USD574792S1 - Lower heat insulating cylinder for manufacturing semiconductor wafers - Google Patents
Lower heat insulating cylinder for manufacturing semiconductor wafers Download PDFInfo
- Publication number
- USD574792S1 USD574792S1 US29/272,820 US27282007F USD574792S US D574792 S1 USD574792 S1 US D574792S1 US 27282007 F US27282007 F US 27282007F US D574792 S USD574792 S US D574792S
- Authority
- US
- United States
- Prior art keywords
- heat insulating
- semiconductor wafers
- lower heat
- manufacturing semiconductor
- insulating cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 239000004065 semiconductor Substances 0.000 title claims description 4
- 235000012431 wafers Nutrition 0.000 title claims description 4
Images
Description
Claims (1)
- The ornamental design for a lower heat insulating cylinder for manufacturing semiconductor wafers, as shown and described.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006-022201 | 2006-08-23 | ||
| JP2006022201 | 2006-08-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| USD574792S1 true USD574792S1 (en) | 2008-08-12 |
Family
ID=39679078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US29/272,820 Expired - Lifetime USD574792S1 (en) | 2006-08-23 | 2007-02-20 | Lower heat insulating cylinder for manufacturing semiconductor wafers |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | USD574792S1 (en) |
| TW (1) | TWD121888S1 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD601979S1 (en) * | 2008-03-28 | 2009-10-13 | Tokyo Electron Limited | Pedestal base of a heat insulating cylinder for manufacturing semiconductor wafers |
| USD616395S1 (en) * | 2009-03-11 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
| USD616394S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
| USD712852S1 (en) * | 2012-03-20 | 2014-09-09 | Veeco Instruments Inc. | Spindle key |
| USD726133S1 (en) | 2012-03-20 | 2015-04-07 | Veeco Instruments Inc. | Keyed spindle |
| US9816184B2 (en) | 2012-03-20 | 2017-11-14 | Veeco Instruments Inc. | Keyed wafer carrier |
| USD1042372S1 (en) * | 2022-09-26 | 2024-09-17 | Poynting Antennas (Pty) Limited | Heat sink |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5534074A (en) * | 1995-05-17 | 1996-07-09 | Heraeus Amersil, Inc. | Vertical boat for holding semiconductor wafers |
| USD404375S (en) * | 1997-08-20 | 1999-01-19 | Tokyo Electron Limited | Heat retaining tube base for use in a semiconductor wafer head processing apparatus |
| USD405428S (en) * | 1997-01-31 | 1999-02-09 | Tokyo Electron Ltd. | Heat retaining tube for use in a semiconductor wafer heat processing apparatus |
| US6033215A (en) * | 1993-01-27 | 2000-03-07 | Tokyo Electron Limited | Heat treatment apparatus and heat treatment boat |
| US6171400B1 (en) * | 1998-10-02 | 2001-01-09 | Union Oil Company Of California | Vertical semiconductor wafer carrier |
| US20020092815A1 (en) * | 2001-01-18 | 2002-07-18 | Hong-Guen Kim | Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same |
| US20040069732A1 (en) * | 2002-10-09 | 2004-04-15 | Huang Chun Kai | Supporting column and cassette using the same |
| US20050145584A1 (en) * | 2004-01-06 | 2005-07-07 | Buckley Richard F. | Wafer boat with interference fit wafer supports |
-
2007
- 2007-02-15 TW TW096301059F patent/TWD121888S1/en unknown
- 2007-02-20 US US29/272,820 patent/USD574792S1/en not_active Expired - Lifetime
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6033215A (en) * | 1993-01-27 | 2000-03-07 | Tokyo Electron Limited | Heat treatment apparatus and heat treatment boat |
| US5534074A (en) * | 1995-05-17 | 1996-07-09 | Heraeus Amersil, Inc. | Vertical boat for holding semiconductor wafers |
| USD405428S (en) * | 1997-01-31 | 1999-02-09 | Tokyo Electron Ltd. | Heat retaining tube for use in a semiconductor wafer heat processing apparatus |
| USD404375S (en) * | 1997-08-20 | 1999-01-19 | Tokyo Electron Limited | Heat retaining tube base for use in a semiconductor wafer head processing apparatus |
| US6171400B1 (en) * | 1998-10-02 | 2001-01-09 | Union Oil Company Of California | Vertical semiconductor wafer carrier |
| US20020092815A1 (en) * | 2001-01-18 | 2002-07-18 | Hong-Guen Kim | Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same |
| US20040069732A1 (en) * | 2002-10-09 | 2004-04-15 | Huang Chun Kai | Supporting column and cassette using the same |
| US20050145584A1 (en) * | 2004-01-06 | 2005-07-07 | Buckley Richard F. | Wafer boat with interference fit wafer supports |
Non-Patent Citations (1)
| Title |
|---|
| Copending U.S. Appl. No. 29/272,821, filed Feb. 20, 2007, "Upper Heat Insulating Cylinder for Manufacturing Semiconductor Wafers". |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD601979S1 (en) * | 2008-03-28 | 2009-10-13 | Tokyo Electron Limited | Pedestal base of a heat insulating cylinder for manufacturing semiconductor wafers |
| USD616394S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
| USD616395S1 (en) * | 2009-03-11 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
| USD712852S1 (en) * | 2012-03-20 | 2014-09-09 | Veeco Instruments Inc. | Spindle key |
| USD726133S1 (en) | 2012-03-20 | 2015-04-07 | Veeco Instruments Inc. | Keyed spindle |
| USD744967S1 (en) * | 2012-03-20 | 2015-12-08 | Veeco Instruments Inc. | Spindle key |
| USD748591S1 (en) | 2012-03-20 | 2016-02-02 | Veeco Instruments Inc. | Keyed spindle |
| US9816184B2 (en) | 2012-03-20 | 2017-11-14 | Veeco Instruments Inc. | Keyed wafer carrier |
| USD1042372S1 (en) * | 2022-09-26 | 2024-09-17 | Poynting Antennas (Pty) Limited | Heat sink |
Also Published As
| Publication number | Publication date |
|---|---|
| TWD121888S1 (en) | 2008-03-11 |
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