USD916037S1 - Cover of seal cap for reaction chamber for semiconductor - Google Patents

Cover of seal cap for reaction chamber for semiconductor Download PDF

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Publication number
USD916037S1
USD916037S1 US29/670,537 US201829670537F USD916037S US D916037 S1 USD916037 S1 US D916037S1 US 201829670537 F US201829670537 F US 201829670537F US D916037 S USD916037 S US D916037S
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United States
Prior art keywords
cover
semiconductor
reaction chamber
seal cap
view
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Active
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US29/670,537
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English (en)
Inventor
Yusaku OKAJIMA
Shuhei SAIDO
Hidenari YOSHIDA
Takafumi Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
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Kokusai Electric Corp
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Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: OKAJIMA, YUSAKU, SAIDO, SHUHEI, SASAKI, TAKAFUMI, YOSHIDA, HIDENARI
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US29/670,537 2018-05-18 2018-11-16 Cover of seal cap for reaction chamber for semiconductor Active USD916037S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPD2018-10931F JP1624334S (enrdf_load_stackoverflow) 2018-05-18 2018-05-18
JPJP2018-010931 2018-05-18

Publications (1)

Publication Number Publication Date
USD916037S1 true USD916037S1 (en) 2021-04-13

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US29/670,537 Active USD916037S1 (en) 2018-05-18 2018-11-16 Cover of seal cap for reaction chamber for semiconductor

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US (1) USD916037S1 (enrdf_load_stackoverflow)
JP (1) JP1624334S (enrdf_load_stackoverflow)
TW (1) TWD201038S (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD947914S1 (en) * 2020-11-23 2022-04-05 Applied Materials, Inc. Base plate for a processing chamber substrate support
USD980814S1 (en) * 2021-05-11 2023-03-14 Asm Ip Holding B.V. Gas distributor for substrate processing apparatus
USD980813S1 (en) * 2021-05-11 2023-03-14 Asm Ip Holding B.V. Gas flow control plate for substrate processing apparatus
USD981972S1 (en) * 2021-03-22 2023-03-28 Kokusai Electric Corporation Adiabatic plate for substrate processing appratus
US11887878B2 (en) 2019-06-28 2024-01-30 Applied Materials, Inc. Detachable biasable electrostatic chuck for high temperature applications
USD1071886S1 (en) * 2022-01-20 2025-04-22 Applied Materials, Inc. Substrate support for a substrate processing chamber

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1057675S1 (en) 2021-04-12 2025-01-14 Lam Research Corporation Pedestal for a substrate processing system
TWD235139S (zh) 2023-07-07 2024-12-01 美商蘭姆研究公司 (美國) 基板處理系統用台座
TWD236177S (zh) 2023-07-07 2025-02-01 美商蘭姆研究公司 (美國) 基板處理系統用台座
TWD239110S (zh) 2023-07-07 2025-07-01 美商蘭姆研究公司 (美國) 基板處理系統用台座

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD616390S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Quartz cover for manufacturing semiconductor wafers
USD654884S1 (en) * 2010-10-21 2012-02-28 Tokyo Electron Limited Top plate for reactor for manufacturing semiconductor
USD654883S1 (en) * 2010-10-21 2012-02-28 Tokyo Electron Limited Top plate for reactor for manufacturing semiconductor
JP1579504S (enrdf_load_stackoverflow) 2016-07-26 2017-06-19
USD797067S1 (en) * 2015-04-21 2017-09-12 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
JP1598442S (enrdf_load_stackoverflow) 2017-08-09 2018-02-26
USD813181S1 (en) * 2016-07-26 2018-03-20 Hitachi Kokusai Electric Inc. Cover of seal cap for reaction chamber of semiconductor
USD855027S1 (en) * 2018-01-22 2019-07-30 Kokusai Electric Corporation Cover of seal cap for reaction chamber of semiconductor

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD616390S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Quartz cover for manufacturing semiconductor wafers
USD654884S1 (en) * 2010-10-21 2012-02-28 Tokyo Electron Limited Top plate for reactor for manufacturing semiconductor
USD654883S1 (en) * 2010-10-21 2012-02-28 Tokyo Electron Limited Top plate for reactor for manufacturing semiconductor
USD797067S1 (en) * 2015-04-21 2017-09-12 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
JP1579504S (enrdf_load_stackoverflow) 2016-07-26 2017-06-19
USD813181S1 (en) * 2016-07-26 2018-03-20 Hitachi Kokusai Electric Inc. Cover of seal cap for reaction chamber of semiconductor
JP1598442S (enrdf_load_stackoverflow) 2017-08-09 2018-02-26
USD872037S1 (en) * 2017-08-09 2020-01-07 Kokusai Electric Corporation Cover of seal cap for reaction chamber for semiconductor manufacturing
USD855027S1 (en) * 2018-01-22 2019-07-30 Kokusai Electric Corporation Cover of seal cap for reaction chamber of semiconductor

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11887878B2 (en) 2019-06-28 2024-01-30 Applied Materials, Inc. Detachable biasable electrostatic chuck for high temperature applications
USD947914S1 (en) * 2020-11-23 2022-04-05 Applied Materials, Inc. Base plate for a processing chamber substrate support
USD960216S1 (en) * 2020-11-23 2022-08-09 Applied Materials, Inc. Base plate for a processing chamber substrate support
USD981972S1 (en) * 2021-03-22 2023-03-28 Kokusai Electric Corporation Adiabatic plate for substrate processing appratus
USD980814S1 (en) * 2021-05-11 2023-03-14 Asm Ip Holding B.V. Gas distributor for substrate processing apparatus
USD980813S1 (en) * 2021-05-11 2023-03-14 Asm Ip Holding B.V. Gas flow control plate for substrate processing apparatus
USD1071886S1 (en) * 2022-01-20 2025-04-22 Applied Materials, Inc. Substrate support for a substrate processing chamber

Also Published As

Publication number Publication date
JP1624334S (enrdf_load_stackoverflow) 2019-02-12
TWD201038S (zh) 2019-11-21

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