US8450847B2 - Optoelectronic semiconductor chip fitted with a carrier - Google Patents

Optoelectronic semiconductor chip fitted with a carrier Download PDF

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Publication number
US8450847B2
US8450847B2 US13/126,096 US200913126096A US8450847B2 US 8450847 B2 US8450847 B2 US 8450847B2 US 200913126096 A US200913126096 A US 200913126096A US 8450847 B2 US8450847 B2 US 8450847B2
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Prior art keywords
metal layer
carrier
optical component
semiconductor chip
optoelectronic device
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Expired - Fee Related
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US13/126,096
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US20110285017A1 (en
Inventor
Patrick Ninz
Herbert Brunner
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Ams Osram International GmbH
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Osram Opto Semiconductors GmbH
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Assigned to OSRAM OPTO SEMICONDUCTORS GMBH reassignment OSRAM OPTO SEMICONDUCTORS GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: NINZ, PATRICK, BRUNNER, HERBERT
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/85—Packages
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/85—Packages
    • H10H20/8506—Containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/02—Containers; Seals
    • H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/02—Containers; Seals
    • H01L23/10—Containers; Seals characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/0235—Method for mounting laser chips
    • H01S5/02355—Fixing laser chips on mounts
    • H01S5/0237—Fixing laser chips on mounts by soldering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/85—Packages
    • H10H20/855—Optical field-shaping means, e.g. lenses

Definitions

  • This disclosure relates to a method for producing an optoelectronic device and an optoelectronic device.
  • DE 20 2006 006 610 U1 relates to a housing with an electrical circuit. However, it could be helpful to provide a method wherein an optical component is efficiently fitted to a carrier. It could also be helpful to provide an optoelectronic device wherein an optical component is permanently fitted to a carrier.
  • a method for producing an optoelectronic device including providing a carrier, applying at least one first metal layer on the carrier, providing at least one optical component, applying at least one second metal layer on the at least one optical component, and mechanically connecting the carrier to the at least one optical component by the at least one first and the at least one second metal layer, wherein the connecting includes friction welding or is friction welding.
  • an optoelectronic device including a carrier with at least one optoelectronic semiconductor chip on a main side of the carrier, at least one first metal layer on the main side of the carrier, at least one optical component with at least one second metal layer, wherein the at least one second metal layer faces the main side of the carrier, and at least one friction welding seam situated between the at least one first and the at least one second metal layer and by which the at least one optical component is mechanically connected to the carrier, wherein the friction welding seam is situated directly at the at least one first metal layer and/or at the at least one second metal layer.
  • FIG. 1 shows a schematic illustration of a method described for producing one example of an optoelectronic device.
  • FIG. 2 shows schematic sectional illustrations of further examples of optoelectronic devices.
  • FIG. 3 shows schematic three-dimensional illustrations of examples of optical components.
  • the carrier is designed to the effect that at least one optoelectronic semiconductor chip can be fitted thereon.
  • the carrier has a high thermal conductivity of at least 40 W/(m K), in particular of at least 110 W/(m K).
  • the carrier can be a circuit board, a printed circuit board, “PCB” for short, a ceramic or a semiconductor material.
  • the carrier can comprise electrical conductor tracks which can be fitted in, on or at a substrate material of the carrier. The conductor tracks can serve, for instance, for electrically driving the at least one optoelectronic semiconductor chip.
  • the method may comprise the step of applying at least one first metal layer on the carrier.
  • the first metal layer is designed to impart a mechanical connection between the carrier and an optical component.
  • the first metal layer does not serve, in particular, for an electrical contact-connection or electrical interconnection of the at least one optoelectronic semiconductor chip.
  • the first metal layer is preferably electrically insulated from the optoelectronic semiconductor chip.
  • the first metal layer can be applied by a photolithographic process such as by vapor deposition and/or an electrodeposition method.
  • the method may comprise the step of providing at least one optical component.
  • the optical component can be a lens, a filter, a diffusing plate or a covering window.
  • the optical component is, at least in places, transmissive or partly transmissive to electromagnetic radiation that is to be received or emitted by the semiconductor chip.
  • the method may comprise the step of applying at least one second metal layer on the at least one optical component.
  • the second metal layer is designed to produce a mechanical connection between the optical component and the carrier.
  • the process of applying the second metal layer can be effected analogously to the process of applying the first metal layer.
  • the first and/or the second metal layer can also be configured as a metal layer sequence.
  • the first and/or the second metal layer comprise sublayers composed of chromium and gold or sublayers composed of nickel, palladium and gold.
  • the method may comprise the step of mechanically connecting the carrier to the at least one optical component.
  • This process of mechanical connection is effected by the at least one first and the at least one second metal layer and includes friction welding.
  • the friction welding is realized by ultrasound in particular.
  • the connecting process the at least one first and the at least one second metal layer are at least indirectly connected to one another.
  • a friction welding seam forms for example directly between the first and the second metal layer.
  • at least one intermediate layer to be arranged between the first and the second metal layer and for the first and the second metal layer to be mechanically fixedly connected to one another indirectly by the at least one intermediate layer.
  • at least the first or the second metal layer has a direct contact with the friction welding seam.
  • the metal layers to completely or partly comprise the friction welding seam.
  • the method for producing an optoelectronic device may comprise the following steps:
  • the connecting process includes friction welding.
  • a connecting agent as in the case of soldering, for instance, does not take place.
  • a liquid or viscous phase for example, an adhesive, is not used either. It is thereby possible to prevent the connecting agent in a liquid or viscous state from propagating or running over regions of the carrier or of the optical component.
  • connection area is provided by metals.
  • adhesives containing organic materials this type of connection is particularly resistant to aggressive media such as, for example, cleaning agents or salt water.
  • metals in contrast to polymers, for example, are resistant to the effect of light and increased temperatures such as can occur during the operation of the optoelectronic device to be produced.
  • the carrier may be heated to a temperature of between 0° C. and 200° C. inclusive, in particular between 130° C. and 170° C. inclusive. Therefore, the connecting process takes place at comparatively moderate temperatures such that high thermal loading for instance for the optoelectronic semiconductor chip does not occur.
  • the at least one optoelectronic semiconductor chip may be applied on the carrier before the carrier and optical component are connected.
  • the optical component may be pressed onto the carrier with a press-on force of between 1 N and 90 N inclusive, in particular between 30 N and 50 N inclusive, during the process of connection to the carrier.
  • the ultrasonic power for the friction welding may be fed in exclusively via the optical component. In other words, no ultrasound is passed via the carrier to the first and/or second metal layer. This reduces the mechanical loads for the optoelectronic semiconductor chip during the connecting process. Microcracks, in particular, which can lead to a reduction of the lifetime of the optoelectronic semiconductor chip, can thereby be reduced.
  • the frequency of the ultrasound may be between 40 kHz and 100 kHz inclusive, in particular between 55 kHz and 65 kHz.
  • the ultrasonic power fed in during the process of connecting carrier and optical component may be between 0.1 W and 2.0 W inclusive, in particular between 0.5 W and 0.7 W.
  • the ultrasonic power may be applied for a time duration of between 0.2 s and 2.0 s inclusive, in particular between 0.5 s and 1.0 s inclusive.
  • At least one connecting bump may be applied to the at least one first and/or to the at least one second metal layer photolithographically and/or by a wire bonder.
  • the connecting bump can be configured in a point-like or line-like fashion.
  • the thickness of the connecting bump exceeds the thickness of the first and of the second metal layer preferably by at least a factor of three, preferably by at least a factor of five.
  • the at least one connecting bump is, for example, a spacer that defines a distance between the first and the second metal layer.
  • the connecting bump is not a soldering ball or soldering pad that is predominantly or completely melted during the process of connecting carrier and optical component.
  • the first and the second metal layer and, if present, the connecting bump and also the friction welding seam may be free of a connecting agent.
  • metal layers, connecting bump and friction welding seam comprise, in particular, no solder and no organic adhesive.
  • an optoelectronic device is specified.
  • the optoelectronic device can be produced by one of the abovementioned methods.
  • the optoelectronic device can comprise at least one feature as specified in conjunction with the methods. It is likewise possible for the methods described above to have features as described below in connection with examples of the optoelectronic device.
  • the optoelectronic device may comprise a carrier.
  • the carrier has a main side, on which at least one optoelectronic semiconductor chip is fitted.
  • the semiconductor chip is a light-emitting diode or a laser diode.
  • the optoelectronic semiconductor chip can be a thin-film chip as specified in WO 2005/081319 A1 or in DE 10 2007 004 304 A1, the subject matter of which with regard to the semiconductor chip described therein and the production method described therein is incorporated by reference.
  • the first metal layer may be fitted on the main side of the carrier.
  • the first metal layer covers preferably at most 30%, in particular at most 10%, of the area of the main side of the carrier.
  • the first metal layer can be applied to the main side of the carrier in a point-like, line-like and/or frame-like fashion.
  • the at least one second metal layer may be situated at the optical component.
  • the second metal layer is applied to the optical component in such a way that it faces the main side of the carrier.
  • the friction welding seam may be situated between the first and the second metal layer or is completely or at least partly encompassed by the first and the second metal layer.
  • the optical component is mechanically connected to the carrier by the friction welding seam.
  • the optical component and the carrier are mechanically connected to one another exclusively by the friction welding seam.
  • An area content of the friction welding seam, parallel to the main side of the carrier, is approximately equal to an area content of the first and the second metal layer.
  • the area contents of the first and second metal layers and of the friction welding seam deviate from one another by less than 30%, in particular by less than 10%.
  • the friction welding seam may be situated directly at the at least one first and/or directly at the at least one second metal layer or is completely or partly encompassed by them.
  • a material of the friction welding seam is at least formed with a material of the metal layers or consists of the material of the metal layers.
  • the friction welding seam is a layer that produces a mechanical connection between the parts to be connected.
  • a mixture of the materials of the parts to be connected can be present in the region of the friction welding seam.
  • a microscopic intermeshing of the material components to be connected can also be present in the region of the friction welding seam.
  • the friction welding seam has, in particular, features which are characteristic of friction welding and which are accessible to examination by electron microscope, for instance. In other words, the friction welding seam is a substantive feature that can be demonstrated on the finished optoelectronic device.
  • the optoelectronic device may comprise a carrier with at least one optoelectronic semiconductor chip applied on a main side of the carrier. Furthermore, the optoelectronic device has at least one first metal layer on the main side of the carrier and at least one optical component. At least one second metal layer is situated at the optical component, wherein the at least one second metal layer faces the main side of the carrier. Furthermore, the optoelectronic device comprises a friction welding seam situated between the at least one first and the at least one second metal layer and by which the at least one optical component is mechanically connected to the carrier. In this case, the friction welding seam is situated directly at the at least one first and/or at the at least one second metal layer.
  • the at least one connecting bump may be situated between the first and the second metal layer.
  • the connecting bump can be configured with the same material as the metal layers.
  • An area content of the connecting bump preferably corresponds at most to an area content of the first and the second metal layer, in a plane parallel to the main side of the carrier. In other words, an area content of the connecting bump, relative to a plane parallel to the main side of the carrier, deviates from the area content of the metal layers by at most 30%, in particular by at most 20%, preferably by at most 10%.
  • a material of the first and of the second metal layer and a material of the connecting bump may in each case be either gold or aluminum.
  • the first and the second metal layer and also the connecting bump may be configured with a gold or aluminum alloy or consist of such an alloy.
  • an essential material constituent of the metal layers and of the at least one connecting bump is gold or aluminum.
  • a total thickness composed of the first and composed of the second metal layer and composed of the connecting bump, in a direction perpendicular to the main side of the carrier, may be between 2 ⁇ m and 40 ⁇ m inclusive. If the optoelectronic device has no connecting bump, then a total thickness composed of first and second metal layers lies in the specified thickness range; the thickness of the connecting bump is then 0. By virtue of such comparatively large total thicknesses of the metal layers and of the connecting bump, it is possible to obtain a matching of different coefficients of thermal expansion between the carrier and the optical component, in particular during the process of connecting carrier and optical component.
  • the metal layers and the connecting bump can therefore act as a type of buffer.
  • the first metal layer may enclose the at least one optoelectronic semiconductor chip in a frame-like manner at least in places.
  • the optoelectronic semiconductor chip is bordered by the first metal layer completely or in places in the plane of the main side of the carrier.
  • the first metal layer can form a closed frame-like line around the semiconductor chip, for example in the form of a rectangle, an oval or a circle. It is likewise possible for the first metal layer to be formed from a plurality of point-like structures and for these point-like structures to be configured similarly to a dotted line framing the optoelectronic semiconductor chip.
  • the first metal layer may be applied on the carrier in at least four, in particular in exactly four, regions.
  • the regions preferably configured with a small area or in a point-like fashion, are situated in particular exclusively at corners of a mounting area in which the optoelectronic semiconductor chip is connected to the carrier.
  • the mounting area is covered by the optical component.
  • a small area or in a point-like fashion can mean that each of the regions in which the first metal layer is applied on the carrier is an area of at most 10%, preferably of at most 5%, in particular of at most 2.5%, of a total area—facing the carrier—of a frame of the optical component.
  • the carrier and the optical component may enclose a volume in which the at least one optoelectronic semiconductor chip is situated.
  • the volume it is not necessary for the volume to be completely enclosed by the carrier and the optical component.
  • the volume it is possible for the volume not to be closed off in a gas-tight manner. Pressure equalization with respect to external surroundings of the optical component is thereby possible.
  • the optical component may not be in direct spatial contact with the semiconductor chip. In other words, no material of the optical component touches a material of the optoelectronic semiconductor chip.
  • the optical component may not be in direct electrical contact with the optoelectronic semiconductor chip. In other words, no electrical short circuit is present between the optoelectronic semiconductor chip and the optical component.
  • the optical component can be electrically insulated from the optoelectronic semiconductor chip.
  • the volume may be closed off in a gas-tight manner.
  • the optoelectronic device is thereby protectable in particular against moisture or, in an aggressive atmosphere, against corrosion.
  • the volume may not be closed off in a gas-tight manner.
  • the friction welding seam then does not completely frame the optoelectronic semiconductor chip. Pressure equalization between the volume and surroundings is thereby made possible.
  • the optical component may comprise a frame, at which the second metal layer is situated.
  • the frame is configured with a material that is opaque with respect to the radiation to be received or emitted by the optoelectronic semiconductor chip.
  • the frame is preferably light-opaque.
  • the optical component may have an optical element.
  • the optical element is transmissive, in particular transparent, to at least part of the radiation to be emitted or received by the optoelectronic semiconductor chip.
  • the optical element is, in particular, a lens or a window.
  • the optical element may have at least two, in particular precisely two mutually opposite main areas.
  • one of the main areas faces the carrier and/or the optoelectronic semiconductor chip and the second main area faces away from the optoelectronic semiconductor chip and the carrier.
  • Light refraction of the radiation to be emitted or received by the optoelectronic semiconductor chip is effected at both mutually opposite main areas.
  • the light rays passing through the optical element with the exception of those which impinge perpendicularly on one of the main areas, experience a deflection or change of a ray direction at the main areas.
  • the carrier may comprise a ceramic or consists of such a ceramic.
  • the optical component may comprise silicon and glass.
  • the frame is fashioned with silicon and the optical element with glass.
  • the second metal layer may be applied on the silicon, that is to say, in particular, on the frame of the optical component.
  • the frame and/or the silicon of the optical component preferably surround the optoelectronic semiconductor chip in a frame-like manner.
  • the optoelectronic semiconductor chip is completely enclosed by the silicon of the optical component, in a direction parallel to the main side of the carrier.
  • optoelectronic devices described here can be used are, for instance, the backlighting systems of displays or display devices. Furthermore, optoelectronic devices described here can also be used in illumination devices for projection purposes, in headlights or light emitters or in general lighting.
  • FIG. 1 schematically illustrates a method for producing an optoelectronic device 1 on the basis of sectional illustrations.
  • a carrier 2 and an optical component 3 are provided, in particular independently of one another. Before the optical component 3 is connected to the carrier 2 , therefore, the optical component 3 and the carrier 2 can be completely produced and populated, respectively.
  • An optoelectronic semiconductor chip 4 for example a light-emitting diode, is fitted on a main side 20 of the carrier 2 .
  • the semiconductor chip 4 In a lateral direction, parallel to the main side 20 , the semiconductor chip 4 is situated between two first metal layers 11 applied to the main side 20 in areal fashion.
  • the first metal layers 11 consist of gold or a gold alloy.
  • the carrier 2 is, for example, a printed circuit board, PCB for short, or a ceramic.
  • the optical component 3 comprises a frame 31 , which is fashioned with silicon, in particular, and an optical element 32 .
  • the optical element 32 is a glass plate, which is transparent to a radiation to be received or emitted by the semiconductor chip 14 .
  • Two second metal layers 12 are applied in areal fashion at a side of the frame 31 which faces the carrier 2 .
  • An area of the second metal layers 12 corresponds, with respect to an extent parallel to the main side 20 of the carrier 2 , to the areas of the first metal layers 11 within the scope of the production tolerances.
  • connecting bumps 13 are applied to the second metal layers 12 or to the first metal layers 11 .
  • the connecting pumps 13 which act as spacers, can be applied by a photolithographic process or using a machine for wire bonding.
  • the connecting bumps 13 have, in a direction parallel to the main side 20 , a somewhat smaller extent than the metal layers 11 , 12 .
  • FIG. 1C illustrates the connection of the optical component 3 and of the carrier 2 , fashioned in accordance with FIG. 1 B 1 .
  • the carrier 2 and the optical component 3 are pressed onto one another with a force F, symbolized by a double arrow line.
  • the force F is approximately 40 N.
  • the first metal layers 11 are heated via the carrier 2 .
  • the input of the temperature T is indicated by a single arrow line.
  • the temperature T is approximately 150° C.
  • An ultrasound U required for friction welding is introduced into the optoelectronic device 1 with a power of approximately 0.6 W for a duration of approximately 0.7 s and at a frequency of approximately 60 kHz exclusively via the frame 31 of the optical component 3 .
  • the ultrasound U impressed into the frame 31 is symbolized by an arrow not filled in.
  • a mechanically fixed and permanent connection is effected at an interface between the first metal layers 11 and the connecting bumps 13 by a friction welding seam 10 .
  • the friction welding seam 10 is formed by the materials of the connecting bumps 10 and of the first metal layers 11 .
  • the friction welding seam 10 is resistant to chemicals and photo-damage, thus resulting in a mechanically stable, permanent connection via the metal layers 11 , 12 and the connecting bumps 13 between the optical component 3 and the carrier 2 with the semiconductor chip 4 .
  • a total thickness D composed of the metal layers 11 , 12 and the connecting bumps 13 , in a direction perpendicular to the main side 20 of the carrier 2 is approximately 15 ⁇ m.
  • the total thickness D is dependent on a lateral extent L of the optoelectronic device 1 .
  • a thickness of the metal layers 11 , 12 is, for example, in each case between 2 ⁇ m and 5 ⁇ m inclusive.
  • a thickness of the connecting bump 13 is, for example, between 10 ⁇ m and 25 ⁇ m inclusive, preferably approximately 15 ⁇ m.
  • a radiation passage area 41 of the semiconductor chip 4 faces the optical element 32 .
  • the optical element 32 has two mutually opposite main areas 33 a, b .
  • the main area 33 a faces away from the semiconductor chip 4
  • the main area 33 b faces the semiconductor chip 4 and the carrier 2 .
  • the optical component 3 is electrically insulated from the semiconductor chip 4 .
  • a volume 5 is substantially enclosed by the carrier 2 and the optical component 3 .
  • the example of the device 1 in accordance with FIG. 2A substantially corresponds to that shown in FIG. 1C .
  • the first metal layer 11 a is formed with chromium, for example, to ensure a high adhesion of the first metal layers 11 a , 11 b to the carrier 2 .
  • the metal layer 11 b preferably consists of gold and is designed for connection by friction welding.
  • the metal layers 12 a at the frame 31 are likewise fashioned with chromium, for example.
  • the metal layers 12 b are fashioned for example with gold or with some other material which exhibits good adhesion to the material of the connecting bumps 13 .
  • the connecting bumps 13 can also be fashioned with gold.
  • the metal layers 12 b , 11 b and the connecting bumps 13 may be fashioned with aluminum or an aluminum alloy or some other material suitable for friction welding or to consist of such a material.
  • the optical element 32 fashioned as a flat plate can be a filter, a diffusing plate or a transparent plate. It is likewise possible for the optical element 32 to be provided with coatings that are reflective, antireflective or reflective or absorbent in a targeted manner in specific spectral ranges, said coatings not being depicted in FIG. 2A .
  • a conversion means to be fitted to the optical element, said conversion means converting at least part of the radiation emitted by the optoelectronic semiconductor chip 4 into a radiation having a different frequency.
  • a conversion means can also be admixed with the material of the optical element 32 itself.
  • the optoelectronic semiconductor chip 4 can be an LED, in particular a transparent thin-film LED.
  • the device 1 can also have more than one semiconductor chip 4 .
  • a coating (not depicted in FIG. 2A ) that is reflective with respect to the radiation to be generated or received by the semiconductor chip 4 can likewise be applied on the main side 20 of the carrier 2 .
  • the optical element 32 is shaped as a planoconvex converging lens. Light refraction of the radiation generated, in particular, by the semiconductor chip 4 is effected at both main sides 33 a, b .
  • the optical element 32 can also have other forms, for example light-distributing, concave-lens-like shapings. A shaping as a Fresnel lens or zone lens is also possible.
  • the metal layers 11 b , 12 b are joined together directly without the use of connecting bumps 13 .
  • the friction welding seam 10 is therefore formed exclusively by materials of the metal layers 11 b , 12 b.
  • FIG. 3 shows further examples of the optical components 3 such as can be used in conjunction with, for instance, the examples in accordance with FIGS. 1 and 2 .
  • four circle-like second metallizations 12 and cylinder-like connecting bumps 13 are applied at corners at that side of the rectangular frame 31 which faces the carrier (not depicted in FIG. 3 ).
  • a mechanical connection between optical component 3 at the carrier 2 (not depicted) is therefore effected by four comparatively small, point-like regions at the corners of the frame 31 .
  • the second metallization 12 forms of a circumferential, closed track at that side of the frame 31 which faces the carrier 2 (not depicted).
  • the volume 5 it is possible for the volume 5 to be closed off in a gas-tight manner by the carrier 2 and by the optical component 3 and for the semiconductor chip 4 to be encapsulated.
  • a continuous, closed track of the connecting bump 13 it is likewise possible for a continuous, closed track of the connecting bump 13 to be applied on the second metal layer 12 .

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US13/126,096 2009-01-15 2009-11-02 Optoelectronic semiconductor chip fitted with a carrier Expired - Fee Related US8450847B2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102009004724A DE102009004724A1 (de) 2009-01-15 2009-01-15 Verfahren zur Herstellung eines optoelektronischen Bauteils und optoelektronisches Bauteil
DE102009004724.7 2009-01-15
DE102009004724 2009-01-15
PCT/DE2009/001549 WO2010081445A1 (de) 2009-01-15 2009-11-02 Verfahren zur herstellung eines optoelektronischen bauteils und optoelektronisches bauteil

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US20110285017A1 US20110285017A1 (en) 2011-11-24
US8450847B2 true US8450847B2 (en) 2013-05-28

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US (1) US8450847B2 (enrdf_load_stackoverflow)
EP (1) EP2377172A1 (enrdf_load_stackoverflow)
JP (1) JP2012515441A (enrdf_load_stackoverflow)
KR (1) KR20110118765A (enrdf_load_stackoverflow)
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US10505085B2 (en) 2014-06-12 2019-12-10 Osram Opto Semiconductors Gmbh Optoelectronic semiconductor device package with conversion layer and method for producing the same
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