2005-05-12 | 현대모비스 주식회사 | 차량의 히터 제어 버튼의 구조 |
US10029330B2 (en) * | 2015-06-17 | 2018-07-24 | The Boeing Company | Hybrid laser machining of multi-material stack-ups |
KR20230045850A (ko) * | 2021-09-29 | 2023-04-05 | (주)레이저발테크놀러지 | 레이저 조사위치가 조절되는 레이저 솔더링 장치 및 이를 포함하는 솔더링 방법 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0209650A2 (de) * | 1985-06-07 | 1987-01-28 | Vanzetti Systems, Inc. | Verfahren und Vorrichtung zum Anordnen und elektrischen Verbinden von Bauelementen auf einer Leiterplatte |
EP0326020A2 (de) * | 1988-01-28 | 1989-08-02 | Microelectronics and Computer Technology Corporation | Verfahren und Vorrichtung zu Laserbonden |
EP0491192A2 (de) * | 1990-12-19 | 1992-06-24 | Ntn Corporation | Verfahren und Vorrichtung zur Laserbearbeitung |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63108983A (ja) * | 1986-10-27 | 1988-05-13 | Toshiba Corp | レ−ザ加工装置 |
JPH0694080B2 (ja) * | 1988-12-19 | 1994-11-24 | 三菱電機株式会社 | レーザ加工装置 |
US5164565A (en) * | 1991-04-18 | 1992-11-17 | Photon Dynamics, Inc. | Laser-based system for material deposition and removal |
NL193987C (nl) * | 1993-05-03 | 2001-04-03 | Iai Bv | Inrichting voor het oppakken, positioneren en door middel van laserlicht op een drager bevestigen van componenten. |
JPH0890272A (ja) * | 1994-09-19 | 1996-04-09 | Miyachi Technos Corp | レーザ装置 |
JPH08114502A (ja) * | 1994-10-17 | 1996-05-07 | Toppan Printing Co Ltd | 液体測色方法及び装置 |
-
1996
- 1996-05-08 DE DE19618533A patent/DE19618533A1/de not_active Withdrawn
-
1997
- 1997-05-07 CN CN97194423A patent/CN1217819A/zh active Pending
- 1997-05-07 EP EP97923787A patent/EP0953206B1/de not_active Expired - Lifetime
- 1997-05-07 DE DE59712634T patent/DE59712634D1/de not_active Expired - Fee Related
- 1997-05-07 JP JP9539436A patent/JP2000509558A/ja active Pending
- 1997-05-07 WO PCT/DE1997/000926 patent/WO1997042653A1/de active IP Right Grant
- 1997-05-07 KR KR1019980708855A patent/KR20000010742A/ko not_active Application Discontinuation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0209650A2 (de) * | 1985-06-07 | 1987-01-28 | Vanzetti Systems, Inc. | Verfahren und Vorrichtung zum Anordnen und elektrischen Verbinden von Bauelementen auf einer Leiterplatte |
EP0326020A2 (de) * | 1988-01-28 | 1989-08-02 | Microelectronics and Computer Technology Corporation | Verfahren und Vorrichtung zu Laserbonden |
EP0491192A2 (de) * | 1990-12-19 | 1992-06-24 | Ntn Corporation | Verfahren und Vorrichtung zur Laserbearbeitung |
Non-Patent Citations (2)
Title |
---|
"SENSOR-BASED LASER SCANNER LINKS SOLDER JOINT INTEGRITY TO PRODUCTION LINE PERFORMANCE", DESIGN ENGINEERING, June 1987 (1987-06-01), pages 25, 28, XP002028832 * |
RYABUKHO V P ET AL: "SOK-1 LASER OPTICAL SYSTEM WITH TELEVISION ATTACHMENT", INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, vol. 30, no. 6, PART 2, November 1987 (1987-11-01), pages 1494/1495, XP000045151 * |
Also Published As
Publication number | Publication date |
---|---|
CN1217819A (zh) | 1999-05-26 |
EP0953206B1 (de) | 2006-04-26 |
JP2000509558A (ja) | 2000-07-25 |
EP0953206A1 (de) | 1999-11-03 |
DE19618533A1 (de) | 1997-11-13 |
KR20000010742A (ko) | 2000-02-25 |
DE59712634D1 (de) | 2006-06-01 |
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