WO1987006769A1 - Dispositif d'entrainement a commande electrique - Google Patents

Dispositif d'entrainement a commande electrique Download PDF

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Publication number
WO1987006769A1
WO1987006769A1 PCT/DE1987/000190 DE8700190W WO8706769A1 WO 1987006769 A1 WO1987006769 A1 WO 1987006769A1 DE 8700190 W DE8700190 W DE 8700190W WO 8706769 A1 WO8706769 A1 WO 8706769A1
Authority
WO
WIPO (PCT)
Prior art keywords
drive device
electrodes
piezoelectric
voltage
electrode
Prior art date
Application number
PCT/DE1987/000190
Other languages
German (de)
English (en)
Inventor
Michael Anders
Christoph Heiden
Original Assignee
Ernst Leitz Wetzlar Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ernst Leitz Wetzlar Gmbh filed Critical Ernst Leitz Wetzlar Gmbh
Publication of WO1987006769A1 publication Critical patent/WO1987006769A1/fr
Priority to KR1019870701255A priority Critical patent/KR880701467A/ko

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025—Inertial sliding motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices

Definitions

  • the invention relates to an electrically controllable drive device for moving an object in very small stride lengths.
  • a micropositioning device is required in order to be able to bring the probe specifically close to the substrate surface.
  • the particular difficulty lies in the fact that the individual measuring or positioning step for the relative movement between the substrate surface and the probe is in the nanometer range, but the overall distance should be in the range of a few millimeters.
  • the drive device is intended in particular for use in chambers with variable pressure conditions, e.g. High vacuum, and suitable at extremely low temperatures that can reach close to absolute zero.
  • an electrically movable carrier which is particularly suitable for scanning tunnel microscopy was developed. It consists of a piezoelectric plate and (a plurality of legs which support the plate over a bench surface. The legs are movable with the plate but are fixed in place and can be fixed to the bench surface by electrostatic forces.
  • the piezoelectric plate is on its top - When a voltage is applied to this electrode, the thickness of the plate changes due to electrostrictive forces, which also involves a change in diameter of the plate. Since the legs are fixed to the plate, the legs become in accordance with the change in diameter The shift takes place relative to the legs fixed on the bench surface.
  • the legs are attached to the bench surface by static friction under the influence of gravity. By deforming the piezoelectric plate, these forces must first be overcome before the legs start to slide. The transition between static and sliding friction takes place in leaps and bounds and in principle leads to an uncontrolled jump movement in the initial phase, which can cause damage to the parts that are positioned relative to one another.
  • the carrier can be moved both linearly and rotating.
  • the precise positionability of the carrier associated with the fixability of the individual legs is associated with a relatively complex mechanical construction of the carrier and a large number of electrical control elements.
  • the carrier is therefore more susceptible to damage and the large number of electrical leads is associated with heat emission, which is not negligible when used in the low temperature range.
  • the invention was therefore based on the object to provide a drive device which has a very simple structure, requires relatively low voltages for operation, manages with as few leads as possible, enables a very flat design, can be adapted in its design to different tasks which is very reliable mechanically and electrically and also allows a slow, continuous approach between the probe and the test specimen.
  • an electrically controllable drive device for displacing a rod-shaped object is known, the drive device being a piezoelectric tube with a full-surface inner electrode and segmented outer electrode, and time-coordinated direct voltage potentials are applied to the segments of the outer electrode. Furthermore, it is known from DE-PS 3412014 to use piezoelectric disks with an all-over electrode coating on one side and equal-area electrode segments on the other as a drive device for tilting movements.
  • Both the body carrying the substrate surface and the probe can be provided as the object to be displaced.
  • the object is connected to the surface of the piezoelectric disk by the static friction.
  • the surface of the disk can be moved by appropriately changing the voltage applied to the electrodes. If the voltage changes slowly, the object follows the movement of the surface of the piezoelectric disk due to its static friction. However, the change in voltage can also occur so quickly that the associated acceleration of the mass parts in the surface reaches a multiple of the acceleration due to gravity. The inertial force of the object lying on it becomes so great that it exceeds the static friction force between the contact surface on the piezoelectric disk and the object. In this case, the surface moves relative to the object without taking it along.
  • the basic idea of the drive mechanism thus described is to generate a directional movement in the surface of the piezoelectric disk by means of two partial surfaces of the piezoelectric disk which are opposed to one another with respect to contraction and dilation. With a division into two semicircular surfaces, the movement takes place perpendicular to the dividing line of the semicircular surfaces.
  • the size of the adjustment path depends on the difference in the tension on the two partial surfaces. If one chooses the voltages so that their sum is constant at all times, the changes in length associated with the contraction and dilation cancel each other out in the diameter of the piezoelectric disk. Since the edge of the disc is held in a frame, only the center moves linearly depending on the difference in the voltages on the electrode surfaces.
  • the voltage that can be applied to the piezoelectric disk can be varied over a very wide range. So that can be applied to the piezoelectric disk can be varied over a very wide range. So that can be applied to the piezoelectric disk can be varied over a very wide range. So that can be applied to the piezoelectric disk can be varied over a very wide range. So that can be applied to the piezoelectric disk can be varied over a very wide range. So that can be applied to the piezoelectric disk can be varied over a very wide range. So that can
  • the step length of the object shift can be freely selected over a wide range.
  • the maximum adjustment distance depends on the diameter of the piezoelectric disk and can therefore also be easily adapted to the respective measuring task.
  • the object can be guided step by step along a predefined path or a predefined position.
  • one side of the piezoelectric disk must be divided into several electrode segments.
  • the vector for the movement of the surface of the piezoelectric disk can be set by means of suitable contraction and dilation of partial surfaces lying next to or opposite one another. It is important to ensure that the sum of the voltages at two electrode segments with different potentials is at least almost constant, so that the change in length of the piezoelectric disk in the direction of the respective motion vector is compensated.
  • the new drive device has no mechanically moving parts. It only needs as much electrical leads as there are electrodes.
  • the mass shift in the surface of the piezoelectric disk which is responsible for the shifting mechanism of the drive device, occurs both on the top and on the bottom of the disk, as will be explained below with reference to the figures.
  • both sides can therefore be used as a support surface for the object to be moved. Since the entire surface, which is designed as an electrode, is at ground potential, there are no problems with regard to the electrical insulation when an electrically conductive object is placed on it. However, the voltage-carrying electrodes are then closer to a base plate on which the entire drive device rests, so that additional insulating spacers may have to be attached to this.
  • a suitable coating of this surface can ensure that there is no short circuit between the electrodes when the object is supported.
  • Fig. 3 shows the course of the control voltages
  • H shows the time course of the deformation of the surface of the piezoelectric disk.
  • the sectional view of the drive device shown in FIG. 1 shows the simplicity of the construction.
  • a piezoelectric disc 10 is clamped in a frame 11.
  • the disc is covered with a lower electrode 12, which is at ground potential.
  • Two separate electrodes 13 and 14 are applied to the top of the disk, to each of which a voltage U a and U b can be applied.
  • the frame 11 rests on a base plate 15, the piezoelectric disk 10 additionally being supported by a spacer 16.
  • the spacer 16 primarily has a safety function in the event that the pane 10 detaches from the frame 11. He also ensures that the surface of the underside of the disc 10 can move freely. In addition, the ground contact can also be established.
  • the object 17 to be displaced is placed on the upper electrodes 13, 14 and is connected on its lower side to an electrically insulating plate 18.
  • an electrically insulating coating to the electrodes, which prevents a short circuit of the voltages lying on the electrodes by the placed object 17.
  • Various brass cylinders with a mass of 50 to 300 grams were selected as objects for test purposes.
  • a 1.5 mm thick, roughly cleaned glass plate of 45 mm diameter was used as the insulating plate 18 and was glued to the brass cylinders. The surfaces sliding on each other are therefore the underside of the glass pane and the top of the electrodes.
  • the piezoelectric disk 10 had a diameter of approximately 100 mm and a thickness of 3 mm. Piezoelectric ceramic materials are particularly suitable and are used e.g. B. offered under the name Vibrit (Siemens) or PXE 5 (Valvo). Gold was chosen as the electrode material. With the help of the base plate 15, the structure was adjusted so that the surface of the disc 10 is horizontal.
  • the frame 11 was e.g. B. made of aluminum.
  • Fig. 2 shows a plan view of the drive device.
  • four electrodes 13, 13 ', 14, 14' were applied to the circular piezoelectric disk 10.
  • the frame 11 consists of two right-angled legs which are clamped together by screws 19. The legs create a point contact of the piezoelectric disk 10. This clamping has proven to be particularly advantageous for a two-dimensional object displacement.
  • Fig. 3 shows a particularly suitable time course of the two control voltages U a and U b in the form of a sawtooth.
  • the sum of the voltages U a (t) and U b (t) is constant with this voltage curve.
  • For the flat edge of the voltages z. B. selected a rise time of 50 ms, while the steep flank had a rise time of 50 ⁇ s.
  • the amplitude of the voltages was adjustable between 0 and 1000 V.
  • the mutually opposite voltage curve also has the effect that the contraction and dilation in the partial areas of the piezoelectric disk 10 covered by the electrodes 13, 14 are opposite to one another.
  • the time course of the deformation of the surface of the disk 10 is shown schematically in FIG. 4.
  • the voltage U a applied to the electrode 13 is at a maximum, ie the thickness of the disk 10 is stretched in this area.
  • the voltage U b applied to the electrode 14 is minimal, so that this region is compressed.
  • the different change in thickness in the partial areas of the disk 10 leads to a mass shift.
  • a point indicated by the arrow in FIG. 4 on the surface of the disk 10 at the boundary between the two electrodes 13, 14 is therefore shifted to the left.
  • the two voltages U a and U b are the same.
  • the piezoelectric disk has a uniform thickness.
  • the point indicated by the arrow has moved to the right and lies on the dividing line between the two electrodes.
  • the thickness ratios are exactly the opposite of time t a .
  • the indexed point has moved far enough to the right from the dividing line. If one thinks this point is connected to a point on the glass pane 18 by static friction, then the object has also moved to the right by the amount of the displacement of the point.
  • step length of the point indicated in Fig. 4 depends on the amplitude of the applied voltage.
  • Object and drive device can use. This then leads to an object shift from the previously controlled position. This effect can be eliminated by a suitable counter voltage.
  • the counter voltage can be limited in time or can also be applied to the electrodes as a voltage pulse.

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

Un dispositif d'entraînement à commande électrique servant à déplacer un objet sur de très courtes distances comprend, a) un disque piézoélectrique (10) serré à son bord dans un cadre (11), b) une électrode (12) électriquement isolée du cadre (11) et en contact avec toute la surface d'un côté du disque (10), c) au moins deux électrodes (13, 14) électriquement isolées du cadre (11) et ayant presque la même taille, en contact avec l'autre côté du disque (10), d) une source réglable de tension de courant continu (Ua, U6) connectée aux électrodes (12, 13, 14) de façon à générer un champ électrique entre les électrodes face aux deux côtés du disque (10), e) la commande de la source de tension se fait de telle sorte que pendant une première phase un changement lent de la tension est obtenu et pendant une deuxième phase un changement de la tension beaucoup plus rapide en sens inverse et de même amplitude est obtenu, f) la somme des tensions appliquées sur la surface de deux électrodes (13, 14) ayant un potentiel différent reste au moins presque constante.
PCT/DE1987/000190 1986-05-02 1987-04-29 Dispositif d'entrainement a commande electrique WO1987006769A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019870701255A KR880701467A (ko) 1986-05-02 1987-12-30 전기제어식 구동장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3614996A DE3614996C1 (de) 1986-05-02 1986-05-02 Elektrisch steuerbare Antriebsvorrichtung
DEP3614996.9 1986-05-02

Publications (1)

Publication Number Publication Date
WO1987006769A1 true WO1987006769A1 (fr) 1987-11-05

Family

ID=6300092

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE1987/000190 WO1987006769A1 (fr) 1986-05-02 1987-04-29 Dispositif d'entrainement a commande electrique

Country Status (5)

Country Link
EP (1) EP0264403A1 (fr)
JP (1) JPS63503191A (fr)
KR (1) KR880701467A (fr)
DE (1) DE3614996C1 (fr)
WO (1) WO1987006769A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030048917A (ko) * 2001-12-13 2003-06-25 엘지이노텍 주식회사 박막용적 탄성공진기 필터 듀플렉서

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2619932B1 (fr) * 1987-08-25 1991-08-30 Suisse Electronique Microtech Dispositif de reglage fin d'une unite par rapport a un systeme de reference et utilisation de ce dispositif
DE3812684A1 (de) * 1988-04-16 1989-11-02 Klaus Prof Dr Dransfeld Verfahren zum schnellen abrastern von unebenen oberflaechen mit dem raster-tunnelmikroskop
US5255417A (en) * 1991-07-29 1993-10-26 Herman Pearl Button Co., Inc. Decorative multi-part ornamentations and the fabrication thereof
DE102005023988B4 (de) * 2005-05-20 2007-03-01 Universität Hamburg Piezoelektrischer Motor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4087715A (en) * 1976-11-18 1978-05-02 Hughes Aircraft Company Piezoelectric electromechanical micropositioner
EP0010983A1 (fr) * 1978-11-06 1980-05-14 Sperry Corporation Dispositif de commande de position

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3006973C2 (de) * 1980-02-25 1982-06-09 Siemens AG, 1000 Berlin und 8000 München Anordnung zur Ausführung einer steuerbaren linearen Bewegung
EP0071666B1 (fr) * 1981-08-10 1985-02-06 International Business Machines Corporation Support mobile électrique
DE3412014C1 (de) * 1984-03-31 1985-10-17 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5000 Köln Piezokeramischer Stellantrieb zur Erzeugung von Translationsbewegungen

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4087715A (en) * 1976-11-18 1978-05-02 Hughes Aircraft Company Piezoelectric electromechanical micropositioner
EP0010983A1 (fr) * 1978-11-06 1980-05-14 Sperry Corporation Dispositif de commande de position

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030048917A (ko) * 2001-12-13 2003-06-25 엘지이노텍 주식회사 박막용적 탄성공진기 필터 듀플렉서

Also Published As

Publication number Publication date
DE3614996C1 (de) 1987-07-30
EP0264403A1 (fr) 1988-04-27
JPS63503191A (ja) 1988-11-17
KR880701467A (ko) 1988-07-27

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