USD600220S1 - Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers - Google Patents

Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers Download PDF

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Publication number
USD600220S1
USD600220S1 US29/309,698 US30969808F USD600220S US D600220 S1 USD600220 S1 US D600220S1 US 30969808 F US30969808 F US 30969808F US D600220 S USD600220 S US D600220S
Authority
US
United States
Prior art keywords
semiconductor wafers
manufacturing semiconductor
insulating cylinder
radiation fin
heat insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/309,698
Inventor
Izumi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
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Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SATO, IZUMI
Application granted granted Critical
Publication of USD600220S1 publication Critical patent/USD600220S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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FIG. 1 is a perspective view;
FIG. 2 is a front view;
FIG. 3 is a rear view;
FIG. 4 is a right side view the left side being a mirror image thereof;
FIG. 5 is a plan view;
FIG. 6 is a bottom view; and,
FIG. 7 is a sectional view thereof along line 77 of FIG. 2.

Claims (1)

  1. The ornamental design for a heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers, as shown and described.
US29/309,698 2008-03-28 2008-09-26 Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers Expired - Lifetime USD600220S1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008007856 2008-03-28

Publications (1)

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USD600220S1 true USD600220S1 (en) 2009-09-15

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US29/309,698 Expired - Lifetime USD600220S1 (en) 2008-03-28 2008-09-26 Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD798250S1 (en) * 2015-12-01 2017-09-26 Nuflare Technology, Inc. Heater
USD918848S1 (en) * 2019-07-18 2021-05-11 Kokusai Electric Corporation Retainer of ceiling heater for semiconductor fabrication apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD798250S1 (en) * 2015-12-01 2017-09-26 Nuflare Technology, Inc. Heater
USD918848S1 (en) * 2019-07-18 2021-05-11 Kokusai Electric Corporation Retainer of ceiling heater for semiconductor fabrication apparatus

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