WO1997041414A1 - Schaltung zur temperaturkompensation eines wärmeleitungsvakuummeters - Google Patents
Schaltung zur temperaturkompensation eines wärmeleitungsvakuummeters Download PDFInfo
- Publication number
- WO1997041414A1 WO1997041414A1 PCT/EP1997/001184 EP9701184W WO9741414A1 WO 1997041414 A1 WO1997041414 A1 WO 1997041414A1 EP 9701184 W EP9701184 W EP 9701184W WO 9741414 A1 WO9741414 A1 WO 9741414A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- compensation
- branch
- temperature
- circuit
- heat conduction
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
- G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
Definitions
- the invention relates to a circuit for a heat conduction vacuum meter with the features of the preamble of claim 1.
- Thermal conduction vacuum gauges are used in a pressure range that extends from the upper end of the high vacuum range (approx. 10 ⁇ 4 mbar) to far into the rough vacuum range (approx. 1000 mbar).
- Heat conduction vacuum meters take advantage of the fact that more heat is dissipated from a temperature-dependent resistance element at higher gas pressures, that is to say with a higher particle number density, than at lower gas pressures.
- the temperature-dependent resistance element is, for example, a measuring wire which is connected to a Wheatstone bridge. In the Pirani vacuum meter, which is not valid, a change in the resistance of the measuring wire detunes the bridge, which is used as a measure of the pressure.
- the supply voltage at the bridge is constantly regulated in such a way that the resistance and thus the temperature of the measuring wire remain constant regardless of the heat output.
- the current required to keep the resistance value constant is a measure of the thermal conductivity and thus of the pressure of the gas.
- the Wheatstone's bridge is usually reduced to a minimum by adjusting the bridge supply voltage. Mood matched. The bridge supply voltage is thus the primary electrical value corresponding to the pressure.
- the ambient temperature of the measuring wire has a disruptive influence on the measuring principle, since it determines the thermal equilibrium of the measuring wire with its surroundings via radiation and heat conduction through fastening parts.
- it is known to switch a temperature-dependent resistor with a suitable characteristic into one of the branches of the Wheatstone bridge.
- this temperature compensation is inadequate since the voltage drop across the compensation resistor depends not only on the ambient temperature but also on the pressure of the gas. This results in the problem of inadequate temperature compensation in the pressure end regions which generally exists in the case of heat conduction vacuum meters.
- the present invention is based on the object of proposing a circuit for a heat conduction vacuum meter with which an accurate temperature compensation can be achieved in particular in the pressure end regions.
- the bridge circuit has, in addition to the first branch with the measuring resistor, at least two further branches with temperature-dependent compensation resistors, it is possible to use compensation resistors with different characteristics adapted to the pressure ranges for different pressure ranges. An overall improved temperature compensation, and especially in the pressure end areas, is possible. Further advantages and details of the invention will be explained with reference to an exemplary embodiment shown in the figure.
- the bridge circuit is designated by 1. It comprises the branch sections 2 to 5, 16, 17. Their different taps are designated 6 to 9, 18.
- Section 2 with resistor 11 and section 3 with measuring resistor or measuring wire 12 form the measuring branch of bridge 1.
- a first compensation branch comprises sections 4 and 5, which are each equipped with a temperature-independent resistor 13 and 14, respectively.
- section 5 or 4 provides the temperature-dependent resistor 15, which is used for temperature compensation in a manner known per se.
- Another compensation branch is provided parallel to the first compensation branch described. It comprises the sections 16, 17 and the intermediate tap 18. Both sections are each equipped with a temperature-independent resistor 21 and 22, respectively. Section 17 or 16 also contains the temperature-dependent resistor 23.
- the supply voltage UR is at the taps 6, 8 of the bridge circuit 1.
- the controlled Pirani it is controlled with the aid of the operational amplifier 24 in such a way that the measuring resistor 12 remains constant.
- the input 25 of the operational amplifier 24 is connected via line 26 to the intermediate tap 7 of the measuring branch and the input 27 via line 28 to one of the intermediate taps 9 or 18 of the compensation branches.
- the bridge supply voltage is the measure of the pressure.
- the voltage UR is supplied to the display instrument 32 in a manner known per se.
- the line 28 is connected via the line sections 33 and 34 to the taps 9 and 18 of the two compensation branches.
- the resistor 35 is located in one of the two sections, in the other there is, for example, a field effect transistor 36. With the aid of the voltage UG applied to the gate, the field effect transistor can be switched in such a way that one of the two intermediate taps 9, 18 can be selected can be connected to the input 27 of the operational amplifier 24.
- two compensation branches 4, 5 and 16, 17 are shown.
- One of the two resistors 15, 23 is expediently optimized for temperature compensation in the upper pressure range and the other for temperature compensation in the lower pressure range.
- the switchover from one compensation branch to the other is advantageously carried out in the middle pressure range.
- the switchover is fluid.
- the switching range can be selected via the voltage UQ.
- the number of the existing compensation branches can be increased accordingly.
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP97906191A EP0896659A1 (de) | 1996-04-30 | 1997-03-08 | Schaltung zur temperaturkompensation eines wärmeleitungsvakuummeters |
JP9538482A JP2000509151A (ja) | 1996-04-30 | 1997-03-08 | 熱伝導真空計の温度補償回路 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE1996117238 DE19617238A1 (de) | 1996-04-30 | 1996-04-30 | Schaltung zur Temperaturkompensation eines Wärmeleitungsvakuummeters |
DE19617238.1 | 1996-04-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1997041414A1 true WO1997041414A1 (de) | 1997-11-06 |
Family
ID=7792865
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP1997/001184 WO1997041414A1 (de) | 1996-04-30 | 1997-03-08 | Schaltung zur temperaturkompensation eines wärmeleitungsvakuummeters |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0896659A1 (de) |
JP (1) | JP2000509151A (de) |
DE (1) | DE19617238A1 (de) |
WO (1) | WO1997041414A1 (de) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004036169A1 (en) * | 2002-10-16 | 2004-04-29 | Helix Technology Corporation | Apparatus and methods for heat loss pressure measurement |
US6799468B2 (en) | 2000-05-31 | 2004-10-05 | Helix Technology Corporation | Apparatus and methods for heat loss pressure measurement |
WO2006020196A1 (en) * | 2004-07-28 | 2006-02-23 | Brooks Automation, Inc. | Method of operating a resistive heat-loss pressure sensor |
US7249516B2 (en) | 2004-07-28 | 2007-07-31 | Brooks Automation, Inc. | Method of operating a resistive heat-loss pressure sensor |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102471346B1 (ko) * | 2022-06-24 | 2022-11-29 | (주)아토벡 | 진공압력산출장치 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2105047A (en) * | 1981-08-28 | 1983-03-16 | British Oxygen Co Ltd | Pirani gauges |
US5069066A (en) * | 1990-05-10 | 1991-12-03 | Djorup Robert Sonny | Constant temperature anemometer |
DE4308433A1 (de) * | 1993-03-17 | 1994-09-22 | Leybold Ag | Wärmeleitungsvakuummeter mit Meßzelle, Meßgerät und Verbindungskabel |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2460873A (en) * | 1945-01-01 | 1949-02-08 | Dayton H Clewell | Vacuum gauge |
DE1029599B (de) * | 1953-11-27 | 1958-05-08 | Heraeus Gmbh W C | Heissleitervakuummeter |
DE1699150U (de) * | 1954-05-31 | 1955-05-26 | Patra Patent Treuhand | Vakuummesser. |
US3290928A (en) * | 1964-06-10 | 1966-12-13 | Boeing Co | Temperature compensated strain gage and circuit |
DE2157842C3 (de) * | 1971-11-22 | 1974-11-21 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Anordnung zur Temperaturkompensation für Meßbrücken |
GB1515611A (en) * | 1976-03-11 | 1978-06-28 | Rosemount Eng Co Ltd | Electric circuits |
GB8407192D0 (en) * | 1984-03-20 | 1984-04-26 | Lucas Ind Plc | Circuit |
DD296353A5 (de) * | 1990-06-28 | 1991-11-28 | Hochvakuum Dresden,De | Schaltungsanordnung zur korrektur des temperaturfehlers von waermeleitungsvakuummetern |
DE4205551A1 (de) * | 1992-02-24 | 1993-08-26 | Leybold Ag | Schaltung zur temperaturkompensation eines geregelten waermeleitungsvakuummeters |
DE4308434A1 (de) * | 1993-03-17 | 1994-09-22 | Leybold Ag | Temperaturkompensation bei einem geregelten Wärmeleitungsvakuummeter |
-
1996
- 1996-04-30 DE DE1996117238 patent/DE19617238A1/de not_active Withdrawn
-
1997
- 1997-03-08 WO PCT/EP1997/001184 patent/WO1997041414A1/de not_active Application Discontinuation
- 1997-03-08 EP EP97906191A patent/EP0896659A1/de not_active Ceased
- 1997-03-08 JP JP9538482A patent/JP2000509151A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2105047A (en) * | 1981-08-28 | 1983-03-16 | British Oxygen Co Ltd | Pirani gauges |
US5069066A (en) * | 1990-05-10 | 1991-12-03 | Djorup Robert Sonny | Constant temperature anemometer |
DE4308433A1 (de) * | 1993-03-17 | 1994-09-22 | Leybold Ag | Wärmeleitungsvakuummeter mit Meßzelle, Meßgerät und Verbindungskabel |
Non-Patent Citations (1)
Title |
---|
J. ENGLISH ET AL.: "a wide range constant-resistance Pirani gauge with ambient temperature compensation", JOURNAL OF SCIENTIFIC INSTRUMENTS, vol. 42, no. 2, 1 February 1965 (1965-02-01), pages 77 - 80, XP002034384 * |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6938493B2 (en) | 1997-07-21 | 2005-09-06 | Helix Technology Corporation | Apparatus and methods for heat loss pressure measurement |
US6945119B2 (en) | 1997-07-21 | 2005-09-20 | Helix Technology Corporation | Apparatus and methods for heat loss pressure measurement |
US6799468B2 (en) | 2000-05-31 | 2004-10-05 | Helix Technology Corporation | Apparatus and methods for heat loss pressure measurement |
KR100809164B1 (ko) * | 2000-05-31 | 2008-02-29 | 헬릭스 테크놀로지 코포레이션 | 환경 내의 가스 압력을 측정하는 열손실 게이지, 및 그것을 형성하는 방법 |
WO2004036169A1 (en) * | 2002-10-16 | 2004-04-29 | Helix Technology Corporation | Apparatus and methods for heat loss pressure measurement |
FR2847982A1 (fr) * | 2002-10-16 | 2004-06-04 | Helix Tech Corp | Dispositif et procedes pour la mesure de la pression de pertes de chaleur |
US6865952B2 (en) | 2002-10-16 | 2005-03-15 | Helix Technology Corporation | Apparatus and methods for heat loss pressure measurement |
CN100374839C (zh) * | 2002-10-16 | 2008-03-12 | 布鲁克斯自动化有限公司 | 用于热损失压力测量的装置和方法 |
WO2006020196A1 (en) * | 2004-07-28 | 2006-02-23 | Brooks Automation, Inc. | Method of operating a resistive heat-loss pressure sensor |
US7249516B2 (en) | 2004-07-28 | 2007-07-31 | Brooks Automation, Inc. | Method of operating a resistive heat-loss pressure sensor |
Also Published As
Publication number | Publication date |
---|---|
JP2000509151A (ja) | 2000-07-18 |
EP0896659A1 (de) | 1999-02-17 |
DE19617238A1 (de) | 1997-11-06 |
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