US8576368B2 - Driving circuit for a liquid crystal display device, method of manufacturing the same and display device having the same - Google Patents
Driving circuit for a liquid crystal display device, method of manufacturing the same and display device having the same Download PDFInfo
- Publication number
- US8576368B2 US8576368B2 US11/986,594 US98659407A US8576368B2 US 8576368 B2 US8576368 B2 US 8576368B2 US 98659407 A US98659407 A US 98659407A US 8576368 B2 US8576368 B2 US 8576368B2
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- Prior art keywords
- driving circuit
- conductive
- bump
- layer
- conductive particle
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/321—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
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- G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
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Definitions
- the present invention relates to a driving circuit for a liquid crystal display (LCD) device. More particularly, the present invention relates to a driving circuit for an LCD device, a method of manufacturing the driving circuit and a display device having the driving circuit.
- LCD liquid crystal display
- a liquid crystal display (LCD) device has advantageous characteristics such as reduced thickness, light weight, low power consumption, and has good resolution, color reproducibility, and display quality.
- the LCD device which is a type of flat panel display device, is being widely used and intensively researched.
- the LCD device typically includes an LCD panel having a thin-film transistor (TFT) array substrate, a color filter substrate, a liquid crystal layer located between the TFT array substrate and the color filter substrate, a backlight assembly disposed under the LCD panel to serve as a light source, and a driving circuit part disposed at a peripheral portion of the LCD panel to drive the LCD panel.
- the LCD panel includes two glass substrates (the TFT array substrate and the color filter substrate mentioned above), a plurality of pixels disposed between the two glass substrates and arranged in a matrix shape on the thin-film transistor (TFT) array substrate and for each pixel a switching element such as a TFT for controlling signals provided to the pixel.
- the driving circuit part includes a printed circuit board (PCB) on which parts for generating various signals such as a control signal, a clock signal, and a data signal, are mounted.
- a driving circuit that is an LCD driver integrated circuit (IC) (LDI) is connected to the LCD panel and the PCB to apply a signal to wirings formed on the LCD panel.
- the LCD driver integrated circuit includes a set of bonding pads with each bonding pad including a metal bump.
- the surface to which the driver integrated circuit is to be mounted is provided with a matching set of pads.
- the driver integrated circuit is mounted on the surface by bonding the set of bonding pads to the matching set of pads.
- Examples of LDI mounting methods include chip-on-glass (COG), tape carrier package (TCP), and chip-on-film (COF).
- COG chip-on-glass
- TCP tape carrier package
- COF chip-on-film
- the LDI mounting methods require fine pad pitch bonding, an easy bonding process and high reliability, especially with the increasing complexity of an LDI chip arising from, for example increases in the number of pixels and high resolution.
- a method of forming a bump and a method of fine pad pitch bonding are key technologies.
- the driving circuit and the LCD panel are electrically connected to each other through the conventional ACF.
- the AFC comprises electrically conductive particles dispersed in a non-conductive film.
- the ACF is adhered to the glass TFT array substrate and the driver IC is bonded to the ACF. Thereafter, in a final bonding process, a plurality of conductive particles flows in the ACF and some of the conductive particles are captured between the bumps and the pads on the TFT array substrate, thereby electrically connecting the driving circuit to the pads and to wiring on the TFT array substrate.
- the pitch of a COG chip becomes finer as an LCD device becomes smaller, lighter and thinner, and the pitch of an outer lead bonding (OLB) or a film-on-glass (FOG) bonding also becomes finer.
- OLB outer lead bonding
- FOG film-on-glass
- an agglomeration of the conductive particles may extend from one bump to an adjacent bump, thus forming an electrical connection between the bumps to cause an electrical short defect.
- the area of the bumps decreases the number of conductive particles trapped between a pad and a bump decreases. Indeed, the number of captured conductive particles may be zero, the lack of the conductive particles causing an electrical open defect after the COG bonding.
- the above-mentioned defects may be found during manufacture of an LCD or they may be found by end users of a LCD device after some time has elapsed. Thus, yield and reliability may be degraded.
- the present invention provides a driving circuit for a liquid crystal display (LCD) device capable of easily being electrically connected to the LCD device through bonding pads in which conductive particles are disposed on a bump.
- LCD liquid crystal display
- the present invention further provides a method of manufacturing the driving circuit.
- the present invention still further provides an LCD device having the driving circuit.
- a driving circuit includes a resin layer formed on a bump on an integrated circuit (IC) pad electrode, and a conductive particle deposited on and coupled to the resin layer.
- the resin layer is electrically conductive and the conductive particle adheres to the resin layer.
- the conductive particle may have, for example, a spherical shape, a hexahedron shape, a tetrahedron shape or any suitable shape.
- the conductive particle includes an outer portion comprising an electrically conductive material and an inner portion comprising an elastic material such as an elastic polymer.
- the elastic material may be compressed during bonding so as to prevent an electrical connection defect due to height differences between individual bumps in a plurality of bumps.
- a driving circuit for an LCD device includes an integrated circuit IC, an electrode pad, a bump and a conductive particle.
- the IC generates a signal.
- the electrode pad is formed on the IC to externally transmit the signal.
- the bump is formed on the electrode pad to receive the signal.
- the conductive particle is disposed on the bump to electrically connect the bump to an external electronic device.
- the driving circuit may further include a resin layer between the bump and the conductive particle.
- the resin layer is electrically conductive.
- the conductive particle may include an outer layer including an electrically conductive material and an inner portion including an elastic polymer material.
- the electrically conductive material may include at least one of the metals gold (Au) and nickel (Ni).
- a method of manufacturing a driving circuit for an LCD device is provided as follows.
- An electrode pad is formed on an integrated circuit chip portion of a wafer.
- a first passivation layer is formed on the chip.
- An opening is provided in the passivation layer to expose a portion of the pad.
- a second passivation layer is formed on the first passivation layer.
- An opening in the second passivation layer is provided to again expose the portion of the pad.
- a metal layer is formed on the second passivation layer and on the exposed portion of the pad.
- a photoresist pattern having an opening corresponding to the pad is formed. The opening is filled with metal to form a bump.
- a resin layer having electrical conductivity is formed on the bump and the photoresist pattern. Conductive particles are sprayed onto the resin layer. The photoresist pattern is removed such that the conductive particles remain only on the bump.
- the conductive particles may be sprayed onto the resin layer by using an ink jet or a fine nozzle.
- Each of the conductive particles may include an outer layer including an electrical conductive material and an inner portion including an elastic polymer material.
- an LCD device in another exemplary embodiment, includes a driving circuit, a thin-film transistor (TFT) array substrate, a color filter substrate and a liquid crystal layer.
- the driving circuit includes an IC, an electrode pad, a bump and a conductive particle.
- the IC generates a signal.
- the electrode pad is formed on the IC to externally transmit the signal.
- the bump is formed on the electrode pad to receive the signal.
- the conductive particle is disposed on the bump.
- the TFT array substrate includes a pad electrically connected to the bump of the driving circuit through the conductive particle of the driving circuit.
- the color filter substrate faces the TFT array substrate.
- the liquid crystal layer is disposed between the TFT array substrate and the color filter substrate.
- the driving circuit may include a plurality of bumps electrically insulated from each other.
- the LCD device may further include a non-conductive adhesive configured to adhere the bump of the driving circuit to the TFT array substrate.
- the non-conductive adhesive may include one of a non-conductive film, a non-conductive paste, an ultraviolet adhesive and an epoxy group adhesive.
- the conductive particle may include an outer layer including an electrically conductive material and an inner portion including an elastic polymer material.
- the electrically conductive material may include at least one metal selected from the group consisting of gold and nickel.
- FIG. 1 is an exploded perspective view illustrating a liquid crystal display (LCD) panel according to an exemplary embodiment of the present invention
- FIG. 2 is a cross-sectional view illustrating a conventional driving circuit for an LCD device
- FIG. 3 is a photomicrograph illustrating an electrical open defect that is generated at a bump when the conventional driving circuit is mounted on an LCD panel;
- FIG. 4 is a photomicrograph illustrating an electrical short defect that is generated at a bump when the conventional driving circuit is mounted on the LCD panel;
- FIGS. 5 to 10 are cross-sectional views illustrating a method of manufacturing a driving circuit according to an exemplary embodiment of the present invention.
- FIG. 10 also shows in cross-section a driving circuit in accordance with an exemplary embodiment of the present invention
- FIGS. 11A and 11B are cross-sectional views illustrating conductive particles used in a driving circuit according to an exemplary embodiment of the present invention.
- FIG. 12 is a cross-sectional view illustrating a method of mounting a conventional driving circuit on an LCD device by using an anisotropic conductive film (ACF);
- ACF anisotropic conductive film
- FIG. 13 is a cross-sectional view illustrating a structure of the conventional driving circuit on an LCD device by using the ACF;
- FIG. 14 is a cross-sectional view illustrating a method of mounting a driving circuit according to an exemplary embodiment of the present invention on an LCD device by using a non-conductive film (NCF);
- NCF non-conductive film
- FIG. 15 is a cross-sectional view illustrating a method of mounting a driving circuit according to an exemplary embodiment of the present invention on an LCD device by using a non-conductive paste (NCP); and
- FIG. 16 is a cross-sectional view illustrating a structure in which a driving circuit is attached to an LCD device according to an embodiment of the present invention.
- first, second, third etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present invention.
- spatially relative terms such as “beneath,” “below,” “lower,” “above,” “upper” and the like, may be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as “below” or “beneath” other elements or features would then be oriented “above” the other elements or features. Thus, the exemplary term “below” can encompass both an orientation of above and below. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
- Embodiments of the invention are described herein with reference to cross-section illustrations that are schematic illustrations of idealized embodiments (and intermediate structures) of the invention. As such, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, are to be expected. Thus, embodiments of the invention should not be construed as limited to the particular shapes of regions illustrated herein but are to include deviations in shapes that result, for example, from manufacturing. For example, an implanted region illustrated as a rectangle will, typically, have rounded or curved features and/or a gradient of implant concentration at its edges rather than a binary change from implanted to non-implanted region.
- a buried region formed by implantation may result in some implantation in the region between the buried region and the surface through which the implantation takes place.
- the regions illustrated in the figures are schematic in nature and their shapes are not intended to illustrate the actual shape of a region of a device and are not intended to limit the scope of the invention.
- FIG. 1 is an exploded perspective view illustrating a liquid crystal display (LCD) panel according to an exemplary embodiment of the present invention.
- LCD liquid crystal display
- an LCD device includes a color filter substrate 7 , a thin-film transistor (TFT) array substrate 1 and a liquid crystal layer 5 interposed between the color filter substrate 7 and the TFT array substrate 1 .
- TFT thin-film transistor
- the color filter substrate 7 includes a color filter layer having red, green and blue color filters 9 , a black matrix 8 dividing the color filters and blocking light passing through the liquid crystal layer 5 , and a transparent common electrode 6 for applying a voltage to the liquid crystal layer 5 .
- Gate lines and data lines are horizontally and vertically formed on the TFT array substrate 1 . Pixel areas are defined between the intersections of gate and data lines on the TFT array substrate 1 .
- a TFT switching element is formed in each pixel area. The TFT switching elements are located adjacent to intersections between the gate lines 2 and the data lines 3 .
- a pixel electrode is also formed in each pixel area. Each TFT switching element controls the application of a data voltage to its associated pixel electrode.
- Each pixel area corresponds to one of the color filters 9 of the color filter substrate 7 .
- a full color image may be obtained by combining red, green and blue colors.
- the color filters 9 are arranged in groups of three including red, green and blue to produce full color images.
- FIG. 2 is a cross-sectional view illustrating a conventional driving circuit that is used in an LCD device.
- Electrodes 23 are formed on the driving circuit 21 .
- a bump 25 is formed on each of the electrodes 23 .
- the bumps are to be directly electrically connected to pads provided on a TFT array substrate in an LCD device.
- FIG. 3 is a photomicrograph showing an electrical open circuit defect that occurred at a bump when a conventional driving circuit was mounted on an LCD device.
- FIG. 4 is a photomicrograph showing a cross-sectional view of an electrical short circuit defect that occurred between two bumps when a conventional driving circuit was mounted on an LCD device.
- an agglomeration of the conductive particles 35 may form an electrical connection between adjacent bumps 25 to cause an electrical short circuit defect (refer to FIG. 4 ).
- conductive particles 35 are present on all the bumps 25 but are absent from bump 25 a . The reduction of the areas of the bumps 25 leads to a lack of the conductive particles 35 and an electrical open circuit defect after the COG bonding.
- FIGS. 5 to 10 are cross-sectional views illustrating a method of manufacturing a driving circuit according to an exemplary embodiment of the present invention.
- FIGS. 5-10 show cross sections of the driving circuit that is part of a wafer (not shown) containing many such driving circuits, the wafer being later divided into individual driving circuits like the one shown in FIGS. 5-10 .
- a chip 41 contains circuits (not shown) that are required to provide the functions of a driving circuit.
- the chip 41 may be referred to as an integrated circuit 41 .
- Electrode pads 43 are formed on the chip 41 . These electrode pads 43 provide electrical connections to chip 41 , with some of electrode pads dedicated to receiving signals, other electrode pads dedicated to outputting signals and others providing power and ground connections.
- a passivation layer 45 is formed on chip 41 and on the electrode pads 43 . Openings are provided in the passivation layer 45 to expose a portion of each electrode pad 43 .
- a layer of electrically insulating material such as a polyimide layer 47 is formed on the passivation layer 45 . Openings are provided in the polyimide layer 47 so that the open portion of each electrode pad 43 is again exposed.
- the layer 47 may hereinafter be referred to as a second insulating layer 47 .
- an under bump metallurgy (UBM) layer 49 is formed on the chip 41 having the passivation layer 45 and the polyimide layer 47 .
- the under bump metallurgy layer 49 is optional.
- a photoresist pattern 51 is formed on the UBM layer 49 .
- the photoresist pattern 51 has openings A corresponding to the electrode pads 43 .
- the photoresist pattern 51 may be obtained by using a positive type photoresist material. Alternatively, the photoresist pattern 51 may be obtained by using a negative type photoresist material.
- an electroplating operation is performed so that the openings in the photoresist pattern 51 are filled with metal, to thereby form bumps 53 .
- metals suitable for forming the bumps 53 include gold (Au) and nickel (Ni) and may include other suitable metals. These metals may be used alone or in a combination thereof.
- an adhesive material is coated on the photoresist pattern 51 and on the bumps 53 to form an adhesive layer 60 .
- the adhesive material may comprise a resin material and the adhesive layer 60 may hereinafter be referred to as a resin layer 60 .
- the adhesive material includes an electrically conductive material so that conductive particles 30 deposited on the bumps 53 are in good electrical contact with the electrode pads 43 . Examples of the electrically conductive material used in the adhesive layer 60 may include silver paste.
- each of the conductive particles 30 includes an outer portion including at least one layer of metal, and an inner portion comprising an elastic material such as an elastic polymer.
- the outer portion may include a single metal layer, or may include a first metal layer and a second metal layer that are different in composition from each other. Examples of the metal forming the outer portion may include gold (Au), nickel (Ni), or copper (Cu). These metals may be used alone or in a combination thereof.
- An ink jet or fine nozzle or other suitable device may be used to uniformly apply the conductive particles 30 to the adhesive layer 60 , thereby increasing uniformity of the distribution of the conductive particles 30 .
- the photoresist pattern 51 is removed, and the UBM layer 49 (if present) is etched so that the UBM layer 49 remains only under the bump 53 .
- the driving circuit 40 comprises an integrated circuit 41 , electrode pads 43 formed on the integrated circuit 41 , bumps 53 formed on the electrode pads 43 , a conductive adhesive layer 60 formed on the bumps 53 and conductive particles 30 deposited on the adhesive layer 60 .
- FIGS. 11A and 11B are cross-sectional views illustrating a conductive particle as used in a driving circuit according to an exemplary embodiment of the present invention.
- FIGS. 11A and 11B illustrate shapes and structures of the conductive particles 30 .
- a conductive particle 30 a includes an outer portion comprising a layer 31 including an electrically conductive material such as a metal.
- the conductive particle 30 a also includes an inner portion 34 a including an elastic material such as an elastic polymer.
- a conductive particle 30 b includes an outer portion including a first metal layer 31 and a second metal layer 32 that are different from each other in their composition, and an inner portion 34 b comprising an elastic material such as an elastic polymer.
- the metal forming the outer portion may include gold (Au), nickel (Ni), and copper (Cu). These may be used alone or in a combination thereof. Alternatively, other metal materials having excellent electrical conductivity may be employed in the metal layers.
- FIG. 12 is a cross-sectional view illustrating a method of mounting a conventional driving circuit on an LCD device by using an anisotropic conductive film (ACF).
- FIG. 13 is a cross-sectional view illustrating a structure of the conventional driving circuit on the LCD device by using the ACF.
- a driving circuit 70 and an LCD panel are electrically connected to each other through an ACF 90 .
- the ACF 90 is adhered to the TFT array substrate 81 , which may be a glass substrate, and the driving circuit 70 is bonded to the ACF 90 .
- a plurality of conductive particles 35 flows in the ACF 90 and some of the particles are captured between a bump 75 and a pad 83 on the TFT array substrate 81 , thereby electrically connecting the driving circuit 70 to the pad 83 on the TFT array substrate 81 .
- FIG. 14 is a cross-sectional view illustrating a method of mounting a driving circuit according to an exemplary embodiment of the present invention on an LCD device by using a non-conductive film (NCF).
- FIG. 15 is a cross-sectional view illustrating a method of mounting a driving circuit according to an exemplary embodiment of the present invention on an LCD device by using a non-conductive paste (NCP).
- FIG. 16 is a cross-sectional view illustrating a structure of the driving circuit according to an exemplary embodiment of the present invention on an LCD device.
- the driving circuit 40 having the conductive particles 30 formed on the bump 53 is mounted on a TFT array substrate 81 of an LCD panel.
- the TFT array substrate 81 is cleaned so that foreign substances may not be present on the TFT array substrate 81 .
- an NCF 70 or an NCP 75 is bonded on a pad 83 formed on the TFT array substrate 81 .
- the NCF 70 and the NCP 75 are adhesive and non-conductive.
- the non-conductive adhesive may include a non-conductive film, a non-conductive paste, an ultra-violet curable adhesive or an epoxy group adhesive.
- the bump 53 on the driving circuit is bonded on the pad 83 on which the NCF 70 or the NCP 75 is bonded.
- the conductive particles 30 electrically connect the bump 53 and the pad 83 to each other in response to the application of pressure during the final bonding as shown in FIG. 16 .
- the inner elastic portions 34 a and 34 b may compensate for the irregularity, thereby maintaining a stable electrical connection.
- a conductive particle is disposed on a bump of a driving circuit for an LCD device to improve electrical contact between an LCD panel and the driving circuit.
- the conductive particle includes an inner portion comprising an elastic material, the conductive particle including the elastic polymer inner portion may compensate the irregularity between bumps, although the distance between the bumps is irregular.
- the driving circuit is mounted on the LCD panel, a stable electrical connection may be obtained to reduce electrical connection resistance and prevent reliability defects.
- the conductive particles are not disposed between the bumps and thus electrical short circuits between bumps are precluded.
- the bump may be electrically connected to the pad of the LCD panel through the conductive particle by the compression of the conductive particles to prevent an electrical open defect.
- the bumps may have a fine pitch, so that chip size may be reduced to increase the number of net dies per wafer, thereby reducing manufacturing cost.
- the driving circuit may be applied to an LCD display IC (LDI) having a fine pitch.
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Optics & Photonics (AREA)
- Theoretical Computer Science (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Wire Bonding (AREA)
Abstract
Description
Claims (17)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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KR10-2006-0115743 | 2006-11-22 | ||
KR20060115743A KR101309319B1 (en) | 2006-11-22 | 2006-11-22 | Driving circuit, method of manufacturing thereof and liquid crystal display apparatus having the same |
Publications (2)
Publication Number | Publication Date |
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US20080180376A1 US20080180376A1 (en) | 2008-07-31 |
US8576368B2 true US8576368B2 (en) | 2013-11-05 |
Family
ID=39390406
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US11/986,594 Expired - Fee Related US8576368B2 (en) | 2006-11-22 | 2007-11-21 | Driving circuit for a liquid crystal display device, method of manufacturing the same and display device having the same |
Country Status (6)
Country | Link |
---|---|
US (1) | US8576368B2 (en) |
EP (1) | EP1942365A3 (en) |
JP (1) | JP2008129595A (en) |
KR (1) | KR101309319B1 (en) |
CN (1) | CN101188219B (en) |
TW (1) | TW200834155A (en) |
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US9991224B2 (en) | 2012-04-18 | 2018-06-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Bump-on-trace interconnect having varying widths and methods of forming same |
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Publication number | Priority date | Publication date | Assignee | Title |
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US9773755B2 (en) | 2010-05-20 | 2017-09-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Substrate interconnections having different sizes |
US10056345B2 (en) | 2012-04-17 | 2018-08-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Conical-shaped or tier-shaped pillar connections |
US11315896B2 (en) | 2012-04-17 | 2022-04-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Conical-shaped or tier-shaped pillar connections |
US9991224B2 (en) | 2012-04-18 | 2018-06-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Bump-on-trace interconnect having varying widths and methods of forming same |
US10510710B2 (en) | 2012-04-18 | 2019-12-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Bump-on-trace interconnect |
US10847493B2 (en) | 2012-04-18 | 2020-11-24 | Taiwan Semiconductor Manufacturing, Ltd. | Bump-on-trace interconnect |
US11682651B2 (en) | 2012-04-18 | 2023-06-20 | Taiwan Semiconductor Manufacturing Company | Bump-on-trace interconnect |
US9966346B2 (en) | 2012-09-18 | 2018-05-08 | Taiwan Semiconductor Manufacturing Company | Bump structure and method of forming same |
US10008459B2 (en) | 2012-09-18 | 2018-06-26 | Taiwan Semiconductor Manufacturing Company | Structures having a tapering curved profile and methods of making same |
US11043462B2 (en) | 2012-09-18 | 2021-06-22 | Taiwan Semiconductor Manufacturing Company | Solderless interconnection structure and method of forming same |
US11961810B2 (en) | 2012-09-18 | 2024-04-16 | Taiwan Semiconductor Manufacturing Company | Solderless interconnection structure and method of forming same |
US11419216B2 (en) | 2020-03-30 | 2022-08-16 | Samsung Display Co., Ltd. | Display device and method of manufacturing the same |
Also Published As
Publication number | Publication date |
---|---|
EP1942365A3 (en) | 2009-07-01 |
EP1942365A2 (en) | 2008-07-09 |
US20080180376A1 (en) | 2008-07-31 |
TW200834155A (en) | 2008-08-16 |
KR20080046371A (en) | 2008-05-27 |
JP2008129595A (en) | 2008-06-05 |
CN101188219A (en) | 2008-05-28 |
CN101188219B (en) | 2012-01-25 |
KR101309319B1 (en) | 2013-09-13 |
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