US9779915B2 - Plasma generating device comprising a rotating body - Google Patents

Plasma generating device comprising a rotating body Download PDF

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US9779915B2
US9779915B2 US15/103,412 US201315103412A US9779915B2 US 9779915 B2 US9779915 B2 US 9779915B2 US 201315103412 A US201315103412 A US 201315103412A US 9779915 B2 US9779915 B2 US 9779915B2
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plasma
plasma generating
section
generating device
discharge head
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US20160314938A1 (en
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Jae Beom Park
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APPLIED PLASMA Inc Co Ltd
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APPLIED PLASMA Inc Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H01J37/32449—Gas control, e.g. control of the gas flow
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32541—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/024—Moving components not otherwise provided for
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3463—Oblique nozzles
    • H05H2001/3463—

Definitions

  • the present invention relates to a plasma generating device and, more particularly, to a plasma generating device which has a compact and improved structure, unlike the conventional devices, without requiring a complex structure such as a carbon brush, etc., which makes it possible to prevent the generation of dust and foreign material from the carbon brush, avoid frequent maintenance, and significantly improve the durability of the device, and thus can be widely applied to various industrial processes that require plasma.
  • Plasma refers to the state of a gas ionized into negatively charged electrons and positively charged ions at an ultra-high temperature. In this state, the charge separation is very high, the numbers of negative and positive charges are equal, and thus the overall charge of the plasma is neutral.
  • the states of matter are divided into solid, liquid, and gas states. Since the state of plasma is different from the solid, liquid, and gas states, the plasma is often called the fourth state of matter.
  • the solid When energy is applied to a solid, the solid becomes a liquid and then a gas, and when high energy applied again to the gas state, the gas is separated into electrons and atomic nuclei at a temperature of several tens of thousands of degrees Celsius.
  • the plasma is the most common state of matter in the universe. It has been assumed that 99% of matter in the universe is in the plasma state.
  • Lightning, aurora in the arctic, ionosphere in the atmosphere, etc. are in the plasma state. Outside the atmosphere, the plasma is also present in the Van Allen belt where the ions are trapped in the Earth's magnetic field and also in the solar wind coming from the sun. The interior of a star or the gas around the star is also in the plasma state. Hydrogen gas present in the space between stars is also in the plasma state.
  • Plasmas are widely used, including plasma for nuclear fusion at a temperature of several hundreds of millions of degrees, low-temperature glow plasma or arc plasma used in semiconductor processes, synthesis of new materials, etc.
  • the low-temperature plasma is most widely studied and applied in industry.
  • the reactivity is maximized in plasma, and thus the ionization and recombination of substances become active. Therefore, the use of plasma makes it possible to create a new substance, which is difficult to accomplish with the conventional synthesis or processing of substances, and replace the processes that cause pollution or that are difficult to perform.
  • the plasma is used to remove a photoresist by ashing, which is used to pattern a metal material or semiconductor layer, to etch a thin film made of an organic material or semiconductor material, or to remove the organic material, etc. from the surface by cleaning.
  • the plasma is widely used throughout the industry, and thus a variety of plasma generating devices for artificially generating plasma has also been commercialized.
  • An object of the present invention is to provide a plasma generating device which has a compact and improved structure, unlike the conventional devices, without requiring a complex structure such as a carbon brush, etc., which makes it possible to prevent the generation of dust and foreign material from the carbon brush, avoid frequent maintenance, and significantly improve the durability of the device, and thus can be widely applied to various industrial processes that require plasma.
  • a plasma generating device comprising: a plasma generating module which generates plasma; and a rotating body which is provided with at least one plasma nozzle, through which the plasma generated by the plasma generating module is blown to the outside, and is provided separately from the plasma generating module to be rotatably disposed on the outside of the plasma generating module.
  • the plasma generating module may comprise a high-voltage electrode which is disposed in the central area; a counter electrode which is disposed around the high-voltage electrode and charged with electric power applied to the high-voltage electrode to generate a high-voltage arc; and a gas inlet which is provided between the high-voltage electrode and the counter electrode and through which compressed air or gas is injected into a discharge head.
  • the plasma generating module may further comprise: at least one high-voltage insulator which is provided between the high-voltage electrode and the counter electrode; and a gas distributor which comprises a plurality of gas distribution holes through which the compressed air or gas is distributed.
  • the high-voltage insulator may comprise: a first high-voltage insulator which is disposed adjacent to the gas inlet; and a second high-voltage insulator which is disposed radially on the outside of the first high-voltage insulator in the circumferential direction of the first high-voltage insulator.
  • the counter electrode may comprise: a first counter electrode having a cylindrical shape; and a second counter electrode having a funnel shape and detachably connected to the first counter electrode.
  • the rotating body may comprise: a rotor which is rotatably disposed on the outside of the plasma generating module; and a discharge head which is provided with the plasma nozzle, is detachably connected to an end of the rotor, and has a width gradually increasing to the end.
  • the rotor may comprise: a first rotor which is rotatably disposed radially on the outside of the first counter electrode with a bearing interposed therebetween; and a second rotor of which one end is detachably connected to the first rotor and the other end is detachably connected to the discharge head.
  • a lip seal having excellent slip properties to prevent damage to the bearing may be further provided on the periphery of the bearing.
  • the second rotor may comprise: a cylindrical enlarged-diameter connection section which is screw-connected to the first rotor; a first inclined section which is formed to be inclined at an end of the cylindrical enlarged-diameter connection section; a stepped section which forms a step height with the cylindrical enlarged-diameter connection section radially on the inside of the cylindrical enlarged-diameter connection section and has a diameter smaller than that of the cylindrical enlarged-diameter connection section; a second inclined section which is formed to be inclined at an end of the stepped section; and a cylindrical reduced-diameter connection section which is detachably connected to the discharge head at the end.
  • the inclination of the first inclined section may be greater than that of the second inclined section and a plurality of grooves may be formed on the outer wall of the cylindrical reduced-diameter connection section.
  • a bearing flange which is bent inward to prevent separation of the bearing may be formed on the end of the first rotor.
  • the plasma nozzle may comprise: a first inclined guide section which guides the plasma in an inclined direction in the discharge head; and a second inclined guide section which has an inclination different from that of the first inclined guide section and forms the plasma nozzle in combination with the first inclined guide section.
  • the plasma nozzle may further comprise an end dummy inclined guide section which is formed to be inclined at an angle different from that of any of the first and second inclined guide sections in the corresponding inclined guide sections so that the plasma can be guided to an inclined end surface of the discharge head or to a lower surface of the discharge head.
  • a plurality of plasma nozzles may be disposed on both the inclined end surface of the discharge head and the lower surface of the discharge head.
  • the plasma nozzles may be intensively disposed in the circumferential direction in some areas of both the inclined end surface of the discharge head and the lower surface of the discharge head.
  • the gas distribution hole may comprise: a reduced-diameter nozzle section whose diameter is gradually reduced toward the plasma nozzle; a cylindrical nozzle section which is connected to the reduced-diameter nozzle section in the area of a minimum diameter of the reduced-diameter nozzle section; and an enlarged-diameter nozzle section whose diameter is gradually enlarged from the cylindrical nozzle section to the plasma nozzle.
  • the plasma generating device of the present invention has a compact and improved structure, unlike the conventional devices, without requiring a complex structure such as a carbon brush, etc., which makes it possible to prevent the generation of dust and foreign material from the carbon brush, avoid frequent maintenance, and significantly improve the durability of the device, and thus can be widely applied to various industrial processes that require plasma.
  • FIG. 1 is a diagram showing the configuration of a plasma generating device in accordance with an embodiment of the present invention.
  • FIG. 2 is a cross-sectional structural view of FIG. 1 .
  • FIG. 3 is a partial exploded view of FIG. 2 .
  • FIG. 4 is a partial exploded view of a plasma generating module.
  • FIG. 5 is an enlarged view of a discharge head shown in FIG. 2 .
  • FIG. 6 is a cross-sectional structural view of FIG. 1 from a different angle.
  • FIG. 7 is an enlarged view of a discharge head shown in FIG. 6 .
  • FIG. 8 is a plan view of the discharge head.
  • FIG. 9 is a cross-sectional structural view of a plasma generating device in accordance with another embodiment of the present invention.
  • FIG. 10 is an enlarged view of a gas distribution hole shown in FIG. 9 .
  • the exemplary embodiment may be changed in various ways and have various forms, and thus the scope of the present invention should be understood to include equivalents that can realize the technical spirit of the present invention.
  • the objects or effects disclosed in the present invention are not intended to be entirely or exclusively included in a specific embodiment, and thus the scope of the present invention should not be interpreted to be limited to the specific embodiment.
  • FIG. 1 is a diagram showing the configuration of a plasma generating device in accordance with an embodiment of the present invention
  • FIG. 2 is a cross-sectional structural view of FIG. 1
  • FIG. 3 is a partial exploded view of FIG. 2
  • FIG. 4 is a partial exploded view of a plasma generating module
  • FIG. 5 is an enlarged view of a discharge head shown in FIG. 2
  • FIG. 6 is a cross-sectional structural view of FIG. 1 from a different angle
  • FIG. 7 is an enlarged view of discharge head shown in FIG. 6
  • FIG. 8 is a plan view of the discharge head.
  • a plasma generating device 100 in accordance with the present embodiment has a compact and improved structure, unlike the conventional devices, without requiring a complex structure such as a carbon brush (not shown), etc., which makes it possible to prevent the generation of dust and foreign material from the carbon brush, prevent damage to a ground bearing, etc., and significantly improve the durability of the device, and thus can be widely applied to various industrial processes that require plasma.
  • the plasma generating device 100 may comprise a plasma generating module 110 and a rotating body 170 .
  • the plasma generating module 110 is an assembly in the form of a module that generates plasma.
  • the plasma generating module 110 in accordance with the present embodiment generates plasma by itself
  • the plasma generating module 110 may comprise a high-voltage electrode 120 , counter electrodes 131 and 132 , a gas inlet 140 , high-voltage insulators 151 and 152 , and a gas distributor 160 .
  • the high-voltage electrode 120 is a rod-shaped electrode disposed in the central area.
  • the high voltage is applied to the high-voltage electrode 120 in the center through a cable C.
  • the counter electrodes 131 and 132 are disposed around the high-voltage electrode 120 .
  • the counter electrodes 131 and 132 are charged with electric power to generate a high-voltage arc.
  • the counter electrodes 131 and 132 may be formed as a single body. However, in the present embodiment, the counter electrodes 131 and 132 are formed as separate bodies for the purpose of maintenance. That is, in the present embodiment, the counter electrodes 131 and 132 comprise a first counter electrode 131 having a cylindrical shape and a second counter electrode 132 having a funnel shape and detachably connected to the first counter electrode 131 .
  • the gas inlet 140 is provided between the high-voltage electrode 120 and the counter electrodes 131 and 132 and is a portion through which compressed air or gas is injected into a discharge head 190 .
  • the compressed air may be common compressed air, and the gas may be plasma gas.
  • the high-voltage insulators 151 and 152 are provided between the high-voltage electrode 120 and the counter electrodes 131 and 132 and provide insulation from the outside.
  • the high-voltage insulators 151 and 152 may also be formed as a single body. However, in the present embodiment, the high-voltage insulators 151 and 152 are formed as separate bodies for the purpose of maintenance.
  • the high-voltage insulators 151 and 152 comprise a first high-voltage insulator 151 disposed adjacent to the gas inlet 140 and a second high-voltage insulator 152 disposed radially on the outside of the first high-voltage insulator 151 in the circumferential direction of the first high-voltage insulator 151 .
  • the gas distributor 160 provides a space where the compressed air or gas injected through the gas inlet 140 is distributed.
  • the gas distributor 160 comprises a plurality of gas distribution holes 161 .
  • the plurality of gas distribution holes 161 may be arranged at equiangular intervals in the circumferential direction of the gas distributor 160 .
  • the rotating body 170 is provided with a plasma nozzle 191 , through which the plasma generated by the plasma generating module 110 is blown to the outside, and is provided separately from the plasma generating module 110 to be rotatably disposed on the outside of the plasma generating module 110 .
  • the plasma can be generated in a large area as shown in FIG. 1 .
  • the plasma can be injected vertically, unlike FIG. 1 , and thus the scope of the present invention is not limited to the drawings.
  • the rotating body 170 comprises rotors 181 and 182 which are rotatably disposed on the outside of the plasma generating module 110 and a discharge head 190 which is provided with the plasma nozzle 191 , is detachably connected to an end of the second rotor 182 , and has a width gradually increasing to the end.
  • the rotors 181 and 182 may also be formed as a single body. However, in the present embodiment, the rotors 181 and 182 are formed as separate bodies for the purpose of maintenance
  • the rotors 181 and 182 may comprise a first rotor 181 which is rotatably disposed radially on the outside of the first counter electrode 131 with a bearing B interposed therebetween and a second rotor 182 of which one end is detachably connected to the first rotor 181 and the other end is detachably connected to the discharge head 190 .
  • the first rotor 181 has a substantially cylindrical shape.
  • a plurality of grooves 181 a are formed on the outer wall of the first rotor 181 , and a bearing flange 181 b which is bent inward to prevent separation of the bearing B is formed on the end of the first rotor 181 .
  • a lip seal 182 g having excellent slip properties to prevent damage to the bearing B is further provided on the periphery of the bearing B inside the first rotor 181 .
  • the lip seal 182 g may be made of polymers of fluorinated ethylene (PTFE), but the scope of the present invention is not limited to the material.
  • the plasma generating device 100 has a compact and improved structure, unlike the conventional devices, without requiring a complex structure such as a carbon brush, etc. used for ground, makes it possible to prevent the generation of dust and foreign material from the carbon brush and prevent the contamination of products during plasma surface treatment.
  • the lip seal 182 g having excellent slip properties, it is possible to prevent damage to the bearing B used for ground and significantly improve the sealing of the gas that generates plasma, thereby improving the durability of the device while maintaining the stability of plasma. Therefore, it is possible to avoid frequent maintenance and significantly improve the durability of the device, and thus the plasma generating device can be widely applied to various industrial processes that require plasma.
  • the second rotor 182 has the following structural characteristics.
  • the second rotor 182 may comprise a cylindrical enlarged-diameter connection section 182 a which is screw-connected to the first rotor 181 , a first inclined section 182 b which is formed to be inclined at an end of the cylindrical enlarged-diameter connection section 182 a , a stepped section 182 c which forms a step height with the cylindrical enlarged-diameter connection section 182 a radially on the inside of the cylindrical enlarged-diameter connection section 182 a and has a diameter smaller than that of the cylindrical enlarged-diameter connection section 182 a , a second inclined section 182 d which is formed to be inclined at an end of the stepped section 182 c , and a cylindrical reduced-diameter connection section 182 e which is detachably connected to the discharge head 190 at the end.
  • the second rotor 182 can have the above structural characteristics.
  • the cylindrical enlarged-diameter connection section 182 a , the first inclined section 182 b , the stepped section 182 c , the second inclined section 182 d , and the cylindrical reduced-diameter connection section 182 e may be integrally formed of a single material.
  • the inclination of the first inclined section 182 b may be greater than that of the second inclined section 182 d.
  • a plurality of grooves 182 f may be formed on the outer wall of the cylindrical reduced-diameter connection section 182 e.
  • the discharge head 190 is provided with the above-described plasma nozzle 191 , is detachably connected to an end of the second rotor 182 , and has a width gradually increasing to the end.
  • the plasma nozzle 191 comprises a first inclined guide section 191 a which guides the plasma in an inclined direction in the discharge head 190 and a second inclined guide section 191 b which has an inclination different from that of the first inclined guide section 191 a and forms the plasma nozzle 191 in combination with the first inclined guide section 191 a.
  • the plasma nozzle 191 further comprises a first or second end dummy inclined guide section 191 c or 191 d which is formed to be inclined at an angle different from that of any of the first and second inclined guide sections 191 a and 191 b in the corresponding inclined guide sections 191 a or 191 b so that the plasma can be guided to an inclined end surface 190 a of the discharge head 190 or to a lower surface 190 b of the discharge head 190 .
  • the first end dummy inclined guide section 191 c is provided on the first inclined guide section 191 a so that the plasma can be guided to the inclined end surface 190 a of the discharge head 190 .
  • the second end dummy inclined guide section 191 d is provided on the second inclined guide section 191 b so that the plasma can be guided to the lower surface 190 b of the discharge head 190 .
  • a plurality of plasma nozzles 191 may be disposed on both the inclined end surface 190 a of the discharge head 190 and the lower surface 190 b of the discharge head 190 .
  • the plasma nozzles 191 are intensively disposed in the circumferential direction in some areas of both the inclined end surface 190 a of the discharge head 190 and the lower surface 190 b of the discharge head 190 . With these structural characteristics, the efficiency of plasma generation can be enhanced.
  • the high-voltage electrode 120 designed with a round shape is connected to a secondary coil of a high-voltage transformer for that purpose.
  • the electric arc is generated between the high-voltage electrode 120 and the counter electrodes 131 and 132 , and the air (or a specific gas) is in the plasma state by the arc generated.
  • the plasma generated through the plasma nozzle 191 of the discharge head 190 can be blown to the outside by injecting the compressed air or gas, and the surface can be modified by the plasma.
  • Continuous arc generates ions having high energy in the plasma field.
  • This energy by the ions is applied to the polymer surface, reactive active groups are formed on the surface. Therefore, it is the necessary condition for cross-linking between the polymer surface and ink, coating agents, adhesives, etc.
  • the arc has a conical shape such as a flame coming from a torch as shown in FIG. 1 .
  • the plasma generating device 100 has a compact and improved structure, unlike the conventional devices, without requiring a complex structure such as a carbon brush, etc., which makes it possible to prevent the generation of dust and foreign material from the carbon brush, prevent damage to the bearing B., avoid frequent maintenance, and significantly improve the durability of the device, and thus can be widely applied to various industrial processes that require plasma.
  • the plasma generating device 100 of the present embodiment can provide strong high-voltage power, which ensure long-time reliability, can be operated structurally in a simple manner, and can be protected by its circuit.
  • FIG. 9 is a cross-sectional structural view of a plasma generating device in accordance with another embodiment of the present invention
  • FIG. 10 is an enlarged view of a gas distribution hole shown in FIG. 9 .
  • a plasma generating device 200 of the present embodiment may also comprise a plasma generating module 210 and the rotating body 170 .
  • the plasma generating module 210 may also comprise the high-voltage electrode 120 , the counter electrodes 131 and 132 , the gas inlet 140 , the high-voltage insulators 151 and 152 , and the gas distributor 160 .
  • the gas distribution hole 261 provided in the gas distributor 260 may have a structure different from the above-described gas distribution hole 161 .
  • the gas distribution hole 261 comprises a reduced-diameter nozzle section 261 a whose diameter is gradually reduced toward the plasma nozzle 191 , a cylindrical nozzle section 261 b which is connected to the reduced-diameter nozzle section 261 a in the area of a minimum diameter of the reduced-diameter nozzle section 261 a , and an enlarged-diameter nozzle section 261 c whose diameter is gradually enlarged from the cylindrical nozzle section 261 b to the plasma nozzle 191 .
  • the reduced-diameter nozzle section 261 a prevents the generation of a vortex of gas flowing toward the reduced-diameter nozzle section 261 a such that the gas flows uniformly and stably.
  • the cylindrical nozzle section 261 b reduces the pressure of the gas introduced from the reduced-diameter nozzle section 261 a to increase the flow rate. Moreover, the introduced gas can be injected from the enlarged-diameter nozzle section 261 c at a desired flow rate by adjusting the thickness and length of the cylindrical nozzle section 261 b.
  • the enlarged-diameter nozzle section 261 c allows the gas to be more easily injected into the entire area of the discharge head 190 .
  • the flow rate of the gas passing through the reduced-diameter nozzle section 261 a , the cylindrical nozzle section 261 b , and the enlarged-diameter nozzle section 261 c is increased and becomes uniform, which contributes to an increase in the efficiency of plasma generation.
  • the plasma generating device 200 has a compact and improved structure, unlike the conventional devices, without requiring a complex structure such as a carbon brush, etc., which makes it possible to prevent damage to the bearing B, avoid frequent maintenance, and significantly improve the durability of the device, and thus can be widely applied to various industrial processes that require plasma.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
US15/103,412 2013-12-11 2013-12-11 Plasma generating device comprising a rotating body Active US9779915B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
PCT/KR2013/011461 WO2015088069A1 (fr) 2013-12-11 2013-12-11 Dispositif générateur de plasma
KR10-2013-0153671 2013-12-11
KR20130153671A KR101498392B1 (ko) 2013-12-11 2013-12-11 플라즈마 발생장치

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US20160314938A1 US20160314938A1 (en) 2016-10-27
US9779915B2 true US9779915B2 (en) 2017-10-03

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US (1) US9779915B2 (fr)
EP (1) EP3082384B1 (fr)
JP (1) JP6323842B2 (fr)
KR (1) KR101498392B1 (fr)
CN (1) CN105830540B (fr)
RU (1) RU2649314C1 (fr)
WO (1) WO2015088069A1 (fr)

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US20160314938A1 (en) 2016-10-27
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