USD826185S1 - Ceiling heater for substrate processing apparatus - Google Patents

Ceiling heater for substrate processing apparatus Download PDF

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Publication number
USD826185S1
USD826185S1 US29/596,974 US201729596974F USD826185S US D826185 S1 USD826185 S1 US D826185S1 US 201729596974 F US201729596974 F US 201729596974F US D826185 S USD826185 S US D826185S
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US
United States
Prior art keywords
processing apparatus
substrate processing
ceiling heater
ceiling
heater
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Active
Application number
US29/596,974
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English (en)
Inventor
Tetsuya Kosugi
Takatomo Yamaguchi
Shuhei SAIDO
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
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Hitachi Kokusai Electric Inc
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Application filed by Hitachi Kokusai Electric Inc filed Critical Hitachi Kokusai Electric Inc
Assigned to HITACHI KOKUSAI ELECTRIC INC. reassignment HITACHI KOKUSAI ELECTRIC INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KOSUGI, TETSUYA, SAIDO, SHUHEI, YAMAGUCHI, TAKATOMO
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Publication of USD826185S1 publication Critical patent/USD826185S1/en
Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HITACHI KOKUSAI ELECTRIC INC.
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US29/596,974 2016-10-14 2017-03-13 Ceiling heater for substrate processing apparatus Active USD826185S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPD2016-22413F JP1581406S (enrdf_load_stackoverflow) 2016-10-14 2016-10-14
JP022413/2016 2016-10-14

Publications (1)

Publication Number Publication Date
USD826185S1 true USD826185S1 (en) 2018-08-21

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US29/596,974 Active USD826185S1 (en) 2016-10-14 2017-03-13 Ceiling heater for substrate processing apparatus

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US (1) USD826185S1 (enrdf_load_stackoverflow)
JP (1) JP1581406S (enrdf_load_stackoverflow)
TW (1) TWD187001S (enrdf_load_stackoverflow)

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD841607S1 (en) * 2017-02-14 2019-02-26 Riso Kagaku Corporation Wireless communication tag
USD887358S1 (en) * 2018-12-06 2020-06-16 Lofelt Gmbh Motor membrane
USD895587S1 (en) * 2019-10-22 2020-09-08 Avery Dennison Retail Information Services, Llc Antenna
USD913256S1 (en) * 2019-07-31 2021-03-16 Eryn Smith Antenna pattern for a semiconductive substrate carrier
USD918848S1 (en) * 2019-07-18 2021-05-11 Kokusai Electric Corporation Retainer of ceiling heater for semiconductor fabrication apparatus
USD921431S1 (en) 2019-04-01 2021-06-08 Veeco Instruments, Inc. Multi-filament heater assembly
USD922339S1 (en) * 2019-11-11 2021-06-15 Asia Vital Components Co., Ltd. Radiating fin
USD922340S1 (en) * 2019-11-11 2021-06-15 Asia Vita Components Co., Ltd. Radiating fin
USD922341S1 (en) * 2019-11-11 2021-06-15 Asia Vital Components Co., Ltd. Radiating fin
USD926716S1 (en) * 2019-07-31 2021-08-03 Eryn Smith Antenna pattern for a semiconductive substrate carrier
USD954691S1 (en) 2019-10-22 2022-06-14 Avery Dennison Retail Information Services, Llc Antenna
USD959393S1 (en) 2020-09-24 2022-08-02 Kokusai Electric Corporation Ceiling heater for substrate processing apparatus
USD962183S1 (en) * 2019-07-11 2022-08-30 Kokusai Electric Corporation Retainer plate of top heater for wafer processing furnace
USD962184S1 (en) * 2019-07-11 2022-08-30 Kokusai Electric Corporation Retainer plate of top heater for wafer processing furnace
USD980199S1 (en) * 2020-12-17 2023-03-07 Megabyte Limited Antenna for radio frequency tag reader
USD980177S1 (en) * 2020-09-24 2023-03-07 Kokusai Electric Corporation Ceiling heater for substrate processing apparatus
USD1006768S1 (en) * 2021-01-07 2023-12-05 Solaero Technologies Corp. Semiconductor wafer for mosaic solar cell fabrication
USD1021832S1 (en) * 2020-09-17 2024-04-09 Ebara Corporation Elastic membrane
USD1051530S1 (en) * 2023-03-29 2024-11-12 Irobot Corporation Drip tray for use with a mobile cleaning robot
USD1091033S1 (en) 2023-03-09 2025-08-26 Irobot Corporation Drip tray for use with a mobile cleaning robot
USD1094344S1 (en) * 2024-05-17 2025-09-23 Avery Dennison Retail Information Services Llc Antenna
USD1096704S1 (en) * 2024-06-25 2025-10-07 Avery Dennison Retail Information Services Llc Antenna
USD1096705S1 (en) * 2024-02-19 2025-10-07 Riso Kagaku Corporation Wireless communication tag

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030183614A1 (en) * 2002-03-26 2003-10-02 Hitachi Kokusai Electric Inc. Heat treatment apparatus and method for processing substrates
US6653603B2 (en) * 2000-11-30 2003-11-25 Ngk Insulators, Ltd. Heaters
US20040149719A1 (en) * 2002-12-20 2004-08-05 Kyocera Corporation Wafer heating apparatus
US20050072716A1 (en) * 2001-07-15 2005-04-07 Efrain Quiles Processing system
US20060130763A1 (en) * 2004-11-15 2006-06-22 Emerson David T Restricted radiated heating assembly for high temperature processing
US20070095289A1 (en) * 2003-06-23 2007-05-03 Tokyo Electron Limited Heat treatment apparatus
USD601521S1 (en) * 2006-09-28 2009-10-06 Tokyo Electron Limited Heater for manufacturing semiconductor
USD649126S1 (en) * 2008-10-20 2011-11-22 Ebara Corporation Vacuum contact pad
JP2013004891A (ja) * 2011-06-21 2013-01-07 Shibaura Mechatronics Corp ヒータユニット、ファンフィルタユニット及び基板処理装置
US20140021673A1 (en) * 2012-07-18 2014-01-23 Applied Materials, Inc. Pedestal with multi-zone temperature control and multiple purge capabilities
US9719629B2 (en) * 2014-04-08 2017-08-01 Plansee Se Supporting system for a heating element and heating system
USD797690S1 (en) * 2015-03-16 2017-09-19 Nuflare Technology, Inc. Heater for semiconductor manufacturing apparatus
USD798250S1 (en) * 2015-12-01 2017-09-26 Nuflare Technology, Inc. Heater

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6653603B2 (en) * 2000-11-30 2003-11-25 Ngk Insulators, Ltd. Heaters
US20050072716A1 (en) * 2001-07-15 2005-04-07 Efrain Quiles Processing system
US20030183614A1 (en) * 2002-03-26 2003-10-02 Hitachi Kokusai Electric Inc. Heat treatment apparatus and method for processing substrates
US20040149719A1 (en) * 2002-12-20 2004-08-05 Kyocera Corporation Wafer heating apparatus
US20070095289A1 (en) * 2003-06-23 2007-05-03 Tokyo Electron Limited Heat treatment apparatus
US20060130763A1 (en) * 2004-11-15 2006-06-22 Emerson David T Restricted radiated heating assembly for high temperature processing
USD601521S1 (en) * 2006-09-28 2009-10-06 Tokyo Electron Limited Heater for manufacturing semiconductor
USD649126S1 (en) * 2008-10-20 2011-11-22 Ebara Corporation Vacuum contact pad
JP2013004891A (ja) * 2011-06-21 2013-01-07 Shibaura Mechatronics Corp ヒータユニット、ファンフィルタユニット及び基板処理装置
US20140021673A1 (en) * 2012-07-18 2014-01-23 Applied Materials, Inc. Pedestal with multi-zone temperature control and multiple purge capabilities
US9719629B2 (en) * 2014-04-08 2017-08-01 Plansee Se Supporting system for a heating element and heating system
USD797690S1 (en) * 2015-03-16 2017-09-19 Nuflare Technology, Inc. Heater for semiconductor manufacturing apparatus
USD798250S1 (en) * 2015-12-01 2017-09-26 Nuflare Technology, Inc. Heater

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
EC21 Inc. <URL: https://diamondhrichard.en.ec21.com/Duplex_Winding_Infrared_Coil_Ceramic--5521314_8834245.html.> Visited Feb. 28, 2018. Duplex Winding Infrared Coil/ Ceramic Cooker/ Heating Plate/Radiant Element/Hob. *
Modello designs. <URL: https://www.modellocustomstencils.com/collections/medallion-stencils.> Visited Feb. 28, 2018. Medallion Stencils. *

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD841607S1 (en) * 2017-02-14 2019-02-26 Riso Kagaku Corporation Wireless communication tag
USD887358S1 (en) * 2018-12-06 2020-06-16 Lofelt Gmbh Motor membrane
USD921431S1 (en) 2019-04-01 2021-06-08 Veeco Instruments, Inc. Multi-filament heater assembly
USD962184S1 (en) * 2019-07-11 2022-08-30 Kokusai Electric Corporation Retainer plate of top heater for wafer processing furnace
USD962183S1 (en) * 2019-07-11 2022-08-30 Kokusai Electric Corporation Retainer plate of top heater for wafer processing furnace
USD918848S1 (en) * 2019-07-18 2021-05-11 Kokusai Electric Corporation Retainer of ceiling heater for semiconductor fabrication apparatus
USD926716S1 (en) * 2019-07-31 2021-08-03 Eryn Smith Antenna pattern for a semiconductive substrate carrier
USD913256S1 (en) * 2019-07-31 2021-03-16 Eryn Smith Antenna pattern for a semiconductive substrate carrier
USD954691S1 (en) 2019-10-22 2022-06-14 Avery Dennison Retail Information Services, Llc Antenna
USD895587S1 (en) * 2019-10-22 2020-09-08 Avery Dennison Retail Information Services, Llc Antenna
USD922341S1 (en) * 2019-11-11 2021-06-15 Asia Vital Components Co., Ltd. Radiating fin
USD922340S1 (en) * 2019-11-11 2021-06-15 Asia Vita Components Co., Ltd. Radiating fin
USD922339S1 (en) * 2019-11-11 2021-06-15 Asia Vital Components Co., Ltd. Radiating fin
USD1021832S1 (en) * 2020-09-17 2024-04-09 Ebara Corporation Elastic membrane
USD980177S1 (en) * 2020-09-24 2023-03-07 Kokusai Electric Corporation Ceiling heater for substrate processing apparatus
USD959393S1 (en) 2020-09-24 2022-08-02 Kokusai Electric Corporation Ceiling heater for substrate processing apparatus
USD980199S1 (en) * 2020-12-17 2023-03-07 Megabyte Limited Antenna for radio frequency tag reader
USD1006768S1 (en) * 2021-01-07 2023-12-05 Solaero Technologies Corp. Semiconductor wafer for mosaic solar cell fabrication
USD1091033S1 (en) 2023-03-09 2025-08-26 Irobot Corporation Drip tray for use with a mobile cleaning robot
USD1051530S1 (en) * 2023-03-29 2024-11-12 Irobot Corporation Drip tray for use with a mobile cleaning robot
USD1096705S1 (en) * 2024-02-19 2025-10-07 Riso Kagaku Corporation Wireless communication tag
USD1094344S1 (en) * 2024-05-17 2025-09-23 Avery Dennison Retail Information Services Llc Antenna
USD1096704S1 (en) * 2024-06-25 2025-10-07 Avery Dennison Retail Information Services Llc Antenna

Also Published As

Publication number Publication date
TWD187001S (zh) 2017-12-01
JP1581406S (enrdf_load_stackoverflow) 2017-07-18

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