Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K33/00—Specially-profiled edge portions of workpieces for making soldering or welding connections; Filling the seams formed thereby
  • B23K33/004—Filling of continuous seams
  • B23K33/006—Filling of continuous seams for cylindrical workpieces
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K9/00—Arc welding or cutting
  • B23K9/02—Seam welding; Backing means; Inserts
  • B23K9/028—Seam welding; Backing means; Inserts for curved planar seams
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K33/00—Specially-profiled edge portions of workpieces for making soldering or welding connections; Filling the seams formed thereby
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K2101/00—Articles made by soldering, welding or cutting
  • B23K2101/04—Tubular or hollow articles
  • B23K2101/06—Tubes

Definitions

• the present invention relates to a welded joint and a welding method, and more particularly to a welded joint and a welding method capable of making a bead width inside a pipe uniform and narrow.
• the present invention is suitably applied to a semiconductor manufacturing apparatus, a gas supply piping system, an ultrapure water supply system, and the like.
• the degree of integration of semiconductor devices is increasing more and more, and at the same time, the performance is being improved.
• semiconductor manufacturing equipment and manufacturing atmosphere have been highly purified, and gases and ultrapure water have been further purified.
• a gas supply piping system used in a semiconductor manufacturing process is configured by connecting various pipes, fittings, valves, and the like by welding.
• a welding method for example, in the case of a stainless steel pipe, a method is used in which the pipe ends of two pipes are butt-connected to each other and are welded by tungsten inert gas welding, arc gas welding, electron beam welding, or the like.
• the bead width becomes uneven and wide, and as a result, there is a problem that the process gas and the like are contaminated.
• metal fumes are generated during welding, but a wider bead means that more metal fumes evaporate and scatter.
• This metal fume is cooled in the vicinity of the welded portion and re-adheres, peels off when a corrosive gas or the like is supplied, contaminates the gas and the process atmosphere, and deteriorates the characteristics of the semiconductor device to be manufactured.
• the bead portion has a rough surface force and gas is easily adsorbed, there is a problem that the adsorbed gas gradually desorbs and contaminates the process atmosphere.
• chromium carbide precipitates at the bead, which may cause intergranular corrosion depending on the gas used.
• an object of the present invention is to provide a welded joint and a welding method capable of performing welding with a narrow bead width. Disclosure of the invention
• the welded joint according to the present invention is characterized in that a groove is provided on the inner wall side of the tubular end in a welded joint having a tubular end for welding.
• the groove has an angle of 60 to 75 ° from a central axis, and a depth from the tubular end is 0.15 to 0.25.
• the welding method of the present invention is a method for welding a welded joint having a tubular portion, wherein after forming a groove on the inner wall side of the pipe end of the two welded joints, the welded joints are butted along the outer periphery. It is characterized by welding.
• the groove has an angle of 60 to 75 ° with respect to a central axis, and a depth from the tubular end is 0.15 to 0.25.
• the present invention has been completed on the basis of such knowledge, and when a welded joint having a tubular end such as a pipe is welded and connected, a groove is provided on the inner wall side of the end of the pipe serving as a welded portion. By welding from the outside, it is possible to make the bead width inside the pipe uniform and extremely narrow, and obtain it with good reproducibility.
• the groove angle is preferably from 60 to 75 ° from the center line of the tube, and more preferably from 65 to 70 °. In this range, the bead width becomes more uniform and narrower.
• the depth of the groove from the tip differs depending on the pipe diameter and thickness. 0.15 to 0.25 mm for 3Z 8 inch tube and 14 inch tube, and 0.2 to 0.3 stroke for 1Z 2 inch tube are preferable.
• a welded portion has a tubular shape, and various types such as a pipe, a vanoleb, and various kinds of joints are exemplified. In particular, it is suitably applied to a pipe having a diameter of 1 to 4 inches or 3Z to 8 inches.
• FIG. 1 is a schematic view showing an example of a groove shape of a welded portion of the present invention and a welding method.
• FIG. 2 is a conceptual diagram showing a state of a bead portion after welding.
• the bead width is in the range of 0.4 to 0.5 mm, and is uniform and narrow. Bead was obtained. Moreover, the strength was equal to or greater than that of a wide bead with an I-groove.
• Tables 1 and 2 show the results of similar welding with the groove angle () and depth (d) and various changes. ⁇ table 1 ⁇
• the groove angle is preferably 60 to 70 °, and more preferably 65 to 70 °. Within this range, defects due to insufficient welding are eliminated, and a narrow bead can be obtained. At a groove angle of 80 °, where the flat portion at the pipe end disappears, the weld strength tended to be lower than that at 60-75 °. In addition, as shown in Table 2, by setting the groove depth to 0.15 to 0.25, a bead having a small size and no insufficient welding was obtained. Industrial applicability

Landscapes

• Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• Physics & Mathematics (AREA)
• Plasma & Fusion (AREA)
• Butt Welding And Welding Of Specific Article (AREA)

Priority Applications (2)

Applications Claiming Priority (2)

Publications (1)

Family

ID=16578502

Family Applications (1)

Country Status (5)

Families Citing this family (6)

Citations (2)

• 1993
  • 1993-08-24 JP JP20978193A patent/JP3362357B2/ja not_active Expired - Lifetime
• 1994
  • 1994-08-24 KR KR1019960700933A patent/KR960703698A/ko not_active Withdrawn
  • 1994-08-24 WO PCT/JP1994/001392 patent/WO1995006538A1/ja active Application Filing
  • 1994-08-24 DE DE4496500T patent/DE4496500T1/de not_active Withdrawn
  • 1994-09-13 TW TW083107784A patent/TW279239B/zh active

Patent Citations (2)

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