WO1997025723A3 - Röntgenmikroskop mit zonenplatten - Google Patents

Röntgenmikroskop mit zonenplatten Download PDF

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Publication number
WO1997025723A3
WO1997025723A3 PCT/DE1997/000045 DE9700045W WO9725723A3 WO 1997025723 A3 WO1997025723 A3 WO 1997025723A3 DE 9700045 W DE9700045 W DE 9700045W WO 9725723 A3 WO9725723 A3 WO 9725723A3
Authority
WO
WIPO (PCT)
Prior art keywords
zone plates
ray
microscopes
condensers
resolution
Prior art date
Application number
PCT/DE1997/000045
Other languages
English (en)
French (fr)
Other versions
WO1997025723A2 (de
Inventor
Gerd Schneider
Original Assignee
Niemann Bastian
Gerd Schneider
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Niemann Bastian, Gerd Schneider filed Critical Niemann Bastian
Priority to DE59703140T priority Critical patent/DE59703140D1/de
Priority to US09/101,552 priority patent/US6167112A/en
Priority to EP97919244A priority patent/EP0873566B1/de
Publication of WO1997025723A2 publication Critical patent/WO1997025723A2/de
Publication of WO1997025723A3 publication Critical patent/WO1997025723A3/de

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Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K7/00—Gamma- or X-ray microscopes
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2207/00—Particular details of imaging devices or methods using ionizing electromagnetic radiation such as X-rays or gamma rays
    • G21K2207/005—Methods and devices obtaining contrast from non-absorbing interaction of the radiation with matter, e.g. phase contrast

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

Die Erfindung beschreibt lichtstarke Zonenplatten (4), die für ein hochauflösendes Röntgenmikroskop als Kondensoren und Röntgenobjektive vorgesehen sind. Sie besitzen einen hohen Beugungswirkungsgrad in einer hohen Beugungsordnung, was durch ein hohes Aspektverhältnis (H/P) und ein geeignet eingestelltes Strich/Lücke-Verhältnis (P1/P2) kleiner 1 erreicht wird. Zusätzliche Verbesserungen können durch Zonen (6, 7) erzielt werden, die zur optischen Achse (3) geneigt sind. Die Zonenplatten (4) können auch in Braggreflexion betrieben werden. Damit stehen effiziente Optiken mit hoher numerischer Apertur zur Verfügung. Mit ihnen sind Röntgenmikroskope mit 10 nm Auflösung möglich. Dabei können die Zonenplatten (4) relativ grob strukturiert sein. Deshalb sind sie leicht und in vergleichsweise kurzer Zeit herzustellen. Die Zonenplatten (4) hoher numerischer Apertur lassen sich besonders vorteilhaft in Laborröntgenmikroskopen als kleine Kondensoren einsetzen, da sie aus einem besonders hohen Raumwinkel Licht einer Mikroplasma-Röntgenstrahlungsquelle auffangen und auf das Objekt fokussieren können.
PCT/DE1997/000045 1996-01-12 1997-01-13 Röntgenmikroskop mit zonenplatten WO1997025723A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE59703140T DE59703140D1 (de) 1996-01-12 1997-01-13 Röntgenmikroskop mit zonenplatten
US09/101,552 US6167112A (en) 1996-01-12 1997-01-13 X-ray microscope with zone plates
EP97919244A EP0873566B1 (de) 1996-01-12 1997-01-13 Röntgenmikroskop mit zonenplatten

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19600895.6 1996-01-12
DE19600895 1996-01-12

Publications (2)

Publication Number Publication Date
WO1997025723A2 WO1997025723A2 (de) 1997-07-17
WO1997025723A3 true WO1997025723A3 (de) 1997-10-02

Family

ID=7782588

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE1997/000045 WO1997025723A2 (de) 1996-01-12 1997-01-13 Röntgenmikroskop mit zonenplatten

Country Status (4)

Country Link
US (1) US6167112A (de)
EP (1) EP0873566B1 (de)
DE (2) DE59703140D1 (de)
WO (1) WO1997025723A2 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3741411B2 (ja) * 1999-10-01 2006-02-01 株式会社リガク Ｘ線集光装置及びｘ線装置
US20050041779A1 (en) * 1999-11-24 2005-02-24 Btg International Limited X-ray zoom lens
US6762880B2 (en) * 2001-02-21 2004-07-13 Ibsen Photonics A/S Grating structures and methods of making the grating structures
US7365909B2 (en) * 2002-10-17 2008-04-29 Xradia, Inc. Fabrication methods for micro compounds optics
US7072442B1 (en) * 2002-11-20 2006-07-04 Kla-Tencor Technologies Corporation X-ray metrology using a transmissive x-ray optical element
US7119953B2 (en) * 2002-12-27 2006-10-10 Xradia, Inc. Phase contrast microscope for short wavelength radiation and imaging method
US7170969B1 (en) * 2003-11-07 2007-01-30 Xradia, Inc. X-ray microscope capillary condenser system
WO2005094318A2 (en) * 2004-03-29 2005-10-13 Jmar Research, Inc. Morphology and spectroscopy of nanoscale regions using x-rays generated by laser produced plasma
US7302043B2 (en) * 2004-07-27 2007-11-27 Gatan, Inc. Rotating shutter for laser-produced plasma debris mitigation
US7452820B2 (en) * 2004-08-05 2008-11-18 Gatan, Inc. Radiation-resistant zone plates and method of manufacturing thereof
US7466796B2 (en) * 2004-08-05 2008-12-16 Gatan, Inc. Condenser zone plate illumination for point X-ray sources
US20080240347A1 (en) * 2005-07-22 2008-10-02 Jmar Research, Inc. Method, apparatus, and system for extending depth of field (dof) in a short-wavelength microscope using wavefront encoding
US7331714B2 (en) * 2005-09-29 2008-02-19 Uchicago Argonne, Llc Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument
US7492989B2 (en) 2006-05-23 2009-02-17 Massachusetts Institute Of Technology Hybrid transmission-reflection grating
US8040601B1 (en) * 2007-06-22 2011-10-18 Allview Research Llc Projection screen using a bragg selective holographic element
US8541758B1 (en) * 2011-06-17 2013-09-24 Aqua Treatment Services, Inc. Ultraviolet reactor
US8481966B1 (en) * 2012-02-28 2013-07-09 Tiza Lab, L.L.C. Microplasma ion source for focused ion beam applications
US8674321B2 (en) * 2012-02-28 2014-03-18 Tiza Lab, L.L.C. Microplasma ion source for focused ion beam applications
US9887459B2 (en) * 2013-09-27 2018-02-06 Raytheon Bbn Technologies Corp. Reconfigurable aperture for microwave transmission and detection
US20160086681A1 (en) * 2014-09-24 2016-03-24 Carl Zeiss X-ray Microscopy, Inc. Zone Plate and Method for Fabricating Same Using Conformal Coating
CN108646330B (zh) * 2018-04-25 2020-12-25 深圳大学 一种全透波带片
JP2022069273A (ja) * 2020-10-23 2022-05-11 株式会社リガク 結像型ｘ線顕微鏡

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD129370A1 (de) * 1976-06-25 1978-01-11 Lutz Wolf Anordnung zur pruefung und messung von zu einer ebene symmetrisch gekruemmten flaechen
EP0286385A2 (de) * 1987-04-06 1988-10-12 Digital Scintigraphics, Inc. Zusammengesetzter Kollimator und Tomographie-Kamera
EP0475098A2 (de) * 1990-08-29 1992-03-18 Firma Carl Zeiss Röntgenmikroskop
US5199057A (en) * 1989-08-09 1993-03-30 Nikon Corporation Image formation-type soft X-ray microscopic apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD129370A1 (de) * 1976-06-25 1978-01-11 Lutz Wolf Anordnung zur pruefung und messung von zu einer ebene symmetrisch gekruemmten flaechen
EP0286385A2 (de) * 1987-04-06 1988-10-12 Digital Scintigraphics, Inc. Zusammengesetzter Kollimator und Tomographie-Kamera
US5199057A (en) * 1989-08-09 1993-03-30 Nikon Corporation Image formation-type soft X-ray microscopic apparatus
EP0475098A2 (de) * 1990-08-29 1992-03-18 Firma Carl Zeiss Röntgenmikroskop

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
DATABASE WPI Section Ch Week 7814, Derwent World Patents Index; Class D18, AN 78-25383A, XP002033431 *
DAVID C ET AL: "ELECTRON-BEAM GENERATED X-RAY OPTICS FOR HIGH RESOLUTION MICROSCOPY STUDIES", OPTIK, vol. 91, no. 3, 1 September 1992 (1992-09-01), pages 95 - 99, XP000294827 *
DI FABRIZIO E ET AL: "Fast proximity corrections for electron-beam-fabricated high resolution and high-aspect-ratio Fresnel zone plate", JAPANESE JOURNAL OF APPLIED PHYSICS, PART 1 (REGULAR PAPERS, SHORT NOTES & REVIEW PAPERS), MAY 1996, PUBLICATION OFFICE, JAPANESE JOURNAL APPL. PHYS, JAPAN, vol. 35, no. 5A, ISSN 0021-4922, pages 2855 - 2862, XP000677280 *
SCHNEIDER G ET AL: "Cross-linked polymers for nanofabrication of high-resolution zone plates in nickel and germanium X-ray microscopy", 29TH INTERNATIONAL CONFERENCE ON ELECTRON, ION, AND PHOTON BEAM TECHNOLOGY AND NANOFABRICATION, SCOTTSDALE, AZ, USA, 30 MAY-2 JUNE 1995, vol. 13, no. 6, ISSN 0734-211X, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (MICROELECTRONICS AND NANOMETER STRUCTURES), NOV.-DEC. 1995, AIP FOR AMERICAN VACUUM SOC, USA, pages 2809 - 2812, XP002033333 *

Also Published As

Publication number Publication date
US6167112A (en) 2000-12-26
EP0873566B1 (de) 2001-03-14
DE59703140D1 (de) 2001-04-19
WO1997025723A2 (de) 1997-07-17
DE19700880A1 (de) 1997-07-17
EP0873566A2 (de) 1998-10-28

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