WO1997029391A1 - Dispositif de detection de la presence d'un objet electro-conducteur - Google Patents

Dispositif de detection de la presence d'un objet electro-conducteur Download PDF

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Publication number
WO1997029391A1
WO1997029391A1 PCT/SE1996/000180 SE9600180W WO9729391A1 WO 1997029391 A1 WO1997029391 A1 WO 1997029391A1 SE 9600180 W SE9600180 W SE 9600180W WO 9729391 A1 WO9729391 A1 WO 9729391A1
Authority
WO
WIPO (PCT)
Prior art keywords
capacitive
sensor element
sensor
driving signal
driving
Prior art date
Application number
PCT/SE1996/000180
Other languages
English (en)
Inventor
Bengt Allan Bergvall
Tommy Fristedt
Original Assignee
Scandmec Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Scandmec Ab filed Critical Scandmec Ab
Priority to PCT/SE1996/000180 priority Critical patent/WO1997029391A1/fr
Priority to AU51289/96A priority patent/AU5128996A/en
Publication of WO1997029391A1 publication Critical patent/WO1997029391A1/fr

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01VGEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V3/00Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation
    • G01V3/08Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation operating with magnetic or electric fields produced or modified by objects or geological structures or by detecting devices
    • G01V3/088Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation operating with magnetic or electric fields produced or modified by objects or geological structures or by detecting devices operating with electric fields
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B60VEHICLES IN GENERAL
    • B60RVEHICLES, VEHICLE FITTINGS, OR VEHICLE PARTS, NOT OTHERWISE PROVIDED FOR
    • B60R21/00Arrangements or fittings on vehicles for protecting or preventing injuries to occupants or pedestrians in case of accidents or other traffic risks
    • B60R21/01Electrical circuits for triggering passive safety arrangements, e.g. airbags, safety belt tighteners, in case of vehicle accidents or impending vehicle accidents
    • B60R21/015Electrical circuits for triggering passive safety arrangements, e.g. airbags, safety belt tighteners, in case of vehicle accidents or impending vehicle accidents including means for detecting the presence or position of passengers, passenger seats or child seats, and the related safety parameters therefor, e.g. speed or timing of airbag inflation in relation to occupant position or seat belt use
    • B60R21/01512Passenger detection systems
    • B60R21/0153Passenger detection systems using field detection presence sensors
    • B60R21/01532Passenger detection systems using field detection presence sensors using electric or capacitive field sensors
    • GPHYSICS
    • G08SIGNALLING
    • G08BSIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B13/00Burglar, theft or intruder alarms
    • G08B13/22Electrical actuation
    • G08B13/26Electrical actuation by proximity of an intruder causing variation in capacitance or inductance of a circuit
    • GPHYSICS
    • G08SIGNALLING
    • G08BSIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B21/00Alarms responsive to a single specified undesired or abnormal condition and not otherwise provided for
    • G08B21/18Status alarms
    • G08B21/22Status alarms responsive to presence or absence of persons
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03KPULSE TECHNIQUE
    • H03K17/00Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/94Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
    • H03K17/945Proximity switches
    • H03K17/955Proximity switches using a capacitive detector

Definitions

  • the present invention relates to an arrangement for detecting the presence of electrically conducting objects in a certain area.
  • An arrangement emits a driving signal in the shape of an alternating current, to drive a capacitive sensor element.
  • An arrangement detects the difference in capacitance which is present between the sensor element and surrounding objects, both in the presence and absence of objects.
  • the extremities of a passenger in the rear seat can, when driving, be pressed into the back-rest of the seat from behind, or into the seat from below. These extremities are electrically conducting, and in the same way as has been described above regarding the frame, cause a large spread in the detection distance to the person in front.
  • the object of the present invention is to reduce the influence of larger capacitances, and thereby to increase the reliability of capacitive detection devices.
  • the said object is achieved by means of a detection device according to the present invention, which is characterized in that a second capacitive element is arranged to be driven in counter-phase relative to said first driving signal.
  • the invention is characterized in that a second capacitive element is formed by a screening element, which load-wise is isolated from said sensor plate but maintains essentially the same potential as it.
  • Fig. 1 schematically shows a first example of an embodiment of a detection device according to the invention
  • Fig. 2 schematically shows a second example of an embodiment
  • Fig. 3 schematically shows a third example of an embodiment
  • Fig. 4 shows a perspective view of an example of the location of the capacitive elements in the example shown in Fig. 3.
  • All of the examples of embodiments show a very essential application for the detection device according to the invention, which is the detection of absence or presence of a person with regard to a defined detection area in the seat of a vehicle.
  • the purpose of the detection is, for example, to deactivate an air-bag when absence is detected with regard to the detection area, so that the air-bag is not triggered unnecessarily, or causes injuries due to the fact that a child-seat is being used, or that the person is in an unsuitable position in the seat of the vehicle.
  • the detection area is suitably chosen to comprise a limited part of the area of the vehicle seat, so that detected presence does not mean that a person is in the seat, instead detection of presence will require that the person sits essentially reclined in the seat, or at a certain maximal distance from the back-rest.
  • lines and dots show a person 1 in a correct position in a vehicle seat 2 which is also indicated with lines and dots, i.e. the person is sitting on the seat 3 and is essentially reclined towards the back-rest 4'.
  • the person is thus in the detection area of the detection device, which can for example have a vertical extension which starts a distance from the lower end of the back- rest, and extends a few decimeter upwards, and extends in the direction towards the back of the person a distance of one or a few decimeters in front of the back-rest.
  • Fig. 1 shows a first example of an embodiment of a detection device 4 according to the invention, in an embodiment with a so-called double-system, which does not need a reference point such as the chassis of the car or some other electrically conducing surface with a relatively large capacitance between it and the person or the chassis.
  • the device according to Fig. 1 is provided with an arrangement 23 to emit two separate driving signals 24, 25 to one driving plate 6, 27 each, with the two driving signals being at counter-phase relative to each other.
  • the driving plates are arranged to drive one sensor plate 5, 29 each, wherein both the driving plates and the sensor plates are arranged in the back-rest in the example shown.
  • a corresponding system can alternatively, or as a complement be arranged in the seat 3 of the vehicle seat.
  • the two sensor plates 5, 29 are connected to the voltage detection device 30, which is arranged to emit a signal 31 depending on whether a person is present or absent relative to the detection area.
  • the voltage detected in the detector 30 varies depending on the variable capacitance 14, 33 between the sensor plates 5, 29 and the person 1.
  • the capacitances 14, 33 between the sensor plates 5, 29 and the surroundings thus varies depending on whether a person is present, i.e. is sitting correctly in the chair or not. Absence can thus be indicated when a person is in a "wrong" position with risk for injuries, for example leaning forwards, or when, for example, a child-seat is being used.
  • the double-system can also be designed using only one sensor plate 5/29, in which case the detector 30 only receives one signal in. Due to the counter-phase signal the person does not receive an alternating currency signal, for which reason his contact with the chassis does not influence the system.
  • Fig. 2 shows a modified embodiment of the example from Fig. 1, in which the principle with a double-system is used, but in which the driving plates have been replaced with screening plates 34, 35, which are arranged in essentially the same way as the driving plates, but in which the two driving signals from the arrangement 23 which emits driving signals 24, 25 directly drive the sensor plates 28, 29.
  • the screening plates 34, 35 are driven with essentially the same alternating voltage as the sensor plates, via a so- called buffer 36, 37, which load-wise isolates the screening plates from the sensor plates but sees to it that they maintain essentially the same alternating voltage, so that only a small alternating current passes between the sensor plates and a corresponding screening plate.
  • the electronic buffer 36, 37 must also have the ability to give the screening plates 34, 35 the same alternating voltage as the sensor plate, or at least essentially the same voltage, even when the capacitance between the screening plate and surrounding objects varies.
  • the detector device 30 for example comprises parts of a bridge connection, while the capacitance between the sensor plates 28, 29 and the person 1 are elements in the bridge connection.
  • the numeral 40 denotes a synchronization signal for the synchronization of the detector, whereby interfering signals of another frequency than the frequency of the system are suppressed.
  • Fig. 3 shows a third example of an embodiment of the detection device according to the invention, which comprises another kind of capacitive element 41, a so- called bias plate, which is driven by a driving signal 42 which is inverted, i.e. in counter-phase relative to the driving signal which drives the sensor plate 28.
  • This bias plate 41 can be combined with any other capacitive measuring system, i.e. a single system with a screening plate or a driving plate, or a double-system with screening plates and driving plates, alternatively in combination with previously known systems.
  • the embodiment of Fig. 3 shows a combination of a directly driven sensor plate 28, a screening plate 34 driven with a buffer 36, and the bias plate 41. In similarity with the double-system of Fig.
  • the sensor plate 28 is fed with a driving signal 24 which is an alternating current from a device 43 for the generation of alternating voltage, while the driving plate 6 is fed with an alternating current with essentially the same driving voltage, but via the buffer 36.
  • the bias plate 41 is connected to the device for generating voltage 43 via an inverter 44 which to the bias plate emits an inverted driving signal, i.e. in counter-phase.
  • the bias plate 41 is preferably mechanically so arranged that it has the smallest possible capacitance with the sensor plate 28, and thus has the smallest possible surface towards the sensor plate.
  • the plates are in Fig. 3 shown in a perspective view to indicate an example of the mechanical positions of the plates.
  • sensor plate 28 and the bias plate 41 are in essentially the same plane, and the bias plate at least partially surrounds the sensor plate in this plane.
  • the bias plate 41 for this reason is essentially U-shaped and partially surrounds an area in which the sensor plate is arranged.
  • the bias plate can be ring-shaped and surround an area in which the sensor plate is arranged.
  • the screening plate 34 is in both cases directly in front of the sensor plate, and has essentially the same extension as the sensor plate. By means of a detector 30, the voltage over the sensor plate 28 and the screening plate 34 is detected, and a comparison is made with a reference value and a signal 45 is emitted depending on whether a person 1 is within the detection area in front of the back-rest of the seat or not.
  • bias plate 41 which thus serves as a driving plate, an essentially doubled voltage to the voltage detector 44 is obtained relative to a system without a bias plate, and thus a reduced sensitivity to interferences and an increased reliability in operation.
  • the electronics is advantageously arranged for example underneath the seat of the vehicle.
  • a shielded feeder cable is suitably used.
  • the shield of the cable can be connected to the capacitive element which serves as a screen or driving surface.
  • the capacitive elements can be arranged in different places and in different numbers in the seat of the vehicle.
  • the capacitive elements can also be arranged in connection to an air-bag in order to, from the position of the air-bag, detect presence or absence with reference to a detection area.
  • the detection can also relate to electrically conducting objects other than people, seats for children can, for example, be equipped with an electrically conducting element, for example a foil in the back-rest, in order to deactivate a detection device according to the invention which has been placed in connection to the air-bag.
  • the detection device can be used in entirely different fields than in vehicles. The detection can for example be used within the manufacturing industry to detect absence or presence relative to a detection area.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Remote Sensing (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Emergency Management (AREA)
  • Electromagnetism (AREA)
  • Business, Economics & Management (AREA)
  • Environmental & Geological Engineering (AREA)
  • Geology (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geophysics (AREA)
  • Mechanical Engineering (AREA)
  • Seats For Vehicles (AREA)
  • Geophysics And Detection Of Objects (AREA)

Abstract

L'invention concerne un dispositif de détection de la présence d'un objet électro-conducteur (1) dans une zone prédéterminée. Ce dispositif comprend un élément (23) destiné à émettre un signal de commande se présentant sous la forme d'un courant alternatif. Il comprend également un élément détecteur capacitif (5) et un dispositif (30) permettant de détecter le changement de capacitance entre l'élément détecteur et l'environnement, ce changement étant dû à la présence ou à l'absence d'un objet. Un second élément capacitif est formé par un second élément détecteur (29) qui est commandé par un second signal de commande (25) se trouvant en contre-phase par rapport au premier signal de commande (24). Selon une autre variante, le second élément capacitif peut se présenter sous la forme d'un élément de filtrage qui, à la manière d'une charge, est isolé de l'élément détecteur mais conserve principalement le même potentiel que ce dernier.
PCT/SE1996/000180 1996-02-09 1996-02-09 Dispositif de detection de la presence d'un objet electro-conducteur WO1997029391A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/SE1996/000180 WO1997029391A1 (fr) 1996-02-09 1996-02-09 Dispositif de detection de la presence d'un objet electro-conducteur
AU51289/96A AU5128996A (en) 1996-02-09 1996-02-09 Device for sensing presence of an electrically conducting object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SE1996/000180 WO1997029391A1 (fr) 1996-02-09 1996-02-09 Dispositif de detection de la presence d'un objet electro-conducteur

Publications (1)

Publication Number Publication Date
WO1997029391A1 true WO1997029391A1 (fr) 1997-08-14

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/SE1996/000180 WO1997029391A1 (fr) 1996-02-09 1996-02-09 Dispositif de detection de la presence d'un objet electro-conducteur

Country Status (2)

Country Link
AU (1) AU5128996A (fr)
WO (1) WO1997029391A1 (fr)

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2319997A (en) * 1996-12-04 1998-06-10 Autoliv Dev Airbag arrangement sensing proximity of a vehicle occupant
GB2333160A (en) * 1998-01-12 1999-07-14 Honda Motor Co Ltd Vehicle occupant detecting system
DE19812626A1 (de) * 1998-03-23 1999-09-30 Bayerische Motoren Werke Ag Verfahren zur kapazitiven Objekterkennung bei Fahrzeugen
LU90242B1 (de) * 1998-05-13 1999-11-15 Iee Sarl Kapazitives messsystem
EP0993993A1 (fr) * 1998-10-16 2000-04-19 Bayerische Motoren Werke Aktiengesellschaft Procédé de reconnaisance capacitive d'object pour vehicules
EP0838697A3 (fr) * 1996-10-25 2001-01-03 I.E.E. International Electronics & Engineering S.à.r.l. Dispositif de sondage d'un corps conducteur et son application à la commande d'un système airbag d'un véhicule
GB2360597A (en) * 1998-01-12 2001-09-26 Honda Motor Co Ltd Vehicle occupant detecting system
JP2001287619A (ja) * 2000-03-03 2001-10-16 Bayerische Motoren Werke Ag 車両における容量性の対象検知のための方法
JP2001296370A (ja) * 2000-03-03 2001-10-26 Bayerische Motoren Werke Ag 車両における容量性の対象検知のための方法
FR2826723A1 (fr) * 2001-06-28 2003-01-03 Hitachi Comp Products Europ Sa Systeme de mesure capacitif
WO2003007476A2 (fr) * 2001-07-09 2003-01-23 Nartron Corporation Capteur a capacitance compressible pour la determination de la presence d'un objet
EP1342627A3 (fr) * 2002-03-04 2004-11-17 Motorola, Inc. Détection du poids de l'occupant d'un siège par la déformation du coussin
WO2008046514A2 (fr) * 2006-10-13 2008-04-24 Brose Fahrzeugteile Gmbh & Co. Kommanditgesellschaft, Coburg Capteur anti-pincement
US7545270B2 (en) 2003-08-14 2009-06-09 Jaguar Cars Limited Capacitive proximity sensor with user
WO2011080309A1 (fr) * 2009-12-31 2011-07-07 Mapper Lithography Ip B.V. Système de détection capacitive avec paires différentielles
US8175774B2 (en) 2008-05-16 2012-05-08 Infineon Technologies Ag Capacitive object recognition using adjustable electrode
EP2661812B1 (fr) 2011-01-04 2015-05-06 Microchip Technology Germany II GmbH & Co. KG Dispositif de capteur et procédé de détection d'approche capacitive
WO2016172459A3 (fr) * 2015-04-22 2017-01-12 Microchip Technology Incorporated Système de capteur capacitif à multiples électrodes de transmission
JP2021521428A (ja) * 2018-04-13 2021-08-26 タクチュアル ラブズ シーオー. 運動を向上した検出

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3764861A (en) * 1972-07-31 1973-10-09 Chrysler Corp Electronic seat sensing switch
WO1986002506A2 (fr) * 1984-10-15 1986-04-24 Memco-Med Limited Commande automatique utilisant des detecteurs de proximite
EP0518836A1 (fr) * 1991-06-06 1992-12-16 GOVERNMENT OF THE UNITED STATES OF AMERICA as represented by THE ADMINISTRATOR OF THE NATIONAL AERONAUTICS AND SPACE ADM. Initiateur d'approche capacitif avec blindage alimenté
US5373245A (en) * 1993-07-12 1994-12-13 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Capaciflector camera
US5442347A (en) * 1993-01-25 1995-08-15 The United States Of America As Represented By The Administrater, National Aeronautics & Space Administration Double-driven shield capacitive type proximity sensor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3764861A (en) * 1972-07-31 1973-10-09 Chrysler Corp Electronic seat sensing switch
WO1986002506A2 (fr) * 1984-10-15 1986-04-24 Memco-Med Limited Commande automatique utilisant des detecteurs de proximite
EP0518836A1 (fr) * 1991-06-06 1992-12-16 GOVERNMENT OF THE UNITED STATES OF AMERICA as represented by THE ADMINISTRATOR OF THE NATIONAL AERONAUTICS AND SPACE ADM. Initiateur d'approche capacitif avec blindage alimenté
US5442347A (en) * 1993-01-25 1995-08-15 The United States Of America As Represented By The Administrater, National Aeronautics & Space Administration Double-driven shield capacitive type proximity sensor
US5373245A (en) * 1993-07-12 1994-12-13 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Capaciflector camera

Cited By (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0838697A3 (fr) * 1996-10-25 2001-01-03 I.E.E. International Electronics & Engineering S.à.r.l. Dispositif de sondage d'un corps conducteur et son application à la commande d'un système airbag d'un véhicule
GB2319997A (en) * 1996-12-04 1998-06-10 Autoliv Dev Airbag arrangement sensing proximity of a vehicle occupant
GB2333160A (en) * 1998-01-12 1999-07-14 Honda Motor Co Ltd Vehicle occupant detecting system
US6356194B1 (en) 1998-01-12 2002-03-12 Honda Giken Kogyo Kabushiki Kaisha Occupant detecting system
GB2360597B (en) * 1998-01-12 2002-08-28 Honda Motor Co Ltd Occupant detecting system
GB2333160B (en) * 1998-01-12 2002-08-28 Honda Motor Co Ltd Occupant detecting system
GB2360597A (en) * 1998-01-12 2001-09-26 Honda Motor Co Ltd Vehicle occupant detecting system
WO1999048727A1 (fr) * 1998-03-23 1999-09-30 Bayerische Motoren Werke Aktiengesellschaft Procede de detection capacitive d'objets dans les vehicules
DE19812626A1 (de) * 1998-03-23 1999-09-30 Bayerische Motoren Werke Ag Verfahren zur kapazitiven Objekterkennung bei Fahrzeugen
WO1999059003A1 (fr) * 1998-05-13 1999-11-18 I.E.E. International Electronics & Engineering S.A.R.L. Systeme de mesure capacitif et procede de mesure pour un tel systeme
LU90242B1 (de) * 1998-05-13 1999-11-15 Iee Sarl Kapazitives messsystem
DE19847750A1 (de) * 1998-10-16 2000-04-20 Bayerische Motoren Werke Ag Verfahren zur kapazitiven Objekterkennung bei Fahrzeugen
EP0993993A1 (fr) * 1998-10-16 2000-04-19 Bayerische Motoren Werke Aktiengesellschaft Procédé de reconnaisance capacitive d'object pour vehicules
US6437695B1 (en) 1998-10-16 2002-08-20 Bayerische Motoren Werke Aktiengesellschaft Method for capacitive object recognition in vehicles
US6577142B2 (en) 2000-03-03 2003-06-10 Bayerische Motoren Werke Aktiengesellschaft Process for the capacitive object detection in the case of vehicles
EP1129894A3 (fr) * 2000-03-03 2003-01-15 Bayerische Motoren Werke Aktiengesellschaft Procédé de reconnaisance capacitive d'objet pour véhicules
EP1129893A3 (fr) * 2000-03-03 2003-01-15 Bayerische Motoren Werke Aktiengesellschaft Procédé de reconnaisance capacitive d'objet pour véhicules
JP2001287619A (ja) * 2000-03-03 2001-10-16 Bayerische Motoren Werke Ag 車両における容量性の対象検知のための方法
JP2001296370A (ja) * 2000-03-03 2001-10-26 Bayerische Motoren Werke Ag 車両における容量性の対象検知のための方法
JP4658352B2 (ja) * 2000-03-03 2011-03-23 バイエリッシェ モートーレン ウエルケ アクチエンゲゼルシャフト 車両における容量性の対象検知のための方法
JP4621369B2 (ja) * 2000-03-03 2011-01-26 バイエリッシェ モートーレン ウエルケ アクチエンゲゼルシャフト 車両における容量性の対象検知のための方法
FR2826723A1 (fr) * 2001-06-28 2003-01-03 Hitachi Comp Products Europ Sa Systeme de mesure capacitif
WO2003002949A2 (fr) * 2001-06-28 2003-01-09 Hitachi Computer Products (Europe Sa) Systeme de mesure capacitif
WO2003002949A3 (fr) * 2001-06-28 2003-03-20 Hitachi Comp Products Europ Sa Systeme de mesure capacitif
EP1933461A1 (fr) * 2001-07-09 2008-06-18 Nartron Corporation Capteur de capacité compressible pour déterminer la présence d'un objet
WO2003007476A2 (fr) * 2001-07-09 2003-01-23 Nartron Corporation Capteur a capacitance compressible pour la determination de la presence d'un objet
WO2003007476A3 (fr) * 2001-07-09 2005-05-19 Nartron Corp Capteur a capacitance compressible pour la determination de la presence d'un objet
EP1342627A3 (fr) * 2002-03-04 2004-11-17 Motorola, Inc. Détection du poids de l'occupant d'un siège par la déformation du coussin
US7545270B2 (en) 2003-08-14 2009-06-09 Jaguar Cars Limited Capacitive proximity sensor with user
US7821275B2 (en) 2006-10-13 2010-10-26 Brose Fahrzeugteile Gmbh & Co. Kommanditgesellschaft Anti-pinch sensor
WO2008046514A3 (fr) * 2006-10-13 2008-06-12 Brose Fahrzeugteile Capteur anti-pincement
WO2008046514A2 (fr) * 2006-10-13 2008-04-24 Brose Fahrzeugteile Gmbh & Co. Kommanditgesellschaft, Coburg Capteur anti-pincement
US8175774B2 (en) 2008-05-16 2012-05-08 Infineon Technologies Ag Capacitive object recognition using adjustable electrode
JP2013516602A (ja) * 2009-12-31 2013-05-13 マッパー・リソグラフィー・アイピー・ビー.ブイ. 差動ペアを備えた静電容量感知システム
RU2559993C2 (ru) * 2009-12-31 2015-08-20 МЭППЕР ЛИТОГРАФИ АйПи Б.В. Емкостная измерительная система с дифференциальными парами
JP2013516601A (ja) * 2009-12-31 2013-05-13 マッパー・リソグラフィー・アイピー・ビー.ブイ. 静電容量感知システム
WO2011080309A1 (fr) * 2009-12-31 2011-07-07 Mapper Lithography Ip B.V. Système de détection capacitive avec paires différentielles
US8638109B2 (en) 2009-12-31 2014-01-28 Mapper Lithography Ip B.V. Capacitive sensing system with differential pairs
KR101454727B1 (ko) * 2009-12-31 2014-10-27 마퍼 리쏘그라피 아이피 비.브이. 차동 쌍들을 가진 용량성 감지 시스템
CN105716630A (zh) * 2009-12-31 2016-06-29 迈普尔平版印刷Ip有限公司 一种用于光刻机器的集成传感器系统的电容式感测系统
CN102782444A (zh) * 2009-12-31 2012-11-14 迈普尔平版印刷Ip有限公司 具有差动对的电容式感测系统
CN102782444B (zh) * 2009-12-31 2015-11-25 迈普尔平版印刷Ip有限公司 具有差动对的电容式感测系统
EP2661812B1 (fr) 2011-01-04 2015-05-06 Microchip Technology Germany II GmbH & Co. KG Dispositif de capteur et procédé de détection d'approche capacitive
US9733290B2 (en) 2011-01-04 2017-08-15 Microchip Technology Incorporated Sensor device and method for capacitive approximation detection
WO2016172459A3 (fr) * 2015-04-22 2017-01-12 Microchip Technology Incorporated Système de capteur capacitif à multiples électrodes de transmission
US10108292B2 (en) 2015-04-22 2018-10-23 Microchip Technology Incorporated Capacitive sensor system with multiple transmit electrodes
JP2021521428A (ja) * 2018-04-13 2021-08-26 タクチュアル ラブズ シーオー. 運動を向上した検出

Also Published As

Publication number Publication date
AU5128996A (en) 1997-08-28

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