US5513057A - Magnetic head with wear resistant layer having alignment mark, and magnetic head unit incorporating same - Google Patents

Magnetic head with wear resistant layer having alignment mark, and magnetic head unit incorporating same Download PDF

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Publication number
US5513057A
US5513057A US08/441,712 US44171295A US5513057A US 5513057 A US5513057 A US 5513057A US 44171295 A US44171295 A US 44171295A US 5513057 A US5513057 A US 5513057A
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US
United States
Prior art keywords
magnetic head
head unit
wear
resistant layer
alignment mark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
US08/441,712
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English (en)
Inventor
Victor Zieren
Jacobus J. M. Ruigrok
Mathijs De Jongh
Arnold Broese Van Groenou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
US Philips Corp
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US Philips Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by US Philips Corp filed Critical US Philips Corp
Priority to US08/441,712 priority Critical patent/US5513057A/en
Application granted granted Critical
Publication of US5513057A publication Critical patent/US5513057A/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/10—Structure or manufacture of housings or shields for heads
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
    • G11B5/255—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features comprising means for protection against wear
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed

Definitions

  • the invention relates to a magnetic head unit comprising a magnetic head secured to a support and having a magnetic head structure provided with a head face and at least one transducing gap terminating in the head face.
  • the invention also relates to a magnetic head and to a magnetic head structure for use in the magnetic head.
  • a support in the form of a housing comprising a magnetic head unit is known from U.S. Pat. No. 5,074,486; herewith incorporated by reference.
  • the known magnetic head unit comprises a magnetic head intended for cooperation with a magnetic tape, which head is mounted in a housing provided with tape guides.
  • the magnetic head has a magnetic head structure with a tape contact face and a transducing gap.
  • a write gap of a magnetic head is at the same position and at the same angle with respect to the magnetic tape as a read gap during reading the recording signals, in order to inhibit signal loss.
  • Said tape guides of the known magnetic head unit ensure that the magnetic tape always occupies the same position with respect to the magnetic head.
  • the transducing gap of the magnetic head occupies a defined position with respect to the tape guides of the housing.
  • magnetic heads are aligned as to position and direction before they are built in.
  • the visible transducing gap itself may be used as a reference.
  • a known drawback of magnetic heads which are in contact with a magnetic medium, particularly a magnetic tape, during operation is that the head face is subject to wear. Particularly in thin-film magnetic heads the thin-film layer structure may give rise to very considerable wear within a short period of operation, thus ensuring only a short lifetime of the magnetic head unit. It is known per se to provide wear-resistant layers on the head faces of magnetic heads in order to inhibit wear. In this connection it has been proposed in EP-A 0,123,826 (herewith incorporated by reference) to provide the head face of a magnetic head with a sputtered layer of titanium carbide, chromium carbide or titanium nitride having a thickness of at most 0.2 micron.
  • a drawback of providing a wear-resistant layer, particularly a layer which is not transparent to visible light, is that the alignment of the magnetic head with respect to a support or a housing of the magnetic head unit is seriously impeded and is no longer possible with the aid of a visible-light microscope. Under such circumstances, only special equipment using, for example, an IR microscope or a phase-contrast microscope provides the possibility of reliable alignment.
  • the magnetic head unit according to the invention is therefore characterized in that a wear-resistant layer forming a contact face and having at least one alignment mark occupying a defined position with respect to the transducing gap is provided on the head face of the magnetic head.
  • the magnetic head When the magnetic head is being built into the magnetic head unit according to the invention, the magnetic head is aligned with respect to a reference plane by means of the alignment mark and by using a simple microscope before it is definitively secured to the support.
  • the wear-resistant layer is preferably provided with various, preferably small alignment marks.
  • the magnetic head unit according to the invention is eminently suitable for analog as well as digital applications. Examples of applications are multi-track audio, video and data recording.
  • a particularly suitable application is the longitudinal magnetic tape recording system as described in U.S. patent application Ser. No. 07/473,085, filed Jul. 24, 1992, and; herewith incorporated by reference.
  • An embodiment of the magnetic head unit according to the invention is characterized in that the alignment mark is formed by an area having a structure which differs from the structure of the wear-resistant layer.
  • the area having the different structure in the form of, for example, ridges or a pattern of elevations can be provided photolithographically.
  • a practical embodiment of the magnetic head unit according to the invention is characterized in that the alignment mark has at least one cavity which is present in the wear-resistant layer.
  • An embodiment of the magnetic head unit according to the invention is characterized in that the area having the different structure has a relief with a periodicity of at least 1/4 ⁇ , in which ⁇ is the wavelength of light, particularly visible light.
  • the different structure is in general insufficiently visible at a periodicity of less than 1/4 ⁇ .
  • An embodiment of the magnetic head unit according to the invention is characterized in that the wear-resistant layer has at least one further alignment mark.
  • An advantage thereof is that the azimuth angle, i.e. the angle at which the transducing gap extends to the normal on the direction of displacement of the magnetic medium, can be accurately adjusted when the magnetic head is being mounted.
  • An embodiment of the magnetic head unit according to the invention in which the magnetic head has a group of transducing gaps as shown, for example, in said U.S. patent application Ser. No. 07/473,085, is characterized in that the group of transducing gaps is present between the first-mentioned alignment mark and the further alignment mark. If the two alignment marks are in a plane parallel to the plane of the group of transducing gaps, the azimuth angle can be adjusted in a simple manner. If the two planes coincide, the group of gaps can be positioned with respect to a reference plane in an extremely simple manner.
  • a technologically attractive embodiment of the magnetic head unit according to the invention is characterized in that the head face has a head face area corresponding to the area having the different structure.
  • an area having a different structure is formed in the head face, for example, by means of etching, before the wear-resistant layer is provided.
  • One advantage of this is that the area having the different structure can easily be positioned and aligned with respect to the transducing gap, while parts of the magnetic head structure are visible in the head face.
  • a further advantage is that it is not necessary to take special precautions when the wear-resistant layer is being provided by means of, for example, sputtering or vapour deposition, because the area having the different structure is copied in the wear-resistant layer due to the small thickness of this layer and therefore remains visible.
  • EP-A-0 075 4 13 discloses a magnetoresistive card-reading head comprising a sapphire substrate, one face of which is intended for cooperation with magnetically encoded cards and an opposite face is provided with MR elements. The last-mentioned face is also provided with a registration mark for use in aligning the substrate during a stage of the manufacturing process.
  • the magnetic head according to the invention has a magnetic head structure which is provided with a head face and at least one transducing gap terminating in the head face, and is characterized in that a wear-resistant layer which is not transparent to visible light, is present on the head face and forms a contact face for co-operation with a magnetic medium.
  • the wear-resistant layer has at least one alignment mark.
  • the magnetic head is characterized in that the wear-resistant layer has a thickness of between 20 and 100 nm. In another embodiment of the magnetic head according to the invention, having satisfactory mechanical and the wear-resistant layer substantially comprises chromium nitride.
  • the magnetic head preferably has a magnetic head structure fabricated means of thin-film techniques.
  • the magnetic head unit according to the invention comprising a magnetic head secured to a support and having a thin film magnetic head structure provided with a head face and at least one transducing gap terminating in the head face is therefore characterized in that a chromium nitride layer is provided on the head face of the magnetic head.
  • a wear-resistant layer of chromium nitride has a lower melting point as compared with many other wear-resistant materials such as, for example, titanium nitride.
  • a lower melting point implies a higher surface mobility at the substrate temperature used during sputtering, which is 250°-350° C. maximum in connection with the preservation of the magnetical properties of the magnetic thin-film materials provided.
  • a higher surface mobility ensures a denser and more properly bonded layer, so that the resultant wear resistance is better than that of, e.g., an intrinsically hard titanium nitride layer.
  • the magnetic head structure of the magnetic head of said magnetic head units comprises at least one inductive transducing element and/or at least one magnetoresistive transducing element.
  • FIG. 1 shows a layout of an embodiment of the magnetic head according to the invention
  • FIG. 2 is a diagrammatic cross-section II--II through a transducing gap of the magnetic head of FIG. 1,
  • FIG. 3 is a perspective elevational view of the magnetic head shown in FIG. 1,
  • FIG. 4 is a perspective elevational view of the magnetic head of FIG. 1 in a production stage in which a wear-resistant layer has not yet been provided,
  • FIG. 5 is a side elevation of an embodiment of a magnetic head unit according to the invention.
  • FIG. 6 is a plan view of the unit shown in FIG. 5.
  • the thin-film magnetic head according to the invention shown in FIGS. 1, 2 and 3 comprises a support or substrate 1, in this example of a magnetic material, namely NiZn ferrite, on which a magnetic head structure 2 is provided, the magnetic head structure comprising magnetic layers, electric layers and insulation layers, and being protected by a counter block 3 of a non-magnetic material, for example Al 2 O 3 /TiC.
  • the magnetic head has a head face 5 with eleven transducing gaps in this example.
  • gaps S1 to S9 are intended to read information in a digital form and a group of two gaps S10 and S11 is intended to read information in an analog form from a record career 7 (e.g., tape) which moves along the magnetic head in a direction x.
  • the gaps S1 to S9 for digital use generally have a smaller gap length than the gaps S10 and S11 for analog use. It is alternatively possible to choose such a gap length that both analog and digital information can be read by one and the same gap.
  • the magnetic head according to the invention comprises an insulation layer 9 provided on the substrate 1, which layer is provided with three electric conductors C1, C2 and C3 in this example, which may extend as far as the transducing gaps.
  • the magnetic head further comprises eleven magnetoresistive elements E1 to E11, further referred to as MR elements which comprise, for example, an Ni--Fe layer on which one or more barberpole strips of, for example, Au may be provided.
  • Each MR element E1 to E11 may have a pair of connection tracks 11a and 11b, further referred to as first connection tracks which terminate in first connection faces 13a and 13b.
  • the eleven first connection faces 13b are interconnected. Both the first connection tracks and the first connection faces are preferably made of Au.
  • an MR element provided with a barberpole is known per se and is described, inter alia, in U.S. Pat. No. 4,052,748 (herewith incorporated by reference).
  • Said electric conductors C1, C2 and C3 are used for driving the MR elements E1 to E9, E10 and E11 and are each provided with a pair of second connection tracks 15a and 15b which terminate in second connection faces 17a and 17b, respectively.
  • the magnetic head also comprises eleven pairs of flux guides of a soft-magnetic material, for example NiFe or AlFeSi, with each pair comprising a first or front flux guide 19a and, spaced apart therefrom, a second or rear flux guide 19b.
  • the front flux guide 19a extends as far as the head face 5 for cooperation with the magnetic record carrier 7.
  • the MR elements E1 to E11 are present between the substrate 1 and the flux guides, each MR element forming a bridge between a first and a second flux guide 19a and 19b. In certain constructions and for specific uses it is possible to omit the rear flux guides. It also possible to start from a non-magnetic substrate and to provide an extra flux guide.
  • the electric conductors, the MR elements and the flux guides are electrically insulated with respect to each other by a number of insulation layers of an electrically and magnetically insulating material, for example a polymer.
  • the insulation layers are denoted by the reference numerals 21 and 23 in FIG. 2.
  • a further insulation layer 25, for example, in the form of an adhesive layer is present between the joint flux guides 19a and 19b and the counter block 3.
  • a wear-inhibiting or wear-resistant layer 31 of substantially chromium nitride is provided on the head face 5, which layer forms a contact face or tape contact face 33 for cooperation with the tape-shaped record carrier 7.
  • the chromium nitride layer 31, which is not transparent to visible light, has a thickness of 40 nm.
  • the layer 31 has three alignment marks 35, 36 and 37 in this example, which with respect to the gaps S1 to S11 have an accurately defined position as regards location as well as direction, the gaps S1 to S11 being present in the area between the alignment marks 35 and 36 and the alignment mark 37.
  • the formation of the alignment marks 35, 36 and 37 in the wear-resistant layer 31 will be described in greater detail, particularly with reference to FIGS. 2 and 4.
  • three extra layers 35a, 36a and 37a for example, strips of a polymer, are formed at a defined distance from the gaps S1 to S11 at the same time the insulation layer 21 is being provided, which extra layers terminate in the head face 5 at least after the head face 5 has been formed by means of, for example, grinding and/or lapping.
  • cavities 35b, 36b and 37b can be formed in the head face 5 at the area of the polymer layers 35a, 36a and 37a.
  • the head face 5 After the head face 5 has been formed, it is cleaned by means of selective etching in an O 2 plasma, as a result of which the head face is hollowed at the area of the polymer layers 35a, 36a and 37a due to the difference in etching rate of the polymer and the material surrounding the layers 35a, 36a and 37a, for example, NiFe or an oxide.
  • the thin chromium nitride layer 31 is provided by way of sputtering on the head face 5. Due to the small thickness of this layer 31, the areas 35b, 36b and 37b formed in the head face 5 appear as similar visible areas 35, 36 and 37 in the non-transparent layer 31. Due to this property structure, the magnetic head according to the invention can be accurately aligned and built in a housing of a magnetic head unit in spite of the presence of a non-transparent layer 31 on the head face 5.
  • the magnetic head structure according to the invention shown in FIGS. 5 and 6 comprises the magnetic head described with reference to FIGS. 1 to 4 and here being denoted by the reference numeral 40.
  • the magnetic head structure is provided with a support in the form of a housing 41 having a pair of tape guides 43 and 44 at both sides of the magnetic head 40. These tape guides are used for accurately guiding a magnetic tape along the magnetic head.
  • the height of the tape with respect to the magnetic head, particularly its transducing gaps, and the angle between a bounding edge of the tape and the magnetic head, particularly its joint transducing gaps, are thereby accurately maintained.
  • the magnetic head 40 Before the magnetic head 40 is secured in the housing 41 during manufacture, it is positioned with reference to the alignment marks 35, 36 and 37 and is oriented with respect to a reference plane related to the tape guides 43 and 44 with the aid of a microscope. After the correct position and orientation have been set, with the transducing gaps occupying the correct position and direction with respect to the recording tracks of the magnetic tape to be scanned, the magnetic head 41 is secured in the housing.
  • two alignment marks which are spaced apart over a short distance, such as the marks 35 and 36, it is possible to determine an average distance to the reference plane and thus enhance the aligning accuracy.
  • the invention is not limited to the embodiments shown.
  • a cavity 35, 36 or 37 as an alignment mark
  • different soft materials such as a photolacquer or soft metals are suitable as materials for the extra layers 35a, 36a and 37a.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)
  • Supporting Of Heads In Record-Carrier Devices (AREA)
US08/441,712 1991-07-19 1995-05-15 Magnetic head with wear resistant layer having alignment mark, and magnetic head unit incorporating same Expired - Fee Related US5513057A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US08/441,712 US5513057A (en) 1991-07-19 1995-05-15 Magnetic head with wear resistant layer having alignment mark, and magnetic head unit incorporating same

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
NL9101270A NL9101270A (nl) 1991-07-19 1991-07-19 Magneetkopeenheid, magneetkop ten gebruike in de magneetkopeenheid en magneetkopstructuur ten gebruike in de magneetkop.
NL9101270 1991-07-19
US91155992A 1992-07-08 1992-07-08
US23135094A 1994-04-20 1994-04-20
US08/441,712 US5513057A (en) 1991-07-19 1995-05-15 Magnetic head with wear resistant layer having alignment mark, and magnetic head unit incorporating same

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US23135094A Continuation 1991-07-19 1994-04-20

Publications (1)

Publication Number Publication Date
US5513057A true US5513057A (en) 1996-04-30

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Application Number Title Priority Date Filing Date
US08/441,712 Expired - Fee Related US5513057A (en) 1991-07-19 1995-05-15 Magnetic head with wear resistant layer having alignment mark, and magnetic head unit incorporating same

Country Status (8)

Country Link
US (1) US5513057A (nl)
EP (2) EP0707309A3 (nl)
JP (1) JPH05274628A (nl)
AT (1) ATE148254T1 (nl)
DE (1) DE69216945T2 (nl)
ES (1) ES2099198T3 (nl)
MY (1) MY108301A (nl)
NL (1) NL9101270A (nl)

Cited By (7)

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US5943196A (en) * 1997-05-01 1999-08-24 Storage Technology Corporation Apparatus for securing a thin film magnetic tape head closure using a C-core to interconnect gluing vias
WO2000033358A1 (en) * 1998-12-03 2000-06-08 Koninklijke Philips Electronics N.V. Method of forming an assembly of stacked layers
EP1076339A2 (en) * 1999-08-09 2001-02-14 Quantum Corporation Tape head with support bars
US20030039069A1 (en) * 2001-08-23 2003-02-27 International Business Machines Corporation Method and apparatus for providing tape head assemblies for very high density recording
US20030075582A1 (en) * 2000-08-21 2003-04-24 Koninklijke Philips Electronics N.V. Recording and/or reproducing device comprising a coated tape guide
US6580583B1 (en) * 1996-11-21 2003-06-17 Koninklijke Philips Electronics N.V. Magnetic head with integrated circuit on a rigid body
US8934197B2 (en) 2012-07-16 2015-01-13 Quantum Corporation Magnetic media access head with metal coating

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US5475552A (en) * 1992-07-31 1995-12-12 Matsushita Electric Industrial Co., Ltd. Magnetic head having a chromium nitride protective film for use in a magnetic recording and/or reproducing apparatus and a method of manufacturing the same
US5636092A (en) * 1992-07-31 1997-06-03 Matsushita Electric Industrial Co., Ltd. Magnetic head having chromium nitride protective film for use in magnetic recording and/or reproducing apparatus and method of manufacturing the same
DE69307982T2 (de) * 1992-08-03 1997-07-24 Philips Electronics Nv Magnetkopf mit verschleissbeständiger Schicht und dessen Herstellungsverfahren
DE4323115A1 (de) * 1992-08-03 1994-02-10 Philips Electronics Nv Magnetkopf mit einer im wesentlichen Cr¶2¶O¶3¶-haltigen Schicht und Verfahren zum Herstellen eines derartigen Magnetkopfes
JPH06325322A (ja) * 1993-03-16 1994-11-25 Sharp Corp 薄膜磁気ヘッドおよびその製造方法
BE1008051A3 (nl) * 1994-01-27 1996-01-03 Koninkl Philips Electronics Nv Werkwijze voor het vervaardigen van een magneetkopeenheid, werkwijze voor het vervaardigen van een magneetkop, magneetkopeenheid en magneetkop ten gebruike in de magneetkopeenheid.
JPH11513170A (ja) * 1996-07-19 1999-11-09 フィリップス エレクトロニクス ネムローゼ フェンノートシャップ 主素子及び副素子を具える磁気ヘッド、及び前記磁気ヘッドを製造する方法

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EP0075413A2 (en) * 1981-09-12 1983-03-30 Chubb Integrated Systems Limited Magnetoresistive transducer assemblies
EP0123826A1 (de) * 1983-03-04 1984-11-07 Siemens Aktiengesellschaft Aufzeichnungsanordnung für einen Magnetschichtspeicher
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Cited By (14)

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Publication number Priority date Publication date Assignee Title
US6580583B1 (en) * 1996-11-21 2003-06-17 Koninklijke Philips Electronics N.V. Magnetic head with integrated circuit on a rigid body
US6885518B1 (en) 1997-05-01 2005-04-26 Storage Technology Corporation Method and apparatus for securing a thin film magnetic tape head closure using gluing vias
US5943196A (en) * 1997-05-01 1999-08-24 Storage Technology Corporation Apparatus for securing a thin film magnetic tape head closure using a C-core to interconnect gluing vias
WO2000033358A1 (en) * 1998-12-03 2000-06-08 Koninklijke Philips Electronics N.V. Method of forming an assembly of stacked layers
EP1076339A3 (en) * 1999-08-09 2002-06-05 Quantum Corporation Tape head with support bars
US6611398B1 (en) 1999-08-09 2003-08-26 Quantum Corporation Tape head with support bars
EP1076339A2 (en) * 1999-08-09 2001-02-14 Quantum Corporation Tape head with support bars
US20030075582A1 (en) * 2000-08-21 2003-04-24 Koninklijke Philips Electronics N.V. Recording and/or reproducing device comprising a coated tape guide
US6873495B2 (en) * 2000-08-21 2005-03-29 Hewlett-Packard Ltd. Recording and/or reproducing device comprising a coated tape guide
US20030039069A1 (en) * 2001-08-23 2003-02-27 International Business Machines Corporation Method and apparatus for providing tape head assemblies for very high density recording
US6781792B2 (en) * 2001-08-23 2004-08-24 International Business Machines Corporation Method and apparatus for providing tape head assemblies having U-shaped support beams for very high density recording
US8934197B2 (en) 2012-07-16 2015-01-13 Quantum Corporation Magnetic media access head with metal coating
US9153259B2 (en) 2012-07-16 2015-10-06 Quantum Corporation Magnetic media access head with metal coating
US9595272B2 (en) 2012-07-16 2017-03-14 Quantum Corporation Magnetic media access head with metal coating

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ATE148254T1 (de) 1997-02-15
DE69216945D1 (de) 1997-03-06
ES2099198T3 (es) 1997-05-16
EP0707309A2 (en) 1996-04-17
DE69216945T2 (de) 1997-07-24
EP0528459A3 (en) 1993-06-16
MY108301A (en) 1996-09-30
EP0707309A3 (en) 1997-05-28
JPH05274628A (ja) 1993-10-22
NL9101270A (nl) 1993-02-16
EP0528459A2 (en) 1993-02-24
EP0528459B1 (en) 1997-01-22

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