US9341761B2 - Switchable laser and fiber based lamphouse for optimal power output in different wavelength bands and pixel sizes - Google Patents

Switchable laser and fiber based lamphouse for optimal power output in different wavelength bands and pixel sizes Download PDF

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Publication number
US9341761B2
US9341761B2 US14/301,781 US201414301781A US9341761B2 US 9341761 B2 US9341761 B2 US 9341761B2 US 201414301781 A US201414301781 A US 201414301781A US 9341761 B2 US9341761 B2 US 9341761B2
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fiber
input
illumination system
size
lamphouse
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US20150268400A1 (en
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Anant Chimmalgi
Rahul Yadav
Joshua Wittenberg
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KLA Corp
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KLA Tencor Corp
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Assigned to KLA-TENCOR CORPORATION reassignment KLA-TENCOR CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CHIMMALGI, Anant, WITTENBERG, Joshua, YADAV, RAHUL
Priority to KR1020167028497A priority patent/KR102166400B1/ko
Priority to PCT/US2015/021070 priority patent/WO2015142926A1/en
Priority to TW104108664A priority patent/TWI631878B/zh
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0005—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being of the fibre type
    • G02B6/0006—Coupling light into the fibre
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0005—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being of the fibre type
    • G02B6/0008—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being of the fibre type the light being emitted at the end of the fibre

Definitions

  • the disclosure generally relates to the field of inspection tools, particularly to inspection tools utilizing laser sustained plasma light sources.
  • Laser sustained plasma light sources can be utilized for various applications. For instance, certain inspection tools may use laser sustained plasma light sources for product inspection. In such tools, light from a multi-kilowatt diode laser is used to sustain plasma usually in a conventional xenon or mercury-xenon arc lamp. Various other types of media may also be utilized to sustain the plasma.
  • the present disclosure is directed to a method for controlling a fiber based illumination system.
  • the method includes: determining an optimal fiber size suitable for a given illumination requirement; selecting at least one fiber input among a plurality of available fiber inputs based on the determined optimal fiber size; and utilizing the selected at least one fiber input to deliver light from a light source to a lamphouse of the illumination system.
  • a further embodiment of the present disclosure is directed to an illumination system.
  • the illumination system includes at least one light source, a lamphouse, a plurality of available fiber inputs, and a controller.
  • the controller is configured to: determine an optimal fiber size suitable for a given illumination requirement; select at least one fiber input among the plurality of available fiber inputs based on the determined optimal fiber size; and utilize the selected at least one fiber input to deliver light from the at least one light source to the lamphouse.
  • An additional embodiment of the present disclosure is also directed to an illumination system.
  • the illumination system includes at least one light source, a lamphouse and a plurality of available fiber inputs housed in a fiber switching mechanism.
  • the fiber switching mechanism is configured to switch between the plurality of available fiber inputs utilizing mirrors corresponding to the plurality of available fiber inputs.
  • the illumination system also includes a controller configured to: determine an optimal fiber size suitable for a given illumination requirement; select at least one fiber input among the plurality of available fiber inputs based on the determined optimal fiber size; and utilize the selected at least one fiber input to deliver light from the at least one light source to the lamphouse.
  • FIG. 1 is an illustration depicting a fiber switching mechanism
  • FIG. 2 is an illustration depicting a fiber switching mechanism with an auxiliary input
  • FIG. 3 is a cross-sectional diagram of a fiber bundle
  • FIG. 4 is flow diagram illustrating a method for providing and controlling a switchable laser and fiber based lamphouse for optimal power output.
  • the laser pump power must be increased.
  • the plasma begins to grow in size and saturate in brightness at the center. Since the light source collects light only from the center of the plasma, increasing the pump power above a certain level does not lead to a corresponding increase in the usable power.
  • the laser pump wavelength is a critical parameter for achieving higher collectible power since the plasma size is a function of the laser pump wavelength.
  • the plasma can be sustained at lower laser intensities. The plasma can therefore extend farther from the absolute focus of the laser, resulting in a growth in size of the plasma. Therefore, the pump wavelengths should be chosen far from any absorption peak of the gas medium.
  • the plasma brightness is also a function of the chosen delivery fiber size.
  • a smaller fiber size will have a tighter focus at the plasma location which results in compact and bright plasma.
  • the maximum laser power that can be coupled into a fiber at a given wavelength is limited by its size.
  • To increase the pump power multiple wavelengths may be coupled, but this coupling makes it difficult to optimize the pump wavelengths for smaller fiber sizes.
  • For larger fiber sizes fewer wavelengths can be used to achieve the same pump power, but the focus for these fibers is not as tight.
  • One technique to overcome this limitation is to use fiber lasers (in which the gain medium is an optical fiber instead of a diode), which inherently have a better beam quality.
  • Fiber Sizes Merits Demerits 600 micron Relatively Cheap Limited by the power that can be coupled into the fiber Better collection efficiency due to compact and bright plasma 2000 micron Relatively Cheap Lower collection efficiency due to large and dim plasma Higher powers can be coupled into the fiber 200 micron Best collection efficiency due Relatively Expensive to compact and bright plasma
  • the present disclosure is directed to systems and methods for providing laser sustained plasma light sources without the aforementioned shortcomings.
  • switchable fiber sizes and wavelength combinations are provided for optimal power output in different wavelength bands and pixel sizes. More specifically, in some embodiments in accordance with the present disclosure, switchable fiber configurations are provided where larger fibers with higher pump powers are used for bigger pixel sizes and higher wavelength bands while smaller fibers are used for smaller pixel size and shorter wavelength bands. Additionally and/or alternatively, pumping schemes are provided where pump wavelengths close to the absorption peak of the gas fill are used for bigger pixel sizes while pump wavelengths away from the gas fill absorption peak are used for smaller pixel sizes.
  • FIG. 1 a schematic of a generalized implementation of a fiber switching mechanism 100 on the lamphouse 102 in accordance with one embodiment of the present disclosure is shown.
  • a number n of fibers 104 are connected to the fiber switching mechanism 100 to provide illumination for the lamphouse 102 .
  • These n fibers 104 may be different in size and may be selectively/conditionally engaged or disengaged.
  • a plurality of flip mirrors 106 are also positioned in the fiber switching mechanism 100 . By bringing in a suitable flip mirror 106 , the light from a particular fiber 104 can be optically coupled into the lamphouse 102 .
  • all mirrors 106 may be removed from the optical path between the fiber input 1 ( 104 A) and the lamphouse 102 to optically couple the fiber input 1 ( 104 A) to the lamphouse 102 .
  • mirrors 3 through n ⁇ 1 may be removed from the optical path between mirror 2 ( 106 B) and the lamphouse 102 to optically couple the fiber input 3 ( 104 C) to the lamphouse 102 . It is understood that coupling between other fiber inputs and the lamphouse 102 can be achieved in the similar manner as described above.
  • mirrors 106 provided in the fiber switching mechanism 100 are depicted as flip mirrors merely for illustrative purposes. These mirrors are not required to be flipped in and out of the optical path, and other types of physical movements (e.g., sliding or the like) may be implemented to position the mirrors accordingly.
  • the mirrors 106 may not need to be physically moved to accomplish fiber switching.
  • wavelength coupling techniques may be implemented, wherein a mirror (e.g., mirror 3 , 106 C) corresponding to a particular fiber input (e.g., input 4 , 104 D) is configured to only reflect wavelength of that particular fiber input 104 D towards the lamphouse 102 , and that mirror 106 C may not have any optical effects on any other fiber inputs (e.g., input 1 , 104 A) even if that mirror 106 C is physically positioned on the optical path between fiber input 104 A and the lamphouse 102 .
  • a mirror e.g., mirror 3 , 106 C
  • a particular fiber input e.g., input 4 , 104 D
  • that mirror 106 C may not have any optical effects on any other fiber inputs (e.g., input 1 , 104 A) even if that mirror 106 C is physically positioned on the optical path between fiber input 104 A and the lamphouse 102 .
  • polarization coupling techniques may be implemented, wherein a mirror corresponding to a particular fiber input is configured to only reflect input having a matching polarization. It is contemplated that other coupling techniques, such as spatial coupling or the like, may also be utilized to accomplish fiber switching.
  • the different fiber inputs 104 may be coming out from a single laser or different lasers.
  • four different fiber sizes (0.2 mm, 0.6 mm, 1 mm and 2 mm) are utilized, where the three bigger fiber sizes are delivering light from a shared laser source 1 ( 114 A) while the smallest fiber delivers light from a fiber laser source 2 ( 114 B).
  • the 0.2 mm fiber is not required and all fiber inputs are coming from a shared laser source (e.g., a diode laser).
  • the shared laser source may be equipped with beam switches to serve as the illumination source for different fibers.
  • larger fiber sizes can be used when the tool is configured for larger pixel size or longer wavelengths.
  • the fiber can be switched to a smaller size when the tool is configured for smaller pixel size or shorter wavelengths/broadband light. It is understood that such implementations are merely exemplary; various fiber sizes from various laser sources 114 may be utilized without departing from the spirit and scope of the present disclosure.
  • the pump laser light is sent in the fiber which is to be used next before the currently used fiber stops. For example, if fiber input 1 ( 104 A) is being used currently and the fiber switching mechanism 100 needs to switch the input to fiber input 3 ( 104 D), the fiber input 3 should be engaged prior to disengaging fiber input 1 . If fiber inputs 1 and 3 share the same pump laser source, the total power can be equally divided between the two fibers. Once the light starts to come out of both fibers, their corresponding mirror(s) can be positioned in place as described above.
  • flip mirrors are utilized, they can be configured to be reflective on both sides such that during the switching process, the excess pump laser light can be directed towards the beam dumps 108 . Subsequently, after the switching process is completed, the light in the initially used fiber (fiber input 1 in the example above) can be stopped and the entire laser pump light for the lamphouse can be delivered through the new fiber (fiber input 3 in the example above).
  • an auxiliary laser input independent from the rest of the switching mechanism may be utilized to sustain the plasma during the switching process.
  • the auxiliary laser input 110 also referred to as the plasma sustaining laser input, is depicted.
  • This auxiliary laser input 110 provides a fiber from a plasma sustaining laser.
  • the plasma sustaining laser is only turned on at the time of the fiber switching.
  • This laser may be operating at a different wavelength from the rest of the lasers so that the light can be sent into the lamphouse 102 using a dichroic filter 112 without affecting operations of the rest of the fiber inputs.
  • the auxiliary laser input 110 shown in FIG. 2 is merely exemplary.
  • One or more auxiliary laser input sources positioned at one or more different locations may be utilized to sustain the plasma without departing from the spirit and scope of the present disclosure.
  • each fiber input 104 is not required to be limited to a fixed fiber size. That is, a fiber input 104 may be configured in an adjustable manner that allows the particular fiber input 104 to switch between different sizes. In one embodiment, multiple fibers are bundled together to deliver light out through the same fiber input.
  • FIG. 3 is a cross-sectional view illustrating an exemplary fiber bundle 300 .
  • multiple fibers 302 through 308 are oriented in the same direction and are positioned as close as possible, separated from each other only by their cooling limitations 310 (e.g., ⁇ 5 mm). While four fibers 302 through 308 are depicted in this example, it is understood that the specific number of fibers to be bundled, and their specific sizes, may vary depending on specific application without departing from the spirit and scope of the present disclosure.
  • the relative position between the cross-section of the bundle 300 and its corresponding laser/illumination source is adjustable. This allows different fibers within the bundle 300 to be utilized as the delivering fiber. To make a switch between the fibers within such a bundle 300 , the power is gradually distributed from the outgoing delivering fiber to the incoming delivering fiber. Once the incoming delivering fiber is moved in place, full power is coming out from the incoming delivering fiber.
  • both the outgoing delivering fiber and the incoming delivering fiber may deliver the laser power, even through the laser power may be delivered at suboptimal levels.
  • the plasma position and shape may also be suboptimal.
  • the adverse effect is negligible.
  • both the outgoing delivering fiber and the incoming delivering fiber are delivering the laser power during this switching process, the plasma can still be sustained and maintained at approximately the same temperature. Therefore, lamp is not required to be restarted and cooling does not need to be adjusted.
  • fiber bundles 300 as described above may be utilized by one or more fiber inputs 104 . In this manner, fiber switching within a bundle 300 and fiber switching among different fiber inputs 104 may be used in conjunction. Alternatively, a fiber bundle 300 may be utilized independently to provide illumination for a lamphouse, without the fiber switching mechanism 100 , and still provide the abilities to switch between different fibers.
  • the controller 116 of the illumination system can automatically select the optimal fiber size for this use case so that light from the selected fiber is getting directed towards the lamphouse.
  • a larger fiber allows pumping higher laser powers, which is suitable for generating higher raw power for larger pixel sizes and larger wavelengths.
  • a smaller fiber results in a more compact and brighter plasma, which results in improved performance for smaller pixels and wavelengths.
  • the switchable laser and fiber based lamphouse may be controlled by a controller (e.g., a computer processor or the like).
  • a controller e.g., a computer processor or the like.
  • the controller may determine an optimal fiber size for this particular optics state and/or requirement in step 402 .
  • the controller may then select, among a plurality of different available fibers, one or more fibers to deliver light to the lamphouse based on the determined optimal fiber size in step 404 .
  • the one or more fibers selected by the controller may be switched into their corresponding engaged positions in step 406 and serve to deliver light to the lamphouse.
  • the one or more selected fibers may be switched into their corresponding engaged positions utilizing the various switching techniques previously described.
  • one or more auxiliary plasma sustaining laser inputs may be equipped when certain switching techniques are utilized.
  • the switchable laser and fiber based illumination system and method as described above are not limited to providing illumination for inspection tools. Illumination systems in accordance with embodiments of the present disclosure may be utilized in various different applications without departing from the spirit and scope of the present disclosure.
  • Such a package may be a computer program product which employs a computer-readable storage medium/device including stored computer code which is used to program a computer to perform the disclosed function and process of the present disclosure.
  • the computer-readable medium may include, but is not limited to, any type of conventional floppy disk, optical disk, CD-ROM, magnetic disk, hard disk drive, magneto-optical disk, ROM, RAM, EPROM, EEPROM, magnetic or optical card, or any other suitable media for storing electronic instructions.
  • the methods disclosed may be implemented as sets of instructions, through a single production device, and/or through multiple production devices. Further, it is understood that the specific order or hierarchy of steps in the methods disclosed are examples of exemplary approaches. Based upon design preferences, it is understood that the specific order or hierarchy of steps in the method can be rearranged while remaining within the scope and spirit of the disclosure.
  • the accompanying method claims present elements of the various steps in a sample order, and are not necessarily meant to be limited to the specific order or hierarchy presented.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Lasers (AREA)
US14/301,781 2014-03-18 2014-06-11 Switchable laser and fiber based lamphouse for optimal power output in different wavelength bands and pixel sizes Active 2034-07-24 US9341761B2 (en)

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Application Number Priority Date Filing Date Title
US14/301,781 US9341761B2 (en) 2014-03-18 2014-06-11 Switchable laser and fiber based lamphouse for optimal power output in different wavelength bands and pixel sizes
KR1020167028497A KR102166400B1 (ko) 2014-03-18 2015-03-17 상이한 파장대 및 픽셀 사이즈에서의 최적의 파워 출력을 위한 전환 가능한 레이저 및 파이버 기반의 램프하우스
PCT/US2015/021070 WO2015142926A1 (en) 2014-03-18 2015-03-17 Switchable laser and fiber based lamphouse for optimal power output in different wavelength bands and pixel sizes
TW104108664A TWI631878B (zh) 2014-03-18 2015-03-18 用於不同波長帶及像素尺寸之最佳功率輸出之可切換雷射及基於光纖之燈箱

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US14/301,781 US9341761B2 (en) 2014-03-18 2014-06-11 Switchable laser and fiber based lamphouse for optimal power output in different wavelength bands and pixel sizes

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US10257918B2 (en) 2015-09-28 2019-04-09 Kla-Tencor Corporation System and method for laser-sustained plasma illumination
US10244613B2 (en) * 2015-10-04 2019-03-26 Kla-Tencor Corporation System and method for electrodeless plasma ignition in laser-sustained plasma light source

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JP2012253378A (ja) 2001-03-16 2012-12-20 Imra America Inc 偏光保持ファイバ、システム及びファイバレーザ
US7244937B1 (en) * 2002-10-15 2007-07-17 Raytheon Company Optical measurement apparatus with laser light source
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JP2005215120A (ja) 2004-01-28 2005-08-11 Fuji Xerox Co Ltd 面発光型半導体レーザを光源に用いた光送信装置
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TWI631878B (zh) 2018-08-01
WO2015142926A1 (en) 2015-09-24
US20150268400A1 (en) 2015-09-24
KR20160132978A (ko) 2016-11-21
KR102166400B1 (ko) 2020-10-15
TW201545608A (zh) 2015-12-01

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