USD574792S1 - Lower heat insulating cylinder for manufacturing semiconductor wafers - Google Patents

Lower heat insulating cylinder for manufacturing semiconductor wafers Download PDF

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Publication number
USD574792S1
USD574792S1 US29/272,820 US27282007F USD574792S US D574792 S1 USD574792 S1 US D574792S1 US 27282007 F US27282007 F US 27282007F US D574792 S USD574792 S US D574792S
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US
United States
Prior art keywords
heat insulating
semiconductor wafers
lower heat
manufacturing semiconductor
insulating cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/272,820
Inventor
Izumi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SAITO, IZUMI
Application granted granted Critical
Publication of USD574792S1 publication Critical patent/USD574792S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is a perspective view of the design for a lower heat insulating cylinder for manufacturing semiconductor wafers in accordance with the invention;
FIG. 2 is a front view thereof;
FIG. 3 is a left side view thereof;
FIG. 4 is a right side view thereof;
FIG. 5 is a rear view thereof;
FIG. 6 is a top view thereof;
FIG. 7 is a bottom view thereof;
FIG. 8 is another top view thereof which shows sectional line 99;
FIG. 9 is a sectional view thereof along line 99 of FIG. 8; and,
FIG. 10 shows a lower heat insulating cylinder for manufacturing semiconductor wafers in accordance with the invention in use wherein the broken line showing of the environment is for illustrative purpose only and forms no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a lower heat insulating cylinder for manufacturing semiconductor wafers, as shown and described.
US29/272,820 2006-08-23 2007-02-20 Lower heat insulating cylinder for manufacturing semiconductor wafers Expired - Lifetime USD574792S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006-022201 2006-08-23
JP2006022201 2006-08-23

Publications (1)

Publication Number Publication Date
USD574792S1 true USD574792S1 (en) 2008-08-12

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Family Applications (1)

Application Number Title Priority Date Filing Date
US29/272,820 Expired - Lifetime USD574792S1 (en) 2006-08-23 2007-02-20 Lower heat insulating cylinder for manufacturing semiconductor wafers

Country Status (2)

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US (1) USD574792S1 (en)
TW (1) TWD121888S1 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD601979S1 (en) * 2008-03-28 2009-10-13 Tokyo Electron Limited Pedestal base of a heat insulating cylinder for manufacturing semiconductor wafers
USD616395S1 (en) * 2009-03-11 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
USD616394S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
USD712852S1 (en) * 2012-03-20 2014-09-09 Veeco Instruments Inc. Spindle key
USD726133S1 (en) 2012-03-20 2015-04-07 Veeco Instruments Inc. Keyed spindle
US9816184B2 (en) 2012-03-20 2017-11-14 Veeco Instruments Inc. Keyed wafer carrier
USD1042372S1 (en) * 2022-09-26 2024-09-17 Poynting Antennas (Pty) Limited Heat sink

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5534074A (en) * 1995-05-17 1996-07-09 Heraeus Amersil, Inc. Vertical boat for holding semiconductor wafers
USD404375S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Heat retaining tube base for use in a semiconductor wafer head processing apparatus
USD405428S (en) * 1997-01-31 1999-02-09 Tokyo Electron Ltd. Heat retaining tube for use in a semiconductor wafer heat processing apparatus
US6033215A (en) * 1993-01-27 2000-03-07 Tokyo Electron Limited Heat treatment apparatus and heat treatment boat
US6171400B1 (en) * 1998-10-02 2001-01-09 Union Oil Company Of California Vertical semiconductor wafer carrier
US20020092815A1 (en) * 2001-01-18 2002-07-18 Hong-Guen Kim Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same
US20040069732A1 (en) * 2002-10-09 2004-04-15 Huang Chun Kai Supporting column and cassette using the same
US20050145584A1 (en) * 2004-01-06 2005-07-07 Buckley Richard F. Wafer boat with interference fit wafer supports

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6033215A (en) * 1993-01-27 2000-03-07 Tokyo Electron Limited Heat treatment apparatus and heat treatment boat
US5534074A (en) * 1995-05-17 1996-07-09 Heraeus Amersil, Inc. Vertical boat for holding semiconductor wafers
USD405428S (en) * 1997-01-31 1999-02-09 Tokyo Electron Ltd. Heat retaining tube for use in a semiconductor wafer heat processing apparatus
USD404375S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Heat retaining tube base for use in a semiconductor wafer head processing apparatus
US6171400B1 (en) * 1998-10-02 2001-01-09 Union Oil Company Of California Vertical semiconductor wafer carrier
US20020092815A1 (en) * 2001-01-18 2002-07-18 Hong-Guen Kim Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same
US20040069732A1 (en) * 2002-10-09 2004-04-15 Huang Chun Kai Supporting column and cassette using the same
US20050145584A1 (en) * 2004-01-06 2005-07-07 Buckley Richard F. Wafer boat with interference fit wafer supports

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Copending U.S. Appl. No. 29/272,821, filed Feb. 20, 2007, "Upper Heat Insulating Cylinder for Manufacturing Semiconductor Wafers".

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD601979S1 (en) * 2008-03-28 2009-10-13 Tokyo Electron Limited Pedestal base of a heat insulating cylinder for manufacturing semiconductor wafers
USD616394S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
USD616395S1 (en) * 2009-03-11 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
USD712852S1 (en) * 2012-03-20 2014-09-09 Veeco Instruments Inc. Spindle key
USD726133S1 (en) 2012-03-20 2015-04-07 Veeco Instruments Inc. Keyed spindle
USD744967S1 (en) * 2012-03-20 2015-12-08 Veeco Instruments Inc. Spindle key
USD748591S1 (en) 2012-03-20 2016-02-02 Veeco Instruments Inc. Keyed spindle
US9816184B2 (en) 2012-03-20 2017-11-14 Veeco Instruments Inc. Keyed wafer carrier
USD1042372S1 (en) * 2022-09-26 2024-09-17 Poynting Antennas (Pty) Limited Heat sink

Also Published As

Publication number Publication date
TWD121888S1 (en) 2008-03-11

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