Classifications

• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
  • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
  • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
  • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
  • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

Definitions

• the present invention relates to a speed sensor, and more particularly to a speed sensor using a Corioliser acting on a rotating object.
• a speed sensor is indispensable for grasping the running state of a vehicle and the flight state of an aircraft.
• speed sensors generally used in vehicles such as automobiles adopt a method in which the rotational speed of wheels is detected by a tachometer and the running speed of the vehicle is indirectly determined based on this rotational speed.
• speed sensors generally used in aircraft use a method in which the speed of a fluid is measured using a pitot tube or the like, and the flight speed is indirectly determined based on the flow speed.
• the measurement results are easily affected by the external environment, and it is difficult to perform accurate measurement.
• a speed sensor that calculates the running speed of a car based on the rotational speed of the wheels, if the tire diameter changes due to tire wear, this change will appear as a measurement error in speed as it is. Also, if the tire slips or slips, you will still get inaccurate measurements.
• a speed sensor that calculates the flight speed based on the flow velocity measured by a single pipe, It is difficult to get accurate measurements because of the strong wind.
• the present invention measures accurate speed without being affected by outside
• a first aspect of the present invention provides a speed sensor
• a weight body with mass m A weight body with mass m
• a second aspect of the present invention provides the speed sensor according to the first aspect described above.
• the first pongee is defined on a straight line that passes through the center of gravity G of the weight body.
• a third aspect of the present invention relates to the speed sensor according to the second aspect described above.
• An XYZ three-dimensional coordinate system having an origin 0 at the position of the center of gravity G of the weight body having the mass m is defined.
• the detecting means detects a Coriolis Fco (x) acting on the weight body in the X-direction and a Coriolis Fco (y) acting on the weight in the Y-direction,
• the determined velocities Vx and Vy are output as the X cold direction component VX and the Y axis direction component Vy of the casing speed in the XYZ three-dimensional coordinate system.
• An XYZ three-dimensional coordinate system having an origin 0 at the position of the center of gravity G of the weight body having the mass m is defined, and the driving means rotates the weight body about the Z axis at an angular velocity ⁇ z.
• the driving operation and the second driving operation of rotating at an angular velocity ⁇ X about the X axis are alternately performed,
• the detection means detects a Corioliska Fco (X) acting on the weight body in the X-axis direction and a Corioliska Fco (y) acting on the Y-axis direction,
• the speed VX in the X-axis direction is calculated using the following equation.
• the driving means causes the weight body to revolve so that the center of gravity G of the weight body moves on a predetermined orbit, and has an angular velocity ⁇ about the first axis moving on the orbit. Make a spinning motion
• the driving means defines the orbit on the ⁇ ⁇ plane of the ⁇ ⁇ ⁇ ⁇ ⁇ three-dimensional coordinate system, and the weight body with mass m revolves along this orbit and rotates in parallel with the Z axis.
• the robot makes a rotation with an angular velocity ⁇ ⁇ ⁇ ⁇ ⁇ about the axis, and the detecting means detects the X ⁇ component FX and the ⁇ axis component F y of the force acting on the weight body, and the housing moves at a predetermined speed.
• Moving with V The difference between these detected values when the body is stationary and these detected values when the housing is stationary is determined by the Corioliser F co (x) acting in the X-direction and the Y-axis direction acting on the weight.
• the X-axis direction component VX and the Y-axis direction component Vy of the speed of the housing in the three-dimensional coordinate system are output.
• the driving means defines the orbit on the XY plane of the XYZ three-dimensional coordinate system, and the weight body having mass m is revolved along this orbit, and the angular velocity about the rotation axis parallel to the Z axis ⁇ ⁇ , the first driving operation to make a rotational motion, and the X ⁇ ⁇ orbit defined on the ⁇ ⁇ plane of the three-dimensional coordinate system.
• the orbital motion along the axis of rotation and the second drive operation to make the t
• the X-direction component FX and the Y-axis component Fy of the force ffl acting on the weight are detected by the detection means, and these components are detected when the housing is moving at the predetermined speed V.
• the velocity component VX in the X $ free direction of the housing is obtained using the relationship
• the velocity component Vy in the direction is determined, and the driving means is detected during the second driving operation.
• the velocity component V z in the Z-axis direction of the housing is obtained using the relationship z
• the directional component V y and the directional component z are output.
• An eighth aspect of the present invention is directed to the speed sensor according to the first aspect.
• the center of gravity G of the weight rest moves on the predetermined reciprocating orbit.
• Component is detected, and the housing moves with the velocity component V in the direction along the third axis.
• the speed V of the housing in the direction along the axis is obtained.
• a ninth aspect of the present invention is directed to the speed sensor according to the eighth aspect.
• Drive means define a reciprocating trajectory on the X ⁇ ⁇ X plane of the three-dimensional coordinate system
• the detecting means detects the X ⁇ direction component FX and the Z axis direction component Fz of the force acting on the weight body, and detects these when the housing is moving at a predetermined speed V.
• the velocity component Vz in the Z-axis direction of the housing is obtained using the relationship
• an X-axis component VX and a Z-fortunate component Vz of the speed of the housing are output.
• the drive means defines a reciprocating trajectory on the XZ plane of the XYZ three-dimensional coordinate system, and the weight having mass m is reciprocated along this reciprocating trajectory, and the angular velocity about the rotation axis parallel to the Y axis
• the first driving motion that makes a rolling motion with ⁇ y and the reciprocating trajectory on the YZ plane of the XYZ three-dimensional coordinate system are defined, and the weight having mass m is moved along this reciprocating trajectory.
• the reciprocating motion and the second driving operation of rotating the rotating axis parallel to the X axis with the angular velocity ⁇ X are alternately performed.
• the detection means detects the X-axis direction component FX and Zeta KenYukari direction component F Zeta forces acting on the weight body, housing of these the state is moving at a predetermined velocity V
• the difference between the detected value and these detected values when the housing is stationary is calculated by applying the corioliser F co (x) that acts on the weight rest in the X-axis direction and the Coriolis force acting in the Z-axis direction.
• the speed component V x in the X-axis direction of the housing is obtained
• the velocity component Vz in the Z-axis direction of the housing is obtained by using the checker Vz ⁇ ⁇ y, and the driving means detects the Coriolis Fco (z )
• the detection means detects the variation of the amplitude of the reciprocating motion of the weight body in the X-axis direction, and uses this variation as the Coriolis force Fco (x) acting on the weight rest in the X ⁇ direction. It was done.
• a twelfth aspect of the present invention is the speed sensor according to the ninth or first aspect described above,
• the detection means detects the deviation of the reciprocating trajectory of the weight body in the ⁇ -axis direction, and uses this deviation as Coriolis Fco (z) acting in the ⁇ ⁇ direction on the weight body. is there.
• the obtained velocities Vx, Vy, Vz are converted to The velocity is output as the X-direction component Vx, the Y-direction component Vy, and the Z-direction component Vz.
• a thirteenth aspect of the present invention is the speed sensor according to the first aspect
• the vibrator is arranged so that the longitudinal direction is along the X axis, and a predetermined position of the vibrator is supported and fixed to the housing by the base, and the free end of the vibrator is a weight Function, the pedestal is configured to function as a support means,
• the driving means is constituted by a force generator that generates a force for displacing the free end of the vibrator in the XZ plane,
• the detection means is composed of a displacement detector that detects the actual displacement of the free end in the XZ plane, and the difference between the displacement based on the force generated by the force generator and the actual displacement detected by the displacement detector is calculated. Based on this, the Coriolis force F co in the Z-axis direction acting on the free end is obtained,
• the calculating means calculates the velocity V w of the vibrator in the direction along the X-axis direction based on the obtained Coriolis Fco.
• a fourteenth aspect of the present invention provides the speed sensor according to the above-described thirteenth aspect
• the vibrator is supported and fixed by a pair of pedestals arranged at a predetermined distance in the X-axis direction, and both end portions located outside the pair of pedestals function as a first free end and a second free end, respectively.
• a force generator is constituted by a piezoelectric element fixed to a central portion of the vibrator sandwiched between a pair of pedestals, and an AC power supply for supplying an AC voltage to the piezoelectric element.
• the first piezoelectric element and the second S A second piezo element, a first voltmeter that detects a voltage generated in the first piezo element, and a second voltmeter that detects a voltage generated in the second piezo element.
• a displacement detector is configured to obtain Coriolisa Fco based on the difference between the output of the first voltmeter and the output of the second voltmeter.
• a pair of pedestals is arranged at a pair of node positions where displacement is the least in the unique vibration mode of the vibrator.
• a sixteenth aspect of the present invention is the speed sensor according to the first aspect
• the peripheral part is fixed to the housing, the weight rest is fixed to the center part, and the supporting means is constituted by a flexible substrate having flexibility.
• the driving unit has a force generator that applies a force in a predetermined direction to a predetermined portion of the flexible substrate, and the force generator is disposed at a plurality of positions on the flexible substrate. It has a displacement detector for detecting a displacement of a predetermined portion of the flexible substrate in a predetermined direction, and the displacement detector is arranged at a plurality of positions on the flexible substrate.
• the central portion is fixed to the housing, the weight is fixed to the peripheral portion, and the supporting means is constituted by a flexible substrate having flexibility.
• the driving unit has a force generator that applies a force in a predetermined direction to a predetermined portion of the flexible substrate.
• the force generator is disposed at a plurality of positions on the flexible substrate.
• the eighteenth aspect of the present invention is the speed sensor according to the above-mentioned sixth or seventeenth aspect
• An XYZ three-dimensional coordinate system is defined such that the surface of the flexible substrate is parallel to the XY plane and Z ⁇ passes through the center of gravity of the weight rest.
• the weight body is made to reciprocate along an arc-shaped orbit on the XZ plane, and is made to rotate with an angular velocity wy about an axis parallel to the Y axis.
• a force generator that applies a force in the direction along the Z axis is arranged in the area near the origin of the flexible substrate, and the weight bodies are moved in the XZ plane by periodically operating each force generator.
• the robot In addition to the reciprocating motion along the above arc-shaped orbit, the robot also rotates in an axis parallel to the Y axis with an angular velocity ⁇ y.
• a speed sensor according to a twenty-first aspect of the present invention is the speed sensor according to the eighteenth or nineteenth aspect
• a force generator for applying a force in a direction along the direction of ⁇ ⁇ is disposed on each of the positive and negative regions of the flexible substrate, and these force generators are operated periodically.
• An XYZ three-dimensional coordinate system is defined such that the surface of the flexible substrate is parallel to the XY plane, and the Z axis passes through the center of gravity of the weight body.
• a force generator for applying a force in a direction along Y ⁇ is disposed in each of the positive and negative areas of Y ltl of the flexible substrate, and these force generators are operated periodically.
• the weight body is reciprocated along an arc-shaped trajectory on the YZ plane, and is rotated about an axis parallel to the X axis with an angular velocity ⁇ X.
• a twenty-third aspect of the present invention provides the speed sensor according to the sixteenth or seventeenth aspect
• Displacement detectors that detect displacement in the direction along the ⁇ axis are respectively arranged in the positive and negative regions of the X-axis of the flexible substrate, and based on the difference between the displacements detected by these displacement detectors. To work in the X ⁇ direction of the weight rest co (x) is detected.
• a displacement detector for detecting a displacement in a direction along the Z-axis is disposed in a region near the origin of the flexible substrate, and based on the displacement detected by the displacement detector, the Z-axis of the weight rest is set. It detects the Coriolis F co (z) acting in the direction.
• displacement detectors for detecting displacements in the direction along the Z axis are arranged in the positive region and the negative region of the Y-axis of the flexible substrate, respectively, and a difference between the displacements detected by these displacement detectors is determined. Based on this, Coriolica Fco (y), which ffls in the Ylb direction of the weight rest, is detected.
• the Coriolis force Fco (z) acting on the weight body in the Z-axis direction is detected based on the sum of the displacements detected. It was made.
• An XYZ three-dimensional coordinate system is defined such that the surface of the flexible substrate is parallel to the XY plane, and the Z axis passes through the center of gravity of the weight body.
• Displacement detectors for detecting displacement in the direction along X are arranged in the positive and negative regions of the X-axis of the flexible substrate, and these displacement detectors detect the displacement. Based on the displacement, the Coriolis force F co (x) acting on the weight rest in the X ⁇ direction is detected.
• the 28th aspect of the present invention is the speed sensor according to the 27th aspect described above,
• displacement detectors for detecting displacements in the direction along the Y axis are respectively arranged in the positive and negative regions of the flexible substrate on the Y axis, and based on the displacements detected by these displacement detectors. It detects the Coriolisa F co (y) acting in the Y ⁇ direction of the weight body.
• a twentieth aspect of the present invention is the speed sensor according to the above-mentioned twenty-seventh or twenty-eighth aspect
• Corioliser F co (z) acting in the Z-axis direction of the weight is detected based on the displacements detected by the displacement detectors located in the positive and negative areas of X-ill, respectively. Things.
• a thirty-first aspect of the tree invention is the velocity sensor according to the above-mentioned sixteenth or seventeenth aspect
• a force generator and a displacement detector are constituted by the second electrode formed at a position facing the electrode.
• the element and the element constitute a force generator and a displacement detector.
• a third aspect of the present invention is the speed sensor according to the sixteenth or seventh aspect described above,
• a part of the driving means and a part of the detecting means are constituted by physically the same element.
• a thirty-fourth aspect of the present invention is the speed sensor according to the sixteenth or seventeenth aspect
• a thin flexible portion is formed by digging an annular groove between the peripheral portion and the central portion of the plate-like substrate, and the central portion displaces with respect to the peripheral portion by bending of the flexible portion.
• a flexible substrate is formed by a plate-like substrate.
• an XYZ three-dimensional coordinate system is defined
• the force is equal to the resonance frequency F r (X) of the weight body in the X-axis direction and the resonance frequency F r (z) in the Z-axis direction.
• a thirty-sixth aspect of the present invention is the speed sensor according to the thirty-fifth aspect
• the resonance frequency F r (y) in the Y-axis direction of the weight rest is substantially equal to the resonance frequency F r (X) in the X-axis direction.
• a 37th aspect of the present invention is the speed sensor according to the above 1st aspect
• a supporting means is constituted by a fixed substrate fixed to the housing and a piezoelectric element fixed below the fixed substrate.
• a weight rest is fixed below the piezoelectric element, and electric charges are stored at a predetermined position of the piezoelectric element.
• the driving means is constituted by the supplying means, and the detecting means is constituted by the means for measuring the electric charge generated at a predetermined position of the piezoelectric element.
• Fig. 1 shows the principle that when an object ⁇ 0 rotates at an angular velocity ⁇ ⁇ ⁇ ⁇ around the Z axis while moving at a velocity V wx in the X axis direction, Coriolis F co (y) acts in the ⁇ axis direction.
• FIG. 1 shows the principle that when an object ⁇ 0 rotates at an angular velocity ⁇ ⁇ ⁇ ⁇ around the Z axis while moving at a velocity V wx in the X axis direction, Coriolis F co (y) acts in the ⁇ axis direction.
• Fig. 2 shows that when the object 10 is rotating at the velocity V wy in the Y axis direction and rotating at the angular velocity ⁇ ⁇ ⁇ ⁇ around the Z axis, the Coriolis F co ( ⁇ ) acts in the X axis direction. It is a figure explaining a principle.
• FIG. 3 is a diagram for explaining the principle of performing the operation.
• FIG. 4 is a block diagram showing basic components of the speed sensor according to the present invention.
• FIG. 5 is a diagram for explaining the basic principle of applying the present invention to a platform where the weight body performs a revolving motion in addition to the rotating motion.
• FIG. 6 is a diagram showing a state in which the weight body performs only a revolving motion.
• FIG. 7 is a diagram showing a state in which the weight body is rotating along with the revolving motion.
• FIG. 8 is a diagram showing a force acting on the weight rest rotating around the stationary point 0 and rotating.
• FIG. 9 is a diagram showing a force acting on a revolving weight rest rotating around a point 0 moving at a speed Vt. '
• FIG. 10 is a diagram showing the force ffl acting on the revolving and rotating weight body around point 0 moving at the speed Vr.
• FIG. 11 is a diagram showing a force acting on a weight body revolving and rotating around a point 0 moving at a speed V.
• FIG. 12 is a diagram for explaining the principle of detecting a two-dimensional velocity component in the X axis and Y axis directions on a stage where the weight body performs only a rotation motion.
• FIG. 13 is a diagram for explaining the principle of detecting a velocity component in the ⁇ ⁇ direction when the weight body is performing only rolling motion.
• FIG. 14 is a diagram showing the force acting on the weight body when the weight rest performs a revolving motion in addition to the rotation motion around the rest point 0.
• Fig. 15 shows the structure of the “simple support system” in which the weight is supported by the arm.
• FIG. 16 is a diagram for explaining the principle of detecting the two-dimensional velocity components of X-Yuyoshi and ⁇ -Yu when the weight rest performs a revolving motion in addition to the rotation motion.
• FIG. 17 is a diagram for explaining the principle of detecting a velocity component in the Z direction in a stage where the weight body is revolving in addition to the rotation.
• FIG. 18 is a diagram for explaining the principle of detecting a two-dimensional velocity component when the weight performs a reciprocating pendulum motion in addition to the rotation motion.
• FIG. 19 is a perspective view showing the reciprocating pendulum motion shown in FIG. 18 in a three-dimensional coordinate system.
• FIG. 20 is a top view for explaining the principle of detecting a three-dimensional velocity component by gradually rotating the motion surface of the reciprocating pendulum motion shown in FIG.
• FIGS. 21 (a) and (b) are diagrams showing the polarization characteristics of a type I piezoelectric element used in the speed sensor according to the present invention.
• FIGS. 22 (a) and (b) are diagrams showing the polarization characteristics of a type ⁇ ⁇ piezoelectric element referred to as ffl in the speed sensor according to the present invention.
• FIG. 23 is a perspective view showing a basic configuration of a one-dimensional speed sensor according to one embodiment of the present invention.
• FIG. 24 is a front sectional view and a wiring diagram of the speed sensor shown in FIG. 23 c
• FIG. 25 is a front view showing one state of vibration in the speed sensor shown in FIG.
• FIG. 26 is a front view showing another state of the vibration in the speed sensor shown in FIG.
• FIG. 27 is a graph showing voltage waveforms at various points in the speed sensor shown in FIG.
• FIG. 28 shows a first modification of the one-dimensional speed sensor shown in FIG. It is a perspective view.
• FIG. 29 is a perspective view showing a second modification of the one-dimensional speed sensor shown in FIG.
• FIG. 30 is a perspective view showing a third modification of the one-dimensional speed sensor shown in FIG.
• FIG. 31 is a perspective view showing a fourth modification of the one-dimensional speed sensor shown in FIG.
• FIG. 32 is a front view when the motion system shown in FIG. 19 is moving at the speed Vz.
• FIG. 33 is a front view when the motion system shown in FIG. 9 is moving at the speed Vx.
• FIG. 34 is a waveform diagram for explaining the principle of detecting the moving speed Vz of the motion system shown in FIG. 32.
• FIG. 35 is another waveform diagram for explaining the principle of detecting the moving speed Vz of the motion system shown in FIG. 32.
• FIG. 36 is a waveform chart for explaining the principle of detecting the moving speed VX of the motion system shown in FIG. 33.
• FIG. 37 is another waveform chart for explaining the principle of detecting the moving speed Vz of the motion system shown in FIG. 32.
• FIG. 38 is a side sectional view showing one embodiment of a multidimensional velocity sensor in which a force generator and a displacement detector are constituted by capacitive elements.
• FIG. 39 is a top view of the flexible substrate 110 in the multidimensional speed sensor shown in FIG.
• FIG. 38 shows a cross section of the flexible substrate shown in FIG.
• FIG. 40 is a side sectional view for explaining the operation of the multidimensional speed sensor shown in FIG.
• FIG. 41 is a top view of a flexible substrate 110 in a modified example of the multidimensional speed sensor shown in FIG.
• Fig. 42 is a cross-sectional side view showing one embodiment of a multidimensional velocity sensor comprising a force generator and a displacement detector using the type I piezoelectric element shown in Figs. 21 (a) and (b).
• FIG. 42 is a cross-sectional side view showing one embodiment of a multidimensional velocity sensor comprising a force generator and a displacement detector using the type I piezoelectric element shown in Figs. 21 (a) and (b).
• FIG. 43 is a top view of the flexible substrate 210 in the multidimensional speed sensor shown in FIG. A cross section of the flexible substrate 210 shown in FIG. 43 taken along X is shown in FIG.
• FIG. 44 is a cross-sectional side view showing one embodiment of a multidimensional velocity sensor comprising a force generator and a displacement detector using the type II piezoelectric element shown in FIGS. 22 (a) and (b).
• FIG. 44 is a cross-sectional side view showing one embodiment of a multidimensional velocity sensor comprising a force generator and a displacement detector using the type II piezoelectric element shown in FIGS. 22 (a) and (b).
• FIG. 45 is a top view of the piezoelectric element 330 in the multidimensional speed sensor shown in FIG.
• FIG. 46 is a bottom view of the piezoelectric element 330 in the multidimensional speed sensor shown in FIG.
• FIG. 47 is a top view of a piezoelectric element 33 () in a modified example of the multidimensional speed sensor shown in FIG. 44.
• FIG. 48 is a side sectional view showing an embodiment in which the structure is simplified by applying a ffl device to a multidimensional speed sensor using the capacitive element shown in FIG. 38.
• FIG. 49 is a top view of a flexible substrate 110 in the multidimensional speed sensor shown in FIG. 48.
• the flexible substrate 110 shown in FIG. 49 is placed on the X axis.
• the cross section taken along is shown in FIG.
• FIG. 50 is a circuit diagram showing an example of a signal processing circuit used to operate the multidimensional speed sensor shown in FIG.
• Fig. 51 is a cross-sectional side view showing an embodiment in which the structure is reduced by applying a dual-purpose device to the multidimensional velocity sensor using the type I piezoelectric element shown in Figs. 21 (a) and (b).
• FIG. 51 is a cross-sectional side view showing an embodiment in which the structure is reduced by applying a dual-purpose device to the multidimensional velocity sensor using the type I piezoelectric element shown in Figs. 21 (a) and (b).
• FIG. 52 is a top view of the flexible substrate 210 in the multidimensional velocity sensor shown in FIG. A cross section of the flexible substrate 210 shown in FIG. 52 cut along the X axis is shown in FIG.
• Fig. 53 shows another embodiment in which the structure is simplified by applying a dual-purpose device to the multidimensional velocity sensor using the type I piezoelectric element shown in Figs. 21 (a) and (b). It is a side sectional view.
• FIG. 54 is a top view of the flexible substrate 210 in the multidimensional speed sensor shown in FIG.
• FIG. 53 shows a cross section of the flexible substrate 210 shown in FIG. 54 taken along the line X ⁇ .
• FIG. 55 is a side sectional view showing a stress distribution generated when the flexible substrate 21 # constituting the multidimensional speed sensor according to the present invention is bent.
• FIG. 56 is a plan view showing an inner region A 1 and an outer region A 2 determined based on the stress distribution shown in FIG.
• FIG. 57 is a circuit diagram showing an example of a signal processing circuit used to operate the multidimensional speed sensor shown in FIG. 51.
• FIG. 58 is a circuit diagram showing an example of a signal processing circuit used to operate the multidimensional speed sensor shown in FIG.
• FIG. 4 is a side sectional view showing an embodiment in which the structure is refined by applying a dual-purpose device to a multidimensional speed sensor.
• FIG. 60 is a top view of the piezoelectric element 330 in the multidimensional speed sensor shown in FIG. A cross section of the piezoelectric element 330 shown in FIG. 6 along the X axis is shown in FIG.
• FIG. 61 is a circuit diagram showing an example of a signal processing circuit used to operate the multidimensional speed sensor shown in FIG.
• FIG. 62 is a sectional side view of a modification of the multidimensional speed sensor shown in FIG.
• FIG. 63 is a side sectional view of a multidimensional speed sensor having a weight rest provided around a flexible substrate.
• this object 10 is rotated at the angular velocity ⁇ ⁇ ⁇ ⁇ with the Z axis as the center of gravity.
• a Coriolis Fco (y) 2 * m * Vw z «o> x
• a Coriolis Fco (y) represented by (3) is formed in the Y direction.
• three examples of assembling have been described.However, depending on which coordinate axis corresponds to the rotation axis of the object 10, the movement direction axis, and the action of Coriolis force ⁇ , a total of 6 Crossover will occur. In short, this mechanical phenomenon can be said to be a phenomenon in which if an object moving along the first coordinate axis is rotated around the second coordinate axis, Coriolis will occur along the third coordinate axis. Wear.
• the velocity component V wy in the Y $ ltl direction of the object 10 is determined, and this can be obtained as ffl as the Y axis component V y of the flight speed of the aircraft, as shown in FIG.
• the object 1 can be obtained based on the above equation (3).
• the Z $ ili direction velocity component V wz of 0 is obtained, and this can be used as the Z axis direction component V Z of the flight speed of the aircraft.
• FIG. 4 is a block diagram showing a basic configuration of a speed sensor according to the present invention utilizing such a basic principle of speed detection.
• the weight rest 20 having the mass m is supported in the housing 22 by the support means 21.
• the housing 22 functions as a body of a sensor that houses the weight body 20.
• the support means 21 supports the weight body 20 so as to be rotatable about a predetermined rotation axis. Therefore, the weight body 20 can freely rotate around the rotation inside the housing 22.
• this rotation axis is called the [] axis.
• the driving means 23 has a function of rotating the weight body 2 ⁇ ⁇ ⁇ ⁇ at an angular velocity ⁇ about the axis of [], and the detection means 24 It has a function of detecting a Coriolis force Fco acting in a direction along a second axis orthogonal to the axis. Then, the calculating means 25
• the mass m (known amount) of the weight body 20, the rotational angular velocity ⁇ of the weight rest 20 (determined based on the driving energy supplied from the driving means 23 to the weight body 20), the weight A calculation is performed to calculate the velocity Vw of the weight body 20 by applying the Coriolis Fco acting on the weight body 20 (detected by the detection means 24).
• the obtained velocity V w is the velocity of the weight body 20 in the third axial direction. According to the present invention, it is possible to realize a one-dimensional speed sensor, a two-dimensional speed sensor, and a three-dimensional speed sensor based on such a principle.
• the configuration of the dimensional velocity sensor is very simple. That is, in the basic configuration shown in FIG. 4, it is sufficient that the support means 21 can support the weight rest 20 so as to be rotatable only about the first shaft, and the driving means 23 is a weight body. It suffices to have a function of rotating the 20 with respect to the first axis, and the detecting means 24 should have a function of detecting a corerica Fco acting on the weight rest 20 in the second direction. Is enough.
• the calculation means 25 can determine the speed Vw in the third free direction based on the equation (4).
• the first $ ltl, the second reason, and the third axis can be any axes that are orthogonal to each other.
• the configuration of a multidimensional speed sensor is a little complicated.
• the driving means 23 has the weight rest 20 and these two fiti (X ⁇ , Y ⁇ )
• the detection means 24 has a function of detecting coriolis in the two ill (eg, Y-axis and Z-axis) directions acting on the weight body 20.
• the two-dimensional speed sensor that obtains the speed in two directions (for example, the direction of the axis X and the direction of the axis X) can be realized by the arithmetic unit 25.
• the support means 21 has a function of supporting the weight rest 20 so that the weight rest 20 is rotatable with respect to the three axes of 'and ⁇ . If it has a function of selectively rotating and driving these three axes, and if the detecting means 24 has a function of detecting the three-axis direction coriolis acting on the weight rest 20, the calculating means 25 will provide It is possible to realize a three-dimensional speed sensor that obtains the speed of (3).
• a more efficient multidimensional velocity sensor can be constructed.
• the basic principle of Fig. 1 and the basic principle of Fig. 2 are combined, simply rotating the object 10 around the Z axis will produce a velocity V wx in the X $ direction and a velocity V w in the Y axis direction.
• a two-dimensional speed sensor capable of detecting both y and y can be configured. That is, in the configuration of FIG. 4, in order to realize a two-dimensional velocity sensor, the support means 21 must be capable of supporting the weight 20 so that the weight body 20 can rotate only in the first direction (Z axis).
• the driving means 23 has a function of driving the weight rest 20 to rotate about the first axis (Z-axis), and the detecting means 24 is provided with the second function acting on the weight rest 20. It suffices to have a function that can detect the stiffness Fco (y) in the direction of the axis (YfA) and a function that can detect the colica Fco (x) in the direction of the third axis (from Xf) acting on the weight rest 20. It is.
• the calculation means 25 can calculate the velocity Vw x in the ⁇ $ ⁇ direction based on the principle shown in FIG. 1, and can calculate the velocity Vwy in the Y lti direction based on the principle shown in FIG. You can also ask.
• the supporting means 21 and the driving means 23 having a structure capable of driving the weight body 20 to rotate about the first axis (Z axis) are described. It is only necessary to provide a detection means 24 having a function of detecting Coriolisa acting in the second fifi (Y-axis) and third cold (X-axis) directions.
• XYZ A three-dimensional speed sensor that can detect the speeds V wx, V wy, and V wz can be configured. That is, in the configuration of FIG. 4, in order to realize a three-dimensional velocity sensor, the supporting means 21 is provided with a weight for both the first f (Z Yukiyoshi) and the third (X Yukiyoshi). It is sufficient if the body 20 can be supported so as to be rotatable, and the driving means 23 selectively moves the weight rest 20 with respect to the first axis (Z axis) and the third axis (X axis).
• the detecting means 24 has a function of driving the rotating body to rotate.
• the detecting means 24 has a function of detecting the Corioliska F co (y) acting on the weight body 20 in the second axis (Y-axis) direction. It is sufficient to have a function capable of detecting the Coriolisa F co (x) acting on the weight 20 in the third ⁇ (X-axis) direction.
• the arithmetic means 25 can determine the speed V w X in the X direction due to the principle shown in FIG. 1, or can calculate the speed V w in the Y direction due to the principle shown in FIG. wy can be determined, and the velocity Vwz in the Z ⁇ direction can be determined based on the principle shown in FIG.
• the weight rest 20 can be selectively driven to rotate with respect to the first good reason (Z axis) and the third ⁇ (X axis).
• the arithmetic means 25 in the present invention does not necessarily have to faithfully perform a theoretical operation based on a physical phenomenon. In practice, it is very difficult to obtain the absolute ⁇ of the speed by such a theoretical operation. For example, let us consider a platform that determines the speed Vw by theoretical calculation based on the above equation (4). In this case, it is necessary to measure an accurate value of the mass m of the weight body 20. However, the weight rest 20 is supported in the housing 22 by some kind of support means 21, and in reality, where is the weight rest 20 and where is the support means 21 It is difficult to distinguish between the two.
• the acting force or a physical quantity equivalent thereto must be measured by some kind of measuring means, but the measuring means capable of accurately measuring the absolute value of the Coriolisa Fco Is very difficult to construct.
• the calculating means 25 is not a means for actually performing the calculation based on the above formula, but a means for performing the calibration calculation. become.
• equation (4) it is theoretically shown that if the mass of the weight body, its angular velocity ⁇ , and the Corioliser F co acting thereon are known, the velocity V w can be obtained. ing.
• a speed sensor having a weight rest 20, a support means 21, a housing 22, a driving means 23, and a detection means 24 is prototyped.
• the detection means 24 should output some value indicating the Coriolis Fco.
• some voltage value is output, but in this case, the output voltage value is a value corresponding to the Coriolisa Fco acting on the weight 2 ⁇ in a one-to-one correspondence. It is enough if it is guaranteed.
• the voltage value output from such a prototype is calibrated using an existing speed sensor.
• this prototype is mounted on a test vehicle together with an existing speed sensor, and the output voltage from the prototype is recorded while the test vehicle is running at a predetermined speed.
• the speed value indicated by the existing speed sensor is also recorded at the same time.
• a table can be created in which the output voltage value of the prototype and the absolute value of the speed measured by the existing speed sensor correspond to].
• the calibration of the output voltage of the prototype was performed. If the output voltage of the prototype corresponds linearly to the absolute value of the speed, a circuit having a function of performing a predetermined linear scaling operation on the output voltage may be used as the calculating means 25. .
• the calculating means 25 a circuit or a microprocessor that performs such a functional calculation may be used. If a very complicated correspondence is obtained, the correspondence is recorded in a memory in the form of a so-called look-up table, and the calculation means 25 is used. A device that converts the output voltage value into the absolute value of the speed and outputs the converted value may be used.
• the operation performed by the arithmetic means 25 does not indicate only a so-called arithmetic operation, but broadly includes a process of converting the output of the detecting means 24 into a value indicating the speed.
• the reason why the speed can be detected based on the theoretical basis is theoretically analyzed by using mathematical expressions.
• This is for explaining the basic principle of speed detection according to the present invention, and the arithmetic performed by the arithmetic means 25 is an arithmetic based on such a basic principle. Note that, as described above, even if processing for outputting data indicating speed using a method such as a calculation means 25, a lookup table or the like is performed, speed detection is performed based on the same basic principle. As long as this is the case, such a process is completely equivalent to an arithmetic process based on a mathematical expression, and is included in the technical scope of the present invention.
• the speed V wx, V wy, and V wz obtained are all the speeds of the self-resting zero. Therefore, in the speed sensor having the basic configuration as shown in FIG. 4, the speed V w obtained by the calculating means 25 is the speed of the weight body 20 itself. Now, in FIG. 4, assuming that the weight rest 20 is rotatably supported with respect to a rotation passing through the center of gravity, the relative velocity component of the weight rest 20 to the housing 22 becomes zero.
• the speed V w of the weight rest 20 obtained by the calculating means 25 is equal to the housing 2 2 Speed V. Therefore, for example, the speed Vw of the weight rest 20 obtained by the computing stand 25, which is obtained when the speed sensor is mounted on the vehicle, is equal to the speed V of the vehicle.
• the description so far is based on the premise that the weight body 20 rotates about the rotation axis passing through the center of gravity G as described above. However, when actually constructing a speed sensor, it is not always possible to rotationally drive the weight rest 20 for a rotation ill passing through its center of gravity G.
• FIG. 5 is a perspective view showing a state in which the weight rest 3 ⁇ revolves on a predetermined orbit 31.
• the orbit 3] force ⁇ is a circumferential orbit with a center point
• the center of gravity of the weight rest 30 is the G force. It is assumed that they are moving as follows.
• the weight body 20 when the weight body 20 is supported by the support means 21 with a rotation axis deviating from the center of gravity G, the weight body 20 is equivalent to the model shown in FIG. Become.
• the rotation of the weight rest means “the rotation of the weight rest itself about the rotation axis passing through the center of gravity G of the weight rest”
• the revolution of the weight rest means “ The movement of the weight on a defined orbit around the revolution ⁇ ⁇ ⁇ that does not pass through the center of gravity G of the weight.
• the model shown in Fig. 5 can be easily understood by imagining the celestial motion of the earth (weight 30) revolving around the sun located at the center point 0.
• the weight rest 30 (indicated by a triangle for the sake of explanation here) is a P] motion that moves along a circumferential trajectory 31 about a center point 0.
• the state of the weight rest 30 is shown superimposed every 1 to 12 cycles.
• This circumferential orbit 31 is a revolving orbit, and the weight rest 3 ⁇ is rotating around the center point 0 at the angular velocity ⁇ on both the platforms shown in FIGS. 6 and 7.
• the motion shown in FIG. 6 consists only of the orbital motion, and the weight body 30 does not rotate.
• the movement shown in Fig. 7 includes rotation movement in addition to orbital movement.
• the orientation of the weight rest 30 indicated by a triangle at each position is gradually changing. That is, while the weight body 30 moves on the orbit of revolution 31 at the revolution angular velocity ⁇ , the weight itself 30 is rotating at the rotation angular velocity ⁇ with the center of gravity G as the center. In this example, it is ⁇ - ⁇ , and the weight body 30 makes one revolution as it moves on the orbit 31.
• the phenomena shown in Figs. 1 to 3 are phenomena that occur on the platform where the weight rest 30 rotates at an angular velocity ⁇ , and are not directly related to the orbital motion due to the angular velocity ⁇ . Therefore, when the speed sensor according to the present invention is realized by a system in which the weight rest 30 performs a revolving motion, the revolving motion as shown in FIG. A system that only performs movement is inappropriate, and a system with rotation as shown in Fig. 7 must be prepared.
• the angular velocity involved in the speed detection is the rotation angular velocity ⁇ , not the revolution angular velocity ⁇ .
• the handling is different from that when only the spinning motion described in ⁇ 2 is performed. Need to do.
• the second reason is that an additional force such as a centrifugal force due to the orbital motion acts on the weight rest 30, and the second reason is that the motion of the weight body 30 This is because the speed and the movement speed of the housing do not match.
• the weight body 20 rotates about the rotation axis passing through the center of gravity G, and the centrifugal force acting in each direction is canceled. .
• the speed V of the weight body 20 is V w can be handled as it is as the vehicle speed V.
• centrifugal force always acts in the radial direction on the weight rest 30 moving along the orbit 31.
• the speed V w of the weight 3 ⁇ is equal to the speed V of the housing (in other words, this sensor is It does not correspond to the motion speed V) of the vehicle on board.
• the speed V of the sensor housing housing the system as shown in FIG. 5, that is, the movement speed V of the vehicle equipped with this sensor is detected by the following measures. I have. First, let us consider the force instantaneously acting on the weight rest 30 moving while rotating on the circumferential orbit 31 shown in FIG. Now, at a specific point P shown in Fig. 8, Assuming that the radial direction of the orbit 31 is D r, the tangential direction is D t, and the direction perpendicular to these directions is Du, the weight body 30 revolves with the velocity V w toward the tangential direction D t. And the rotation is at the angular velocity ⁇ with the direction Du as the rotation fill.
• the force F r (0) in the radial direction is equal to the centrifugal force F ce generated based on the circular motion (orbital motion) of the weight 30, and the centrifugal force F ee is If the mass of the rest 30 is m, the radius of the orbit 31 is 1 ", and the angular velocity of the orbital motion is
• a tangential force F t (0)-0 is applied to the stage where the weight body 30 performs a constant velocity circular motion.
• the speed Vt of the vehicle can be measured if the sensor having such a system is mounted on the vehicle. That is, first, in a state where the vehicle is stationary, in other words, as shown in FIG. 8, with the center point 0 stationary, the weight rest 3 ⁇ is caused to revolve and rotate. The radial force F r (0) acting at the moment when the weight body 30 passes through a specific point is measured and obtained in advance. Subsequently, while the vehicle is traveling at the speed Vt, the weight 30 is made to perform similar revolution and rotation, and the radial force F r (V t) acting at that time is measured.
• the Corioliser Fco (V t) based on the velocity V t can be obtained from the equation (6) using the difference. Further, the velocity Vt can be obtained from equation (7).
• the system with the stationary state shown in Fig. 8 and the speed Vt shown in Fig. 9 In the whole moving state, whether or not the Coriolis force Fco (V t) in the radial direction Dr acts on the weight rest 30 is different, and the change in the radial force Fr is the Coriolis force Fco. (V t), and Coriolis Fco (V t) is a value corresponding to the speed V t.
• the speed Vr of the vehicle can be measured if the sensor having such a system is mounted on the vehicle. That is, first, in a state where the vehicle is stationary, in other words, as shown in FIG. 8, when the center point 0 is stationary, the weight rest 30 is caused to revolve and rotate. The tangential force F t (0) acting at the moment when the weight body 30 passes through a specific point is measured and obtained in advance. Then, while the vehicle is running at the speed Vr, the weight 30 performs the same revolution and rotation, and the tangential force Ft (Vr) acting at that time is measured.
• the Corioliser Fco (V r) based on the velocity V r can be obtained by the equation (9). Further, the velocity Vr can be obtained from the equation (10).
• the coriolica Fco (V r) in the tangential direction D t to the weight 3 [] The difference in the tangential force F t corresponds to the Coriolis force F co (V r), and the Coriolis force F co (V r) has a value corresponding to the velocity V r . Therefore, if the tangential force F t (V r) is always measured and the difference from the reference value F t (0) in the stationary state is appropriately calibrated and output, the output value will be the speed V r Can be used as the detection value of
• V r V r 8 (V r) is the same as the case of the stationary state shown in FIG.
• F r (0) and F t (0) are forces acting in the radial and tangential directions, respectively, in the stationary state as shown in FIG. 8, and Fco (V si ⁇ ⁇ ) and Fco ( V cos 0) is the Coriolis force generated in the radial and tangential directions due to the velocity V, respectively.
• an arbitrary two-dimensional velocity V of the vehicle can be measured if the sensor having such a system is mounted on the vehicle. That is, first, in a state where the vehicle is stationary, in other words. As shown in FIG. 8, when the center point 0 is stationary, the weight 30 The tangential force F t ( ⁇ ) and the radial force F r (0) acting at the moment when the weight 3 ⁇ passes a specific point are measured in advance. Ask for it. Subsequently, while this vehicle is traveling at the speed V, the weight rest 3 ⁇ performs the same revolution and rotation, and the tangential force acting at the moment when the weight rest 30 passes the same specific point. Measure F t (V) and radial force F r (V).
• a circumferential orbit is used as the orbit 31.
• the orbit need not necessarily be a circular orbit.
• it may be an elliptical orbit, or any other orbit.
• the important point of the above-mentioned detection principle is that it is only necessary to detect a change in the force acting on the weight rest 30 in a predetermined direction at a predetermined point, so that the same trajectory can always be ensured.
• the orbit 31 may be any orbit.
• the orbital motion does not necessarily have to be a orbital motion.
• the orbital motion may be a reciprocating motion with a circular arc as the orbit. This will be described later in S5.
• the orbital motion does not necessarily need to be a constant angular velocity motion, and the angular velocity ⁇ may be changed every moment in the above-described model.
• the angular speed ⁇ of the orbit changes periodically.
• the speed sensor according to the present invention is particularly suitable for being used as a two-dimensional or three-dimensional speed sensor.
• the basic principle of a field base applied to a two-dimensional velocity sensor that can detect the velocity component VX in the X axis direction and the velocity component Vy in the Y axis direction in the XYZ three-dimensional coordinate system, and the Zl direction
• the basic principle of ffl suitable for a three-dimensional speed sensor that can detect the velocity component V z of and will be described below.
• an XYZ three-dimensional coordinate system having an origin 0 at the position of the center of gravity G of the weight body 20 is defined.
• a platform is considered in which the weight rest 20 is rotated at a predetermined angular velocity ⁇ z with Z as a rotation axis.
• the reason for rotation (Z tsumugi) passes through the center of gravity G of the weight rest 20, so that the weight 2 ⁇ makes a zero-rotational motion with respect to the Z axis ⁇ , the center of gravity for this coordinate system
• the relative position of G is unchanged, and the weight rest 20 does not revolve.
• the velocity component V wx of the weight rest 20 in the X-direction is represented by the coordinates
• the moving speed Vxy of the system becomes equal to the X-axis component VX of the weight
• the weight component 20 in the Y-axis direction Vwy is equal to the moving speed VXy of the coordinate system in the Y-axis direction Vy.
• the Z axis which is the axis of rotation of the weight 20
• the Z axis is an axis perpendicular to both the X axis and the Y axis, when the weight 20 moves at the velocity V x in the X axis direction, the weight 2 For 0, as already mentioned,
• Coriolis Fco (x) in the direction of X $ expressed by the following formula acts.
• the force FX acting on the weight body 20 in the X-axis direction can be regarded as Coriolis Fco (x) in the X fist direction, and acts on the weight rest 20 in the Y direction.
• the force F y can be regarded as it is as Coriolis Fco (y) in the Y fill direction.
• the following two-dimensional velocity sensor can be configured. That is, the weight body 20 having the mass m is supported by the supporting means 21 so as to be rotatable about the Z axis passing through the center of gravity G, and the weight body 20 is accommodated in the housing 22. To Then, the weight body 20 is rotationally driven at an angular velocity ⁇ z with respect to Z screw by the driving means 23, and in this state, a force Fx in the X-axis direction acting on the weight rest 20 by the detection means 24, The force F y in the free direction is detected.
• the velocity component VX in the X-axis direction of the weight body 20 can be obtained by calculation according to the above equation (18), and the velocity component V y in the Y-axis direction of the weight rest 2 ⁇ can be obtained according to the above equation (19).
• the relative position of the weight rest 20 with respect to the three-dimensional coordinate system does not change. If the center of gravity G is stationary at a predetermined position in the housing 22, the weight rest 20 performs only rotation, so that the moving speeds VX and Vy of the weight body 20 in the respective axial directions are: It becomes the moving speed of the housing 22 as it is. Therefore, it becomes possible to measure the moving speed of the vehicle equipped with the housing 22.
• the principle of operation of the two-dimensional velocity sensor capable of detecting the velocity component VX in the X-direction and the velocity component Vy in the Y-axis direction has been described with reference to FIG. 12 above. It is also possible to realize a three-dimensional speed sensor capable of detecting the speed component Vz in the Z-axis direction.
• the two-dimensional speed sensor shown in FIG. 12 is a speed sensor that can use both the detection principle shown in FIG. 1 and the detection principle shown in FIG. It was enough to be able to rotate only for.
• a three-dimensional velocity sensor needs to use all three detection principles shown in Figs.
• a function of rotating and driving the weight body 20 about the X axis may be added.
• the three-dimensional speed sensor has two measurement modes.
• the first measurement mode is a mode that detects the velocity component VX in the X $ direction and the velocity component Vy in the Y-axis direction.
• a force FX acting in the X ⁇ direction and a force F y acting in the Y direction acting on the weight rest 20 are detected, and based on the equations (18) and (19) described above.
• the velocity components VX and Vy are determined.
• the second measurement mode is a mode for detecting the velocity component Vz in the Zlfl direction. As shown in FIG. 13, the weight rest 20 is set to the angular velocity ⁇ X The force F acting in the fili direction on the weight body 20 y
• Equation (18) is an equation that holds when the weight rest 20 is driven to rotate around the Z axis (in the first measurement mode) based on the basic principle of FIG. This is an equation for obtaining the velocity component V x in the ⁇ direction.
• equation (20) is an equation that holds when the weight body 20 is driven to rotate around the X axis (in the second measurement mode) based on the basic principle of FIG. This is an equation for obtaining the velocity component Vz in the direction of the bulge.
• a ⁇ three-dimensional coordinate system is defined, and a circumferential orbit 31 is defined in the X ⁇ plane.
• Weight body 3 0 force
• a platform that is revolving at an angular speed ⁇ ⁇ ⁇ ⁇ around ⁇ parallel rotation with ⁇ fist ⁇ ⁇ ⁇ while revolving at an angular speed ⁇ ⁇ ⁇ along this orbit 3 1.
• the rotation lh becomes f parallel to Z iti through the center of gravity G of the weight rest 30. Since the center of gravity G moves on the orbit 31 due to the orbital motion, the rotation cause also moves on the orbit 31.
• the rotation motion (angular speed ⁇ ⁇ ) and the orbital motion (angular speed ⁇ ⁇ ) of the weight rest 30 are clearly defined. It is important to distinguish. That is, it is the rotation of the weight body 30 that is involved in the generation of Corioliska.
• the top rotates on the rail while rotating at the rotation angle speed ⁇ .
• the revolution angular velocity ⁇ ⁇ be involved in the development of the Coriolis force is merely a rotation angular velocity ⁇ of the top, if the angular velocity ⁇ ⁇ is doubled, Corio Guatemala also acts doubled.
• the simplest mechanism for making a revolving motion while rotating around a certain weight rest 30 is the simplest one mechanism.
• This mechanism connects the center point O and the weight body 30 by a robot. That is, if an arm having one end rotatably pivoted at the position of the center point 0 is prepared and the weight body 30 is fixed to the other end of the arm, such a movement mechanism can be easily configured. it can.
• Fig. 15 shows the basic configuration of such a movement mechanism.
• One arm 32 is rotatably pivoted at one end at a position of a center point 0, and a weight body 30 is fixed to the other end.
• the center point 0 (the origin of the coordinate system) of the orbit 3] and the weight body 30 are connected by a simple arm 3 2 having no movable part, and the arm 3 2 is centered.
• the system in which the weight rest 30 is fixed so as not to rotate with respect to the arm 32 at the point 0 so as to freely rotate is referred to as a “simple support system”.
• This ⁇ simple support system '' has the advantage that the structure is very simple, and also has the advantage that it can use both the power for revolving motion and the power for rotating motion. Have. For example, a mechanism that moves the top along a circumferential rail would require a power to rotate the top itself and a power to move the top along the rail.
• the force acting at the moment when the weight body 30 passes through the point ⁇ ] is measured, and the X-axis direction velocity component VX and the ⁇ -axis direction velocity component Vy of the entire system are detected.
• the sensor housing containing the motion system shown in FIG. Let's explain the principle of mounting on a vehicle and detecting the traveling speed of this vehicle separately in Xih direction component VX and Y axis direction component Vy.
• the weight rest 3 [] is caused to perform a revolving motion and a rotating motion having a predetermined angular velocity ⁇ .
• the weight rest 30 is moved along the orbit 31 while the entire three-dimensional coordinate system shown in FIG. 14 is stationary.
• the motion of the weight body when the coordinate system is in a stationary state as described above will be referred to as “reference motion”.
• the force F x (0) in the X-axis direction and the force F y (0) in the Y-axis direction generated at the weight rest 3 ⁇ are generated. Measure in advance.
• FIG. 16 shows this state.
• the weight body 30 is also moved along the orbit 31 and, at the moment of passing the point P1, the force in the X-axis direction acting on the weight rest 30 FX (VX y) and the Y direction The force F y (V xy) is measured.
• the differences X and mu F y from the measured values at the time of the reference movement are
• the force FX in the X-pong direction and the force Fy in the Y-huge direction acting on the weight rest 30 are measured and obtained during the reference movement. If the differences ⁇ FX, AFy from these obtained values are obtained, the axial components VX, Vy of the moving speed VXy of the vehicle can be obtained.
• This detection principle is equivalent to the detection principle already described in S3, considering that at point P1, the force FX is a force acting in the tangential direction and the force Fy force is a force acting in the radial direction. I understand that it is.
• the operating principle of the two-dimensional speed sensor capable of detecting the velocity component VX in the X-direction and the velocity component Vy in the Y-axis direction has been described above with reference to FIG. 16. it is also possible to realize a three-dimensional velocity sensor that can detect a velocity component V Z of the Z-axis direction.
• the two-dimensional speed sensor shown in FIG. 6 is a speed sensor that can use both the detection principle shown in FIG. 1 and the detection principle shown in FIG. It was sufficient to be able to drive only the parallel rotation axes.
• three-dimensional velocity sensors need to use all three detection principles shown in Figs.
• a function of rotating and driving the weight body 30 about a rotation axis parallel to the X axis may be added.
• the three-dimensional speed sensor has two measurement modes.
• the first measurement mode is a mode for detecting the velocity component VX in the X-axis direction and the velocity component Vy in the Y-axis direction.
• the weight body 30 is moved along the Z-axis.
• the force FX in the X-axis direction and the force F y in the Y flll direction acting on the weight body 3 ⁇ ⁇ are detected, and the speed is determined by the method described above.
• the components VX and Vy are determined. This is the operation itself of the two-dimensional speed sensor described above.
• the second measurement mode detects the velocity component Vz in the free direction.
• a revolving orbit 33 is defined in the YZ plane, and the weight rest 30 is rotated at an angular velocity ⁇ X with respect to ⁇ parallel to the X axis, while rotating in the YZ ⁇ plane.
• Orbital orbit 3 Orbital motion at angular velocity ⁇ X on 3. Then, for example, at the point P 1, the difference ⁇ F y of the ⁇ -axis direction force F y acting on the weight rest 30 may be detected. That is, the force F y (0) when the three-dimensional coordinate system is kept stationary and the force F y (V when the three-dimensional coordinate system is moving at the speed V z in the Z direction.
• the weight 30 In the first measurement mode, the weight 30 needs to be driven to rotate around the Z axis. In the second measurement mode, the weight 30 needs to be driven to rotate around Xil. Therefore, both measurement modes cannot be executed at the same time.However, if these measurement modes are switched in a time-division manner, the velocity components V x, V y, and V z for each axis are periodically changed. It is possible to detect.
• the weight rest 30 performs a revolving motion along the circumferential orbit 31.
• the orbit 31 is not necessarily a circular orbit. For example, even if the weight reciprocates on an arc-shaped orbit, the revolving orbit does not matter.
• the force acting in the X-axis direction FX and the force acting in the Y-axis direction F at the moment of passing through the point P1 while the weight body 30 is reciprocating near the point P1 It just needs to be able to measure y in some way.
• FIG. 18 is a diagram showing a basic principle of a speed sensor using a weight body that performs such a reciprocating motion.
• the weight rest 40 is fixed to the lower end of the arm 41, and the upper end of the arm 41 is rotatably pivoted at the position of the origin 0 of the coordinate system. Therefore, assuming that the effective length of the arm 41 is r, the weight rest 40 can move along an arc trajectory 42 having a radius r around the origin 0.
• Such a supporting structure of the weight rest becomes the “simple supporting system” described above.
• an XYZ three-dimensional coordinate system is defined so that the paper surface is an XZ plane as shown in FIG. Along the circular orbit 4 2 from
• the weight body 40 performs a reciprocating pendulum motion.
• the mass of the arm 41 is ignored, it can be treated as a model in which the center of gravity G of the weight body 40 moves on the circular arc orbit 42 at an angular velocity ⁇ y.
• the weight body 40 revolves around the Y-axis at an angular velocity o> y.
• the weight body 40 revolves around the origin 0 at an angular velocity ⁇ y
• the term “rotation” or “revolution” is not necessarily a word meaning one rotation of 360 °, but has a meaning including a partial rotation that does not reach one rotation. Will be used.
• the angular velocity ⁇ y is not constant but an amount that changes periodically. That is, at both end points P 1 and P 2 of the arc trajectory 42, the angular velocity co y becomes zero, and at the center point P 0, the angular velocity ⁇ y becomes the maximum value.
• the observation point P3 which is separated from the point P0 to the point P1 by an angle 0 as shown in the figure.
• some measuring means for measuring the force FX acting on the weight body 40 in the X-axis direction and the force F z in the Z-axis direction is provided. .
• the force FX acting in the X $ direction acting on the weight body 40 and the force Fz acting in the Ziifi direction are measured, and the reference is measured. If the differences ⁇ FX and AFz from these values obtained during exercise are obtained, the axial components VX and Vz of the sensor housing moving speed VXz can be obtained. In practice, instead of calculating the speeds VX and Vz by performing the calculations based on the above-mentioned equations (28) and (29), the values of the measured differences ⁇ Fx and AFz are converted to different speeds. What is necessary is just to calibrate and output by a sensor.
• a two-dimensional velocity sensor capable of detecting the velocity component V x in the X-axis direction and the velocity component V z in the Z-axis direction by a reciprocating pendulum motion system as shown in Fig. 18 is constructed.
• the calculating means 25 calculates the difference X, AFz from the detected value at the time of the reference motion when the housing 22 is stationary.
• the velocity component VX in the X-axis direction and the velocity component Vz in the Z-axis direction of the casing 22 can be obtained by calculation or by a calibration equivalent to this calculation.
• FIG. 19 is a perspective view showing a movement system substantially the same as the movement system shown in FIG.
• the motor system shown in Fig. 19 the weight “5” is fixed to the lower end of the arm 51, and the upper end of the arm 51 is rotatably supported at a support point Q over Z. Now, let's consider a platform that reciprocates this motion system in the XZ plane.
• the weight body 50 reciprocates along an arc trajectory 52 having a radius equal to the effective length r of the arm 51.
• the circular arc orbit 52 is a path formed between the end points P 1 and P 2, and this movement is equivalent to the movement shown in FIG. Therefore, during this reciprocating pendulum motion, if the force FX in the X-axis direction acting on the weight body 50 and the force Fz in the Z-fist direction can be detected by some method, the Xll direction in the entire motion system can be detected. The velocity component VX and the velocity component Vz in the Z-axis direction can be obtained.
• FIG. 20 is a top view for explaining this rotation function.
• the arc trajectory 52 shown in FIG. 19 is a trajectory overlapping the X axis in FIG.
• the reciprocating pendulum motion in the XZ plane is a left and right reciprocating motion along the X axis in FIG.
• the support point Q shown in FIG. 19 is gradually rotated about the Z axis as the rotation axis.
• the plane of reciprocating pendulum motion gradually changes from the XZ plane to the W1 plane, the W2 plane,... as shown in Fig. 20.
• the YZ plane becomes the motion plane.
• the circular locus 53 indicates the locus of the end points PI and P2.
• the circular arc trajectory 54 passing through the weight body 50 becomes a trajectory along the Y axis in FIG. 20 and the movement of the weight body 50 is viewed from above. And the reciprocating movement up and down along the Y axis.
• this circular orbit 54 The reciprocating pendulum along the axis is a motion having an angular velocity ⁇ X about the X axis. Therefore, during such a reciprocating pendulum motion, if the ⁇ force in the fortunate direction F ⁇ acting on the weight rest 50 can be detected in some way, the measured value of this force F ⁇ ⁇ during the reference motion , And this difference corresponds to the Coriolisa F co (z) in the ⁇ -axis direction.
• a three-dimensional speed sensor can be realized by causing the weight body 50 to reciprocate in a predetermined motion plane and to gradually rotate the motion plane. That is, when the motion plane overlaps the XZ plane (when the weight body 50 is moving at an angular velocity ⁇ y around Y f.), The X If the force FX is detected, the movement velocity V z in the Z-axis direction of the entire motion system can be obtained. If the force F z in the Z-axis direction acting on the weight body 50 is detected, the motion system can be obtained. The moving speed VX in the entire X-axis direction can be obtained.
• the force acting on the weight rest 50 is ⁇ the force in the free direction. If F ⁇ is detected, the moving speed V y in the ⁇ -axis direction of the entire driving system can be obtained.
• the reciprocating path of the weight 5 ° does not necessarily have to be a circular arc.
• it may be a parabolic track, a hyperbolic road, an elliptical road, or any other route.
• the calculating means 25 uses the change of the force acting on the weight body 5 ⁇ in the predetermined direction as a parameter to obtain the velocity components VX, V y, V z of the casing 22 in the respective pong directions. Calculation or calibration In order to simplify the calculation or calibration, it is preferable to reciprocate on a simple path such as an arc orbit as much as possible.
• a simple path such as an arc orbit
• Each of the specific embodiments described below is of a type in which the weight body is reciprocally pendulum-moved substantially along a circular orbit.
• the revolving speed of the weight body is considerably high, and it can be said that it is not a reciprocating pendulum motion but a vibration. Therefore, continuous speed detection in almost real time becomes possible.
• a piezoelectric element is a very suitable material for such a driving means 23 and a detecting means 24.
• a piezoelectric element has a property of generating a charge of a predetermined polarity when a force is applied in a predetermined direction, and has a property of generating a force in a predetermined direction when a charge of a predetermined polarity is supplied.
• the former property can be used as the detecting means 24, and the latter property can be used as the driving means 23.
• the piezoelectric element PE 1 shown in Fig. 21 (a) and (b).
• the piezoelectric element PE 1 when a force in the laterally extending direction is externally applied, the piezoelectric element PE 1 has a positive charge on the upper electrode layer A side and a lower electrode. Negative charges are generated on the layer B side, and conversely, as shown by the arrow in Fig. 21 (b), the upper electrode is applied to the field base to which a laterally contracting force is applied from the outside. A negative charge is generated on the layer A side, and a positive charge is generated on the lower electrode layer B side.
• the above description shows the property that a charge of a predetermined polarity is generated when a force is applied in a predetermined direction. Conversely, when a charge of a predetermined polarity is supplied, a predetermined direction is generated. It also has the property of generating force. That is, when a positive charge is supplied to the upper electrode layer A side and a negative charge is supplied to the lower electrode layer B side of the piezoelectric element PE1, as shown by an arrow in FIG. When a negative charge is supplied to the upper electrode layer A side and a positive charge is supplied to the lower electrode layer B side, as shown by the arrow in Fig. 21 (b) Then, a force in the direction of contracting laterally is generated.
• the piezoelectric element PE 1 having such polarization characteristics is referred to as a type I piezoelectric element.
• the piezoelectric element PE2 shown in FIGS. 22 (a) and (b) has a slightly different property from the above-described piezoelectric element PE1. That is, as shown by the arrow in FIG. 22 (a), this piezoelectric element PE2 has a positive charge on the upper electrode layer A side when a force in the direction of being vertically applied from the outside is applied. A negative charge is generated on the lower electrode layer B side, and conversely, as shown by an arrow in FIG. A negative charge is generated on the electrode layer A side, and a positive charge is generated on the lower electrode layer B side.
• the above description shows the property that a charge of a predetermined polarity is generated when a force is applied in a predetermined direction.
• the charge has a property of generating a force in a predetermined direction when a charge of a predetermined polarity is supplied. That is, when a positive charge is supplied to the upper electrode layer A side and a negative charge is supplied to the lower electrode layer B side of the piezoelectric element PE 2, as shown by an arrow in FIG. When a negative electric charge is supplied to the upper electrode layer A side and a positive electric charge is supplied to the lower electrode layer B side, an arrow is shown in Fig. 22 (b). As described above, a force in the direction of contracting vertically is generated.
• the piezoelectric element PE 2 having such polarization characteristics is referred to as a type II piezoelectric element.
• piezoelectric elements for example, piezoelectric ceramics are widely used.
• the piezoelectric element has a function of performing “force-charge” conversion and a function of performing “charge-force” conversion.
• the former function was used as the Corioliska detecting means 24, and the latter function was used as the driving means 23 for rotating the weight rest. Things.
• FIG. 23 is a perspective view of a main part of the one-dimensional speed sensor according to one embodiment of the present invention.
• the speed sensor includes an elongated prism-shaped vibrator 60, a pair of pedestals 61, 62 supporting the vibrator 60, and a piezoelectric element 6 fixed to the center of the upper surface of the vibrator 60. 3 and piezoelectric elements 64 and 65 fixed to both ends of the upper surface of the vibrator 60.
• an XYZ three-dimensional coordinate system is defined as shown in the figure, and the following description will be made.
• the vibrator 60 is arranged so that its longitudinal direction is along the X-axis, and its lower surface is formed by a pair of pedestals 61 and 62 arranged at a predetermined distance in the X-axis direction. Are supported.
• the pair of pedestals 6 1 and 6 2 is a triangular prism-shaped block, and the top sides are bonded to the lower surface of the vibrator 6 #.
• FIG. 24 is a front sectional view and a wiring diagram of the speed sensor shown in FIG. As shown in FIG. 24, the pedestals 61, The lower surface of 62 is fixed to the bottom of housing 22. Although not shown in the figure, the entire main part illustrated in FIG.
• the vibrator 60 is only supported by the pair of pedestals 61 and 62. It is supported and fixed in 22.
• the vibrator 60 needs to vibrate as efficiently as possible.
• the structure in which the vibrator 60 is supported by the vertexes of the pair of pedestals 61 and 62 in this manner is to achieve vibration as efficient as possible.
• the vibrator 60 be made of a material suitable for such vibration. In this embodiment, a vibrator made of a metal material is used.
• piezoelectric elements 63, 64, and 65 are fixed to the upper surface of the vibrator 60.
• the piezoelectric element 63 functions as a force generator for applying a force to the vibrator 60
• the piezoelectric elements 64 and 65 function as displacement detectors for detecting displacement of both ends of the vibrator 60.
• these piezoelectric elements are composed of piezoelectric element bodies 63 P, 64 P, 65 P and upper electrode layers 63 A, 64 A, 65 A, as shown in the sectional view of FIG. Have been.
• the thicknesses of the piezoelectric element bodies 63 P, 64 P, 65 P and the thicknesses of the upper electrode layers 63 A, 64 A, 65 A are shown in an enlarged manner. Actually, these thicknesses are very small compared to the dimensions of the vibrator 60, and the appearance is as shown in the perspective view of FIG. The important point here is that the piezoelectric element 63 is located at the center between the pair of pedestals 61 and 62, whereas the piezoelectric element 64 is on the left side of the pedestal 61 and the piezoelectric element 65 is on the pedestal 62. It is located on the right side.
• the vibrators [] and the piezoelectric element For 6 3, 6 4, 6 5, an AC power supply 6 6 and voltmeters 6 7, 6 8 are connected, and the outputs of the voltmeters 6 7, 6 8 Has been given.
• the piezoelectric element bodies 63P, 64P, and 65P the type I piezoelectric elements shown in FIGS. 21 (a) and (b) are used.
• the prism 60 made of metal is used as the vibrator 60, the vibrator 60 itself forms the lower electrode layer B shown in FIGS. 21 (a) and (b).
• the piezoelectric element 63 becomes The state shown in FIG. 1 (a) and the state shown in FIG. 21 (b) are alternately taken.
• the voltmeter 67 detects electric charges generated above and below the piezoelectric element 64, and the voltmeter 68 functions to detect electric charges generated above and below the piezoelectric element 65.
• the vibrator 60 vibrates so as to alternately repeat the state shown in FIG. 25 and the state shown in FIG. As described above, the vibrator 6 [) vibrates in a unique vibration mode.
• a unique vibration mode has a node position where displacement is least. Therefore, in realizing this speed sensor, the unique vibration mode of the vibrator 60 is analyzed, the node position with the least displacement is confirmed, and this node position is determined by the pair of pedestals 6 1 and 6 2. Preferably, it is supported.
• FIG. 25 and FIG. 26 show the vibration state of the pedestal where the pedestals 61 and 62 are arranged at such node positions.
• the vibrator 60 changes its shape from a state in which the upper part is bent to a convex shape to a state in which the lower part is bent to a convex shape, but at the node position supported by the pedestals 61, 62, Almost no position change has occurred.
• the vibrator 60 is supported by the node position in this manner, efficient vibration can be realized, and there is no problem that the vibration is transmitted to the housing 22 and leaks to the outside.
• the voltmeters 67 and 68 are supposed to detect what voltage will be detected.
• the upper surface of the vibrator 60 is in a state of extending in the horizontal direction in all portions, so that a force in the direction of extending in the horizontal direction is applied to the piezoelectric element 64. Therefore, as shown in FIG. 2A, a positive charge is generated on the upper electrode layer 64A side, and a positive voltage is detected by the voltmeter 67.
• the voltmeter 67 detects an AC voltage having the same cycle and the same phase as the AC voltage generated by the AC power supply 66.
• the piezoelectric element 65 and the voltmeter 68 detects an AC voltage having the same period and the same phase as the AC voltage generated by the AC power supply 66.
• the piezoelectric elements 64, 65 are piezoelectric elements having exactly the same size and the same performance, and are arranged at completely symmetric positions.
• the support positions of the pedestals 61 and 62 are symmetrical, and the arrangement of the piezoelectric elements 63 is symmetrical.
• the vibration phenomena of the vibrator 60 are completely symmetrical on the left and right, and naturally the AC voltages detected by the voltmeters 67 and 68 are also exactly the same.
• such a discussion is based on the premise that the entire speed sensor is stationary. If the entire speed sensor is moving in a predetermined direction, it is necessary to further consider the action of Coriolis.
• the left and right free ends of the vibrator 60 are treated as separate and independent weights. That is, in FIG. 25, the left free end located on the left side of the pedestal 61 of the vibrator 60 and the right free end located on the right side of the pedestal 62 are considered as independent weight rests. .
• Vibrator 6 ⁇ ⁇ ⁇ is not vibrating (dashed line in Fig.
• the left end of ⁇ can be treated as a mass located at the center of gravity GL 0, and the free end of the right can be treated as a mass located at the center of gravity GR 0.
• the center of gravity GLO and the center of gravity GRO are symmetrically located, and both are mass points with the same mass m.
• the vibrator 6 ⁇ is in a vibrating state, the center of gravity of these free ends moves.
• the center of gravity of the left free end moves to GL1, and the center of gravity of the right free end moves to GR1.
• the vibration state shown in Fig. 25 the vibration state shown in Fig.
• the center of gravity of the left free end moves to GL2, and the center of gravity of the right free end moves to GR2.
• Such a shift in the center of gravity is nothing less than the reciprocating pendulum motion described in FIG.
• the left and right free ends are supported by a “simple support system” so that reciprocating pendulum movement can be performed with the support point of the pedestal as the center point.
• the support point of the pedestal may move slightly due to vibration, and the vibrator 60 itself may be slightly distorted, so that the path of movement of the center of gravity may not be a perfect circular orbit.
• the reciprocating motion in which the center of gravity changes from GL 1 to GL 0 to GL 2 and the reciprocating motion in which the center of gravity changes from GR 1 to GR 0 to GR 2 are both angular velocities around the Y axis (perpendicular to the paper). It is nothing but an S rolling motion with y.
• the action of Coriolisa is exactly opposite on the left and right.
• the unbalanced phenomenon on the left and right appears as a difference between the detection voltages of the left and right voltmeters 67 and 68.
• the downward Coriolis Fz (L 1) acting on the left free end acts in a direction to further increase the extension of the piezoelectric element 64 fixed to the upper surface, while the right free end Coriolis force F Z direction on acting (R 1) to act in the direction to reduce the elongation of the piezoelectric element 65 which is fixed to the upper surface.
• the outputs of the left and right voltmeters 67 and 68 are the same, but when the entire motion system moves at the speed VX, the left voltmeter 67 detected voltage 7 increases, the detection voltage V 6 8 right voltmeter 68 is reduced.
• the upward Coriolis F F (L 2) acting on the left free end acts in a direction to further increase the shrinkage of the piezoelectric element 64 fixed on the upper surface
• the right The downward Coriolis Fz (R2) acting on the end acts in a direction to reduce the contraction of the piezoelectric element 65 fixed to the upper surface.
• FIG. 27 is a graph showing a change in the detection voltage of such voltmeters 67 and 68.
• both detection voltages V67 and V68 are equal.
• the detection voltage V67 increases and V68 decreases. Therefore, by calculating the difference between the two detection voltages in the signal processing means 69, it is possible to obtain the speed component VX in the X direction of the housing 22 accommodating the speed sensor.
• an AC voltage is supplied from the AC power supply 66 to the piezoelectric element 63 functioning as a force generator, and the vibrator 60 is vibrated.
• the voltmeters 67 and 68 detect the displacements of the electrodes via the piezoelectric elements 64 and 65 functioning as displacement detectors.
• the Corioliser does not act, and displacements corresponding to the supplied AC voltage are detected by the voltmeters 67 and 68 (see Fig. 27 when V 6 7 , V 6 o).
• a differential amplifier is used as the signal processing means 69, and the difference between the output voltages of the two voltmeters 67, 68 is output as a voltage value, and the speed component VX actually measured by another speed sensor is used.
• the output of the differential amplifier may be calibrated based on the value.
• FIG. 28 shows an example using a prismatic vibrator 70 (the pedestal and the wiring are not shown) as in the above-described embodiment, but the arrangement of the piezoelectric elements is slightly different. That is, the piezoelectric element 71 functioning as a force generator is disposed at the center of the upper surface of the vibrator 7 ⁇ as in the above-described embodiment, but the piezoelectric elements 72 and 7 functioning as displacement detectors 3 are arranged on the lower surface of both ends.
• a triangular prism-shaped vibrator 80 is provided with three piezoelectric elements 81, 82, 83 on one surface, and the same operation is also possible. .
• a vibrator is formed by a so-called tuning fork-like structure 90.
• the first vibrator 91 and the second vibrator 92 are connected by a bottom portion 93, forming a U-shaped structure as a whole.
• the bottom portion 93 is fixed to the housing 95 by a pedestal 94.
• three piezoelectric elements 96, 97, 98 are arranged on the side surface of the first vibrator 91.
• three piezoelectric elements Elements (not shown) are located on the side surface of the second vibrator 92.
• a driving means for rotating the weight body on its own axis and a detecting means for detecting Coriolisa acting on the weight body are essential components.
• a driving means for rotating the weight body on its own axis and a detecting means for detecting Coriolisa acting on the weight body are essential components.
• FIG. 19 the mechanism by which the weight rest 50 reciprocates in the XZ plane has been described.
• the weight body 50 rotates at an angular velocity ⁇ y about the Y axis.
• the Coriolisa F co (x) in the X-axis direction acting on the weight rest 50 becomes an amount related to the velocity component V z in the Z-axis direction of the entire motion system rest, and the weight body 50
• the Coriolis force F co (z) acting in the Z-axis direction is an amount related to the velocity component VX in the X-pong direction of the entire motion system, so that Coriolisers F co (x) and F co (z) are As described above, if the velocity components can be measured by any method, the velocity components V z and VX can be obtained.
• a means for moving the weight body 50 in a reciprocating pendulum in the XZ plane is necessary as a driving means.
• a means for detecting the Corioliska F co (x) in the X-axis direction and the Coriolis Fco (z) in the Z-axis direction acting on the body 50 is required.
• the inventor of the present application has considered using a plurality of force generators as driving means.
• a first force generator that applies a force to the weight body 50 in the positive direction of the X axis
• a second force generator that applies a force to the weight body 50 in the negative direction of the X axis
• the weight rest 50 can be reciprocally pendulum-moved along the circular orbit 52.
• a capacitance element ⁇ piezoelectric element is suitable, and a specific example in which the force generator is configured using the capacitance element ⁇ piezoelectric element will be described later.
• the inventor of the present application has considered using a plurality of displacement detectors as the detecting means.
• the first displacement detector that can detect the displacement of the weight body 50 in the X-axis direction (ie, the X coordinate value) and the displacement in the Z-axis direction (ie, the Z coordinate value) are shown in FIG.
• a second displacement detector that can be detected is installed.
• the displacement detector itself has only the function of directly detecting the displacement of the weight body 50, but can indirectly detect the Coriolisa Fco. The principle can be understood from the following explanation.
• the rest of the motion system shown in Fig. 19 has no velocity component and is in a stationary state.
• the Coriolis force due to the movement of the motor system at all times does not act on the platform and the weight body 50 at this time.
• the force generator is operated to cause the weight rest 50 to reciprocate along a circular orbit 52. If the force generator is programmed to perform a predetermined periodic motion, the reciprocating pendulum motion of the weight 50 will be a repetition of the periodic motion.
• reference motion the motion of the weight rest 50 in an environment where Coriolisa does not act is referred to as “reference motion” as described above.
• the displacement of the weight 50 detected by the first displacement detector in the X-axis direction is also determined by the weight displacement detected by the second displacement detector.
• the displacement in the 50 direction of service also becomes a known periodic one.
• the displacement in the X-direction detected by the first displacement detector is, for example, "5, 4, 3, 2, 1, 0, -1, 1, 2, 3, 4, , One 5,-4,-3,-2, — 1, 0, 1, 2, 3, 4, 5, 4, 3, 2, 1, 0, one], « ”
• the displacement in the Z-axis direction detected by the second displacement detector is, for example, “3, 2, 1, 0, — 1,, -2, -3, -2, 1], 0, 1, 2 3, 2, 1, 0, — 1, « ”. Therefore, a known displacement detection value in a state where the “reference movement” is being performed is stored as a reference detection value.
• FIG. 32 is a front view of the motion system shown in FIG. 19, and shows a state in which the weight body 50 reciprocates along a circular orbit 52 in the XZ plane. .
• + ⁇ y is obtained in the half cycle from the end point P 2 to the end point P 1 through the center point P 0 to the end point P 1, and Conversely, in the half cycle going from the end point P 1 to the end point ⁇ 2 through the center point P ⁇ to the end point ⁇ 2, it becomes ⁇ y.
• the sign of the angular velocity o> y is reversed every half cycle.
• the absolute value of the angular velocity cu y becomes maximum at the moment when the vehicle passes the center point P 0, and becomes zero at the end points P 1 and P 2.
• the entire motion system shown in Fig. 32 moves in the positive direction of the Z axis at a speed + Vz, And how it changes.
• the weight body 50 is positive
• a Coriolis force Fco (x) acts in the positive direction of the X axis
• the weight 5 ⁇ is moving at a negative angular velocity of 1 wy
• the Coriolis force is in the negative direction of the X axis. It turns out that Fco (x) works.
• the displacement in the X-fortunate direction detected by the first displacement detector is, as described above, “5, 4, 3, 2, 1, 0, one 1, -2,- 3, one 4,-5, one 4,-3, one 2, one 1, 0, 1, 2, 3, 4, 5, 4,... ”
• the displacement in the Xflll direction detected by the first displacement detector is “6, 5, 4, 3, 2, 1”. , 0,-1,-2,-3, one 4,-5, one 6,-5, one 4,-3,-2, one 1, 0, 1, 2, 3, 4, 5, 6, 5, 4,... ”.
• the first displacement detection A detector always detects the amplitude of displacement in the X-axis direction. By comparing this detected value with a reference detected value in “reference movement”, the moving speed V z can be known. That is, the moving speed Vz is obtained as the difference between the actual amplitude detection value obtained by the displacement detector [1] and the reference amplitude detection value in the “reference motion” state.
• Coriolis Fco (z) are denoted as + AF z and one AF z with a sign
• the weight rest 50 moves from the end point P 2 to the end point P 1 through the center point P 0 to the right of the figure.
• a Coriolis force of + ⁇ Fz directed in the Z $ direction acts additionally, and conversely, the weight rest 50 moves from the end point P 1 to the center point P 0.
• a corioliser of ⁇ F z directed in the negative direction of the Z axis acts additionally.
• the arm 51 is made of a material with some flexibility; In fact, the embodiments of the multidimensional velocity sensor described in ⁇ 12 and thereafter adopt a structure in which the weight is supported by a flexible substrate, as described later. It is equivalent to a flexible base.
• the arm 51 is flexible, if a Corioliser + AF z directed in the positive direction of the Z axis acts, the circle becomes The arc trajectory 52 moves in the positive direction of the Z axis (upward in Fig. 33).
• a Corioliser ⁇ Fz oriented in the negative direction of the Z axis acts, the arc trajectory 52 moves in the negative direction of the Z axis (Fig. 33). Below).
• the circular arc orbit 52 is slightly upward as compared with the "reference movement".
• the arc orbit 52 moves slightly downward compared to the "reference operation" in the half cycle. Will be displaced. Since the absolute value of the angular velocity wy of the weight 50 becomes maximum at the center point P 0 and becomes zero at both end points P 1 and P 2, the displacement amount of the circular arc orbit 52 is calculated at the center point P ⁇ . It becomes maximum and becomes zero at both end points P 1 and P 2. Therefore, the displacement of the center point P 0 appears most remarkably. In FIG. 33, the position of the center point ⁇ 0 after this displacement is shown as points ⁇ 0 and ⁇ () —.
• Corioliser + AF z is added in the half cycle (angular velocity + wy) to the right of the figure in the reciprocating pendulum motion.
• the corioliser-AF z is added, so the vehicle passes through the lower trajectory passing through point P 0 _.
• the corioliser AF z is added in the right half cycle (angular velocity + wy) of the forward and backward pendulum motion.
• the corioliser + AF z is added, so that it follows the upper trajectory passing the point P0 +. Become.
• the displacement of the weight rest 50 in the Z-axis direction is always detected by the second displacement detector, and if this detected value is compared with the reference detected value in the “reference motion”, the moving speed VX You can know.
• the absolute value of the moving speed VX for example, the average displacement value in the Z axis direction (the average of the Z coordinate values of the weight body 50 for the period of the pendulum motion) is obtained.
• the difference between the average displacement value and the reference average displacement value in the “reference motion” may be calculated, or the Z coordinate value at the moment when the weight 5 ° passes the Z axis (for example, The Z coordinate value of the point P 0 + in FIG. 33 and the Z coordinate value at the moment when the weight body 50 passes through ⁇ in the “reference motion” (for example, the point P ⁇ in FIG. 33) (Z coordinate value).
• the sign of the moving speed VX is calculated by comparing the magnitude relation of the displacement detection values in the Z-direction detected by the second displacement detector for the right half cycle and the left half cycle. You can ask.
• the moving speed VX is determined based on the deviation of the orbit in the Z-axis direction in the reciprocating pendulum motion.
• the detection principle of the moving speeds Vz and VX described above will be described more specifically with reference to waveform diagrams.
• the waveform G (+ X) shown in FIG. 34 is a drive signal for driving the first force generator that generates a force ffl on the weight rest 50 in the positive direction of the X axis,
• a positive drive signal is given, the weight body 50 is pulled in the X-axis positive direction
• a negative drive signal is given, the weight body 50 is pulled in the X-axis negative direction.
• the waveform G (—X) is a drive signal for driving a second force generator that generates a force ffl on the weight body 50 in the negative direction from X, and the positive drive signal was given At this time, the weight body 50 is pulled in the negative direction of the X axis, and when a negative drive signal is given, the weight rest 50 is pulled in the positive direction of the X axis.
• the phases of the waveform G (+ x) and the waveform G (-X) are inverted, and when the drive shown in both waveforms moves, the amplitude increases as described above.
• the detected value X has a large amplitude as shown in the middle part of FIG.
• the waveform G (+ X) and the waveform G (—X) shown in FIG. 36 are the same as those shown in FIG. 34, and the first and second waveforms which apply a force in the positive and negative directions of ⁇ are shown.
• This is a driving signal for driving the force generator of FIG.
• the weight body 50 performs the forward and backward pendulum motion as described above.
• the waveform D ( ⁇ ) shown in FIG. 36 is a detection signal obtained from the second displacement detector that detects the displacement ( ⁇ coordinate value) of the weight rest 50 in the vertical direction, 3 shows a waveform in the case of performing a reference motion. Obtaining such a waveform can be easily understood by following the ⁇ coordinate value of the weight body 50 moving along the circular arc orbit 52 in FIG.
• a waveform ⁇ y shown in FIG. 36 is a waveform indicating the angular velocity ⁇ y of the weight rest 50 performing the reciprocating pendulum motion.
• a half cycle L from time t1 to t2 to t3 is a period during which the weight 50 moves to the left in FIG. 33, and the angular velocity ⁇ y becomes a negative value.
• the half cycle R from time t3 to t4 (t0) to tl is This is the period during which the weight 50 moves to the right in FIG. 33, and the angular velocity co y becomes a positive value.
• the waveform G (+ X) and the waveform G (-X) shown in FIG. 36 are the same waveforms as those shown in FIG. 34, and the first and second waveforms that exert a force in the positive and negative directions of the X axis are shown.
• This is a drive signal for driving the second force generator.
• the weight body 50 performs the forward and backward pendulum motion as described above.
• the waveform D (z) shown in FIG. 36 is a detection signal obtained from the second displacement detector that detects the displacement (Z coordinate value) of the weight body 50 in the Z-axis direction.
• the waveform of the stage where 50 is performing the reference movement is shown. Obtaining such a waveform can be easily understood by following the Z coordinate value of the weight body 50 moving along the circular arc orbit 52 in FIG.
• a waveform ⁇ y shown in FIG. 36 is a waveform indicating the angular velocity ⁇ y of the weight body 50 performing the reciprocating pendulum motion.
• a half cycle L from time t1 to t2 to t3 is a period during which the weight 50 moves to the left in FIG. 33, and the angular velocity ⁇ y becomes a negative value.
• the half cycle R from time t3 to t4 (t0) to tl is- This is a period during which the weight body 50 moves rightward in FIG. 33, and the angular velocity ⁇ y becomes a positive value.
• FIG. 37 is a waveform diagram of the difference AD obtained in this manner.
• the difference waveform ⁇ shown in the upper part of FIG. 37 indicates the difference when the weight rest 5 () is performing the reference motion, and the difference is always zero.
• the difference waveform AD ⁇ shown in the middle part of Fig. 37 is, as shown by the white arrow in Fig. 33, ⁇ ⁇ when the whole motion system moves at + VX speed in the positive direction. Shows the difference.
• the orbit is displaced in the half-period R due to the action of Corioliser + ⁇ Fz, and the orbit is displaced in the Z direction.
• the orbit is displaced in the negative Z ⁇ direction due to the action of ⁇ Fz. Therefore, in the waveform diagram in the middle part of FIG. 37, the difference ⁇ ⁇ has a positive value in the half cycle R, and the difference D ⁇ ⁇ has a negative value in the half cycle L. Conversely, when the entire motion system moves in the direction of ⁇ $ at a speed of 1 VX, the difference D ⁇ ⁇ ⁇ becomes as shown in the lower part of FIG. 37.
• the direction (sign) and magnitude of the velocity Vx in the X-axis direction can be detected.
• a force acts on the weight body 5 mm in the positive direction of the X axis.
• a second force generator for exerting a force in the negative direction of the X-axis.
• a second displacement detector capable of detecting the displacement of the weight body 50 in the X ⁇ direction and a second displacement detector capable of detecting the displacement in the positive Z direction are provided, and actual detected values of these displacement detectors are provided.
• a third force generator that applies a force to the weight body 50 in the positive Y-axis direction is used as driving means.
• a fourth force generator that applies a force in the negative direction from Y may be added.
• the second displacement detector can detect the orbital displacement in the Z-axis direction during the movement along the arc-shaped orbit 54, this displacement is based on the Coriolis soil z acting in the Z $ direction, Since the Coriolis soil ⁇ Fz is an amount related to the velocity Vy, a three-dimensional velocity sensor capable of measuring all velocity components including the velocity Vy can be realized.
• the three-dimensional velocity sensor 100 whose side section is shown in FIG. 38 is an embodiment in which a force generator and a displacement detector are constituted by capacitive elements.
• the substrate that functions as the center of the speed sensor 100 is the flexible substrate 110.
• FIG. 39 shows a top view of the flexible substrate 110.
• FIG. 38 shows a cross section of the flexible substrate 1] 0 shown in FIG. 39 cut along the X direction. As shown by a broken line in FIG. 39, an annular groove is formed on the lower surface of the flexible substrate 1] 0, and a portion where the groove is formed is formed. Is flexible due to its small thickness (shown as flexures 1 1 and 2 in FIG. 38).
• the inner portion surrounded by the annular flexible portion 112 is referred to as an action portion 111
• the outer portion of the flexible portion 112 is referred to as a fixed portion 113.
• a block-shaped weight body 120 is fixed to the lower surface of the working portion 111, and the fixed portion 113 is supported by a pedestal 13 [] (in FIG. 39, The positions of the weight rest 12 2 and the pedestal 130 are indicated by broken lines).
• the pedestal 130 is fixed to the base substrate 14 ⁇ .
• the weight body 120 is suspended in the space surrounded by the pedestal 130.
• the thin flexible portion 112 has flexibility, the weight rest 122 can be displaced in this space with a certain degree of freedom.
• the weight is increased via the flexible portion 112 functioning as a support means and the action portion 111.
• Weight rest 120 force ⁇ which means that it is supported so that it can move with a certain degree of freedom.
• a cover substrate 150 is mounted on the flexible substrate 110 so as to cover it while securing a predetermined space.
• Electrode layers D11 to D15 are formed on the upper surface of the flexible substrate 110.
• these electrode layers are indicated by hatching, but this is for the purpose of facilitating pattern recognition of each electrode layer, and the cross section is shown. Not for hatching. Also, different hatching patterns were applied to the electrode layer functioning as a force generator and the electrode layer functioning as a displacement detector. This is similar to the other figures showing the planar pattern of the electrodes.
• one large disc-shaped common electrode layer ⁇ is formed on the lower surface of the lid substrate 15 ⁇ ⁇ so as to face all of these electrode layers G 11 ⁇ 14 and 01 1 1 015. 10 are formed, and these upper and lower electrode layers constitute a total of 9 sets of capacitive elements.
• a three-dimensional coordinate system is defined in which the X-axis is located to the right of the figure and the rules are located to the top of the figure, and the following description will be given.
• the electrode layers G11 to G14 and the electrode layers D11 to D14 are all located on the X axis or the Y axis in this coordinate system. It has a shape that is line-symmetric with respect to the bush.
• nine individual electrode layers G 11 to G 14 and D 11 to D 15 are formed on the flexible substrate 110 side, and a single common layer is formed on the lid substrate 150 side.
• the electrode layer E10 was formed, conversely, a single common electrode layer E10 was formed on the flexible substrate 110 side, and nine individual electrode layers G11 to 9 were formed on the lid substrate 150 side. G14, D11 to D15 may be formed.
• nine individual electrode layers are formed on each of the flexible substrate 110 and the lid substrate 15 Offlij, and each of the opposing electrode layers is physically independent. It is also possible to configure a capacitance element described above.
• the capacitive element composed of the electrode layer G 11 and the common electrode layer E 10 functions as a force generator that applies a force in the positive direction of the X axis to the weight body 120. .
• a capacitive element composed of the electrode layer G12 and the common electrode layer E10, a capacitive element composed of the electrode layer G13 and the common electrode layer E10, an electrode layer G14 and the common electrode layer E] 0
• the capacitive element consisting of consists of a force generator that applies a force in the positive direction of the Y axis, a force in the negative direction, a force in the negative direction of Y, and.
• the reciprocating pendulum motion along the circular orbit 52 (X) shown in Fig. 2 or a reciprocating pendulum motion along a circular orbit 54 (Y-axis) shown in FIG. 20 can be performed.
• the common electrode layer E 10 is grounded and the operation of applying a positive voltage to the electrode layer G 11 and the operation of applying a positive voltage to the electrode layer G 13 are alternately performed,
• the weight body 120 performs a reciprocating pendulum motion in the XZ plane along the circular orbit 52.
• FIG. 40 is a side sectional view for explaining such a movement.
• Such a reciprocating pendulum motion is a rotation motion having an angular velocity ⁇ y around the Y axis, and the weight body 120 has a fixed part 1 13 and a pedestal 1 It is supported by the “simple support system” in the device housing consisting of 30 and the base substrate 140.
• the weight body 120 performs a reciprocating pendulum motion in the YZ plane along the circular orbit 54 (Y axis) shown in FIG.
• the force that causes Coulomb attraction between each of the electrode layers G11 to G14 and the common electrode layer E10 to cause the weight body 120 to reciprocate pendulum movement On the contrary, it is also possible to reciprocate the pendulum by applying Coulomb repulsion. If both Coulomb attraction and Coulomb repulsion are used, more efficient reciprocating pendulum motion is possible. For example, when displacing in the positive direction of X, a Coulomb attractive force may be applied between the electrode layers G 11 / E 10 and a Coulomb repulsive force may be applied between the electrode layers G 13 / E 10.
• the capacitance element composed of the electrode layer D 11 and the common electrode ⁇ 10 and the electrode layer D 13 and the common electrode ⁇
• the capacitance element composed of 10 serves as a displacement detector in the X-axis direction.
• the weight rest 120 is displaced in the positive direction of the X axis, and the flexible portion 1 1 2 is bent, the distance between the electrode layers D l 1 / E 10 is reduced, and the electrode layer D 13 / E The distance between 10 will increase, and the capacitance value of the capacitance element formed by these two electrode layers will change.
• the weight body 120 is displaced in the negative direction of X ⁇ ⁇ , a change opposite to that of the aforementioned platform occurs.
• the capacitance value of the capacitance element composed of the electrode layer D11 / E10 changes as shown by the waveform D (+ X) in FIG. 34, and the capacitance of the capacitance element composed of the electrode layer D13ZE10 ⁇ changes like waveform D (— X). Therefore, by measuring the difference ADx between the capacitance value between the electrode layers D 11 and ZE 10 and the capacitance value between the electrode layers D 13 ZE 10, the X-axis direction of the weight body 120 is measured. The amplitude can be determined. As shown in FIG. 35, since the difference ADX is a periodic function, if the amplitude value is appropriately calibrated, the moving speed Vz in the Z-axis direction can be obtained.
• the Coriolis F co (F co ( If z) can be measured, this Coriolis Fco (z) will be an amount corresponding to the moving speed VX in the X direction of the entire speed sensor.
• the Coriolis Fco (z) in the Z-axis direction can be measured by a displacement detector that detects the displacement of the weight body 120 in the Z-axis direction.
• the quantity element serves as a displacement detector in the Z-axis direction.
• a voltage is alternately applied to the electrode layers G 11 and G 13 to bring the weight body 120 into a state of reciprocating pendulum movement in the XZ plane.
• the weight body 120 performs "reference movement".
• a temporal change in the capacitance value of the capacitance element including the electrode layer D 15 and the common electrode E 10 is previously determined as a reference waveform.
• This reference waveform shows the displacement of the weight body 120 in the Z-pong direction during the “reference movement”.
• the weight rest 120 is displaced in the Z ib positive direction, the distance between the electrode layers D 15 E 10 is reduced, the capacitance value is increased, and conversely, the weight body 120 is Z $ If it is displaced in the negative direction, the distance between the electrode layers D15 / E10 increases and the capacitance value decreases.
• this three-dimensional velocity sensor 100 force ', the velocity in the direction of the X-fist —
• V X the velocity in the direction of the X-fist
• this relationship is reversed. That is, in the half cycle R going to the right, the distance between the electrode layers D 15 ⁇ ⁇ 10 increases and the capacitance value decreases compared to the state of the “reference motion”, and in the half cycle L going to the left, The distance between the electrode layers D15 / E10 is reduced and the capacitance value is increased as compared with the state of the "reference movement”.
• the temporal change of the capacitance value of the capacitive element composed of the electrode layer D 15 / E 10 in the “reference motion” state is actually obtained because it is measured in advance as a reference waveform.
• the absolute value of the moving speed VX in the X-axis direction can be obtained from the amplitude of the difference waveform ⁇ .
• the direction (sign) can be determined by the phase of the waveform ⁇ D ⁇ . For example, if a differential waveform ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ as shown in the middle part of Fig.
• the weight body 120 acts on the weight body 120 in a state where the weight body 120 reciprocates in the YZ plane with the angular velocity ⁇ X around the X axis. If (z) can be measured, this Coriolis Fco (z) will be an amount corresponding to the moving speed V y of the entire speed sensor in the Y-axis direction. Therefore, the voltage is applied alternately to the electrode layers G 12 and G 14, and the weight 120 is caused to reciprocate in the YZ plane, and the electrostatic capacitance between the electrode layers D 15 / E ⁇ 0 is obtained.
• the three-dimensional velocity sensor 100 has a function of detecting all of the three-dimensional velocity components VX, Vy, Vz.
• the weight body 120 is reciprocally pendulum-moved in the XZ plane, and the platform for detecting the velocity component V y includes: It is necessary to reciprocate the weight body 20 in the YZ plane.
• the weight 120 in motion has an inertial force, so it is not possible to suddenly switch the reciprocating pendulum motion in the XZ plane to the reciprocating pendulum motion in the YZ plane. Have difficulty. Therefore, in practice, as described in FIG.
• the reciprocating pendulum movement surface is gradually rotated from the XZ plane to the W1 plane, the W2 plane, and so on, so as to be brought to the YZ plane. Is preferred.
• the reciprocating pendulum motion surface is continuously rotated counterclockwise in FIG. 20 and the reciprocating pendulum motion surface overlaps the XZ plane.
• each speed component can be detected periodically and continuously. Can be.
• the three-dimensional velocity sensor 100 is also provided with a displacement detector for detecting the Coriolis Fco (y) in the Y-axis direction. That is, a capacitance element composed of the electrode layer D 12ZE10 and a capacitance element composed of the electrode layer D14 / E10 are the same.
• the detection operation of the Coriolis force Fco (y) in the ⁇ direction using these capacitors consists of a capacitor consisting of the electrode layer D 11 / E 10 and an electrode layer D 13 3 E 10
• the operation is completely the same as the operation of detecting the Coriolis Fco (x) in the X $ direction using the capacitive element, and therefore the description is omitted here.
• the displacement detector for detecting the Coriolis Fco (y) in the Y-axis direction is provided in order to provide the detection operation with redundancy.
• the velocity component Vz can also be obtained by the Coriolis Fco (y) in the Y-axis direction measured when the weight body 120 is reciprocally pendulum-moved in the YZ plane.
• each of the displacement detectors constituted by the capacitance elements directly displaces the predetermined position on the upper surface of the flexible substrate 110 in the Z direction (that is, constitutes the capacitance element).
• the XYZ axes of the weight 120 depend on the position of the weight 120 on the flexible substrate 110. This means that displacement in the direction is indirectly detected.
• FIG. 39 since each of the electrode layers D11 to D14 constituting the displacement detector is a line object with respect to the X axis or the Y axis, displacement detection in each axis direction is performed. In doing It is not affected by other ingredients.
• the electrode layer D11 used for detecting displacement in the X-axis direction is line-symmetric with respect to the X-axis, so when a displacement in the cold direction occurs, half of the area is the common electrode layer E.
• the force approaching 10; ', the other half is away from the common electrode layer E10, so that the displacement is totally offset.
• displacement detectors for detecting displacements in the direction along the Z axis are provided in the positive and negative regions of the X axis and the positive and negative regions of the Y axis.
• Capacitors are arranged, and the difference between the outputs of the displacement detectors arranged in both the positive and negative areas of X is used to detect the corerica acting on the weight body in the X-axis direction.
• a configuration is adopted in which the difference in the outputs of the displacement detectors arranged in the sensor is used to detect Coriolis acting on the weight body in the Y-axis direction.
• the electrode layer shown in FIG. 41 is used instead of the electrode layer shown in FIG. Although there is no difference in physical structure between the two, in the speed sensor shown in Fig. 39, the center electrode layer D15 functioned as a displacement detector, whereas in the speed sensor shown in Fig. 41 Then, the central electrode layer G 15 functions as a force generator.
• the electrode layer G 15 functions to make the reciprocating pendulum motion of the weight body 120 smoother.
• a predetermined voltage is applied between the electrode layers G 11 and ZE 10
• Coulomb attraction acts between the two electrodes, the flexible substrate 110 bends, and the weight 1 2 0 Will be displaced in the X direction.
• a predetermined voltage is applied between the electrode layers G13 / E10
• a Coulomb attractive force acts between the two electrodes, and the weight body 120 is displaced in the negative direction of the X-axis.
• the weight rest 120 can be reciprocated in the XZ plane by alternately applying such a voltage.
• the weight body 120 can more smoothly perform a pendulum motion.
• a Coulomb repulsion is applied between the electrode layers G15 / E10 at the neutral point where the center of gravity G crosses the Z axis, the distance between the electrode layers G15 / E10 becomes wider than usual, and the reciprocating pendulum motion The trajectory becomes closer to an arc.
• the electrode layer G 15 formed at the center is made to function as a force generator, so that the detection operation of the Coriolis Fco (z) in the Z-axis direction is performed by the electrode layer D 1 2 and D14.
• the electrode layers D12 and D14 are for providing redundancy in the detection operation, but in this modified example, these electrode layers are used. This means that the Coriolis force Fco (z) in the Z-pong direction is detected. That is, if the sum of the capacitance value between the electrode layers D12 / E10 and the capacitance value between the electrode layers D14 and ZE10 is obtained, this sum is the corerica Fco ( z).
• the distance between the electrode layers D12 / E10 and the distance between the electrode layers D14 / E10 both increase.
• the capacitance value becomes larger
• the electrode layer becomes The distance between D12 / E10 and the distance between electrode layers D14 / E10 are equally large. Therefore, the capacitance value becomes smaller. So the sum of both is
• the reason for using the sum in this way is that if only one of the values is used, the Coriolis Fco (y) in the Y-axis direction is erroneously detected.
• the weight body 120 when Coriolis Fco (y) in the positive Y-axis direction acts on the weight body 120, the weight body 120 is displaced in the Y-direction, so that the distance between the electrode layers D 12 and E 20 in FIG. Shrink, electrode layer! The distance between 14 / E 20 will increase. Therefore, for example, when trying to detect Coriolis Fco (z) in the Z-direction using only the capacitance value between the electrode layers D 12ZE 20, such a Coriolis Fco (y) in the Y-axis direction worked. False detection is also performed on the platform.
• the change in the two will be offset on the platform where the free-directional Coriolis Fco (y) acts.
• the difference is a value that indicates the Coriolis Fco (y) in the Y-axis direction.
• Example of multidimensional speed sensor using type I piezoelectric element The speed sensor 200 whose side section is shown in Fig. 42 is the type shown in Figs. 21 (a) and (b). This is an embodiment in which a force generator and a displacement detector are configured by a piezoelectric element having the polarization characteristic of I.
• the basic configuration of this speed sensor 200 [] is almost the same as that of the speed sensor 100 shown in FIG. That is, an annular groove is formed on the lower surface of the flexible substrate 210, and the portion where the groove is formed is thin, so that the flexible portion 2 having flexibility is formed.
• a block-shaped weight body 220 is fixed to the lower surface of the action portion 211, and the fixed portion 212 is supported by a pedestal 230.
• the pedestal 230 is fixed to the base substrate 240.
• the components formed on the upper surface of the flexible substrate 210 are different from those of the speed sensor 1 • 0 described above. That is, a pusher-like common electrode layer E20 is fixed on the upper surface of the flexible substrate 210, and a pusher-like piezoelectric element 250 is also fixed thereon.
• the piezoelectric element 250 is made of a piezoelectric ceramic having a type I polarization characteristic shown in FIGS. 21 (a) and (b).
• FIG. 43 shows a top view of the flexible substrate 210.
• a cross section of the flexible substrate 210 shown in FIG. 43 taken along the line XI is shown in FIG.
• a pattern of 12 electrode layers is clearly shown on the pusher-like piezoelectric element 250.
• the center of the piezoelectric element 250 has a circular opening, and the center of the flexible substrate 210 is It is shining.
• On the lower surface of the piezoelectric element 250 a force in which a pusher-like common electrode layer E20 is arranged; ', not shown in FIG.
• each electrode layer is indicated by hatching, but this is for the purpose of facilitating pattern recognition of each electrode layer, and a cross-sectional portion is shown. Not for hatching.
• electrode layers G21 to G24 are for use as force generators, and electrode layers D21 to D28 are for use as displacement detectors. It is for. That is, the piezoelectric element 250 and the common electrode layer E 20 are both a single force ⁇ , since the twelve electrode layers formed on the upper surface of the piezoelectric element 250 are each independently ⁇ , In terms of operation, they can be treated as 12 independent piezoelectric elements.
• FIG. 42 an XYZ three-dimensional coordinate system in which the X axis is arranged in the right direction of the figure and the Z axis is arranged in the upward direction is defined, and the following description will be made.
• each of the electrode layers G 21 to G 24 and the electrode layers 0 21 to D 28 is located on the X axis or the Y axis in this coordinate system. The shape is symmetrical with respect to Ningyu.
• the piezoelectric element 250 is a type I piezoelectric element having polarization characteristics as shown in FIGS. 21 (a) and 21 (b). Therefore, for example, if voltage is supplied so that a negative charge is generated in the electrode layer G21 and a positive charge is generated in the common electrode layer E2, respectively, the electrode layer G21 of the piezoelectric element 25 is formed. As shown in Fig. 21 (b), a part that is located below become.
• the electrode layer G 23 of the piezoelectric element 250 is formed.
• a part extending below is subject to a laterally extending force.
• the weight 2 is attached to the flexible substrate 210. Bending occurs to displace 20 in the positive direction of the X axis.
• a radius can be generated that displaces the weight body 220 in the negative direction from X $.
• force generators (each part of the piezoelectric element) for applying a force in the direction along the X axis are arranged in the positive and negative areas of the X axis, respectively.
• the Coriolis in the X ⁇ direction acting on the weight body 220 If Fco (X) can be measured, this Coriolis Fco (x) will be an amount corresponding to the Z-axis moving speed Vz of the entire speed sensor. Also, as described in ⁇ 11, the Coriolis F co (x) in the X-axis direction can be measured as an amplitude increase / decrease phenomenon by a displacement detector that detects the displacement of the weight body 220 in the X-axis direction. . In the three-dimensional speed sensor 200, the electrode layers D 21 and 23 are used for detecting displacement in the X ⁇ direction.
• the flexure of the flexible substrate 210 is transmitted to the piezoelectric element 250, and the electrode layer of the piezoelectric element 250 is A portion located below D 21 is deformed to shrink in the lateral direction, and a portion located below electrode layer D 23 is deformed to extend in the lateral direction. Therefore, from the polarization characteristics shown in FIGS. 21 (a) and (b), a negative charge is generated in the electrode layer D21 and a positive charge is generated in the electrode layer D23. Become. By measuring these generated charges, the displacement of the weight body 220 in the positive X-axis direction can be obtained.
• the polarity of the generated charges is reversed in the case where the weight body 220 is displaced in the negative direction of the X-axis as compared with the above-described case. Therefore, by measuring the difference ADX between the charge generated in the electrode layer D 21 and the charge generated in the electrode layer D 23, it is possible to detect the amplitude of the weight rest 220 in the X ⁇ direction. Become. As shown in Fig. 35, since this difference ⁇ DX is a periodic function, the amplitude In this case, the moving speed V z in the Z direction can be obtained.
• the Coriolis Fco (z) in the Z-axis direction can be measured by a displacement detector that detects the displacement of the weight body 220 in the Z $ (li direction.
• the four electrode layers D22, D24, D25, and D27 are used to detect the Coriolis Fco (z) in the Z-axis direction, as shown in FIG. D22 and D24 are electrode layers arranged on the outside, while electrode layers D25 and D27 are electrode layers arranged on the inside.
• a negative charge is generated in the electrode layers D 25 and D 27, and a positive charge is generated in the outer electrode layers D 22 and D 24.
• a negative charge is generated in the electrode layers D 22 and D 27.
• a predetermined electric charge is supplied to the electrode layers G21 and G23, and the weight rest 220 is reciprocated in the XZ plane.
• the weight rest 220 performs a “reference movement”.
• the sum of the generated charges of the inner electrode layers D 25 and D 27 and the sum of the generated charges of the outer electrode layers D 22 and D 24 are expressed by:
• the change over time of the difference is measured in advance as a reference waveform. This reference waveform shows the displacement in the free direction of the weight body 220 during the “reference operation”.
• the waveform showing the temporal change of the difference between the total of the generated charges for the inner electrode layers D 25 and D 27 and the sum of the generated charges for the outer electrode layers D 22 and D 24 is given by
• the absolute value of the X-axis moving speed VX can be known from the amplitude of this difference waveform ADz.
• the direction (sign) can be determined by the phase of the difference waveform D D. This is as described in FIG. Therefore, if the amplitude of the difference waveform ⁇ ⁇ ⁇ is appropriately calibrated, the moving speed V X in the X-axis direction can be obtained.
• the weight 220 acts on the weight 120 while the weight 220 is reciprocating in the plane with the angular velocity ⁇ X about the X axis. If the force Fco (z) can be measured, the Coriolis Fco (z) will be an amount corresponding to the moving velocity V y of the entire speed sensor in the Y-axis direction. Accordingly, a predetermined charge is supplied to the electrode layers G22 and G24, and the weight body 220 is reciprocally pendulum-moved in the YZ plane. Performs a predetermined operation on the resulting voltage value to calculate the Coriolis force in the Z-axis direction. By calculating F co (z) and appropriately calibrating this value, the moving speed V y in the Y-axis direction can be obtained.
• the three-dimensional speed sensor 200 has a function of detecting all of the three-dimensional speed components VX, Vy, Vz. In order to detect all three-dimensional velocity components, it is preferable to gradually rotate the reciprocating pendulum motion surface as described in FIG. 2Q.
• the three-dimensional speed sensor 200 also has a displacement detector for detecting the Coriolis Fco (y) in the Y-axis direction. That is, the electrode layers D26 and D28 are those.
• the operation of detecting the Coriolis force Fco (y) in the YiMl direction using these electrode layers is the same as the operation of detecting the Coriolis force Fco (x) in the Xl direction using the electrode layers D21 and D23. The description is omitted here because it is completely the same.
• the displacement detector for detecting the Coriolis Fco (y) in the Y-axis direction is provided for providing redundancy in the detection operation.
• the velocity component V z can also be obtained from the ⁇ $ ⁇ 3 ⁇ 4 direction Coriolis F co (y) measured in a state where the weight body 220 is reciprocally pendulum-moved in the YZ plane.
• each of the electrode layers D 21 to D 28 constituting the displacement detector is a line object with respect to the X axis or the Y axis, c for example there is no influence of other pongee components in performing detection of displacement
• the electrode layer D 2 1 used in the displacement detection in the X-axis direction, D 2 3 because that is the line-symmetrical with respect to the X-axis .
• the generated charges are offset as a whole.
• displacement detectors piezoelectric sensors that detect displacement in the direction along each axis are provided in the positive and negative regions of the X axis and the positive and negative regions of the Y axis. Each part of the element) is located, and the corioliser acting on the weight body in the X-axis direction is detected using the displacement detectors located in both the positive and negative areas of Xiti, and the positive and negative areas of Y. This means that a configuration is adopted in which the placed displacement detector is used to detect coriolis acting on the weight body in the Y-axis direction.
• 12 individual electrode layers 0 2 1 to 0 2 4 and D 2 1 to D 2 8 are formed on the upper surface of the piezoelectric element 250, and a single common electrode layer is formed on the lower surface.
• the electrode layer E 20 was formed, conversely, a single common electrode layer E 20 was formed on the upper surface, and 12 individual electrode layers G 21 to G 24, D 21 to D 28 may be formed.
• 12 individual electrode layers may be formed on the upper surface and the lower surface of the piezoelectric element 250 without using the common electrode layer.
• Example of multi-dimensional speed sensor using type D piezoelectric element A two-dimensional speed sensor 300 whose side section is shown in Fig. 44 is shown in Figs. 22 (a) and (b). This is an example in which a force generator and a displacement detector are constituted by a piezoelectric element having a type III polarization characteristic.
• the two-dimensional velocity sensor 300 has a disk-shaped piezoelectric element 330 having polarization characteristics of type ⁇ ⁇ ⁇ between a disk-shaped flexible substrate 310 and a disk-shaped fixed substrate 320. It has an interposed structure. On the lower surface of the flexible substrate 310, a cylindrical weight rest 340 is fixed. Is being worn.
• the outer peripheral portion of the flexible substrate 310 and the outer peripheral portion of the fixed substrate 320 are both supported by the housing 350.
• five upper electrode layers E3 :! ⁇ E 35 (only part of which is shown in Figure 44) is formed on the lower surface, as well as five lower electrode layers ⁇ 36 - ⁇ 40 (again, The upper surface of the upper electrode layers ⁇ 31 to ⁇ 35 is fixed to the lower surface of the fixed substrate 320, and the lower electrode layers ⁇ 36 to ⁇ The lower surface of 40 is fixed to the upper surface of flexible substrate 310.
• the fixed substrate 320 has sufficient rigidity and a force that does not cause bending; the flexible substrate 310 has flexibility and functions as a so-called diaphragm.
• FIG. 44 is a side sectional view of the speed sensor taken along the ⁇ ⁇ plane.
• FIG. 45 is a top view showing the upper surface of the piezoelectric element 330 and the upper electrode layers ⁇ 31 to ⁇ 35
• FIG. 46 is a lower view and the lower electrode layer ⁇ ⁇ of the piezoelectric element 330. It is a bottom view which shows 36- 640.
• each of the upper electrode layers ⁇ 31 to ⁇ 34 has a fan shape, and is located on the X f or Y axis in this coordinate system. It has a shape that is line-symmetric with respect to the axis.
• the upper electrode layer E35 has a circular shape, and is arranged at the position of the origin.
• the lower electrode layers E36 to E40 have the same shape as the upper electrode layers E31 to E35, respectively, as shown in FIG. Have been.
• the lower electrode layers E36 to E40 may be a single common electrode layer.
• the flexible substrate 31 ° is made of a conductive material, The substrate 310 itself can be used as a single common electrode layer, and there is no need to physically configure the lower electrode layer.
• the electrode layers E 31 to E 34 and the electrode layers E 36 to E 39 are electrode layers that function as force generators, and the electrode layers E 35 and E 40 Is an electrode layer functioning as a displacement detector.
• the electrode layers having different functions are indicated by different hatching. Therefore, this hatching does not indicate a cross section.
• the piezoelectric element 330 is a type III piezoelectric element having polarization characteristics as shown in FIGS. 22 (a) and 22 (b). Therefore, for example, if a negative voltage is applied to the electrode layer E31 and a positive voltage is applied to the electrode layer E36,
• this speed sensor 300 After all, in this speed sensor 300, the positive area and the negative area of the X axis, in addition, force generators (each part of the piezoelectric element) for applying a force in the direction along Z fi!] are arranged in the positive and negative regions of the Y axis, and these force generators are periodically arranged. By moving the weight rest 340 in the XZ plane or the YZ plane, the reciprocating pendulum motion can be performed. Next, the principle of detecting the velocity V x in the X direction by the two-dimensional velocity sensor 300 will be described.
• the Zib direction acting on the weight rest 340 is If the Coriolis Fco (z) can be measured, this Coriolis Fco (z) will be an amount corresponding to the moving speed VX in the X-fault direction of the entire speed sensor. Also, it has already been described in ⁇ 11 that the Z-axis Coriolis F co (z) can be measured by a displacement detector that detects the displacement of the weight body 34 in the Z-axis direction.
• the two-dimensional velocity sensor 300 detects the Coriolis Fco (z) in the Z-axis direction based on the charges generated by the pair of electrode layers E35 and E40. For example, if the Coriolisa F co (z) in the positive Z direction acts on the weight body 340, the weight rest 340 will move in the positive Z axis direction (upward in FIG. 44). , And the central portion of the piezoelectric element 330 contracts in the vertical direction. Therefore, as shown in FIG. 22 (1)), a negative charge is generated in the electrode layer E35 and a positive charge is generated in the electrode layer E40.
• the weight rest, 34 ⁇ on which the Coriolis Fco (z) in the positive direction of the ⁇ axis acts, is displaced in the positive direction of the ⁇ axis as a whole.
• the weight body 340 is displaced in the negative direction of the Z axis as a whole.
• Such a displacement of the weight body 340 in the Z-pong direction can be measured in the form of charges generated in the electrode layers E35 and E40, as described above. Therefore, a predetermined operation is performed on the voltage values of these electrode layers to obtain the Coriolis Fco (z) in the Z axis direction, and by appropriately calibrating this value, the moving speed VX in the X axis direction is obtained.
• the weight body 340 acts on the weight rest 340 when the weight body 340 reciprocates in the YZ plane with the angular velocity ⁇ X around X, and X the axial coriolis Fco (z). If this can be measured, this Coriolis Fco (z) will be an amount corresponding to the moving speed V y of the speed sensor in the Y direction.
• the reciprocating pendulum in the YZ plane with respect to the weight body 340 is obtained.
• the Corioliser Fco (z) in the Zi i direction is calculated in the form of the charges generated for the electrode layers E 35 and E40, and this value is appropriately calibrated.
• the moving speed Vy can be obtained.
• the two-dimensional velocity sensor 300 has a function of detecting the two-dimensional velocity components VX, Vy.
• five individual electrode layers E 31 to E 35 are formed on the upper surface of the piezoelectric element 330 as shown in FIG. 45, and the lower surface is shown in FIG. 46.
• five individual electrode layers E 36 to E 40 are formed as described above, any one of them may be a single common electrode layer.
• the peripheral portion of the flexible substrate 10 is fixed to the housing 350, but the peripheral portion may be a free end. Such a structure is the same as the embodiment shown in FIG. 62 described later.
• an electrode layer serving as a force generator and a displacement detector as a displacement detector are used. What is necessary is just to make it the structure which divided the electrode layer which plays a role.
• the electrode layer E 31 in FIG. 45 is divided into E 31 G and E 31 D, and the electrode layer E 33 is £ 33.
• 3D and the shape of the electrode layers E32, E34 is changed to E32G, E34G.
• the electrode layers E 31 G, E 32 G, E 33 G, and E 34 G function as force generators, and function to reciprocate the weight rest 340 in the XZ plane or the YZ plane. Fulfill.
• the electrode layers E 3 ID, E 33 D, and E 35 D serve as displacement detectors, and displace the weight rest 34 mm in the X- and Z-axis directions (that is, the Coriolis Fco (x)). , Fco (z)).
• the electrode layers having different roles are indicated by different hatching. I Therefore, this hatching does not indicate a cross section.
• Opposite electrodes corresponding to each of these electrodes are also provided on the lower surface side of 330 o
• the detection operation of the three-dimensional velocity components VX, Vy, Vz using the three-dimensional velocity sensor is briefly described as follows. First, a predetermined AC voltage is supplied to the electrode layers E 31 G and E 33 G, and the weight 340 is reciprocated in the XZ plane. Calculate the Coriolis Fco (z) in the Z-axis direction, calibrate this, and output it as the velocity component VX in the X-axis direction. Similarly, when the weight body 340 is reciprocally pendulum-moved in the XZ plane, the X-axis direction is calculated based on the difference between the charge generated in the electrode layer E 31D and the charge generated in the electrode layer E 33D.
• the Coriolis Fco (x) is obtained, calibrated, and output as the velocity component Vz in the Z-axis direction. Further, a predetermined AC voltage is supplied to the electrode layers E32G and E34G, and the weight 340 is reciprocated in the YZ plane in a reciprocating pendulum. The Coriolis Fco (z) in the Z-axis direction is obtained, calibrated, and output as the velocity component Vy in the Y-axis direction. Thus, the three-dimensional velocity components VX, Vy, Vz can be detected. ⁇ 17. Dual use of drive means and detection means
• the speed sensor according to the present invention requires driving means for rotating the weight body in rotation and detection means for detecting the Coriolis force acting on the weight rest during the rolling movement.
• the driving means is realized by a force generator
• the detecting means is realized by a displacement detector.
• the force generator and the displacement detector can be constituted by elements having exactly the same physical structure.
• a capacitive element has the property of generating a Coulomb attraction between a pair of electrodes when a voltage is applied, and thus can be used as a force generator. Since it can be extracted as a signal, it can be used as a displacement detector.
• a piezoelectric element has the property of generating a stress by applying a voltage, so that it can be used as a force generator, and the stress applied by displacement can be taken out as an electric signal. It can also be used as a detector.
• the component as the force generator and the component as the displacement detector have been treated as separate components, but in reality, there is no physical There is no difference in structure, and they are simply treated as separate elements for the purpose of operating as a speed sensor. Therefore, both are interchangeable components, and the same component can be used as a force generator or can be used as a displacement detector depending on the operation mode. In fact, if the detection circuit is slightly devised, it is possible to simultaneously perform the role of the force generator and the role of the displacement detector for the same component.
• ⁇ 18 describes an example in which a dual-purpose device is applied to a speed sensor using a capacitive element described in ⁇ 12,13
• ⁇ 19 describes a type I piezoelectric element described in ⁇ 14.
• An example in which a dual-purpose device is applied to a speed sensor using a device is described in ⁇ 2.
• Section 0 describes an embodiment in which a dual-purpose device is applied to a speed sensor using a type III piezoelectric element described in ⁇ 15, 16.
• the speed sensor 190 reduces the required number of electrode layers by applying a ffl device to the "speed sensor using a capacitive element" shown in Fig. 38, and the overall structure This is an example in which is simplified. 38 is different from the sensor shown in FIG. 38 only in the configuration of the electrode layer arranged on the upper surface of the flexible substrate 110 and the electrode layer arranged on the lower surface of the lid substrate 15 °. Therefore, hereinafter, only the configuration of this electrode layer will be described, and description of other components will be omitted.
• the lower electrode layer L 1 1 is on the positive area of the X axis
• L 12 is on the positive area of the Y axis
• L 13 is on the negative area of the X axis
• L 14 is on the negative area of Y lh. All are symmetrical with respect to each coordinate axis.
• the upper electrode layers U11 to U14 are arranged at positions facing the respective lower electrode layers L11 to L14.
• the upper electrode layers U11 to U14 have exactly the same shape as the lower electrode layers L11 to L14.
• one set of capacitive elements is formed by each of the electrode layers L 1 1 ZU 11, the electrode layer L 12 ZU 12, the electrode layer L 13 / U 13, and the electrode layer L 14 / U 14. become.
• Each of the capacitive elements is a capacitive element composed of an upper electrode layer formed on the lower surface of the lid substrate 150 and a lower electrode layer formed on the upper surface of the flexible substrate 110.
• UU14 and LI1 ⁇ L: 14 indicate the respective upper and lower electrode layers.
• L11 to L14 are connected to a common ground level and are conductive with each other.
• B 11 to B 18 are buffer circuits, and R 11 to R 18 are resistors.
• C] to C4 are capacitance-voltage conversion circuits having a function of converting the capacitance value of each capacitance element into a voltage value and outputting the voltage value.
• T 7 is a terminal for inputting a drive voltage VII, VI 3, VI 5, V 17 to be applied to the upper electrode layers U 11, U 12, U 13, U 14, respectively, and a detection signal output terminal T 12, T14, T16, and T18 are terminals that output the detection voltages V12, VI4, VI6, and V18 output from the capacitance-voltage conversion circuits CI, C2, C3, and C4, respectively.
• an AC signal of the inversion ⁇ E1 may be given to the drive signal input terminals T 11 and T 15. .
• Coulomb force acts on the two sets of capacitive elements at opposite timings, and the weight rest 120 performs a reciprocating pendulum motion in the XZ plane.
• an alternating-phase AC signal may be applied to the drive signal input terminals T 13 and T 17. .
• Coulomb forces act on the two sets of capacitive elements at opposite timings, and the weight body 120 performs a reciprocating pendulum motion in the YZ plane.
• weight rest 1 20 is Xfih positive
• the distance between the electrode layers U 1 1 and ZL 11 is short, and the distance between the electrode layers U 13 and L 13 is long, so that the capacitance value in the former increases, and the capacitance in the latter increases. The value decreases. Therefore, in the circuit of FIG. 50, the detection voltage V12 rises and the detection voltage V16 falls. Therefore, displacement of the weight: I 2 — in the X-direction can be detected by the difference between the two detection voltages (V 12-V 16).
• the weight rest 120 when the weight rest 120 is displaced in the positive direction, the distance between the electrodes becomes shorter and the capacitance value of all four capacitive elements increases. In each of the pairs of capacitance elements, the distance between the electrodes becomes longer and the capacitance value decreases. Therefore, the increase or decrease of the sum of the voltages (V12 + V14 + V16 + V18) obtained at the four output terminals ⁇ 12, ⁇ 14, ⁇ 16, ⁇ 18 causes both positive and negative displacement of Zfrfi. (The displacement of the Z $ direction can be detected by the sum of the two voltages (V12 + V16) or (V14 + V18). To do this, it is preferable to use the sum of the four voltages as described above).
• each of the electrode layers L 11 to L 14 and U 11 to U 14 has a shape that is line-symmetric with respect to the X axis or the Y reason, the above detection results include The axial components do not interfere.
• the distance between the electrode layers U 11 / L 11 and the electrode layer U 13 / L 13 is shorter because one is shorter and the other is longer.
• the displacement in the X-direction can be determined as the difference between the detection voltages (V12-V16).
• weight body 1 20 force ⁇ ⁇ The displacement of the base in the axial direction depends on the distance between the electrode layers U 11 / L 11 and the distance between the electrode layers U 13 / L 13 Forces that become shorter or longer as a whole are completely canceled out and no voltage difference occurs.
• the weight rest 120 is displaced in the ⁇ -axis direction, the distance between the electrode layers U 11 and ZL 11 and the distance between the electrode layers U 13 and L 13 are both shorter. If the difference of the detection voltage (V12-V16) is taken, it will be cancelled.
• this speed sensor 190 uses only four electrode pairs U 11 / L 11, U 12 / L 12, U 13ZL 13, U 14 It has the function of reciprocating pendulum movement of 120 along the X ⁇ plane or ⁇ plane, and the function of separately detecting the displacement of the weight body 120 in both the positive and negative directions of the X axis, ⁇ axis, and ⁇ . You can see that. Therefore, if these electrode pairs are used as the dual-purpose device described in ⁇ 17, it is possible to detect the velocity components V ⁇ , Vy, and Vz in each direction. The specific method is described below.
• the weight 120 is caused to perform the “reference motion”. For example, if a reciprocating pendulum motion is to be performed in the XZ plane, as described above, AC signals having opposite phases are applied to the input terminals T11 and T15, respectively. Then, at this time, the voltages VI2 and V16 output to the output terminals T12, ⁇ ] 6 are measured in advance. Of course, these Is a periodic signal that changes in the same cycle as the AC signal applied to the input terminals T11 and T15.
• the speed is actually detected using the speed sensor 190.
• the speed sensor 190 For example, to detect the velocity component Vz in the Z-direction, apply AC signals of opposite phases to the input terminals T11 and T15, and apply the weight 1 2 ⁇ to the ⁇ plane. A reciprocating pendulum motion is performed, and at this time, the Coriolisa Fco (x) in the X-axis direction ffl formed on the weight body 12 mm may be measured. It has already been mentioned that the Coriolis force Fco (x) in the X ⁇ ⁇ ⁇ direction can be detected based on the detection voltages V12 and VI6 appearing at the output terminals T12 and T16.
• the detection voltages V 12 and V 16 appearing at the output terminals T 12 and T 16 are components of the AC signal. And the component of Coriolis Fco (x) is superimposed.
• the detection voltages V12 and VI6 appearing at the output terminals T12 and T16 are measured in the "reference motion" state in which Corioliser does not act at all. If the detection voltage V12, V] 6 obtained in the "reference motion” state is subtracted from the actual measurement value of the detection voltage V12, VI6 obtained during the speed detection work, the difference is It is a component. For example, if the detected voltage difference (V12-V) 6, which indicates displacement in the X direction, is increased by ⁇ from the previously measured value, it corresponds to ⁇ in the positive direction of the X axis.
• the detection process is slightly complicated, but on the other hand, the structure of the sensor itself is greatly simplified.
• a voltage is applied between the upper electrode layer and the lower electrode layer facing each other, electric charges having different polarities are supplied to the two electrode layers, and Coulomb attraction is applied, and the weight rest 120
• the weight rest 120 It is also possible to drive.
• the weight 1 it becomes possible to displace more efficiently in the forward direction of the X chain. In this way, when the weight body 120 is reciprocally pendulum-moved so as to exert an attractive force on the one hand and a repulsive force on the other hand, a more efficient driving operation becomes possible.
• the weight body 120 If Coulomb attraction is applied to all four electrode pairs or to two electrode pairs arranged on the same coordinate ⁇ , the weight body 120 is displaced in the positive direction of the ⁇ axis. If a Coulomb repulsive force is applied to all four electrode pairs or to two electrode pairs arranged on the same coordinate axis, the weight rest 120 will move in the negative direction. Therefore, if the drive operation in both the positive and negative directions of this Yukiyoshi is combined with the drive operation in both the positive and negative directions of the X-axis as described above, the weight body 120 can be displaced. ⁇ It is possible to move smoothly on a trajectory closer to an arc trajectory along the plane.
• the displacement of the weight body 120 in the X-axis direction is determined by the detection voltage.
• both the upper electrode layers U 11 to U 14 and the lower electrode layers L 11 to L 14 are physically independent individual electrode layers. Either one may be physically a single common electrode layer (the base in this example is a disk-shaped common electrode layer that faces all four fan-shaped electrode layers). In order to simplify the wiring between the electrode layers, it is preferable to form such a common electrode layer.
• L11 to L14 are commonly grounded, and are electrically common electrodes.
• the speed sensor 190 having the structure shown in Fig. 48 is inexpensive and has high performance by being made of a material to which a general semiconductor device manufacturing process technology and micromachining technology can be applied. It becomes possible to mass-produce such products.
• the members such as the flexible substrate 110, the weight body 120, the pedestal 130, and the lid substrate 150 are formed using a silicon substrate or a glass substrate, the glass substrate and the silicon substrate can be used.
• An abutment with the substrate can be made by using an anode attachment technology, and a silicon / direct bonding technology can be made by using the attachment between silicon substrates.
• Example of a speed sensor using a type I piezoelectric element 290 The speed sensor 290 whose side section is shown in Fig. 51 is a speed sensor using a type I piezoelectric element shown in Fig. 42. In this embodiment, the required number of electrode layers is reduced, and the overall structure is simplified. 42 is different from the sensor shown in FIG. 42 only in the configuration of the electrode layers arranged on the upper and lower surfaces of the piezoelectric element 250. Therefore, hereinafter, only the configuration of this electrode layer will be described, and description of other components will be omitted.
• each coordinate is located on the lower surface of the piezoelectric element 250.
• a common lower electrode layer L20 having a pusher shape facing all of the upper electrode layers U21 to U24 is arranged. In this manner, four sets of partial piezoelectric elements sandwiched by the electrode layer U 2 ⁇ / L 20, the electrode layer U 22 L 2 CU, the electrode layer U 23ZL 20, and the electrode layer U 24 ZL 20 are formed.
• a speed sensor 295 whose side section is shown in FIG. 53 is an embodiment in which the arrangement of the electrode layers of the speed sensor 290 shown in FIG. 51 is slightly changed. That is, as shown in FIG. 54, four fan-shaped upper electrode layers U26 to U29 are arranged on the upper surface of the piezoelectric element 250 in the speed sensor 295.
• the upper electrode layer U 26 is on the positive region of X
• U 27 is on the positive region of Y axis
• U 28 is on the negative region of X axis
• U 29 is on the negative region of Y axis. All are symmetrical with respect to each coordinate axis.
• a common lower electrode layer L25 having a pusher shape is arranged so as to face all of the upper electrode layers U26 to U29.
• four sets of partial piezoelectric elements sandwiched between the electrode layer U 26 ZL 25, the electrode layer U 27 ZL 25, and the electrode layer 8 28 / L 2. Is formed.
• each electrode layer is arranged in the inner region. Or located in the outer region.
• the meaning of this arrangement region will be described with reference to the side sectional view of FIG.
• the flexible portion 212 is bent as shown in the figure. Occurs.
• the stress generated inside the flexible part 211 differs depending on each part. Assuming that the stress in the direction extending laterally in the figure is positive and the stress in the direction contracting laterally is negative, as shown in the lower stress distribution diagram in Fig.
• FIG. 56 is a top view of a flexible substrate 21 # for showing the distribution of the inner region A1 and the outer region A2.
• the electrode layer arranged in the inner region A1 It can be understood that the opposite phenomena occurs between the electrode layer disposed in the outer region A2 and the action portion 211 even though the action portion 211 is displaced in the same direction. For example, while a positive charge is generated in the electrode layer arranged in the inner region A1, a negative charge is generated in the electrode layer arranged in the outer region A2. Therefore, it is not preferable to dispose a single electrode layer that straddles the inner area A1 and the outer area A2 in order to detect the displacement of the action section 21]. In the electrode layer straddling in this way, the phenomenon that occurs in the inner area A1 and the phenomenon that occurs in the outer area A2 work so as to cancel each other out.
• the speed sensor 200 (the speed sensor described in ⁇ 14) shown in FIGS. 42 and 43 includes the electrode layers G 22, G 24, and D 25 arranged in the inner area A 1. ⁇ D28 and the electrode layers G21, G23, D21 ⁇ D24 located in the outer region A2, considering that the opposite phenomena occur, and skillfully combining both This means that the sensor enables more efficient detection.
• the speed sensor 290 shown in FIG. 51 and FIG. 52 is an embodiment in which all the electrodes are arranged in the inner area A1. 20 is driven, and the displacement of the weight body 220 is detected based on the stress generated in the inner area A1. In this sensor 290, the stress in the outer region A2 is not used.
• the speed sensor 2995 shown in FIGS. 53 and 54 is an embodiment in which all the electrodes are arranged in the outer region A2, and the weight is generated by generating a stress in the outer region A2. Drive the rest of the weight based on the stress generated in the outer region A2. The displacement will be detected. In this sensor 295, the stress in the inner area A1 is not used.
• a signal processing circuit as shown in FIG. 57 is prepared.
• U 21 to U 24 and 2 ⁇ shown at the left end are an upper electrode layer formed on the upper surface of the piezoelectric element 250 and a lower electrode layer formed on the lower surface, respectively.
• a type 1 piezoelectric element is sandwiched between the pair of electrode layers.
• ⁇ 21 to ⁇ 28 are buffer circuits, and R21 to R28 are resistors.
• Drive signal input terminals ⁇ 21, T 23, T 25, T 27 are drive voltages V 21, V 23, V 25, V 27 for applying to upper electrode layers U 21, U 22, U 23, U 24, respectively.
• the detection signal output terminals T22, T24, T26, and T28 are the detection voltages V22 that indicate the actual potentials of the upper electrode layers U21, U22, U23, and U24, respectively. , V 24, V 26, and V 28.
• predetermined drive signals may be given to the drive signal input terminals T 21 and T 25, respectively.
• predetermined drive signals may be applied to the drive signal human power terminals T23 and T27, respectively.
• the displacement of the weight body 220 in each pong direction can be detected.
• a stress in the direction extending along the X axis acts on the formation region of the upper electrode layer U21, and the formation region of the upper electrode layer U23 is Since a stress acts in the direction of shrinking along the X axis, taking into account the polarization characteristics of the type I piezoelectric element shown in FIGS. 21 (a) and (b), a positive voltage is detected as the detection voltage V22. It can be seen that a negative voltage is obtained as the detection voltage V26. Therefore, the displacement of the weight rest 220 in the positive X direction can be detected by the difference between the two detection voltages (V22-V26).
• each of the upper electrode layers U21 to U24 has a line-symmetrical shape with respect to the ⁇ $ or Y axis, the above detection result does not interfere with the other f-axis components.
• the stress in the direction of extension or contraction along the X-axis is applied to the formation region of the upper electrode layers U21 and U23 arranged on the X-axis. This stress can be obtained as the difference between the detected voltages (V22-V26).
• the formation area of the upper electrode layers U21 and U23 arranged on the X-axis is a force that partially expands and contracts, respectively.
• the generated charges are canceled for each electrode layer, and do not affect the detection voltages V22 and V26.
• the weight body 220 is displaced in the Z-axis direction, a positive charge is generated in each of the upper electrode layers on the inner region A1, and the detection voltages V22 and V26 are all the same positive values. Therefore, if the difference of the detection voltage (V22-V26) is taken, it will be canceled.
• this speed sensor 290 has only four electrode pairs U 21 / L 20, U 22 / L 20, U 23 / L 20, U 24 / L 20 (L 2
• the function of moving the weight rest 220 back and forth along the XZ plane or the YZ plane using the electrode layer) and the displacement of the weight body 220 in both the positive and negative directions of the X, Y, and Z axes are separate. It can be seen that it has the function of detecting Therefore, if these electrode pairs are used as the dual-purpose device described in ⁇ 17, the velocity components Vx, Vy, V z can be detected. The specific method will be described below.
• the weight body 220 is caused to perform “reference movement” in a state where the entire speed sensor is stationary. For example, if a reciprocating pendulum motion is performed in the XZ plane, as described above, an AC signal having an opposite phase is given to each of the input terminals T21 and T25. At this time, the voltages V22 and V26 output to the output terminals T22 and T26 are measured in advance. Of course, these voltage values are periodic signals that change at the same cycle as the AC signal applied to the input terminals T21 and T25.
• speed detection is actually performed using the speed sensor 290.
• an AC signal of opposite phase is given to each of the input terminals T 21 and T 25, and the weight 220 is subjected to the reciprocating pendulum motion in the XZ plane.
• the Coriolisa Fco (x) acting on the weight rest 220 in the X-axis direction may be measured.
• the Coriolis force Fco (x) in the X $ ll direction can be detected based on the detection voltages V22 and V26 appearing at the output terminals T22 and T26.
• the detection voltages V22 and V26 appearing at the output terminals T22 and T26 correspond to the components of this AC signal.
• the component of Coriolis Fco (x) is superimposed.
• the detection voltages V22 and V26 appearing at the output terminals T22 and T26 were measured in a "standard motion" state in which Corioliser did not act at all. If the detected voltages V22, V26 obtained in the "reference motion" state are subtracted from the actually measured values of the detected voltages V22, V26, the difference is the Coriolisa component.
• the four electrode layers U 21 to U 24 It is preferable to supply a charge to all of the above.) If the drive operation in both the positive and negative directions of the Z axis and the drive operation in the positive and negative directions of the X axis described above are linked, for example, the weight rest 220 is moved along the XZ plane. It is also possible to smoothly reciprocate the pendulum on an orbit close to the [F] arc trajectory
• the displacement of the weight rest 22 [] in the X-axis direction is obtained from the difference between the detected voltages (V 22-V 26), and the displacement of the weight rest 220 in the Y-axis direction is obtained. Is obtained from the difference between the detection voltages (V24-V28). The reason for taking such a difference is that the detection accuracy is improved and the displacement component in the Z-axis direction is included in the detection result. This is to prevent interference.
• the upper electrode layers U 21 to U 24 are individually physically independent electrode layers, and the lower electrode layer L 20 is opposed to all of these four upper electrode layers.
• the lower electrode layer is composed of four physically independent electrode layers, and the upper electrode layer is physically a single common electrode layer. It does not matter.
• the upper electrode layer and the lower electrode layer may be formed as physically independent individual electrode layers without using the common electrode layer. However, in order to simplify the wiring between the electrode layers, it is preferable that one of them is a common electrode layer.
• Embodiment of Speed Sensor Using Type II Piezoelectric Element The configuration and operation of the speed sensor 300 using the type III piezoelectric element as shown in FIG. 44 have already been described in ⁇ 15. However, the velocity sensor shown in Fig. 44 can only detect the two-dimensional velocity components of the velocities Vx and Vz. To implement a three-dimensional velocity sensor, as shown in Fig. 47, The electrode layers E 31 G, E 32 G, E 33 G, E 34 G serving as force generators, and the electrode layers E 31 D, E 33 D, E 35 D serving as displacement detectors, He explained that it should be provided separately and independently.
• FIG. 1 a signal processing circuit as shown in FIG.
• the components shown on the left side are the piezoelectric sensor 330 and the electrode layers E 31, E 33, E 35, E 36 formed on both surfaces of the speed sensor 300 shown in FIG. 44. , E 38, E 4 [] are extracted and drawn.
• B31 to B38 are buffer circuits
• R31 to R38 are resistors.
• the drive signal input terminals T 31, T 32, T 33, and T 34 respectively provide drive voltages V 31, V 32, V 33, and V 34 for applying to the electrode layers E 33, E 31, E 36, and E 38.
• the detection signal output terminals T 35, T 36, T 37, and T 38 are used to detect the voltages actually generated in the electrode layers E 33, E 31, E 36, and E 38, respectively. These terminals are output as V36, V37, and V38.
• a positive voltage is applied as the driving voltages V31 and V33 and a negative voltage is applied as the driving voltages V32 and V34
• a positive charge is supplied to the electrode layers E33 and E36.
• a negative charge will be supplied to E31 and E38.
• the weight body 340 (see FIG. 44) not shown in FIG. 58 is displaced in the positive X-axis direction.
• the weight body 340 will be displaced in the negative X direction. In this way, if the weight 340 is alternately displaced in both the positive and negative directions of the X axis, the weight 340 can be reciprocally pendulum moved in the X ⁇ plane.
• the weight body 340 is reciprocated in a ⁇ ⁇ plane, and at that time, the output terminals ⁇ 35 to ⁇
• the detection voltages V 35 to V 38 output to 38 are measured in advance.
• the speed sensor 300 is placed in an environment where the speed actually acts, and a drive voltage having a predetermined polarity is also applied to the input terminals T31 to T34, and the weight body 340 is moved in the ⁇ plane.
• the reciprocating pendulum is moved, and the voltage output to the output terminals ⁇ 35 to ⁇ 38 is measured. If these voltage values differ from the values measured in advance, the difference is the Coriolisa component based on the applied speed.
• each electrode layer can simultaneously serve as a force generator and a displacement detector. Will be possible.
• ⁇ 21 ⁇ _ Type Another embodiment of speed sensor using piezoelectric element Speed sensor 390 whose side section is shown in Fig. 59 is also used as "speed sensor 300 using piezoelectric element" shown in Fig. 44 This is an example in which the number of required electrode layers is reduced by applying a heater, and the overall structure is simplified.
• the only difference from the sensor shown in FIG. 44 is the configuration of the electrode layers disposed on the upper and lower surfaces of the piezoelectric element 330. Therefore, hereinafter, only the configuration of this electrode layer will be described, and description of other components will be omitted.
• the upper electrode layer U41 is located on the positive region of the X axis
• U42 is located on the positive region of the Y axis
• U43 is located on the negative region of the X axis
• U44 is located on the negative region of Yflll. Both are symmetrical about each coordinate ⁇ .
• the lower electrode layers L41 to L44 having exactly the same shape as L44 to L44 are arranged at positions facing the upper electrode layers U41 to U44, respectively.
• one set of each of the partial piezoelectric elements is formed by the electrode layer U41 ZL41, the electrode layer U42ZL42, the electrode layer U43ZL43, and the electrode layer U44ZL44.
• a signal processing circuit as shown in FIG. 61 is prepared.
• the electrode layers U4 1 to U44, L4] to L44 shown on the left end are respectively described above.
• B41 to B48 are buffer circuits
• R4 :! R48 is a resistor.
• Drive signal input terminals T41, T43, T45, and T47 are terminals for inputting drive voltages V41, V43, V45, and V47 to be applied to the upper electrode layers U41, U42, U43, and U44, respectively.
• the detection signal output terminals T42, T44, T46, and T48 are terminals for outputting the actual voltages of the upper electrode layers U41, U42, U43, and U44, respectively, as detection voltages V42, V44, V46, and V48. .
• an AC drive signal having an opposite phase may be applied to the drive signal input terminals T41 and T45, respectively.
• the two sets of partial piezoelectric elements are subjected to stresses in opposite directions, and the weight body 34 ⁇ reciprocates along the XZ plane.
• AC drive signals having opposite phases are given to the drive signal input terminals ⁇ 43 and ⁇ 47, respectively. I just need.
• the two sets of partial piezoelectric elements are respectively subjected to stresses in opposite directions, and the weight body 340 reciprocates along a plane.
• the piezoelectric element 330 when the weight body 340 is displaced in the positive direction of the Z axis, a stress is applied to the piezoelectric element 330 in any direction in the direction of contraction in the vertical direction, so that the detection voltages V42, V44, V46, and V48 are obtained. Output a negative voltage. Conversely, when the weight body 340 is displaced in the negative direction of the Z-axis, the piezoelectric element 330 is subjected to a longitudinally extending stress at any point, so that the detection voltages V42, V44, V46, V For 48, a positive voltage is output in each case.
• each of the electrode layers U 41 to U 44 and L 41 to L 44 has a shape that is line-symmetric with respect to the X axis and the Y axis, the above detection results may not interfere with other axis components. Absent. For example, when the weight rest 340 is displaced in the Xi i direction, the space between the electrode layers U41 and L41 shrinks, and the space between the electrode layers U43 and U43 is reduced. The displacement in the X-axis direction can be obtained as the difference between the detected voltages (V46-V42).
• the generated charges are offset because the portions between the electrode layers U41 / L41 and between the electrode layers U43ZL43 are partially contracted or elongated. No change occurs in the detection voltages V42 and V46.
• both the electrode layers U41 / L41 and the electrode layers U43 / L43 both contract or expand, so that the difference between the detection voltages ( V46—V42) will be offset.
• the weight body 340 is placed on the XZ plane or the YZ plane. It can be seen that it has a function of reciprocating pendulum movement along the axis and a function of separately detecting displacements of the weight body 340 in both the positive and negative directions of the X axis, the Y axis, and the Z axis. Therefore, if these electrode pairs are used as the dual-purpose device described in ⁇ 17, it is possible to detect the velocity components Vx, Vy, and Vz in each axial direction. The specific method is described below.
• the weight rest 340 is caused to perform “reference movement”. For example, if the reciprocating pendulum motion is performed in the XZ plane, as described above, an AC signal having an opposite phase is applied to the input terminals T41 and T45. At this time, the voltages V42 and V46 output to the output terminals T42 and T46 are measured in advance. Of course, these voltage values are periodic signals that change in the same cycle as the AC signal applied to the human terminals T41 and T45.
• the input terminals T 43 and T 47 are supplied with AC signals of opposite phases, respectively.
• the voltages V44 and V48 output to the output terminals T44 and # 48 are measured in advance.
• these voltage values are periodic signals that change in the same period as the AC signal applied to input terminals # 43 and # 47.
• speed detection is actually performed using the speed sensor 390.
• the velocity component V in the free direction apply AC signals of opposite phases to the input terminals T41 and T45, and let the weight rest 340 perform a reciprocating pendulum motion in the plane.
• the Coriolis Fco (x) acting on the weight body 340 in the X-axis direction may be measured.
• the Coriolis force Fco (x) in the X-axis direction can be detected based on the detection voltages V42 and V46 appearing at the output terminals T42 and T46.
• the detection voltages V42 and V46 appearing at the output terminals T42 and T46 are added to the components of the AC signal by the Coriolis Fco (x). The components are superimposed.
• the detection voltages V42 and V46 appearing at the output terminals T42 and T46 were measured in the “reference motion” state in which Coriolis did not act at all. If the detection voltages V42 and V46 obtained in the state of “reference motion” are subtracted from the actually measured values of the detection voltages V42 and V46 obtained during the calculation, the difference is the component of Corioliska.
• the detected voltage difference (V42-V46), which indicates displacement in the X-axis direction is increased by ⁇ from the value measured in advance, the magnitude corresponding to ⁇ in the positive direction of the X-axis Coriolis are working. Therefore, this ⁇ ⁇ becomes a value corresponding to the speed component V in the ⁇ direction. Also, by simultaneously supplying the same value of positive voltage as the voltages V41, V43, V45, and V47, it is possible to simultaneously supply positive charges to the four sets of upper electrode layers U41 to U44. Since the piezoelectric element 330 extends in the vertical direction over the entire area, the weight body 340 can be displaced in the negative direction of the Z axis.
• the weight body 340 can be more circularly moved along the XZ plane. It is also possible to smoothly reciprocate on a track close to the track.
• the displacement of the weight rest 340 in the X-axis direction is obtained from the difference between the detected voltages (V46-V42), and the displacement of the weight rest 340 in the ⁇ direction is calculated as the difference between the detected voltages (V48-V44). )
• the reason for taking such a difference is to improve the detection accuracy and to prevent the displacement component in the ⁇ -axis direction from interfering with the detection result.
• both the upper electrode layers U41 to U44 and the lower electrode layers L41 to L44 are physically independent individual electrode layers.
• a single common electrode layer in this case, a disc-shaped common electrode layer that faces all four fan-shaped electrode layers
• it is preferable to form such a common electrode layer.
• FIG. 62 shows a side sectional view of a more pure speed sensor 395 using a type I piezoelectric element.
• the difference from the speed sensor 390 shown in FIG. 59 is that a conductive weight body 345 is used instead of the flexible substrate 310 and the weight body 340. That is, the lower electrode layers L 41 to L 44 are omitted.
• the conductive weight body 345 is a disk-shaped lump of metal or the like, and its outer peripheral portion is free without contacting the housing 350. In other words, the weight rest 345 is supported by the housing 350 by the piezoelectric element 330, the upper electrode layers U41 to U44, and the fixed substrate 320. It is in a suspended state as shown in the figure.
• the weight body 345 can move within the housing 350 with a certain degree of freedom.
• the weight rest 340 of the speed sensor 390 shown in FIG. 59 can be made too large in diameter because the periphery of the flexible substrate 310 is fixed to the housing 350.
• the weight body 345 of the speed sensor 395 shown in Fig. 62 had a diameter within a range that could secure enough space not to touch the housing 345 due to displacement.
• the structure of the speed sensor 395 is excellent in increasing the mass and increasing the sensitivity.
• the weight rest 345 itself is a conductive material, it functions as a common electrode layer, and the lower electrode layers L 41 to L 44 are not required, and the overall configuration is greatly simplified. Have been.
• the speed sensor 395 shown in FIG. 62 is structurally different from the speed sensor 39 ⁇ shown in FIG. It is. ⁇ 2 2. Drive and detection by resonance frequency
• Embodiments of the one-dimensional speed sensor according to the present invention have been described in Section 9. At this time, it was explained that efficient vibration can be realized by vibrating in the unique vibration mode of the vibrator.
• the direction of vibration of the vibrator and the direction of action of Coriolis are matched.
• the vibration direction of the left and right free ends of the vibrator 60 is the Z direction (the vertical direction in the figure), and the action direction of the Corioliser is also Z direction.
• the natural resonance frequency depends on the base, the material, dimensions, and shape of the vibrator 60, and the mechanical conditions such as the positions and supports of the pedestals 61, 62, which cause the left and right free ends to vibrate in this Z fih direction. fr will be determined. Therefore, if the left and right free ends are vibrated at this resonance frequency fr, that is, if a reciprocating pendulum motion is performed, very efficient detection becomes possible.
• fr the left and right free ends are vibrated at this resonance frequency fr, that is, if a reciprocating pendulum motion is performed, very efficient detection becomes possible.
• multi-dimensional speed sensors For example, consider the speed sensor 100 shown in FIG. In order to detect the velocity V z in the ⁇ $ ⁇ 3 ⁇ 4 direction by the velocity sensor 100 0, the weight body 120 is driven in the direction along the X axis to have an angular velocity ⁇ y about the Y axis.
• Corioliser F co (X) it is necessary to detect the Corioliser F co (X) in the X-axis direction generated at the time of rotation movement.
• the weight body 120 is caused to make a forward and backward pendulum motion along the X axis, and Coriolisa Fco (x) is detected as a variation in the amplitude.
• a predetermined AC drive signal is applied to the electrode layers G 11 and G 13 in order to cause the weight rest 12 ⁇ to perform such a reciprocating pendulum motion.
• the frequency f 1 of the AC drive signal is set to be equal to the resonance frequency fr (x) of vibration of the weight body 120 in the X flll direction, the weight body 120 Reciprocating pendulum at frequency fr (x) Exercise will be performed and efficient detection will be possible.
• the resonance frequency fr (x) of the weight body 120 in the X-axis direction is a unique value determined by the material, dimensions, shape, structure, and the like of each part constituting the speed sensor 100. It is a value that can be determined based on simulations or experiments. Therefore, when such a speed sensor 100 is actually designed, such a resonance frequency fr (x) is obtained in advance, and the frequency f 1 of the drive signal for the reciprocating pendulum motion f 1 force resonance frequency fr It is preferable to take care to match (x).
• the weight rest 120 is driven in the direction along the X axis so that it rotates in the direction of the angular velocity ⁇ y around the ⁇ axis, and the Coriolis F in the Z co (z) needs to be detected. That is, the weight body 120 is reciprocally pendulum-moved along the X-axis, and the Coriolis force Fco (z) is detected as a deviation of the motion trajectory in the free direction. In such a detection operation, it should be noted that the driving direction of the weight body 120 (X-axis direction) is different from the action direction of the Coriolis Fco (z) (Z-axis direction).
• the weight body 120 vibrates in two different directions.
• the second vibration direction is the X axis direction
• the second vibration direction is the Z axis direction.
• the vibration in the X-axis direction is a vibration driven by a drive signal having a frequency f 1, that is, a reciprocating pendulum motion
• the vibration in the cold direction is caused by the reciprocating pendulum motion.
• vibration due to vibration is a vibration caused by Coriolisca generated by “vibration for driving”.
• the direction of “vibration for driving” and the direction of “vibration for detection” do not match in the case of multi-dimensional velocity sensor. That's what it means.
• the speed sensor 100 detects the speed VX in the X-axis direction, as described above, the direction of the “vibration for driving” is set to the X-axis direction, and the “vibration for detection” is set as described above. Must be the Z-axis direction.
• a second measurement mode in which the weight body 120 is reciprocated in the Y direction (with an angular velocity ⁇ X) and a second measurement mode are required. Therefore, in the second measurement mode, it is preferable that the frequency f 1 of the drive signal; ′ and the resonance frequency f r (y) of the weight rest 120 in the Y $ free direction be matched.
• Each of the embodiments has such a structure. ⁇ 2 3.
• the structure in which the periphery of the flexible substrate is fixed to the housing and the weight rest is joined to the center is used. I was taking it. However, on the contrary, it is also possible to adopt a structure in which the central portion of the flexible substrate is fixed to the housing and the weight is attached to the peripheral portion. is there.
• a speed sensor 400 whose side cross section is shown in FIG. 63 is an embodiment in which such a structure is employed in a multidimensional speed sensor using a capacitive element.
• the flexible substrate 410 has substantially the same structure as the flexible substrate 110 shown in FIG. That is, an annular groove is formed on the lower surface of the flexible substrate 41 [], and the portion where the groove is formed is thin, so that the flexible portion 41 having flexibility is formed. Make up 2.
• the inside of the flexible portion 4 12 is the fixed portion 4 11, and the outside is the working portion 4 13.
• a ring-shaped weight body 420 is fixed to the lower surface of the working portion 4113, and the fixing portion 4111 is fixed to the base substrate 4440 by a pedestal 4330.
• the base substrate 440 forms a part of the housing of the speed sensor 400.
• a lid substrate 450 is fixed above the fixing portion 411.
• the lid substrate 450 is bonded to the fixed portion 4111 only at the center thereof, and the upper surface of the flexible substrate 410 and the lower surface of the lid substrate 450 face the peripheral portion thereof.
• a void is formed.
• the electrode layer L is formed on the upper surface side of the flexible substrate 410
• the electrode layer U is formed on the lower surface side of the lid substrate 450.
• each electrode layer constitutes a plurality of independent electrodes, and a capacitive element is formed by a pair of opposed electrodes.
• the operation of the speed sensor 400 [] is almost the same as the operation of the sensor 100 described in S 12. That is, by periodically applying a Coulomb force to the capacitive element formed by the two electrode layers U and L, the ring-shaped weight body 420 is reciprocally pendulum-moved in a predetermined axial direction. By detecting the coriolisor in the predetermined axial direction based on the change in the capacitance value of the capacitive element, the speed of the entire speed sensor 400 in the predetermined direction is obtained.
• the advantage obtained by providing the weight body 420 on the periphery of the flexible substrate 410 is that the weight m of the weight body 42 [) can be increased. It is. Comparing the volume of the weight body 120 in the speed sensor 100 shown in FIG. 38 with the rest of the weight body 420 in the speed sensor 400 shown in FIG. If the outer dimensions are the same, it can be understood that the latter structure can secure a larger volume of the weight body and a larger mass.
• the coriolis that acts is proportional to the mass m of the weight, so that the larger the mass m, the higher the detection sensitivity of the sensor.
• the embodiment in which the weight body is provided on the periphery of the flexible substrate has been described for the multidimensional speed sensor using the capacitive element. Is similarly applicable. Industrial use fields
• the speed sensor according to the present invention can accurately measure one-dimensional, two-dimensional, and three-dimensional speed components without being affected by external influences. It can be widely used as a sensor for detecting.

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• 1995
  • 1995-06-01 WO PCT/JP1995/001081 patent/WO1996038711A2/fr active Application Filing

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