USD1022933S1 - Wafer support of semiconductor manufacturing apparatus - Google Patents

Wafer support of semiconductor manufacturing apparatus Download PDF

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Publication number
USD1022933S1
USD1022933S1 US29/828,155 US202229828155F USD1022933S US D1022933 S1 USD1022933 S1 US D1022933S1 US 202229828155 F US202229828155 F US 202229828155F US D1022933 S USD1022933 S US D1022933S
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US
United States
Prior art keywords
manufacturing apparatus
semiconductor manufacturing
wafer support
view
wafer
Prior art date
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US29/828,155
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English (en)
Inventor
Yusaku OKAJIMA
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
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Kokusai Electric Corp
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Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: OKAJIMA, YUSAKU
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US29/828,155 2021-08-27 2022-02-24 Wafer support of semiconductor manufacturing apparatus Active USD1022933S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-018468D 2021-08-27
JP2021018468F JP1706322S (cs) 2021-08-27 2021-08-27

Publications (1)

Publication Number Publication Date
USD1022933S1 true USD1022933S1 (en) 2024-04-16

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ID=80218929

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US29/828,155 Active USD1022933S1 (en) 2021-08-27 2022-02-24 Wafer support of semiconductor manufacturing apparatus

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US (1) USD1022933S1 (cs)
JP (1) JP1706322S (cs)
TW (1) TWD230199S (cs)

Citations (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4355974A (en) * 1980-11-24 1982-10-26 Asq Boats, Inc. Wafer boat
USD291413S (en) * 1984-07-30 1987-08-18 Tokyo Denshi Kagaku Co., Ltd. Wafer holding frame
US4993559A (en) * 1989-07-31 1991-02-19 Motorola, Inc. Wafer carrier
USD361752S (en) * 1993-09-17 1995-08-29 Tokyo Electron Kasbushiki Kaisha Wafer boat or rack for holding semiconductor wafers
USD366868S (en) * 1993-09-29 1996-02-06 Tokyo Electron Kabushiki Kaisha Wafer boat or rack
USD378675S (en) * 1995-05-30 1997-04-01 Tokyo Electron Limited Wafer boat
USD378823S (en) * 1995-05-30 1997-04-15 Tokyo Electron Limited Wafer boat
USD404015S (en) * 1997-01-31 1999-01-12 Tokyo Electron Ltd. Wafer boat for use in a semiconductor wafer heat processing apparatus
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
US6065615A (en) * 1996-02-28 2000-05-23 Asahi Glass Company, Ltd. Vertical wafer boat
US6095806A (en) * 1998-06-24 2000-08-01 Tokyo Electron Limited Semiconductor wafer boat and vertical heat treating system
US6171400B1 (en) * 1998-10-02 2001-01-09 Union Oil Company Of California Vertical semiconductor wafer carrier
US20020092815A1 (en) * 2001-01-18 2002-07-18 Hong-Guen Kim Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same
USD570309S1 (en) * 2006-10-25 2008-06-03 Tokyo Electron Limited Wafer boat
USD570308S1 (en) * 2006-05-01 2008-06-03 Tokyo Electron Limited Wafer boat
USD580894S1 (en) * 2006-05-01 2008-11-18 Tokyo Electron Limited Wafer boat
USD616394S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
USD616395S1 (en) * 2009-03-11 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
USD791721S1 (en) * 2014-11-20 2017-07-11 Tokyo Electron Limited Wafer boat
USD893438S1 (en) * 2017-08-21 2020-08-18 Tokyo Electron Limited Wafer boat
USD926715S1 (en) * 2019-07-29 2021-08-03 Epicrew Corporation Support for a wafer for fabricating a semiconductor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD965044S1 (en) 2019-08-19 2022-09-27 Asm Ip Holding B.V. Susceptor shaft

Patent Citations (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4355974A (en) * 1980-11-24 1982-10-26 Asq Boats, Inc. Wafer boat
US4355974B1 (cs) * 1980-11-24 1988-10-18
USD291413S (en) * 1984-07-30 1987-08-18 Tokyo Denshi Kagaku Co., Ltd. Wafer holding frame
US4993559A (en) * 1989-07-31 1991-02-19 Motorola, Inc. Wafer carrier
USD361752S (en) * 1993-09-17 1995-08-29 Tokyo Electron Kasbushiki Kaisha Wafer boat or rack for holding semiconductor wafers
USD366868S (en) * 1993-09-29 1996-02-06 Tokyo Electron Kabushiki Kaisha Wafer boat or rack
USD378675S (en) * 1995-05-30 1997-04-01 Tokyo Electron Limited Wafer boat
USD378823S (en) * 1995-05-30 1997-04-15 Tokyo Electron Limited Wafer boat
US6065615A (en) * 1996-02-28 2000-05-23 Asahi Glass Company, Ltd. Vertical wafer boat
USD404015S (en) * 1997-01-31 1999-01-12 Tokyo Electron Ltd. Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
US6095806A (en) * 1998-06-24 2000-08-01 Tokyo Electron Limited Semiconductor wafer boat and vertical heat treating system
US6171400B1 (en) * 1998-10-02 2001-01-09 Union Oil Company Of California Vertical semiconductor wafer carrier
US20020092815A1 (en) * 2001-01-18 2002-07-18 Hong-Guen Kim Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same
USD570308S1 (en) * 2006-05-01 2008-06-03 Tokyo Electron Limited Wafer boat
USD580894S1 (en) * 2006-05-01 2008-11-18 Tokyo Electron Limited Wafer boat
USD570309S1 (en) * 2006-10-25 2008-06-03 Tokyo Electron Limited Wafer boat
USD616394S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
USD616395S1 (en) * 2009-03-11 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
USD791721S1 (en) * 2014-11-20 2017-07-11 Tokyo Electron Limited Wafer boat
USD893438S1 (en) * 2017-08-21 2020-08-18 Tokyo Electron Limited Wafer boat
USD926715S1 (en) * 2019-07-29 2021-08-03 Epicrew Corporation Support for a wafer for fabricating a semiconductor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Creative Commons Attribution 3.0, Mechanical structure diagram of the mechanism for storing wafers 1. Chain 2. Limit sensor 3. Guide col. 4. Pressure sensor 5. Pallet 6. Support pole, https://www.researchgate.net/figure/Mechanical-structure-diagram-of-the-mechanism-for-storing-wafers-1-Chain-Jan.-2020. (Year: 2020). *

Also Published As

Publication number Publication date
JP1706322S (cs) 2022-01-31
TWD230199S (zh) 2024-03-01

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