USD981972S1 - Adiabatic plate for substrate processing appratus - Google Patents

Adiabatic plate for substrate processing appratus Download PDF

Info

Publication number
USD981972S1
USD981972S1 US29/808,582 US202129808582F USD981972S US D981972 S1 USD981972 S1 US D981972S1 US 202129808582 F US202129808582 F US 202129808582F US D981972 S USD981972 S US D981972S
Authority
US
United States
Prior art keywords
substrate processing
adiabatic plate
processing appratus
appratus
adiabatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/808,582
Other languages
English (en)
Inventor
Shinya Morita
Seiyo Nakashima
Satoru Murata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MURATA, SATORU, NAKASHIMA, SEIYO, MORITA, SHINY
Application granted granted Critical
Publication of USD981972S1 publication Critical patent/USD981972S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

US29/808,582 2021-03-22 2021-09-21 Adiabatic plate for substrate processing appratus Active USD981972S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-005833D 2021-03-22
JPD2021-5833F JP1700781S (zh) 2021-03-22 2021-03-22

Publications (1)

Publication Number Publication Date
USD981972S1 true USD981972S1 (en) 2023-03-28

Family

ID=78766347

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/808,582 Active USD981972S1 (en) 2021-03-22 2021-09-21 Adiabatic plate for substrate processing appratus

Country Status (3)

Country Link
US (1) USD981972S1 (zh)
JP (1) JP1700781S (zh)
TW (1) TWD225036S (zh)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040256284A1 (en) * 2002-11-26 2004-12-23 Masatoshi Nanjo Cassette for storing a plurality of semiconductor wafers
USD547147S1 (en) * 2006-09-01 2007-07-24 Huy Tran Window tinting tool
USD615937S1 (en) * 2009-03-06 2010-05-18 Tokyo Electron Limited Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers
USD654884S1 (en) * 2010-10-21 2012-02-28 Tokyo Electron Limited Top plate for reactor for manufacturing semiconductor
USD654883S1 (en) * 2010-10-21 2012-02-28 Tokyo Electron Limited Top plate for reactor for manufacturing semiconductor
USD655257S1 (en) * 2010-10-21 2012-03-06 Tokyo Electron Limited Top plate for reactor for manufacturing semiconductor
USD655259S1 (en) * 2010-10-21 2012-03-06 Tokyo Electron Limited Top plate for reactor for manufacturing semiconductor
USD916037S1 (en) * 2018-05-18 2021-04-13 Kokusai Electric Corporation Cover of seal cap for reaction chamber for semiconductor
USD924823S1 (en) 2018-07-19 2021-07-13 Kokusai Electric Corporation Adiabatic plate for substrate processing apparatus

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040256284A1 (en) * 2002-11-26 2004-12-23 Masatoshi Nanjo Cassette for storing a plurality of semiconductor wafers
USD547147S1 (en) * 2006-09-01 2007-07-24 Huy Tran Window tinting tool
USD615937S1 (en) * 2009-03-06 2010-05-18 Tokyo Electron Limited Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers
USD654884S1 (en) * 2010-10-21 2012-02-28 Tokyo Electron Limited Top plate for reactor for manufacturing semiconductor
USD654883S1 (en) * 2010-10-21 2012-02-28 Tokyo Electron Limited Top plate for reactor for manufacturing semiconductor
USD655257S1 (en) * 2010-10-21 2012-03-06 Tokyo Electron Limited Top plate for reactor for manufacturing semiconductor
USD655259S1 (en) * 2010-10-21 2012-03-06 Tokyo Electron Limited Top plate for reactor for manufacturing semiconductor
USD916037S1 (en) * 2018-05-18 2021-04-13 Kokusai Electric Corporation Cover of seal cap for reaction chamber for semiconductor
USD924823S1 (en) 2018-07-19 2021-07-13 Kokusai Electric Corporation Adiabatic plate for substrate processing apparatus

Also Published As

Publication number Publication date
JP1700781S (zh) 2021-11-29
TWD225036S (zh) 2023-05-01

Similar Documents

Publication Publication Date Title
USD901177S1 (en) Protective case
USD912063S1 (en) Tablet keyboard case
USD883511S1 (en) Portable sanitizer
USD910026S1 (en) Tablet case
USD914477S1 (en) Knob
USD1015335S1 (en) Tablet case
USD908477S1 (en) Bolt
USD942836S1 (en) Knob
USD922185S1 (en) Bolt
USD945539S1 (en) Weight plate
USD938243S1 (en) Material removal tool
USD973526S1 (en) Scale
USD981970S1 (en) Substrate mounting plate for substrate processing apparatus
USD965811S1 (en) Hand roller
USD1004568S1 (en) Portable stereo
USD991024S1 (en) Fastener
USD1014454S1 (en) Portable stereo
USD990300S1 (en) Fastener
USD988326S1 (en) Protective cover for tablets
USD990050S1 (en) Nail apparatus
USD905579S1 (en) Gauge
USD986767S1 (en) Planting board
USD1034611S1 (en) Tablet case
USD1001678S1 (en) Rotating buckle
USD981972S1 (en) Adiabatic plate for substrate processing appratus

Legal Events

Date Code Title Description
FEPP Fee payment procedure

Free format text: ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: BIG.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY