WO1993016439A1 - Procede et appareil de prise rapide d'images microscopiques focalisees - Google Patents

Procede et appareil de prise rapide d'images microscopiques focalisees Download PDF

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Publication number
WO1993016439A1
WO1993016439A1 PCT/US1993/001449 US9301449W WO9316439A1 WO 1993016439 A1 WO1993016439 A1 WO 1993016439A1 US 9301449 W US9301449 W US 9301449W WO 9316439 A1 WO9316439 A1 WO 9316439A1
Authority
WO
WIPO (PCT)
Prior art keywords
focus
signal
camera
image
plus
Prior art date
Application number
PCT/US1993/001449
Other languages
English (en)
Inventor
Jon Wallace Hayenga
Louis R. Piloco
Original Assignee
Neopath, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Neopath, Inc. filed Critical Neopath, Inc.
Publication of WO1993016439A1 publication Critical patent/WO1993016439A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/26—Stages; Adjusting means therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365—Control or image processing arrangements for digital or video microscopes
    • G02B21/367—Control or image processing arrangements for digital or video microscopes providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T1/00—General purpose image data processing
    • G06T1/60—Memory management
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • H04N23/67—Focus control based on electronic image sensor signals
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/70—Circuitry for compensating brightness variation in the scene
    • H04N23/74—Circuitry for compensating brightness variation in the scene by influencing the scene brightness using illuminating means

Definitions

  • the present invention is directed toward devices for providing image signals representing an image of an object and, more particularly, apparatus for rapidly capturing focused image signals.
  • Systems for providing image signals typically include a camera positioned to be focused upon an object and constructed for providing image signals representing an image of the object.
  • these systems include apparatus for monitoring the image signals and for varying the focus of the camera to provide a focused image signal.
  • it is not possible to obtain a focused image if any significant relative motion exists between the image and the camera while the image is being obtained.
  • the above-referenced camera systems require an unacceptably long time to focus the camera.
  • the above-described focusing mechanism requires a focused signal to be received before the proper focusing position of the camera can be determined. Accordingly, the focus of the camera must be varied until an acceptably focused image signal is received, before the desired image signal can be obtained. This procedure is unacceptable and tedious.
  • the focus time of these systems is further increased since changing the focus causes vibration that must be stopped before the desired image signals can be obtained. It is desirable, therefore, to provide a camera system capable of determining the proper focus position of the camera without the necessity of receiving focused image signals.
  • a camera system for obtaining a signal representing a focused image of an object.
  • the camera system includes a camera assembly responsive to a focus signal for focusing on a focal point to provide an image signal indicative of the image of the object*.
  • the camera assembly is also constructed to provide an offset focus signal focusing the camera assembly on an offset focal point displaced from the focal point by a predetermined distance.
  • the camera system further includes a focus signal processor for determining the band-pass frequency component of the offset focus signal to provide the focus signal so that the image signal provided by the camera assembly will be representative of a focused image of the object.
  • a light assembly is constructed for providing light to illuminate the object and to provide a light signal indicative of the intensity of the light provided.
  • the camera system also includes a camera assembly for providing an image signal indicative of the image of the object.
  • the camera system also includes a data processor responsive to the light signal for altering the image signal so that the image signal is corrected for variations in intensity of the flash of light.
  • Figure 1 is an illustrative block diagram of the camera system that is the subject of the present invention
  • Figure 2 is a graph illustrating the relationship between the passband frequency component of the signal provided by the camera assembly of Figure 2 and the focus of the camera assembly
  • Figure 3 is a more detailed illustrative diagram of the camera assembly that comprises the subject invention
  • Figure 4 is an illustrative diagram of a circuit for determining the focus position of the camera assembly of Figure 3;
  • Figure 5 is an illustrative block diagram of a circuit for controlling the camera assembly of
  • the subject invention provides a camera system for rapidly obtaining focused images of an object.
  • the camera system of the subject invention may be used in various imaging devices as will be apparent to those skilled in the art.
  • the camera system disclosed herein is used in a system for analyzing cervical pap smears.
  • a camera system 100 constructed in accordance with the subject invention is illustrated in Figure 1.
  • a camera assembly 102 is positioned to obtain an image of a slide 104 mounted to a motion controller 106.
  • the slide 104 is constructed for receiving a slide-mounted medical specimen and the camera system 100 is provided for obtaining image signals of the medical specimen.
  • the subject invention may be used with camera systems constructed for obtaining image signals of a wide variety of objects.
  • the motion controller 106 includes a stage for receiving the slide 104 and is responsive to a slide scan signal, received from a data processor 108, for moving the stage in a slide plane represented by X and Y directions.
  • the X and Y directions are located in the plane that is perpendicular t * in optical path 110 intermediate the slide 104 and the camera 102.
  • the motion controller is further responsive to a slide focus signal for moving the stage in a direction normal to the slide plane, along the optical path 110, for focusing the camera upon the slide 104.
  • the motion controller is constructed to provide a position signal to the data processor 108 wherein the position signal is indicative of the X, Y, and Z position of the stage.
  • Motion controllers for performing the above-described functions are known in the art and a suitable motion controller may be selected by those skilled in the art.
  • the camera assembly 102 is constructed to provide an image signal indicative of the optical trans issivity of the specimen on the slide 104.
  • the image signal from the camera assembly 102 is obtained by focusing the camera assembly on a focal point positioned a first distance along the optical path 110.
  • the camera assembly 102 is further constructed to provide an above focus image signal and a below focus image signal, referred to herein as a focus plus and a focus minus signal, respectively.
  • the focus plus signal is provided by focusing the camera assembly on a focal point positioned a second distance along the optical path 110 wherein the length of the second distance is greater than the length of the first distance.
  • the focus minus signal is provided by focusing the camera assembly on a focal point positioned a third distance along the optical path 110 wherein the length of the third distance is less than the length of the first distance.
  • the image signal, focus plus signal, and focus minus signal are each provided to the data processor 108.
  • the data processor 108 uses the focus plus signal and the focus minus signal to determine the positioning of the slide 104 along the optical path 110 necessary for focusing the specimen so that the image signal provided by the camera 102 will be in focus. More particularly, the data processor 108 determines whether the received signal is of magnitude large enough to focus, whether the image plane lies within the correctable region, and which direction to move the slide 104 to focus the image.
  • the data processor 108 determines the magnitude of the band-pass frequency energy in the focus plus and focus minus signals. As illustrated in Figure 2, the image signal will be in focus when the band-pass frequency energy of the focus plus and focus minus signals are substantially equal. Accordingly, to determine the proper positioning of the slide 104 along the optical path 110, the data processor 108 need only determine how far the slide must be displaced for the energy provided by the focus plus and focus minus signals to be substantially equal. It will be apparent to those skilled in the art that the relative positioning of the focal point of the camera assembly when providing the focus plus signal and focus minus signal is determinative of the relationship between their band-pass frequency energy components and the positioning of the camera assembly for providing a focused image signal.
  • the data processor 108 is constructed to provide the scan signal to position the motion controller 106 in a plurality of X-Y positions to obtain a plurality of image signals indicative of a respective plurality of images of a portion of the specimen on the slide 104.
  • the data processor 108 may be further constructed to determine the proper positioning of the slirle 104 along the optical path 110 for each of the plurality of image signals obtained. After ear . of the plurality of image signals have been obtained, the data processor 108 can determine whether the slide is focused by examining the band-pass frequency component of the focus plus signal and the focus minus signal, as discussed above.
  • a strobe assembly 112 is provided for selectively illuminating the slide 104 at the time that the image signals are obtained by the camera 102.
  • the strobe assembly 112 includes a strobe light 114 that is responsive to a pulse signal from the data processor 108 for providing a flash of light.
  • the strobe light 114 is further responsive to an intensity signal received from the data processor 108 for varying the intensity of the flash of light provided.
  • the strobe light 114 is positioned to illuminate the slide 104 with the flash of light.
  • the slide 104 is positioned intermediate the strobe light 114 and the camera 102 so that the flash of light is provided along an optical path the same as the optical path 110.
  • the strobe assembly 112 further includes a photodetector sensor 116 that is positioned to receive a portion of the flash of light via a beam splitter 118. • ⁇ beam splitter 118 may comprise any of a variety of devices readily available to those skilled in the art.
  • the photodetector sensor 116 is " responsive to the portion of the flash of light to provide a light signal indicative of the intensity of the portion of the flash of light received. Suitable photodetector sensors 116 are readily available commercially.
  • the data processor 108 is responsive to the light signal received from the photodetector sensor 116 for altering the image signal to compensate the image signal for variations in the intensity of the flash of light provided by the strobe 114.
  • the data processor 108 provides the scan signal to the motion controller 106 so that a plurality of image signals may be obtained without waiting for vibration in the motion controller 106 or camera 102 to stop. Since the flash of light provided by the strobe assembly only illuminates the specimen for an instant, the motion of the motion controller 106 is substantially frozen and, therefore, will not have any substantial effect on the focus of the image signal provided by the camera assembly 102.
  • the data processor 108 is capable of controlling the camera system 100 so that image sicrrtals may be obtained immediately after the mot..on controller 106 positions the slide 104 in response to the scan signal from the data processor. After the motion controller 106 has moved the slide into position, the motion controller stops moving, leaving only residual vibration. It is noted that the vibration of the motion controller 106 exhibits a predetermined profile, i.e., it vibrates with substantially the same profile after each stop. As discussed herein, the data processor 108 is capable of determining the exact displacement necessary to bring an image into focus. This displacement is determined notwithstanding the vibration of the motion controller 106.
  • an optical transmission assembly 300 includes an objective lens assembly 302, a first beam splitter 304 and a second beam splitter 306.
  • the first and second beam splitters 304 and 306 provide first, second, and third optical paths 308, 310, and 312, respectively.
  • the objective lens assembly 302 is constructed to vary the magnification provided to the specimen on the slide 104.
  • the objective lens assembly 302 is responsive to a magnification signal received from the data processor 108 to select various lenses to vary the magnification. Suitable assemblies for responding to an electric signal to move two or more lenses into and out of position for varying the magnification provided to the specimen may readily be provided by those skilled in the art.
  • a primary camera 314 is positioned to receive a first image of the specimen on the slide 104 via the first optical path 308.
  • the first optical path 308 is the path from point A on the objective 302 to point B at the CCD of the primary camera 314.
  • the primary camera 314 is responsive to an activation signal for providing an image signal representing the first image.
  • a focus plus camera 316 is positioned to receive a second image of the specimen on the slide 104 along a second optical path 310.
  • the second optical path 310 is the path from point A on the objective 302 to point C at the CCD of the focus plus camera 316. As discussed above by reference to Figures 1 and 2, the length of the second optical path 310 is less than the length of the first optical path by a predetermined length.
  • the focus plus camera 316 is also responsive to the activation signal for providing a focus plus signal, wherein the focus plus signal is indicative of the focus of the image signal.
  • a focus minus camera 318 is positioned to receive a third image of the object on the slide 104 via a third optical path 312.
  • the third optical path is the path from point A on the objective 302 to a point D on the CCD of the focus minus camera 318.
  • the length of the third optical path 312 is greater than the length of the first optical path 308 by the predetermined length.
  • the focus minus camera 318 is responsive to the activation signal for providing a focus minus signal that is also indicative of the focus of the image signal.
  • the data processor 108 determines the bandpass energy of the focus plus signal and the focus minus signal to determine the proper positioning of the slide 104 so that the image signals will be representative of a focused image of the specimen on the slide.
  • the data processor 108 includes first and second identical focus processor circuits 400 and 402 illustrated in Figure 4.
  • the focus processor circuits 400 and 402 each include a band pass filter 404 and 406, respectively, for receiving the focus plus and focus minus signals.
  • the band pass filters 404 and 406 are constructed to pass a band-pass energy component of the focus plus and focus minus signals. Each filtered signal is multiplied by itself in respective multiplier circuits 408 and 410 so that the resulting signal is always proportional to the magnitude of the energy .
  • This energy level signal is then integrated for each line of active video provided in respective integrator 412 and 414 to provide signals indicative of the total energy provided in the band-pass.
  • the output from the integrator 412 and 414 is sampled by respective sample and hold circuits 416 and 418 before being digitized by an analog-to-digital convertor 420.
  • the data processor 108 uses the signals from the analog-to-digital convertor 420 to determine the proper positioning of the slide 104 so that the image signals provided by the primary camera 314 will be representative of a focused image.
  • the correction unit 502 of the data processor 108 is provided for correcting the image signal for pixel-to-pixel variation in amplification and leakage current.
  • the data processor 108 is shown to include a receiver/multiplexer 500 for receiving the image signal, focus plus signal, and focus minus signal.
  • the receiver/multiplexer 500 is constructed to couple the image signal to a correction unit 502 for correcting the image signal for pixel-to-pixel variation, as will be described in more detail below.
  • the receiver/multiplexer 500 further couples the focus plus and focus minus signals to focus processor circuits 400 and 402, discussed above.
  • the light signal from the sensor 116 is coupled to an energy detector 504 for determining the energy provided by the flash of light from the strobe unit 114 and providing an energy signal indicative of its magnitude.
  • the energy signal from the energy detector 504 is coupled to the reference input of an analog digital converter 506.
  • the analog digital convertor 506 is also coupled to receive image signals from the correction unit 502 and to provide digital signals indicative of their magnitude by coupling the energy signals from the energy detector 504 to the reference input of the analog to digital convertor 506, the digital output will be automatically corrected for variation in the intensity of the flash of light provided by the strobe unit 114.
  • the digitized image signals from the analog to digital convertor 506 are provided to a memory unit 508.
  • the memory unit 508 may comprise random access memory or any other memory for providing a conversion to the digitized image signals.
  • the output from the random access memory 508 is selected by a multiplexer 514 as the output of the data processor 108. As illustrated, the multiplexor selects from the video signal from the random access memory 508 and predetermined video signals from a calibration unit 516.
  • the calibration signals are used to determine the proper calibration of the data processor 108 for calibrating the video signal from the camera.
  • the data proce ⁇ or 108 also includes a timing and control circuit 512 for controlling the timing of the activation signals and the pulse and intensity signa-is.
  • a primary camera 314, capable of asynchronous operations, is selected so that the data processor 108 may control the time that the image signals are obtained, without waiting for the camera to be in synchronization with the motion controller 106.
  • the motion controller 106 provides the position sign to the data processor 108 prior to the time th the motion controller 106 will position the ⁇ adjide 104 in the position designated by the scan signal.
  • the data processor 108 responds to the position signal to provide the activation signal to the primary camera 314, thereby synchronizing the primary camera 314 so that it will obtain an image when the motion controller arrives at the position designated by the scan signal. Thereafter, the data processor 108 provides the intensity and pulse signals to the strobe light 114 to illuminate the slide 104 at the time the motion controller 106 positions the slide at the designated position and the primary camera 314 begins obtaining the image signals.
  • the motion controller 106 provides the position signal 61 milliseconds prior to the time it positions the slide at the designated position.
  • the data processor 108 sets the timing to the primary camera 21 milliseconds prior to the time the motion controller positions the slide at the designated position and the intensity and pulse signals are provided to the strobe 114 at the time the motion controller positions the slide at the designated position.
  • the data processor 108 may further include a microprocessor, or other type processing device, for executing a predetermined set of instructions to perform a desired function.
  • a particularly novel aspect of the subject invention is the method by which the focus plus and focus minus signals are combined to determine the proper focus of the camera.
  • the data processor 108 receives an array of focus plus scores FP(0) , FP(1) , . . . FP(255) , and array of focus minus scores FM(0) , FM(1) , . . . FM(225) , each including 256 elements, one for each line of one field of the camera 102.
  • the focus plus and focus minus array are each convolved with a filter array Ffk to correlate the energies of adjacent lines.
  • the filter array is selected to provide a low pass filter that looks for objects at least five lines in size.
  • the filter array Ffk is selected to provide a finite impulse response, low pass filtering of the focus plus and focus minus arrays.
  • the filter kernel is designed to be sensitive to the size and type of object that the data processor 108 is attempting to detect. Further, the finite impulse response filtering is performed in a manner so that the resulting filter array eliminates the first and last few elements of the respective focus plus and focus minus array to eliminate edge effects from the filter.
  • filtered focus plus and focus minus arrays, F'P and F , M are created each including 252 elements.
  • the filtered focus scores are further combined with a noise array to eliminate noise that may be provided by the camera system 100. More particularly, the camera system 100 may include noise that results from camera noise, integrator leakage, dust or streaks on the focus camera, or in one of the optical image planes.
  • a noise array is generated and combined with the filtered focus scores.
  • the noise array is generated by focusing the camera 102 upon a white field, i.e., one with no slide 104 so that the focus plus and focus minus camera can measure the fixed noise floor energy within the focus filter band pass. This noise floor integration is relatively consistent and can be measured and subtracted from the energy measurements made for the individual line scores. This significantly improves the signal to noise ratio for each line.
  • a noise plus and noise minus array is measured for the focus plus and focus minus camera, respectively, in the same manner as the focus plus and focus minus signals, discussed above.
  • the noise plus and noise minus array include an element for each line of the focus plus and focus minus array, respectively.
  • the noise plus and noise minus array is convolved with the filter array Ffk, as discussed above with the focus plus and focus minus arrays, to provide filtered noise plus and filtered noise minus, FNP and FNM arrays, respectively.
  • the resulting array are filtered noise plus and noise minus arrays, having one to one correspondence with the focus plus and focus minus arrays, respectively.
  • the noise plus and noise minus arrays are subtracted from the focus plus and focus minus arrays to provide respective focus plus and focus minus signal arrays, FPS and FPM, respectively.
  • FS(x) [(FPS(x) FPM(x) )/(FPS(x) + FPM(x))].
  • This step produces a normalized focus score for each line of the camera 102, except the f.rst and last few lines that were excluded because of edge filter effects, as discussed above. Normalization of the focus scores helps to make the data independent, i.e., tends to make each score comparable to one another regardless of the amount of data used to produce the score.
  • the array of focus scores is screened to eliminate those scores for which insufficient data existed to achieve a meaningful score. This is done by eliminating each score FS(x) for which FPS(x) plus FMS(x) is outside the range of a predetermined threshold.
  • the threshold range is selected empirically by the lowest signal content image of interest. In a preferred embodiment of the invention, the range is selected as between 3 and 240. Those skilled in the art will appreciate, however, that this range is only illustrative and that any range, including the full range, may be selected. The inventors envision, however, that the most favorable results will be obtained using between 1% and 95% of the range.
  • a particularly novel aspect of the subject invention is the ability of the data processor 108 to not only determine whether an image is in focus or out of focus, and not only determine the direction necessary to move the specimen to bring the image into focus, but to also determine the distance of motion necessary to bring the specimen into focus.
  • the data processor 108 may control the motion controller 106 to rapidly return to the position of any out of focus specimen and may provide the appropriate scan signal so that the motion controller will position the specimen to be in focus.
  • a look up table is generated prior to obtaining any image signals.
  • a test image is employed and placed on the motion controller and a plurality of test focus images obtained to provide a correlation between the focus scores and the amount and direction of displacement necessary for proper focus.
  • the calibration to determine the displacement and direction correlation to focus scores is performed only once when the system is designed and remains the same so long as the component parts of the system are not disturbed.
  • the calibration to obtain data correlating the focus scores to the amount and direction of displacement may be performed at any time prior to obtaining image signals.
  • the motion controller 106 positions the slide 104 at a plurality of predetermined positions for obtaining image signals. After each image signal is obtained, the motion controller 106 immediately moves to obtain the next image signal. While the motion -.ontroller 106 is positioning the slide 104 to obt • I the next image signal, the data processor 108 determines whether the last obtained image signal was in focus and, if so, identifies the image signal as a focused image signal for use by the remainder of the system. However, if the image signal was not in focus, the data processor 108 determines the displacement and direction necessary for focus of the specimen.
  • the data processor 108 instructs the motion controller 106 to return to the out of focus image and provides the necessary displacement information so that, when next obtained, the image will be in focus.
  • this method of obtaining focused image signals is much quicker than the prior art method where the specimen cannot be moved before a focused image signal is obtained. Even when the data processor 108 must return to obtain a second image signal because the first image signal was out of focus, the entire process may be performed in less time than that required by the prior art systems to obtain a single focused image signal. Further, since the camera assembly 102 is constructed from asynchronous cameras, additional time is saved in obtaining focused image signals. Essentially, the only time delay for obtaining image signals is that necessary for the motion controller 106 to position the slide 104 and that necessary for the camera 102 to obtain the image signals.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Signal Processing (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Automatic Focus Adjustment (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

L'invention concerne un système de caméra (102) destiné à produire des signaux d'images représentant l'image d'un objet. Le système de caméra (102) comprend un ensemble stroboscope (114) ainsi qu'un contrôleur de mouvement (106) commandé par un processeur de données (108) destiné à synchroniser la prise de signaux d'image avec un éclair de lumière, afin d'éliminer ainsi sensiblement les variations se produisant dans le signal d'image dû aux vibrations de l'objet ou de la caméra (102). Le système de caméra (102) comprend également un ensemble caméra (102) destiné à produire un signal de mise au point positif et un signal de mise au point négatif (316, 318), dans lequel le processeur de données (108) réagit à la composante d'énergie de fréquence de bande passante (504) du signal de mise au point positif et du signal de mise au point négatif afin de déterminer le positionnement correct de l'objet, de sorte que l'image produite par la caméra (102) est représentatif d'une image focalisée. Une unité de correction (502) permet une correction pixel par pixel de la caméra (102).
PCT/US1993/001449 1992-02-18 1993-02-18 Procede et appareil de prise rapide d'images microscopiques focalisees WO1993016439A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US83806392A 1992-02-18 1992-02-18
US07/838,063 1992-02-18

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0782715A1 (fr) * 1994-09-20 1997-07-09 Neopath, Inc. Dispositif de controle de l'integrite de la mise au point automatique sur une preparation cytologique
WO1999003064A1 (fr) * 1997-07-07 1999-01-21 Alfa Laval Agri Ab Dispositif applicable a un animal
WO2000068667A1 (fr) * 1999-05-07 2000-11-16 Metasystems Hard & Software Gmbh Systemes microscopiques utilises pour le balayage optique d'objets microscopiques

Citations (6)

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Publication number Priority date Publication date Assignee Title
US4220850A (en) * 1978-09-29 1980-09-02 Abbott Laboratories Bimodal autofocusing apparatus
US4341953A (en) * 1979-05-23 1982-07-27 Canon Kabushiki Kaisha Focus detecting system
US4349254A (en) * 1979-02-13 1982-09-14 Asahi Kogaku Kogyo Kabushiki Kaisha Camera focus detecting device
US4577095A (en) * 1982-03-08 1986-03-18 Tokyo Shibaura Denki Kabushiki Kaisha Automatic focusing apparatus for a semiconductor pattern inspection system
US4725722A (en) * 1985-04-12 1988-02-16 Hitachi, Ltd. Automatic focusing method and apparatus utilizing contrasts of projected pattern
US4887125A (en) * 1987-03-05 1989-12-12 Fuji Photo Film Co., Ltd. Method of and device for detecting focusing condition of image incident upon image sensor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4220850A (en) * 1978-09-29 1980-09-02 Abbott Laboratories Bimodal autofocusing apparatus
US4349254A (en) * 1979-02-13 1982-09-14 Asahi Kogaku Kogyo Kabushiki Kaisha Camera focus detecting device
US4341953A (en) * 1979-05-23 1982-07-27 Canon Kabushiki Kaisha Focus detecting system
US4577095A (en) * 1982-03-08 1986-03-18 Tokyo Shibaura Denki Kabushiki Kaisha Automatic focusing apparatus for a semiconductor pattern inspection system
US4725722A (en) * 1985-04-12 1988-02-16 Hitachi, Ltd. Automatic focusing method and apparatus utilizing contrasts of projected pattern
US4887125A (en) * 1987-03-05 1989-12-12 Fuji Photo Film Co., Ltd. Method of and device for detecting focusing condition of image incident upon image sensor

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0782715A1 (fr) * 1994-09-20 1997-07-09 Neopath, Inc. Dispositif de controle de l'integrite de la mise au point automatique sur une preparation cytologique
EP0782715A4 (fr) * 1994-09-20 1999-10-20 Neopath Inc Dispositif de controle de l'integrite de la mise au point automatique sur une preparation cytologique
WO1999003064A1 (fr) * 1997-07-07 1999-01-21 Alfa Laval Agri Ab Dispositif applicable a un animal
US6363883B1 (en) 1997-07-07 2002-04-02 Alfa Laval Agri Ab Animal related apparatus
WO2000068667A1 (fr) * 1999-05-07 2000-11-16 Metasystems Hard & Software Gmbh Systemes microscopiques utilises pour le balayage optique d'objets microscopiques

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